JP2005164243A - Surface defect inspection device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To practically use a surface defect inspection device by robot grasping, by reducing rotation deflection in an open end when inspecting a defect while rotated under the condition where one side of an inspected object is grasped and where the other side is opened. <P>SOLUTION: In this surface defect inspection device, the defect is inspected highly precisely using a following imaging means by correcting the rotation deflection of the inspected object 1 in the one side grasping by a rotation deflection correcting means, for example, by grasping the inspected object 1 while injecting air from an air injection port 9 to an inside of the inspected object 1 to correct the rotation deflection with correction of an attitude of the inspected object 1, when a grasping part 6 grasps the hollow inspection object 1. The defect is inspected thereby with the one side grasping by the robot without generating any disturbance, preparatory work change manhours are reduced in the inspected object 1 of a different length and diameter, and the inspection is automated in recycle where different goods are mixed. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a surface defect inspection apparatus for inspecting a surface shape of a cylindrical material or surface defects such as minute irregularities and protrusions using an optical means.

  Irradiates projection light from uniform illumination means onto the surface of the object to be measured, and detects scratches, irregularities, dirt, etc. on the object surface from the image obtained from the reflected light distribution consisting of regular reflection light and diffuse reflection light Alternatively, the inspection is a generally performed method. In particular, for a planar or cylindrical object such as a roll paper or sheet, a method of obtaining a surface image by performing sub-scanning by relative movement or rotation of the object using a line sensor as an image sensor It is common.

For example, as described in Patent Document 1 (surface layer defect detection device), linear light is applied to a cylindrical inspection object such as a photosensitive drum or a charging roll which is a component inside a copying machine. An apparatus for detecting a defect by irradiating the inspection object, rotating the inspection object, detecting the line-shaped light reflected by the inspection object by a line sensor, and processing an image obtained by the line sensor Also, as shown in Patent Document 2 (surface defect detection device), there is also a device that moves a line sensor, makes the relative position between the specularly reflected light and the line sensor constant, and detects minute irregularities. is there.

  Furthermore, as shown in Patent Document 3 (Photoreceptor surface inspection method and Photoreceptor surface inspection apparatus), there is also a proposal example in which attention is paid to a change in the unevenness defect detection sensitivity depending on the camera position.

  In addition, as disclosed in Patent Document 4 (appearance inspection apparatus), there is also a proposed example of an inspection apparatus that sequentially inspects workpieces on an index table.

JP-A-5-107197 Japanese Patent Laid-Open No. 10-122841 JP-A-9-325120 JP-A-11-258166

  FIG. 1 shows an example proposed by Patent Document 1. In FIG. 1, 100 is an object to be inspected (drum-shaped photoconductor), 101 is a fluorescent lamp, 102 is a slit, K is a light irradiation device, S is a line sensor, U is a line sensor support device, Sa is a condenser lens, X Is the longitudinal direction of the strip-shaped light (slit light) or the longitudinal direction of the line sensor S (the direction in which a large number of light receiving elements are arranged), Y is the optical axis direction of the line sensor S, and Z is the surface and line of the inspection object 100 The relative movement direction with respect to the sensor S (refer to Patent Document 1 for details).

  By the way, the reflected light distribution obtained by such a device is patented because the surface of the object to be measured is not a mirror surface, so that part of the linear incident light is totally reflected and partly scattered on the surface. The spatial extent is shown as described in Document 2 (FIG. 2).

  FIG. 2 is a diagram for explaining the distribution of reflected light when the inspection object is viewed from above. Since the surface of the photosensitive drum 100 which is the inspection object is not a mirror surface, a part of the linear incident light 111 is illustrated. Are specularly reflected and some are scattered on the surface. When there are no irregularities such as scratches on the inspected object 100, as shown in FIG. 2A, most of the reflected light of the line incident light 111 on the surface of the inspected object 100 is the regular reflected light 112a. Occupy. However, when the surface of the inspection object 100 has irregularities 100a such as protrusions and depressions, the line-shaped light 111 is scattered on the surface of the inspection object 100 by the uneven portions as shown in FIG. Scattered light 112b (shown by a broken line) is generated.

  In this way, it is possible to detect a defect by utilizing the fact that the distribution of reflected light varies depending on the presence or absence of uneven portions on the surface of the inspection object 100. At this time, as shown in FIG. 2C, the line sensor 113a receives the specularly reflected light component 112a and detects a decrease in the input light amount as a defect, and the line sensor 113b is located slightly away from the specularly reflected component. And detecting an increase in scattered light 112b as a defect. Further, the inspection object 100 is rotated and a plurality of lines are sub-scanned to detect a defect over the entire inspection object.

  According to what is described in Patent Document 3, in this case, when the image is acquired at a position where the reflected light distribution is closer to the specularly reflected light, the change in the amount of light due to the surface shape is larger because the gradient of the output change is larger, It has been shown that it is possible to detect irregularities that change more minutely and gently.

  However, in an actual surface defect detection device, the light receiving position of the reflected light and the relative position of the line sensor fluctuate due to distortion of the shape of the object to be inspected, rotation unevenness, or vibration, and this relative position fluctuation is the amount of light input to the sensor. There arises a problem that this change is detected as a surface irregularity by mistake. For this reason, the actual situation is that the sensitivity has to be lowered by slightly separating it to an appropriate position. For this reason, defects (for example, φ0.5 mm) that are miniaturized as the image quality and density of recent laser printers increase. However, there is a problem that irregularities that gradually change to a height of about 5 μm cannot be detected stably by the conventional method.

  On the other hand, it is effective to suppress vibration by adjusting the position of the gripping mechanism or gripping device of the object to be inspected (especially when the cylindrical type is used, especially the misalignment or parallelism adjustment at both ends). This makes adjustment costs and equipment costs very large. Further, in the appearance inspection apparatus that rotates with a plurality of moving ends on the index and the photosensitive drum sandwiched in order to shorten the inspection time as in Patent Document 4, the position of the moving end with respect to the fixed end It is extremely difficult to realize the same optical conditions while rotating the.

  In Patent Document 2, a method for solving the above problem by actually moving and tracking the line sensor by measuring the reflected light amount distribution, having a sensor for actually measuring the reflected light amount distribution and a moving means for moving the line sensor. Presents. By this method, it is possible to perform surface defect inspection with high accuracy by following the imaging means to the fluctuation of the optical system.

  In addition, it is necessary to evaluate the function and shape of the collected parts when reusing parts such as photoconductors and fixing rollers that accompany recycling of copiers, but this does not occur during conventional manufacturing. Subtle wear, scratches, etc. exist, and it is necessary to measure the surface shape of parts with higher precision. In addition, in order to reduce recycling costs, it is desirable to significantly reduce the cost of inspection equipment. . Furthermore, the above parts are categorized into various varieties with different diameters and lengths for each model. At the time of production, many of the same varieties are produced continuously, whereas recycled products have different diameters and lengths. It is necessary to inspect the inspection object continuously. In conventional dedicated machines, setup change is indispensable with the change of product type, and it is difficult to automatically inspect recycled products with different product types.

  Based on the above background, as a developed version of an inspection apparatus that has an imaging means that follows the position variation of the object to be inspected, a system that performs inspection while holding the object to be inspected by a general-purpose robot and rotating the gripping part Is being considered. In this case, in order to shorten the inspection tact and reduce the number of man-hours for changing the position of the gripping part, it is desired to rotate while gripping one of the inspection objects and opening the other. However, when the robot actually grips the object to be inspected, the robot may grip it at an angle, or the rotation axis may deviate from the axis of the object to be inspected. There is a problem that the side shake becomes very large and cannot follow.

  One of the objects of the present invention is to carry out defect inspection while holding one of the objects to be inspected and rotating while the other is opened. It is to be able to put the device into practical use.

One of the objects of the present invention is to easily correct tilting of the inspection object and reduce rotational shake by ejecting air to the inside, particularly when gripping a hollow cylindrical inspection object. One of the objects of the present invention is that when gripping a hollow cylindrical object to be inspected, air is ejected from the chuck claw to the inside and outside, thereby further inclining the object to be inspected. It is to be able to correct to accuracy.

  One of the objects of the present invention is to detect the posture of an object to be inspected and correct the posture when the robot grips the object to be inspected according to the posture of the object to be inspected. In other words, rotational shake is reduced by gripping the grip part without tilting.

  One of the objects of the present invention is to detect the posture of the inspection object without lowering the detection accuracy even when there are a plurality of inspection objects such as a tray, and to determine the posture when the robot grips, By correcting according to the posture of the object to be inspected, it is possible to reduce rotational shake by gripping the robot gripping part without tilting.

  One of the objects of the present invention is to make it possible to correct even a change in inclination that occurs during rotation.

  One of the objects of the present invention is to keep the reflected light distribution state constant even when rotational shake occurs.

  One of the objects of the present invention is to reduce the rotational shake by detecting the posture of the object to be inspected and performing follow-up control on the posture of the robot so that the posture becomes constant.

  The surface defect inspection apparatus according to claim 1 is a surface defect inspection apparatus that inspects the presence or absence of defects by acquiring a surface image as an inspection image while rotating a cylindrical inspection object, and inspecting the inspection object. Inspected object transporting means for transporting to a position, a gripping part attached to the inspected object transporting means for gripping one side of the inspected object, and a rotating means provided in the gripping part or the inspected object transporting means The inspection object is rotated by the inspection object, the inspection image acquisition means is capable of acquiring the inspection image at a position that is constant with respect to the fluctuation of the reflected light distribution accompanying the rotation of the inspection object, and the rotational shake of the inspection object And a rotational shake correcting means for correcting.

  According to a second aspect of the present invention, in the surface defect inspection apparatus according to the first aspect, the rotational shake correcting means comprises an air outlet and an air ejection control means provided in the grip portion, and the grip portion is hollow. When the object to be inspected is gripped, the object to be inspected is gripped while air is jetted from the air outlet to the inside of the object to be inspected by the air ejection control means, and the posture of the object to be inspected is corrected. This corrects rotational shake.

  According to a third aspect of the present invention, in the surface defect inspection apparatus according to the second aspect, the gripping portion includes a plurality of claw portions that are in close contact with and grip the inside of the inspection object, and the air spout is provided in each claw portion. And a gap through which air ejected in the gripping state of the inspection object passes.

  According to a fourth aspect of the present invention, in the surface defect inspection apparatus according to the first aspect, the rotational shake correcting means controls the attitude of the inspection object and the attitude of the inspection object conveying means. An inspection object conveyance posture control means for detecting the posture of the inspection object by the posture detection means at the time of gripping, and the inspection object conveyance posture control means based on the detection result of the inspection object conveyance means. The rotational shake is corrected by correcting the posture and correcting the gripping posture of the inspection object.

  According to a fifth aspect of the present invention, in the surface defect inspection apparatus according to the fourth aspect, the posture detecting means is provided in the grip portion.

  According to a sixth aspect of the present invention, in the surface defect inspection apparatus according to the first aspect, the rotational shake correcting means is provided in the posture detecting means for detecting the posture of the inspection object and the gripping part, and the inspection object is provided. A gripping posture correcting unit that corrects the gripping posture of the object. The gripping posture of the inspection object is detected by the posture detection unit during inspection, and the gripping posture correction unit grips the inspection object based on the detection result. The rotational shake is corrected by correcting the posture.

  According to a seventh aspect of the present invention, in the surface defect inspection apparatus according to the sixth aspect, the gripping posture correcting means continues to correct the gripping posture of the inspection object continuously while the inspection object is rotating.

  According to an eighth aspect of the present invention, in the surface defect inspection apparatus according to the sixth or seventh aspect, the posture detection means is installed on a side opposite to the gripping portion side of the inspection object, and the inspection object is gripped. Measure the position of the end that is not.

  According to a ninth aspect of the present invention, in the surface defect inspection apparatus according to the sixth or seventh aspect, the posture detection means includes an imaging means installed in the grip portion, and the inspection object passes through the inspection object. A reference pattern installed on the side opposite to the gripping part is imaged, and the gripping posture correcting means corrects the gripping posture of the inspection object so that the reference pattern position on the image is constant.

  A tenth aspect of the present invention is the surface defect inspection apparatus according to the sixth or seventh aspect, wherein the posture detection means is an image pickup means installed in a direction perpendicular to the inspection image acquisition means with respect to the inspection object. It becomes more.

  The invention according to claim 11 is the surface defect inspection apparatus according to claim 1, wherein the inspection image acquisition means includes a first illumination means and a first imaging means for detecting a surface defect of the inspection object. A second imaging unit for measuring a reflected light distribution from the object to be inspected, a moving unit for moving at least the first imaging unit in two directions of an optical axis direction and a sub-scanning direction, A second illuminating unit installed in parallel with the first imaging unit at a position where the reflected light from the inspection object is incident only on the second imaging unit. Using these components of the inspection image acquisition means, the inspection object is rotated, and the reflected light distribution from the first and second illumination means is acquired by the second imaging means, and from the acquired image Calculate the posture of the inspection object, Depending on the output result, at least the first imaging means is caused to follow the reflected light of the first illuminating means in two directions of the optical axis direction and the sub-scanning direction by the moving means, thereby changing the posture due to rotational shake. In contrast, the position of the inspection image acquisition means is corrected.

  A twelfth aspect of the present invention is the surface defect inspection apparatus according to the eleventh aspect, wherein a reflection means for reflecting a part of irradiation light from the first illumination means is provided instead of the second illumination means. .

  In a thirteenth aspect of the present invention, in the surface defect inspection apparatus according to the eleventh aspect, in place of the second illuminating means, a dividing means for dividing the irradiation light from the first illuminating means is provided.

  According to a fourteenth aspect of the present invention, in the surface defect inspection apparatus according to the first aspect, the inspection image acquisition means includes a first illumination means and a first imaging means for detecting a surface defect of the inspection object. Only the second imaging means for measuring the distribution of reflected light from the object to be inspected, the moving means for moving at least the first imaging means in the sub-scanning direction, and the second imaging means only Second illumination means installed in parallel with the first imaging means at a position where the reflected light from the inspection object is incident, and the rotational shake correction means is the inspection image acquisition means. The component is used to rotate the inspection object, and the reflected light distribution from the first and second illumination means is acquired by the second imaging means, and the posture of the inspection object is calculated from the acquired image. Depending on the calculation result, While correcting the attitude of the conveying means and causing at least the first imaging means to follow the reflected light of the first illuminating means in the sub-scanning direction by the moving means, the attitude change due to rotational shake is prevented. The position of the inspection image acquisition unit is corrected.

  According to a fifteenth aspect of the present invention, in the surface defect inspection apparatus according to the fourteenth aspect, in place of the second illuminating means, a reflecting means for reflecting a part of the irradiation light from the first illuminating means is provided. .

  In a sixteenth aspect of the present invention, in the surface defect inspection apparatus according to the fourteenth aspect, a splitting unit for splitting the irradiation light from the first lighting unit is provided in place of the second lighting unit.

  According to the first aspect of the present invention, since the rotational shake of the inspection object in one-side grip is corrected, a highly accurate defect inspection using the follow-up imaging unit is possible. In particular, by using a robot, the installation area can be reduced and the cost can be reduced compared to conventional robots. In addition, because the robot is gripped on one side, the number of setup changes can be reduced for inspection objects with different lengths and diameters. It is possible to automate the inspection at the time of recycling in which different varieties are mixed.

  According to the second aspect of the present invention, it is possible to correct the gripping position / tilt of the inspection object in a non-contact state.

  According to the third aspect of the invention, it is possible to correct the gripping position / falling of the inspection object in a non-contact state.

  According to the fourth aspect of the present invention, since the posture of the inspection object is detected and the posture held by the inspection object conveying means is corrected, the object can be gripped in accordance with the position / falling of the inspection object. can do.

  According to the fifth aspect of the present invention, the posture can be accurately detected at each position even when the object to be inspected is taken out from a plurality of locations by providing the object posture detecting means in the gripping part.

  According to the sixth aspect of the present invention, even when the object to be inspected is held obliquely by the posture correcting means of the holding part, the inclination can be corrected and the rotational shake can be reduced.

  According to the seventh aspect of the present invention, it is possible to cope with fluctuations in inclination by correcting the inclination continuously while rotating the inspection object.

  According to the eighth aspect of the present invention, rotational shake can be reduced by measuring the position of the open end and correcting the tilt so that the position of the open end is constant.

  According to the ninth aspect of the invention, the rotational shake can be reduced by correcting the tilt so that the field of view obstructed by the inspection object is constant with respect to the reference pattern.

  According to the tenth aspect of the present invention, the rotational shake can be reduced by detecting the change in the inclination in the direction orthogonal to the inspection image acquisition means.

  According to the eleventh aspect of the present invention, the second illuminating means is added, and the rotational shake is divided into the rotational shake in the optical axis direction and the rotational shake in the sub-scanning direction from the distribution of the reflected light from the two different illumination means. By separating these, it is possible to follow the rotational shake in the optical axis direction.

  According to the twelfth aspect of the present invention, it is possible to reduce the apparatus cost and the energy consumption by providing the reflection means instead of the second illumination means.

  According to the thirteenth aspect of the present invention, it is possible to reduce the apparatus cost and the energy consumption by providing the irradiation light dividing means instead of the second illumination means.

  According to the invention described in claim 14, the second illumination means is added, the three-dimensional posture of the object to be inspected is detected from the distribution of reflected light from the two different illumination devices, and the posture is kept constant. As described above, by performing follow-up control on the posture of the inspection object transporting means, it is possible to reduce rotational shake and to perform posture control by the inspection object transporting means, and therefore, a moving means in the optical axis direction is added. There is no need.

  According to the fifteenth aspect of the present invention, it is possible to reduce the apparatus cost and the energy consumption by providing the reflecting means instead of the second illumination means.

  According to the sixteenth aspect of the present invention, it is possible to reduce the apparatus cost and the energy consumption by providing the irradiation light dividing means instead of the second illumination means.

  The best mode for carrying out the present invention will be described with reference to the drawings.

[background]
As an example of the cylindrical inspection object of the surface defect inspection apparatus according to the present embodiment, an OPC drum used in a copying machine or a laser printer will be described. In the OPC drum, a multilayer organic semiconductor is applied to the surface of a cylindrical metal base, and minute irregularities and uneven density appear on the surface due to scratches on the surface of the base and the application state. Conventionally, this has been visually inspected, but in recent years, a method of automating by a CCD camera and image processing has been developed and put into practical use.

  As shown in FIG. 1, in an inspection optical system in which an OPC drum 100 is rotated and an inspection image is acquired by a line sensor S, a direct reflected light component from a light source 101 is detected in order to detect uneven defects with high sensitivity. It is desirable that the line sensor S has a field of view in the vicinity of a certain bright line portion. However, the closer to the bright line portion, the rotation shake of the OPC drum 100 and the vibration accompanying the rotation are detected as a luminance change, and the image Noise appears on the top. In order to reduce this, the above-described Patent Document 2 causes the line sensor S to follow the change in reflected light.

Similarly, as a method for obtaining an image of a field of view in which the change in the reflected light distribution is constant,
A. As shown in FIG. 3, the reflected light distribution is measured by the area sensor 121, and the line sensor S mounted on the automatic stage 122 is made to follow in the Z direction. A method of measuring the reflected light distribution with an area sensor and adjusting the angle of the reflecting plate provided in the optical path between the inspection object and the line sensor. A method of sub-scanning the line sensor output using a high-speed area sensor instead of the line sensor, with respect to the line sensor output, as shown in FIG. As shown in FIG. 5, a reflected light distribution measurement pattern and an observation pattern are selected by reflected light selection means capable of selecting a part of the reflected light of the inspection object in the optical path between the inspection object and the line sensor. Such a method is considered that alternately repeats and sub-scans the image signal based on the observation pattern.

  In this specification, these generic names are defined as “follow-up imaging means”. In addition, a sensor that performs reflected light distribution measurement, which is a constituent element thereof, is referred to as “reflected light distribution measurement means”, and a sensor that acquires an inspection image. It is defined as “inspection image acquisition means”.

  4 and 5 will be described in detail below to facilitate understanding of the present embodiment.

[Detailed description of FIG. 4]
Each grid (mesh) in FIG. 4 represents each pixel of the area sensor. When a bright line such as a solid line (regular reflection light component) is imaged on the area sensor, first, the entire area is subjected to image processing to detect the bright line portion. As a result, a pixel component separated by a predetermined distance from the obtained bright line position is output as one line of image data (output line data). When this process is performed in accordance with the rotation of the inspection object, image data having a fixed relative position with respect to the bright line portion can be sequentially obtained.

[Detailed description of FIG. 5]
Each lattice (mesh) in FIG. 5A indicates each selection element of the reflected light selection means. As the reflected light selection means, there is a reflection means such as DMD (Digital Micro mirror Device; trademark) or a transmission means such as a liquid crystal shutter. In such a reflected light selection means, first, in order to measure the reflected light distribution from the object to be inspected, a selection element of the reflected light selection means is used as in the reflected light distribution measurement pattern shown in FIG. Along with scanning in the main scanning direction, the corresponding reflected light distribution is selected so as to extend in the sub-scanning direction. ON / OFF of the selected element in (x, y) when the main scanning direction is the X direction (x = 1,..., Xsize) and the sub-scanning direction is the Y direction (y = 1,..., Ysize). It is expressed as sel (x, y), and is turned on when sel (x, y) = 1, and the selected element is turned off when sel (x, y) = 0. However, it is defined that the reflected light from the inspection object reaches the line sensor when the selection element is on.

At this time, the reflected light distribution measurement pattern in FIG.
f (x) = a * (xx−d1) + b (1)
(However, \ is an operator for obtaining a quotient, a is a slope, b is an initial offset, and d1 is a measurement period.)
From equation (1)
sel (x, f (x)) = 1, (x = 1,..., xsize) (2)
(Other selection elements are off). FIG. 5A illustrates an example in which a = −1, b = 20, and d1 = 20.

  In the line sensor signal obtained by using such a reflected light distribution measurement pattern, the reflected light distribution from the object to be inspected is brightest at the bright line portion as shown in FIG. When it falls, a signal having the detection period d2 is obtained as shown in FIG. The ratio between the periods d1 and d2 is determined by the magnification setting of the optical system. In FIG. 5, it is illustrated as d1 = d2. In x indicating the maximum value in each cycle of the line sensor signal, y obtained by the inverse function of the equation (1) is the y coordinate of the bright line portion. In this way, using the line sensor, an observation pattern is generated based on the reflected light distribution obtained in the sub-scanning direction. FIG. 5A shows an example in which an observation pattern is generated using an element shifted by 3 selection elements in the y direction with respect to the selection element corresponding to the bright line portion.

  Conventionally, in order to increase the sensitivity, it has been necessary to increase the rigidity of the device and rotate the inspection object without rotational runout or eccentricity, so a dedicated defect inspection device is required, and the inspection object is attached to the inspection machine. A transport mechanism for loading and unloading was also required. However, by using the tracking imaging means as described above, an image can be acquired with a field of view that is constant with respect to fluctuations in the reflected light distribution, and defects can be detected with high sensitivity. In the defect inspection apparatus, it is possible to use a general-purpose robot as shown in FIG. 6 instead of a conventional inspection dedicated system, and the apparatus cost may be significantly reduced. In FIG. 6, 1 is a cylindrical object to be inspected, 2 is an inspection object conveying means having a general-purpose robot structure such as a robot hand for conveying the object 1 to the inspection position and rotating it, 3 is an object to be inspected A line light source 4 that slit-illuminates the object 1 is a follow-up imaging unit that includes an inspection image acquisition unit that acquires an inspection image from the illuminated object 1. Further, by using a general-purpose robot in this way, conventionally, in order to inspect an object to be inspected having a different diameter or length, the upper and lower gripping means of the object to be inspected in the robot hand or the inspection machine had to be replaced. On the other hand, since it can be dealt with by exchanging only the robot hand, there is also an advantage that it can be dealt with even when the change of the inspection type is frequent, such as the inspection of the recycled product. Further, the inspection type can be automatically changed by using an auto tool changer that automatically changes the robot hand.

  However, in order to realize a surface defect inspection apparatus using a general-purpose robot, there are the following problems.

  The follow-up imaging unit 4 detects and corrects the rotational shake of the inspection object 1 as a change in reflected light on a plane perpendicular to the optical axis, and the rotational shake in the optical axis direction is also a plane perpendicular to the optical axis. This is corrected as a change in the reflected light. However, regarding the change in the optical axis direction, if the change width exceeds the depth of field of the detection means, the image is blurred, so the optical axis direction needs to be within the depth of field.

  An optical system used for inspecting an OPC drum having a diameter of 30 mm and a length of 300 mm has a depth of field of about 1 mm, so that it follows an inspection apparatus having a mechanism for suppressing rotational shake as in the past. When adding, the rotational shake in the optical axis direction was not a problem. However, when a general-purpose robot grips one end of the object to be inspected 1 and rotates it while the other end is opened, the amplitude of the vibration is as large as 5 mm. I found out. In order to solve this, as shown in FIG. 7, the open end side of the inspected object 1 is inserted into a fixed rotary gripping part 5 and the inspected object transporting means 2 (only the tip portion is shown ... ) There is a method of gripping both ends together with the gripping part 6 (7 and 8 are claw parts provided on the gripping parts 5 and 6), “insert into fixed axis”, “grip”, rotation, “release”, Four steps indicated by “” called “take out from the fixed shaft” are necessary, and when inspecting the inspection object 1 having a different time or diameter, it is necessary to replace the fixed rotary gripping portion 5. There is a problem.

[Outline of the embodiment]
In the present embodiment, a countermeasure against rotational shake due to this one-side grip is examined.
As a result of observing in detail the rotational shake of the open end of the one-side gripped inspection object 1, the rotational vibration depends on the shape of the inspection object 1, the state in which the inspection object 1 is placed, and the gripping portion when taking out When the gripping experiment was performed a plurality of times due to the difference in the posture of No. 6, the value of the rotational shake greatly fluctuated. That is, it has been found that this also depends on the relative positional relationship between the object to be inspected 1 and the gripping part 6 at the time of gripping. FIG. 8 shows an example in which the object to be inspected 1 and the grip portion 6 are gripped. In FIG. 8, the inspection object 1 when rotated is indicated by a dotted line.

  In the present embodiment, there is provided a surface defect inspection apparatus capable of detecting surface defects with high sensitivity by the follow-up imaging means by correcting the rotational shake as described above. An outline of various embodiments for correcting rotational shake will be described below.

(A) In the first embodiment, the position of the inspection object is corrected at the time of gripping.
(B) In the second embodiment, the posture of the inspection object conveying means is corrected in accordance with the posture of the inspection object at the time of gripping.
(C) In 3rd Embodiment, it correct | amends with a holding part at the time of a test | inspection.
(D) In the fourth embodiment, correction is performed by the imaging unit at the time of inspection.
(E) In the fifth embodiment, the posture of the inspection object conveying means is corrected in accordance with the posture of the inspection object at the time of inspection.

[First embodiment: Correcting the position of an object to be inspected when grasping]
A first embodiment of the present invention will be described with reference to FIGS. The same parts as those shown in FIGS. 6 and 8 are denoted by the same reference numerals. In particular, the imaging / inspection processing on the follow-up imaging means 4 side is similar to the above description, and the illustration and description thereof are omitted.

  First, the OPC drum as the object to be inspected 1 has a hollow cylindrical shape, and a plurality of, for example, three claw portions 8 of the object to be inspected object conveying means 2 having a robot hand structure are inserted inside the OPC drum to the outside. It is structured to be gripped by opening. In order to align the center axis of the inspection object 1 with the center of the gripping part 6, a 3-jaw chuck is used to stably hold the inspection object 1, but the inspection object 1 is arranged on the tray in an unconstrained state. For example, it may be held obliquely as shown in FIG. This is a phenomenon that occurs when the angle or position of the inspection object 1 is deviated with respect to the grip portion 6.

On the other hand, in the present embodiment, as shown in FIG. 9, as the rotational shake correcting means, the air flow ejected from the air ejection port 9 together with the air ejection port 9 at the center of the grip portion 6 is controlled. Air jet control means (not shown) is provided, and after inserting the claw portion 8 into the inspection object 1, the air is blown out from the air outlet 9 to correct the tilt of the inspection object 1 = rotational shake. It is what you do. This is because the inspected object 1 moves so that the pressure difference in the gap between the inspected object 1 and the gripping portion 6 disappears when the pressure inside the inspected object 1 increases and air escapes to the outside. In this case, as shown in FIG. 10, each claw portion 8 is further provided with an air ejection port 9 a, and air is ejected outwardly from the inner surface of the object 1 to be inspected. The tilt of the inspection object 1 can be corrected. However, in the case where each claw portion 8 is provided with an air outlet 9a, gripping is difficult due to the pressure of the air if it is chucked while blowing out air, so that when the claw portion 8 comes into contact with the object 1 to be inspected, What is necessary is just to provide the clearance (not shown) which escapes. In FIG. 10, the air outlet 9 a is provided at one location of each claw portion 8, but providing it at two locations such as the upper and lower locations is very effective in correcting the tilt.

[Second Embodiment: Correcting the posture of the inspection object conveying means in accordance with the posture of the inspection object during gripping]
A second embodiment of the present invention will be described with reference to FIG. The same parts as those shown in FIGS. 6 and 8 are denoted by the same reference numerals. In particular, the imaging / inspection processing on the follow-up imaging means 4 side is similar to the above description, and the illustration and description thereof are omitted.

  Contrary to correcting the posture of the inspection object 1 itself as described above in order to correct the displacement at the time of gripping caused by the displacement of the angle or position of the inspection object 1 with respect to the gripping portion 6. In this embodiment, the rotational shake correction means includes an attitude detection means for detecting the attitude of the inspection object 1 and an inspection object conveyance attitude control means for controlling the attitude of the inspection object conveyance means 2. The rotational shake is corrected by detecting the posture of the inspection object 1 by the detecting means and correcting the posture of the inspection object conveying means 2.

  As the posture detection means, there are a method of detecting the posture of the object 1 to be grasped by an imaging means installed outside, a method of measuring the position of the object 1 using a displacement meter, and the like. Further, in a system in which a plurality of objects to be inspected 1 are mounted and transported on a tray or the like, since there are a plurality of positions of the objects to be inspected 1, the posture detecting means installed outside is obstructed by the adjacent inspected objects 1 and is to be grasped It is desirable to mount the posture detection means on the grip portion 6 because it cannot detect the posture of the inspection object 1 or requires a posture detection means that can detect a wide range in order to measure the whole.

  As a method for realizing this, as shown in FIG. 11, there is a method in which an imaging means 10 as an attitude detection means is provided at the center of the gripping part 6 and the object 1 is imaged by the imaging means 10 and its attitude is detected. The object to be inspected 1 as shown in FIG. 11 is tilted in the same manner, and the object transporting means 2 is similarly inserted into the object to be inspected 1 and gripped, thereby correcting the shift at the time of gripping.

  As the posture detecting means, there are a method of measuring and correcting the center of the circle at the upper end of the inspection object 1 and the roundness by image processing, a method of using a three-dimensional camera, and the like. In addition, as a posture detecting means installed on the gripping part 6, there is a method of installing a distance sensor for measuring the distance from the inspection object 1 on each claw part 8.

[Third embodiment: Correction by gripping part during inspection]
A third embodiment of the present invention will be described with reference to FIGS. The same parts as those shown in FIGS. 6 and 8 are denoted by the same reference numerals. In particular, the imaging / inspection processing on the follow-up imaging means 4 side is similar to the above description, and the illustration and description thereof are omitted.

  In the present embodiment, in order to correct a displacement at the time of gripping caused by a shift in the angle or position of the object to be inspected 1 with respect to the gripping portion 6, in this embodiment, the gripped object to be inspected 1 is not gripped. The position and inclination are corrected when actually inspecting.

  In other words, in the present embodiment, as the rotational shake correcting means, a posture detecting means for detecting the posture of the object to be inspected, and a gripping posture correcting means for correcting the gripping posture of the object to be inspected 1 provided on the grip portion 6. As shown in FIG. 12 (a), even if the object 1 is tilted and gripped when gripping, the gripping posture is corrected by the posture correcting means 11 of the gripping portion 6 as shown in FIG. 12 (b). Thus, the rotational shake is reduced. As the posture correcting means 11, there are a method using a spherical joint, a method using three linear guides in the axial direction, and the like. Further, since the eccentricity between the rotation center and the central axis of the inspection object 1 increases as the inclination increases, a means for correcting the position in addition to the inclination may be required. Further, in order to follow the change in tilt during rotation, it is preferable to continuously correct the tilt during the inspection.

  Here, a configuration example of the posture detection unit that is a component of the rotational shake correction unit of the present embodiment will be described. FIG. 13 shows an example of the posture detecting means 12. The posture detecting means 12 is installed on the open end side of the object 1 to measure the position of the open end side so that the open end becomes a fixed position. In addition, the posture correction means 11 may be controlled. In the example shown in FIG. 13, the posture detection means 12 is constituted by an image input means, and the open end is imaged as a circle as shown in the image diagram of FIG. 13B, so that the center position is controlled to be constant. do it. Note that there is also a method of using a distance sensor that measures the position of the open end instead of the image input unit as the posture detection unit 12.

  FIG. 14 shows another example of the posture detection means 13, and the image pickup means (posture detection means 13) installed on the grip 6 passes through the inside of the test object 1 and is opposite to the grip of the test object 1. The reference pattern 14 installed in the image is imaged, and the posture correction unit 11 corrects the posture based on the reference pattern on the image. Since the field of view is blocked by the inspection object 1 by imaging from the inside of the inspection object 1, the reference pattern 14 can be imaged in a predetermined state where a part of the reference pattern 14 is imaged. Correct the posture as follows. In FIG. 14, the posture correction means 11 is controlled so that the central portion of the radial line is constant. The reference pattern 14 may be any pattern whose position is uniquely determined, such as a concentric circle or a density distribution pattern, in addition to the radial pattern shown in FIG.

  FIG. 15 shows another example of the posture detection means 15. The posture detection means 15 is composed of an imaging means installed in a direction orthogonal to the inspection image acquisition means (following imaging means 4) with respect to the inspection object 1. The posture detecting means (imaging means) 15 detects the inclination in the optical axis direction, and the posture correcting means 11 corrects the gripping posture so that the inclination in the optical axis direction is constant. .

[Fourth embodiment ... corrected by imaging unit during inspection]
A fourth embodiment of the present invention will be described with reference to FIGS. The same parts as those shown in FIGS. 6 and 8 are denoted by the same reference numerals. In particular, the imaging / inspection processing on the follow-up imaging means 4 side is similar to the above description, and the description thereof is omitted.

  The present embodiment does not correct the position / inclination of the grasped inspection object 1 but corrects the displacement at the time of grasping caused by the deviation of the angle or position of the inspection object 1 with respect to the grasping portion 6. In this embodiment, the follow-up imaging unit 4 is made to follow the change in the optical axis direction, thereby correcting the relative change in the posture of the optical system due to the rotational shake.

  First, in order to follow the change in the optical axis direction, it is necessary to detect the shake in the optical axis direction. However, in the conventional follow-up imaging means, the reflected light distribution from the line light source 3 is detected. There is a problem that a change in the optical axis direction cannot be distinguished from a change in the sub-scanning direction (Z direction in FIG. 1). Conventionally, taking advantage of indistinguishability, changes in the direction of the optical axis have also been handled by tracking in the Z direction. However, if the shake increases as described above, the image will be blurred unless the change in the optical axis direction is followed. Therefore, it is necessary to detect the change in the optical axis direction and the change in the sub-scanning direction.

  A method for distinguishing and detecting the change in the optical axis direction of the inspection object 1 and the change in the sub-scanning direction will be described with reference to FIG. In FIG. 16, a half mirror 17 is used to guide a reflected light distribution similar to that entering the tracking imaging unit 4 to the reflected light distribution measuring unit 16 as the second imaging unit for performing the reflected light distribution measurement. ing. Further, a line light source 18 as a second illuminating means is added in the vicinity of the line light source 3 as the first illuminating means, and the line light source 18 is a reflected light distribution measuring means that directly reflects light from the inspection object 1. 16 is installed at a position that does not enter the inspection image acquisition means (follow-up imaging means 4). By installing the line light source 18 in this way, two bright lines are imaged on the reflected light distribution measuring means 16. If the tracking in the sub-scanning direction is performed based on the bright line by the line light source 3 and the tracking in the optical axis direction is performed from the positional relationship of the two bright lines, the rotational shake in the light source direction can be corrected.

  Here, with reference to FIG. 17, the light source, the inspection object 1, the reflection position, and the direction of the regular reflection light will be described. In FIG. 17, the angle between the reflection position on the surface of the inspection object 1 and the center of the inspection object 1 and the Y axis is represented by θ, the incident angle is φ, and the angle between the light source and the reflection position and its X axis is α. Then, since the regular reflection light is reflected at the same angle as the incident angle with respect to the tangent at the reflection position, the following expression is established.

π / 2 = α + θ + φ (10)
π = α + β + 2φ (11)
If φ is eliminated from the equations (10) and (11),
β = 2θ + α (12)
It becomes.

  Here, assuming that the center of the inspection object 1 is the origin, the radius of the inspection object 1 is r, the reflection position is A (x0, y0), the light source position is (x1, y1), and the angle in the regular reflection direction is β. The following formula is established.

y0 = r * cos (θ) (13)
x0 = r * sin (θ) (14)
tan (α) = (y1−y0) / (x1−x0) (15)
Here, from equation (13) and tan's addition theorem,
tan (β) = tan (2θ + α) = (tan (2θ) + tan (α)) / (1-tan (2θ) * tan (α))
…………………… (16)
It becomes. As described above, when the angle θ and the light source position are determined as in the equation (16), the direction of the reflected light is determined.

  When actually observing the reflected light, a lens (see the lens Sa in FIG. 1) is placed in the optical path in order to observe the surface of the inspection object 1 in the follow-up imaging means 4, so that the bright line to be observed follows the lens and the follow-up image. The means 4 is determined by the angle at which the means 4 is installed with respect to the inspection object 1, and the position of the bright line is the position where the reflected light at the reflection angle forms an image on the follow-up imaging means 4. In FIG. 16, when viewing from the front, an image reflected at an angle θ such that β = 0 is obtained.

  Further, the position where the specularly reflected light from the two light sources 3 and 18 is imaged with respect to the reflected light distribution measuring means 16 will be examined. The reflection position that forms the specularly reflected light on the object under test 1 is different for each of the two light sources 3 and 18, and the light from the reflection position that has the same angle β with respect to the reflected light distribution measuring means 16 is guided. It is burned.

  Since the movement of the inspection object 1 due to shake is equivalent to the movement of the light source position in FIG. 17, the reflection position is measured with the angle β of the reflected light due to the change of the light source position being constant. In order to obtain the angle θ from the angle β, the equation (16) may be solved for θ. However, since the equation is complicated, each angle is determined with respect to the positions of the two light sources 3 and 18 using a computer. A result obtained by simulating and obtaining a position where the angle β is the same by changing θ is shown.

  Reflected light in which two light sources 3 and 18 are installed at positions of a radius r = 15 mm of the inspection object 1 and 132 mm away from the center of the inspection object 1 in the direction of 20 degrees and 25 degrees, and β = 0. Table 1 shows the result of simulating the fluctuation of the position of the bright line when the position is observed at a point 450 mm away from the center of the inspection object 1.

  From this, it can be seen that although the bright line position variation by the light source 3 is in the same direction, the increase / decrease in the bright line interval differs depending on the direction of shake.

  From the above discussion, since each direction (optical axis direction and sub-scanning direction) can be detected by the two light sources 3 and 18, the movement for moving the follow-up imaging means 4 in two directions, the optical axis direction and the sub-scanning direction. Means and posture correction means are added, and the light source 18 is added, and the reflected light distribution measuring means 16 can follow the bright line position of the light source 3 from the bright line position of the light source 3 in the optical axis direction. Further, when the reflected light distribution measuring means 16 is installed so as to move together with the follow-up imaging means 4, the position in the optical axis direction is set so that the interval between the bright lines obtained by the light source 3 and the light source 18 is constant. Control is sufficient.

  Further, with respect to the inspection visual field, in order to reduce the influence of the reflected light from the light source 18, it is desirable for the follow-up imaging unit 4 to detect the opposite side of the bright line of the light source 18 with respect to the bright line of the light source 3.

  In the present embodiment, instead of providing the light source 18, as shown in FIG. 18, a reflection means 19 for reflecting a part of the light emitted from the light source 3 to the inspection object 1 is provided. Alternatively, as shown in FIG. 19, a dividing unit 20 that divides the light emitted from the light source 3, for example, two slits or the like may be provided. it can.

  FIG. 20 shows an example of the follow-up imaging unit 4 having the moving unit 21 corresponding to each of the detected optical axis direction and sub-scanning direction as described above. That is, in the illustrated example, the follow-up imaging unit 4 is mounted and provided on a moving unit 21 using an automatic stage that is movable in two directions of the optical axis direction and the sub-scanning direction.

[Fifth Embodiment: Correcting the posture of the inspection object conveying means in accordance with the posture of the inspection object during inspection]
In the fourth embodiment, it has been shown that the addition of the light source 18 as the second light source can detect a change in the optical axis direction due to the rotational shake of the inspection object 1. In the fourth embodiment, this change in the optical axis direction is corrected by the moving means 21 added to the follow-up imaging means 4, but the same effect is obtained by the posture of the inspection object conveying means 2. It is also possible to obtain by correcting the above. Therefore, in the present embodiment, when a general-purpose robot is used for the inspection object transporting means 2, although not shown in particular, the target position of the hand, the two bright lines obtained from the reflected light distribution measuring means 16 are shown. The inclination and position are corrected by correcting from the position information. Further, in this case, similarly to the case shown in FIGS. 18 and 19, a method of using the reflecting means 19 for the irradiation light from the light source 3 instead of the light source 18 and a method of dividing the irradiation light by the dividing means 20. In addition, it becomes possible to follow fluctuations in the optical axis direction.

  The actual surface defect inspection apparatus is configured such that the tracking imaging unit 4 can be effectively used by appropriately combining the correction at the time of gripping, the correction of the gripping state, and the tracking of the detection unit.

  In these embodiments, the inspection object 1 has been described as an example of a hollow cylindrical object such as an OPC drum, but is used in a copying machine except for the method of the second embodiment. The present invention can be similarly applied to an inspection object having a central axis such as a developing roller.

It is a schematic perspective view which shows the example proposed by patent document 1. It is a characteristic view which shows the reflected light distribution model described in patent document 2. It is a schematic perspective view which shows the structural example of the system which tracks a line sensor according to the reflected light distribution measured with the area sensor. It is explanatory drawing which shows the system which acquires an image with constant reflected light distribution by selecting the pixel of an area sensor. It is explanatory drawing which shows the system which measures reflected light distribution by partially selecting reflected light, and obtains an image with constant reflected light distribution. It is a schematic perspective view which shows the structural example of the surface defect inspection apparatus by a robot. It is a schematic front view which shows the structural example of the system which hold | grips both ends with a robot. It is a schematic front view which shows a mode in the case of inclining, hold | gripping and rotating. It is a schematic front view which shows a mode that the to-be-inspected object was hold | gripped by the holding part which has a jet nozzle as 1st embodiment of this invention. It is a schematic front view which shows a mode that the to-be-inspected object was hold | gripped by the holding part which provided the spout in each nail | claw part as a modification. It is a schematic front view which shows a mode that the attitude | position of the to-be-inspected object conveyance means was correct | amended according to the detection result of the attitude | position detection means of a holding part as 2nd embodiment of this invention, and the to-be-inspected object was hold | gripped. It is a schematic front view which shows the mode before and behind the correction | amendment by an attitude | position correction means as 3rd embodiment of this invention. The structural example of the attitude | position detection means in the open end side is shown, (a) is a schematic front view, (b) is an image figure. The structural example of the attitude | position detection means by the holding part side is shown, (a) is a schematic front view, (b) is an image figure. It is a schematic plan view which shows the structural example of the attitude | position detection means detected from a side surface. It is a schematic plan view which shows the structural example of the reflected light distribution detection system by multiple plateau as 4th Embodiment of this invention. It is a top view explanatory drawing which shows the relationship of the reflection angle of a light source and a to-be-inspected object. It is a schematic plan view which shows the structural example which changed the 2nd light source into the reflection means. It is a schematic plan view which shows the structural example which changed the 2nd light source into the division means. It is a schematic perspective view which shows the structural example using the moving means of 2 directions.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Inspection object 2 Inspection object conveyance means 3 1st illumination means 4 Follow-up imaging means (inspection image acquisition means), 1st imaging means 6 Grip part 8 Claw part 9 Air outlet 10 Attitude detection means 11 Attitude correction means 12, 13 Imaging means, attitude detection means 14 Reference pattern 15 Imaging means, attitude detection means 16 Second imaging means 18 Second illumination means 19 Reflecting means 20 Dividing means 21 Moving means

Claims (16)

In the surface defect inspection apparatus for inspecting the presence or absence of defects by acquiring the surface image as an inspection image while rotating the cylindrical inspection object,
Inspection object conveying means for conveying the inspection object to an inspection position;
A gripping part that is attached to the inspection object conveying means and grips one side of the inspection object;
The inspection object is rotated by rotation means provided in the gripping part or the inspection object conveying means, and an inspection image is displayed at a position that is constant with respect to fluctuations in the reflected light distribution accompanying the rotation of the inspection object. An obtainable inspection image obtaining means;
A rotational shake correcting means for correcting rotational shake of the inspection object;
A surface defect inspection apparatus comprising: The rotational shake correction means comprises an air outlet and an air ejection control means provided in the grip portion,
When the gripping part grips the hollow object to be inspected, the air injecting control means grips the object to be inspected while jetting air from the air ejection port to the inside of the object to be inspected. 2. The surface defect inspection apparatus according to claim 1, wherein the rotational shake is corrected by correcting the posture of the object.   The gripping portion includes a plurality of claw portions that are intimately gripped inside the object to be inspected, each claw portion having the air ejection port, and air ejected in a state of gripping the object to be inspected. The surface defect inspection apparatus according to claim 2, wherein there is a gap. The rotational shake correction means includes an attitude detection means for detecting the attitude of the inspection object, and an inspection object conveyance attitude control means for controlling the attitude of the inspection object conveyance means,
The posture of the inspection object is detected by the posture detection means at the time of gripping, and the posture of the inspection object conveyance means is corrected by the inspection object conveyance posture control means based on the detection result. The surface defect inspection apparatus according to claim 1, wherein the rotational shake is corrected by correcting.   The surface defect inspection apparatus according to claim 4, wherein the posture detection unit is provided in the grip portion. The rotational shake correction unit includes a posture detection unit that detects a posture of the inspection object, and a gripping posture correction unit that is provided in the gripping unit and corrects the gripping posture of the inspection object.
The gripping posture of the inspection object is detected by the posture detection means at the time of inspection, and the rotational shake is corrected by correcting the gripping posture of the inspection object by the gripping posture correction means based on the detection result. The surface defect inspection apparatus according to claim 1.   The surface defect inspection apparatus according to claim 6, wherein the gripping posture correcting unit continuously corrects the gripping posture of the inspection object while the inspection object is rotating.   The posture detecting means is installed on the side opposite to the gripping part side of the inspection object, and measures the position of the end of the inspection object that is not gripped. 7. The surface defect inspection apparatus according to 7.   The posture detection means comprises imaging means installed in the gripping part, images the reference pattern installed on the side opposite to the gripping part side of the inspection object through the inside of the inspection object, and holds the gripping 8. The surface defect inspection apparatus according to claim 6, wherein the posture correcting means corrects a gripping posture of the inspection object so that a reference pattern position on the image is constant.   The surface defect inspection apparatus according to claim 6, wherein the posture detection unit includes an imaging unit installed in a direction orthogonal to the inspection image acquisition unit with respect to the inspection object. The inspection image acquisition unit includes a first illumination unit and a first imaging unit for detecting a surface defect of the inspection object, and a second imaging for measuring a reflected light distribution from the inspection object. Means for moving at least the first image pickup means in two directions of the optical axis direction and the sub-scanning direction, and a position where the reflected light from the inspection object is incident only on the second image pickup means And second illumination means installed in parallel with the first imaging means,
The rotational shake correction means uses these components of the inspection image acquisition means to rotate the object to be inspected and to reflect the reflected light distribution from the first and second illumination means to the second imaging means. And the posture of the object to be inspected is calculated from the acquired image, and at least the first imaging means is optically moved by the moving means with respect to the reflected light of the first illumination means according to the calculation result. The surface defect inspection apparatus according to claim 1, wherein the position of the inspection image acquisition unit is corrected with respect to a change in posture due to rotational shake by following two directions of a direction and a sub-scanning direction.   The surface defect inspection apparatus according to claim 11, further comprising a reflection unit configured to reflect a part of irradiation light from the first illumination unit instead of the second illumination unit.   The surface defect inspection apparatus according to claim 11, further comprising a splitting unit for splitting irradiation light from the first lighting unit in place of the second lighting unit. The inspection image acquisition unit includes a first illumination unit and a first imaging unit for detecting a surface defect of the inspection object, and a second imaging for measuring a reflected light distribution from the inspection object. Means, a moving means for moving at least the first image pickup means in the sub-scanning direction, and the first image pickup means at a position where the reflected light from the inspection object is incident only on the second image pickup means. And a second illumination means installed in parallel with
The rotational shake correction means uses these components of the inspection image acquisition means to rotate the object to be inspected and to reflect the reflected light distribution from the first and second illumination means to the second imaging means. And the posture of the inspection object is calculated from the acquired image, and the posture of the inspection object conveying means is corrected according to the calculation result, and at least the first imaging means is the first illumination means. 2. The surface defect according to claim 1, wherein the position of the inspection image acquisition unit is corrected with respect to a change in posture due to rotational shake by causing the moving unit to follow the reflected light in the sub-scanning direction. Inspection device.   15. The surface defect inspection apparatus according to claim 14, further comprising a reflection means for reflecting a part of the irradiation light from the first illumination means in place of the second illumination means. 15. The surface defect inspection apparatus according to claim 14, further comprising a splitting unit for splitting irradiation light from the first lighting unit in place of the second lighting unit.

Images