JPH06118007A - Method and device for inspecting defect on cylinder surface - Google Patents

Method and device for inspecting defect on cylinder surface

Info

Publication number
JPH06118007A
JPH06118007A JP27022792A JP27022792A JPH06118007A JP H06118007 A JPH06118007 A JP H06118007A JP 27022792 A JP27022792 A JP 27022792A JP 27022792 A JP27022792 A JP 27022792A JP H06118007 A JPH06118007 A JP H06118007A
Authority
JP
Japan
Prior art keywords
cylindrical body
light
slit
bright
dark
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP27022792A
Other languages
Japanese (ja)
Inventor
Ayumi Hirono
歩 広野
Hideaki Munakata
英明 宗像
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Business Innovation Corp
Original Assignee
Fuji Xerox Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Xerox Co Ltd filed Critical Fuji Xerox Co Ltd
Priority to JP27022792A priority Critical patent/JPH06118007A/en
Publication of JPH06118007A publication Critical patent/JPH06118007A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To automatically inspect surface defects such as very gentle irregularities on the low-glossiness surface of a cylinder. CONSTITUTION:A slit light image 10 which has repeated patterns of a bright portion 11, a dark portion 12 and a shade portion 13 between the bright portion 11 and the dark portion 12 on the low-glossiness surface 2 in the axial direction of a cylinder 1 is formed to detect reflected light actualized due to surface defects at the shade portion 13 of the formed slit light image 10. The repeated patterns of the slit light image are moved to the axial direction and the cylinder is rotated so that the surface defects all over the surface of the cylinder 1 is automatically detected.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は表面欠陥検査にかかり、
特に静電複写機やレーザープリンタ等の画像出力装置に
おける定着器に用いられるヒートロールのようなロール
状部品の表面欠陥検査方法およびその装置に関する。
The present invention relates to surface defect inspection,
In particular, the present invention relates to a surface defect inspection method for a roll-shaped part such as a heat roll used for a fixing device in an image output device such as an electrostatic copying machine or a laser printer, and the device therefor.

【0002】[0002]

【従来の技術】静電写真方式の複写機やレーザプリンタ
の画像出力装置に用いられる定着装置の多くは、感光体
に形成した静電潜像をトナーで現像した後、この静電潜
像を紙に転写し、トナー像を転写した紙を加熱した2つ
のロール間に通過させることでトナーを溶融して用紙に
像を定着する,所謂ヒートロール方式が採用されてい
る。
2. Description of the Related Art Many of fixing devices used in image output devices of electrostatic photocopiers and laser printers develop an electrostatic latent image formed on a photoconductor with toner and then develop the electrostatic latent image. A so-called heat roll system is adopted in which the toner is melted by fixing the image on the paper by transferring the paper onto the paper and passing the paper on which the toner image is transferred between two heated rolls.

【0003】この種のヒートロールは、ランプ等の熱源
を内蔵したアルミニウム等の素管(円筒基体)の表面
に、接着剤を介してフッ素樹脂やフッ素ゴム等の表面層
を塗布した後、その表面を研磨して平滑な曲面に仕上げ
る工程を経て製造される。この製造工程においては、円
筒体表面の塗布工程における上記表面層の塗布むらや異
物の混入、あるいは定着装置に組みこむ工程での取扱い
時に上記表面に打痕や擦り傷等の欠陥が発生することが
ある。
In this type of heat roll, a surface layer such as fluororesin or fluororubber is applied through an adhesive to the surface of a raw tube (cylindrical base) made of aluminum or the like containing a heat source such as a lamp, and then the It is manufactured through a process of polishing the surface to finish a smooth curved surface. In this manufacturing process, coating unevenness of the surface layer in the coating process of the surface of the cylindrical body and contamination of foreign matter, or defects such as dents and scratches may occur on the surface during handling in the process of incorporating into the fixing device. is there.

【0004】図5はヒートロール等の低光沢な表面をも
つ円筒体の表面欠陥の説明図であって、40は円筒体、
41は表面の軸方向に付いた欠陥、42は表面の周方向
に付いた欠陥をそれぞれ模式的に示したものである。上
記欠陥の大きさは、通常0.1mm以上数mm程度の広
がりで、深さは数μm程度である。これらの欠陥の中で
表面に凹凸をもたらすものは、トナー像の定着を十分に
行うことができずコピー上に白点等の画質欠陥となる。
また、塗布むらは表面層の耐久性に影響する。そのた
め、ヒートロール等の円筒体全数の表面検査を行ってい
る。
FIG. 5 is an explanatory view of surface defects of a cylindrical body having a low gloss surface such as a heat roll, and 40 is a cylindrical body,
Reference numeral 41 schematically shows defects attached in the axial direction of the surface, and 42 schematically shows defects attached in the circumferential direction of the surface. The size of the defect is usually 0.1 mm or more and a few mm, and the depth thereof is a few μm. Among these defects, the one that causes unevenness on the surface cannot sufficiently fix the toner image, resulting in image defects such as white spots on the copy.
In addition, coating unevenness affects the durability of the surface layer. Therefore, the surface inspection of all the cylindrical bodies such as heat rolls is performed.

【0005】「しみ」「むら」等の表面欠陥は色あいの
微妙な変化として、また、「擦り傷」等の欠陥(機械
傷)はヒートロール表面に薄い線として表れるため、念
入りに観察して初めて検出できるものである。表面検査
の方法として従来から検査員による目視検査が行われて
いる(例えば実開昭63−54166号公報参照)。し
かしながら、目視による検査では、検査品質のばらつき
や、検査工数の増大、検査スペースの増大、目視疲労に
よる作業環境の悪化、作業者確保の困難、作業者教育時
間の増大などの問題があった。目視検査作業の自動化と
しては感光体ドラムを対象としたものを適用するものと
して、下記のようなものが提案されている。
Surface defects such as "stains" and "unevenness" appear as subtle changes in color tone, and defects such as "scratches" (mechanical scratches) appear as thin lines on the surface of the heat roll. It can be detected. As a surface inspection method, a visual inspection has been conventionally performed by an inspector (see, for example, Japanese Utility Model Laid-Open No. 63-54166). However, the visual inspection has problems such as variation in inspection quality, increase in inspection man-hours, increase in inspection space, deterioration of work environment due to visual fatigue, difficulty in securing workers, and increase in training time for workers. As the automation of the visual inspection work, the following has been proposed as an application of the one for the photosensitive drum.

【0006】図6は従来の感光体ドラム表面の自動検査
装置の第1例の説明図であって、レーザ113のスポッ
ト光を偏向器114を介して被検査体である感光体ドラ
ム111の表面上で線走査し、集光器112で検査表面
の欠陥による散乱光を集め、これをオプチカルファイバ
ー束115で導き光電子増倍管からなる受光器116で
受光し、演算手段117で所定の閾値と演算して、演算
結果を表示手段118に表示するものである(特開昭6
0−86405号公報)。しかし、この従来例では感光
層での干渉縞が発生して、検査精度を低下させてしまう
という問題がある。
FIG. 6 is an explanatory view of a first example of the conventional automatic inspection device for the surface of the photosensitive drum, in which the spot light of the laser 113 is passed through the deflector 114 and the surface of the photosensitive drum 111 which is the object to be inspected. The line is scanned above, and the light collected by the defects on the inspection surface is collected by the condenser 112, guided by the optical fiber bundle 115, received by the light receiver 116 composed of a photomultiplier tube, and the predetermined threshold value is set by the calculation means 117. The calculation is performed, and the calculation result is displayed on the display means 118 (Japanese Patent Laid-Open No. 6-68242).
0-86405). However, in this conventional example, there is a problem that interference fringes are generated in the photosensitive layer and the inspection accuracy is lowered.

【0007】図7は従来の円筒体表面の自動検査装置の
第2例の説明図であって、感光体ドラム141の表面を
照明装置143で照明し、反射光を等倍結像素子145
でセンサアレー146に結像し、画像処理装置147で
処理することによって得た欠陥データを表面手段148
に表示するものである(特開平3−54438号公
報)。
FIG. 7 is an explanatory view of a second example of a conventional automatic inspection device for the surface of a cylindrical body, in which the surface of the photosensitive drum 141 is illuminated by an illuminating device 143, and reflected light is imaged at an equal magnification 145.
The defect data obtained by forming an image on the sensor array 146 with the image processing device 147 is processed by the surface means 148.
(Japanese Patent Laid-Open No. 3-54438).

【0008】図8図は従来の円筒体表面の自動検査装置
の第3例の説明図であって、81a,81bはハロゲン
光源、82a,82bはオプチカルファイバー束、84
はレンズホルダ、85は縮小光学系を構成するシリンダ
レンズ、86は円筒体、88はスリット光装置、89は
ラインセンサである。同図に示すように、ハロゲン光源
81a,81bの光をオプチカルファイバー束82a,
82bとスリット光装置88を通したスリット光をシリ
ンダレンズ85で縮小して円筒体86の軸方向表面に照
射し、その反射光をラインセンサ89で受光して表面欠
陥を検出するものである。
FIG. 8 is an explanatory view of a third example of the conventional automatic inspection device for the surface of a cylindrical body, in which 81a and 81b are halogen light sources, 82a and 82b are optical fiber bundles, and 84.
Is a lens holder, 85 is a cylinder lens forming a reduction optical system, 86 is a cylindrical body, 88 is a slit light device, and 89 is a line sensor. As shown in the figure, the light from the halogen light sources 81a and 81b is transmitted to the optical fiber bundles 82a and 81a.
The slit light passing through 82b and the slit light device 88 is reduced by the cylinder lens 85 and applied to the axial surface of the cylindrical body 86, and the reflected light is received by the line sensor 89 to detect the surface defect.

【0009】図9は円筒体表面の自動検査装置の第4例
の説明図であって、191は感光体ドラム、192は蛍
光灯1921とスリット1922からなるスリット光
源、193はラインセンサからなる受光器、194は投
写光像、195は投写光像の中心部、196は投写光像
の境界部、197は画像処理部、198は欠陥判定部で
ある。
FIG. 9 is an explanatory view of a fourth example of an automatic inspection device for the surface of a cylindrical body. 191 is a photosensitive drum, 192 is a slit light source consisting of a fluorescent lamp 1921 and a slit 1922, and 193 is a light receiving unit consisting of a line sensor. Reference numeral 194 is a projected light image, 195 is a central portion of the projected light image, 196 is a boundary portion of the projected light image, 197 is an image processing portion, and 198 is a defect determination portion.

【0010】同図に示したように、この装置では光源に
スリット光源192を構成する白色散乱光源を用い、被
検査体である感光ドラム191の表面上の投写光像19
4の中心部195及び境界部196をラインセンサから
なる受光器193で受光し受光信号を画像処理部197
で処理し、欠陥判定部198で欠陥の判定を行うように
したものであって、本発明者等が先に提案したものであ
る(特願平3−271487号)。
As shown in the figure, in this apparatus, a white light source forming a slit light source 192 is used as a light source, and a projected light image 19 on the surface of a photosensitive drum 191 which is an object to be inspected is used.
The central portion 195 and the boundary portion 196 of No. 4 are received by the photodetector 193 composed of a line sensor, and the received light signal is received by the image processing unit 197.
And the defect is judged by the defect judgment unit 198, which has been previously proposed by the present inventors (Japanese Patent Application No. 3-2714787).

【0011】なお、図10は本出願人の他の出願に係る
円筒体の表面欠陥検査装置の概略構成を説明する模式図
であって、90は円筒体、91は円筒体の表面、92は
投光器、93は投写光像、94は投写光像領域外の表
面、95は受光器の視野、96は欠陥、97は受光器、
98は縮小光学系、99は3軸姿勢調整装置、100は
欠陥信号抽出部、101は欠陥判定処理部である。
FIG. 10 is a schematic view for explaining a schematic structure of a surface defect inspection apparatus for a cylindrical body according to another application of the present applicant, in which 90 is a cylindrical body, 91 is the surface of the cylindrical body, and 92 is Projector, 93 is a projected light image, 94 is a surface outside the projected light image area, 95 is a field of view of a light receiver, 96 is a defect, 97 is a light receiver,
Reference numeral 98 is a reduction optical system, 99 is a three-axis attitude adjustment device, 100 is a defect signal extraction unit, and 101 is a defect determination processing unit.

【0012】同図において、投光器92を構成する光源
として蛍光灯を用い、蛍光灯の前面に当該蛍光灯の長手
方向に沿ってスリットを設置し、円筒体90の表面91
に対して、その長軸が上記円筒体90の軸心方向と直交
する方向に設置し、帯状の投写光像93を形成する。投
光器92と受光器97とは、円筒体90の軸方向(長手
方向に)沿って同期移動する。
In the figure, a fluorescent lamp is used as a light source forming the floodlight 92, a slit is provided on the front surface of the fluorescent lamp along the longitudinal direction of the fluorescent lamp, and a surface 91 of the cylindrical body 90 is provided.
On the other hand, the long axis thereof is installed in the direction orthogonal to the axial direction of the cylindrical body 90, and the band-shaped projected light image 93 is formed. The light projector 92 and the light receiver 97 move synchronously along the axial direction (longitudinal direction) of the cylindrical body 90.

【0013】円筒体90の軸方向に沿った走査が完了す
ると、円筒体を一定角度(上記帯状の投写光像の長手方
向幅に相当する角度)だけ回転させる。この円筒体の長
手方向走査と円筒体の回転走査を交互に順次行うことで
円筒体90の表面91の全域の走査がなされる。受光器
97を構成するラインセンサの長手方向を帯状の投写光
像93の境界部分に合わせ、境界線付近(境界部分近
傍)の反射光を縮小光学系98を通して受光する。
When the scanning of the cylindrical body 90 along the axial direction is completed, the cylindrical body is rotated by a certain angle (an angle corresponding to the longitudinal width of the band-shaped projected light image). The entire area of the surface 91 of the cylindrical body 90 is scanned by alternately performing the longitudinal scanning of the cylindrical body and the rotational scanning of the cylindrical body. The longitudinal direction of the line sensor forming the light receiver 97 is aligned with the boundary portion of the strip-shaped projected light image 93, and the reflected light near the boundary line (near the boundary portion) is received through the reduction optical system 98.

【0014】ラインセンサの受光視野95は3軸姿勢調
整装置99により上記境界部分に一致するように設定す
る。投写光像93の境界部分が表面にへこみやふくらみ
欠陥96の近傍を走査したとき、当該投写光像96の境
界線部(端縁部)が乱れ、受光視野95で散乱光が受光
される。ラインセンサはこの境界部分近傍の反射光を光
電変換し、その出力信号を欠陥信号抽出回路100に与
えて欠陥信号を抽出し、欠陥判定処理部101で欠陥良
否と欠陥種類判定装置の判定が行われる。
The light-receiving visual field 95 of the line sensor is set by the three-axis posture adjusting device 99 so as to coincide with the above-mentioned boundary portion. When the boundary portion of the projected light image 93 is scanned in the vicinity of the dent or bulge defect 96 on the surface, the boundary line portion (edge portion) of the projected light image 96 is disturbed, and scattered light is received by the light receiving field 95. The line sensor photoelectrically converts the reflected light in the vicinity of this boundary portion, supplies the output signal to the defect signal extraction circuit 100 to extract the defect signal, and the defect determination processing unit 101 determines whether the defect is good or not and the defect type determination device determines. Be seen.

【0015】[0015]

【発明が解決しようとする課題】しかしながら前記した
図6〜図8の従来技術の中で、レーザー光を用いるもの
では暗室条件が必要になり装置が大型化し、また検査対
象であるヒートロールの表面は比較的粗面(低光沢表
面)であることによりレーザースポット光が散乱し正常
面と欠陥部分の区別が困難である。また、等倍結像素子
を用いるため検査ドラム幅以上のセンサアレイや結像素
子が必要となり装置が大型化するという問題があり、ハ
ロゲン光源81a,81bとオプチカルファイバー束8
2a,92bとによるハロゲンスリット光を用いたもの
では、微妙な色むら等を検出できないという問題があ
る。
However, among the prior arts of FIGS. 6 to 8 described above, the one using laser light requires a dark room condition, the size of the apparatus becomes large, and the surface of the heat roll to be inspected. Is a relatively rough surface (low gloss surface), so that the laser spot light is scattered and it is difficult to distinguish the normal surface from the defective portion. Further, since the same-magnification imaging element is used, there is a problem that a sensor array or an imaging element having a width larger than the inspection drum width is required and the apparatus becomes large in size.
In the case of using the halogen slit light of 2a and 92b, there is a problem that subtle color unevenness cannot be detected.

【0016】そして、図9で説明した自動検査装置は、
本発明者等の実験の結果、ロール表面191のスリット
光の正反射光を受光する位置195により異物や打痕、
擦り傷を、拡散光を受光する位置196により色むら等
の主な欠陥の種類を検出できることが分かった。また、
円筒体表面の凹凸に対しては、正反射受光の境界部分で
散乱光を受光する位置196により検出でき、「へこ
み」や「擦り傷」等筋状の欠陥の中で軸方向の欠陥41
(図5参照)は検出できるが、円周方向に連続する筋状
の「へこみ」や擦り傷42に対しては、図11に示した
模式図にように、スリット62が円筒体60の軸方向す
なわち上記筋状欠陥41の方向と直交していることで、
当該スリット光63が表面の傾きに対し広い角度で照射
されるために影の部分が無くなり、上記円周方向に連続
する筋状の「へこみ」や擦り傷42が検出できないとい
う問題がある。
The automatic inspection device described with reference to FIG.
As a result of experiments conducted by the present inventors, foreign matter and dents were detected at the position 195 at which the specular reflection light of the slit light on the roll surface 191 was received.
It has been found that the type of main defects such as color unevenness can be detected by the position 196 where the scratches and diffused light are received. Also,
The irregularities on the surface of the cylindrical body can be detected by the position 196 where the scattered light is received at the boundary portion of the regular reflection light reception, and the axial defect 41 among the line-shaped defects such as “dents” and “scratches”.
(See FIG. 5) can be detected, but with respect to streak-like “dents” and abrasions 42 that are continuous in the circumferential direction, as shown in the schematic diagram shown in FIG. 11, the slit 62 has an axial direction of the cylindrical body 60. That is, by being orthogonal to the direction of the streak defect 41,
Since the slit light 63 is irradiated at a wide angle with respect to the inclination of the surface, there is no shadow portion, and there is a problem in that streaky “dents” and abrasions 42 continuous in the circumferential direction cannot be detected.

【0017】これに対して、図10で説明した円筒体9
0の軸方向表面91に対して直交方向(円周方向)に配
置した光源92からスリット光を投写して、円筒体の軸
方向に明部(投写光像93)と暗部(投写光像領域外の
表面94)を1組だけ形成して境界部分95での反射光
を検出する方法では、円筒体の円周方向のへこみ欠陥9
6は検出可能である。この検出対象は鏡面であるOPC
感光体ドラム表面で、本発明が対象とする低光沢な表面
では明部と暗部の境界部分95が広い範囲となるのに対
し明部と暗部も明確となる。このため、この装置では、
円筒体軸方向と直交する方向にスリット光を投写する投
光器92を配置し、同じく円筒体軸方向と直交する方向
に受光する受光器97を配置し、この投光器92と受光
器97とを同期して移動させて感光体ドラム全面を走査
する構成であるため、装置が大がかりになり、検査に時
間がかかるという問題がある。
On the other hand, the cylindrical body 9 described with reference to FIG.
The slit light is projected from the light source 92 arranged in the direction (circumferential direction) orthogonal to the axial surface 91 of 0, and the bright portion (projection light image 93) and the dark portion (projection light image area) are formed in the axial direction of the cylindrical body. In the method of forming only one set of the outer surface 94) and detecting the reflected light at the boundary portion 95, the dent defect 9 in the circumferential direction of the cylindrical body is detected.
6 is detectable. This detection target is a mirror surface OPC
On the surface of the photoconductor drum having a low gloss which is the object of the present invention, the boundary portion 95 between the bright portion and the dark portion has a wide range, while the bright portion and the dark portion are also clear. Therefore, with this device,
A light projector 92 for projecting slit light in a direction orthogonal to the cylinder axis direction is arranged, and a light receiver 97 for receiving light is also arranged in a direction perpendicular to the cylinder axis direction. The light projector 92 and the light receiver 97 are synchronized with each other. Since the structure is such that the entire surface of the photoconductor drum is scanned by moving the device, the size of the apparatus becomes large and the inspection takes time.

【0018】本発明の目的は、上記従来技術の問題点を
解消し、アルミニウム等の金属素管(円筒基体)の表面
に、接着剤を介してフッ素樹脂やフッ素ゴム等の表面層
を塗布した後、その表面を研磨して平滑な曲面としたヒ
ートローラ、あるいはプレッシャローラ等の低光沢な表
面をもつ円筒体の表面上に発生する欠陥の中で、特に円
周方向の緩やかな「へこみ」や「ふくらみ」欠陥を検出
することのできる表面欠陥検査方法およびその装置を提
供することにある。
The object of the present invention is to solve the above-mentioned problems of the prior art and to apply a surface layer of fluororesin or fluororubber to the surface of a metal base tube (cylindrical substrate) of aluminum or the like via an adhesive. Later, among the defects that occur on the surface of a heat roller with a smooth curved surface by polishing the surface, or on the surface of a cylindrical body with a low gloss surface such as a pressure roller, especially "dents" that are gentle in the circumferential direction Another object of the present invention is to provide a surface defect inspection method and apparatus capable of detecting a "bulge" defect.

【0019】[0019]

【課題を解決するための手段】上記目的を達成するため
に、本発明は、低光沢な表面2をもつ円筒体1の前記表
面に、前記円筒体1の軸方向15に沿って明部11と暗
部12の繰り返しパターンをもつスリット光像10を形
成し、前記低光沢な表面2に存在する表面欠陥5による
前記スリット光像10の明部11と暗部12との中間に
ある明暗部13領域の反射光レベルの変化により前記表
面欠陥を検知する方法としたことを特徴とする。
In order to achieve the above object, the present invention provides a bright portion 11 on the surface of a cylindrical body 1 having a low gloss surface 2 along an axial direction 15 of the cylindrical body 1. A slit light image 10 having a repeating pattern of dark and dark portions 12 is formed, and a light and dark portion 13 region intermediate between the light portion 11 and the dark portion 12 of the slit light image 10 due to the surface defect 5 existing on the low-gloss surface 2. The method is characterized in that the surface defect is detected based on the change in the reflected light level.

【0020】また、本発明は、低光沢な表面2をもつ円
筒体1の前記表面に光を照射し、その反射光を受光して
表面欠陥を検査する装置において、前記円筒体1の低光
沢な表面2に対して、前記円筒体1の軸方向15に沿っ
て明部11と暗部12の繰り返しパターンのスリット光
像10を形成する遮光板8をもつスリット光光源3と、
前記円筒体1の低光沢な表面2に形成されたスリット光
像10を前記円筒体1の軸15方向に沿って走査するラ
インセンサ6と、前記スリット光像10の明部11と暗
部12の繰り返しパターンを前記円筒体1の軸方向15
に移動させる遮光板移動機構9とを備え、前記低光沢な
表面2に存在する表面欠陥5による前記スリット光像1
0の明部11と暗部12の中間の明暗部13の反射光レ
ベルの変化により前記円筒体1の軸方向15に沿って前
記表面欠陥5を検知する構成としたことを特徴とする。
Further, the present invention is an apparatus for inspecting surface defects by irradiating the surface of a cylindrical body 1 having a low gloss surface 2 with light and receiving the reflected light to inspect for surface defects. A slit light source 3 having a light shielding plate 8 for forming a slit light image 10 of a repeating pattern of bright portions 11 and dark portions 12 along the axial direction 15 of the cylindrical body 1 on the transparent surface 2,
The line sensor 6 for scanning the slit light image 10 formed on the low-gloss surface 2 of the cylinder 1 along the direction of the axis 15 of the cylinder 1, and the bright portion 11 and the dark portion 12 of the slit light image 10. Repeat pattern 15 in the axial direction of the cylindrical body 1
And a light shielding plate moving mechanism 9 for moving the slit light image 1 by the surface defect 5 existing on the low gloss surface 2.
It is characterized in that the surface defect 5 is detected along the axial direction 15 of the cylindrical body 1 by the change of the reflected light level of the bright and dark portion 13 between the bright portion 11 and the dark portion 12 of 0.

【0021】さらに、本発明は、低光沢な表面2をもつ
円筒体1の前記表面に光を照射し、その反射光を受光し
て表面欠陥を検査する装置において、前記円筒体1の低
光沢な表面2に対して、前記円筒体1の軸方向15に沿
って明部11と暗部12の繰り返しパターンをもつスリ
ット光像10を形成する遮光板8をもつスリット光光源
3と、前記円筒体1の低光沢な表面2に形成されたスリ
ット光像10を前記円筒体1の軸15方向に沿って走査
するラインセンサ6と、前記円筒体1をその軸回りに回
転させる円筒体回転機構18と、前記スリット光像10
の明部11と暗部12の繰り返しパターンを前記円筒体
1の1回転ごとに前記円筒体1の軸方向15に沿って移
動させる遮光板移動機構9とを備え、前記低光沢な表面
2に存在する表面欠陥5による前記スリット光像10の
明部11と暗部12の中間の明暗部13の反射光レベル
の変化により前記円筒体1の全面に渡って表面欠陥5を
検知する構成としたことを特徴とする。
Further, the present invention is an apparatus for inspecting a surface defect by irradiating the surface of a cylindrical body 1 having a low gloss surface 2 with light, and receiving the reflected light to inspect for surface defects. A slit light source 3 having a light shielding plate 8 for forming a slit light image 10 having a repeating pattern of bright portions 11 and dark portions 12 along the axial direction 15 of the cylindrical body 1 on the transparent surface 2, and the cylindrical body. 1. A line sensor 6 for scanning a slit light image 10 formed on a low-gloss surface 2 of the cylindrical body 1 along an axis 15 direction of the cylindrical body 1, and a cylindrical body rotating mechanism 18 for rotating the cylindrical body 1 around the axis. And the slit light image 10
Existing on the low-gloss surface 2 with a light-shielding plate moving mechanism 9 for moving a repeating pattern of the bright portion 11 and the dark portion 12 along the axial direction 15 of the cylindrical body 1 for each rotation of the cylindrical body 1. The surface defect 5 is detected over the entire surface of the cylindrical body 1 by the change in the reflected light level of the bright and dark part 13 between the bright part 11 and the dark part 12 of the slit light image 10 due to the surface defect 5. Characterize.

【0022】なお、前記スリット光光源3は蛍光灯等の
線光源の前面に開口部7を持つ格子状の遮光板8を有
し、円筒体1の軸方向15に対して明部11と暗部12
の繰り返しパターンとなるスリット光4を形成する。ラ
インセンサ6は円筒体1上に投写されたスリット光像1
0を軸方向15に走査し、特に明部11と暗部12の中
間の明暗部13を検査範囲とし、遮光板8をロールの回
転毎に遮光位置をスリット光光源3の長手方向14に移
動する遮光板移動機構9を有する。
The slit light source 3 has a grid-shaped light-shielding plate 8 having an opening 7 in front of a linear light source such as a fluorescent lamp, and has a bright portion 11 and a dark portion in the axial direction 15 of the cylindrical body 1. 12
The slit light 4 having a repeating pattern is formed. The line sensor 6 is a slit light image 1 projected on the cylindrical body 1.
0 is scanned in the axial direction 15, and the light-dark portion 13 in the middle of the light portion 11 and the dark portion 12 is set as the inspection range, and the light-shielding plate 8 is moved in the longitudinal direction 14 of the slit light source 3 every time the roll rotates. The light shielding plate moving mechanism 9 is provided.

【0023】[0023]

【作用】図1に示したように、スリット光光源3からの
スリット光4は、遮光板8により格子状のスリット光像
10となり、円筒体1の表面2の円筒体軸15方向に明
部11と明暗部13と暗部12の繰り返しパターンの照
度分布となるように照射する。円筒体1を回転させ、円
周方向の穏やかなへこみや擦り傷等の表面欠陥がスリッ
ト光の明暗部の位置となった時に、図12に示したよう
に、遮光板の開口部7からのスリット光4は表面欠陥5
の部分で影もしくは散乱部分61となる。これをスリッ
ト光像10の中心線部分17に沿って円筒体1の軸方向
15に走査するラインセンサ6により検出する。
As shown in FIG. 1, the slit light 4 from the slit light source 3 becomes a lattice-shaped slit light image 10 by the light shielding plate 8, and the bright portion in the direction of the cylinder axis 15 on the surface 2 of the cylinder 1 is shown. Irradiation is performed so that the illuminance distribution is a repeating pattern of 11, the bright and dark portions 13, and the dark portions 12. When the cylindrical body 1 is rotated and surface defects such as gentle dents and abrasions in the circumferential direction reach the bright and dark portions of the slit light, as shown in FIG. Light 4 is surface defect 5
The portion of becomes a shadow or a scattering portion 61. This is detected by the line sensor 6 which scans in the axial direction 15 of the cylindrical body 1 along the center line portion 17 of the slit light image 10.

【0024】円筒体1の1回転の後にスリット光移動機
構9によりスリットを水平方向(スリット光光源3の長
手方向14)に移動して、円筒体1の非鏡面2上のスリ
ット光像10の明暗部を移動させて、順次これを繰り返
すことで円筒体1の全面が検査される。
After the cylindrical body 1 makes one rotation, the slit light moving mechanism 9 moves the slit in the horizontal direction (longitudinal direction 14 of the slit light source 3) to form a slit light image 10 on the non-mirror surface 2 of the cylindrical body 1. The entire surface of the cylindrical body 1 is inspected by moving the bright and dark parts and sequentially repeating this.

【0025】[0025]

【実施例】以下、本発明の実施例につき、図面を参照し
て詳細に説明する。図1は本発明による円筒体の表面欠
陥検査方法を適用する装置構成の1実施例を説明する模
式図であって、1は被検査対象である円筒体、2は円筒
体の低光沢な表面、3はスリット光光源、4はスリット
光、5は表面欠陥、6はラインセンサ、7は遮光板の開
口部、8は遮光板、9は遮光板移動機構、10はスリッ
ト光像、11はスリット光像の明部、12は同暗部、1
3はスリット光像の明部と暗部との間にある明暗部、1
4はスリット光水平移動方向、15は円筒体軸方向、1
6は遮光部、17はスリット光の中心線部分、18は円
筒体回転機構である。
Embodiments of the present invention will now be described in detail with reference to the drawings. FIG. 1 is a schematic view for explaining an embodiment of an apparatus configuration for applying a method for inspecting a surface defect of a cylindrical body according to the present invention, in which 1 is a cylindrical body to be inspected and 2 is a low gloss surface of the cylindrical body. 3 is a slit light source, 4 is slit light, 5 is a surface defect, 6 is a line sensor, 7 is an opening of a light shielding plate, 8 is a light shielding plate, 9 is a light shielding plate moving mechanism, 10 is a slit light image, 11 is The bright part of the slit light image, 12 is the same dark part, 1
Reference numeral 3 is a bright / dark portion between the bright portion and the dark portion of the slit light image, 1
4 is the slit light horizontal movement direction, 15 is the cylindrical body axial direction, 1
6 is a light-shielding portion, 17 is a center line portion of slit light, and 18 is a cylindrical body rotating mechanism.

【0026】同図において、スリット光光源3は線状光
源の前面に格子状の遮光板8を設置してなり、この遮光
板8を通した明暗の繰り返しスリット光4を円筒体1の
検査表面(低光沢な表面2)に照射してスリット光像1
0を形成する。このスリット光光源は、拡散光源として
拡散面の照度が高く光量分布の均一なことから白色蛍光
灯を用いるのを好適とする。本発明者等の実験によれ
ば、スリット光光源3から円筒体1の表面2までの距離
を約100mm、スリット光光源3の円筒体の円周方向
の幅を約30mmとして、直径17mmφの円筒体表面
でその円周方向に幅約1.5mmのスリット光像10を
得ている。
In the figure, the slit light source 3 comprises a line-shaped light source having a lattice-shaped light-shielding plate 8 installed in front thereof, and the light-dark repeating slit light 4 passing through the light-shielding plate 8 is used to inspect the surface of the cylindrical body 1. Slit light image 1 by illuminating (low gloss surface 2)
Form 0. It is preferable to use a white fluorescent lamp as a diffused light source for the slit light source because the diffused surface has a high illuminance and a uniform light amount distribution. According to experiments conducted by the present inventors, the distance from the slit light source 3 to the surface 2 of the cylindrical body 1 is about 100 mm, the circumferential width of the cylindrical body of the slit light source 3 is about 30 mm, and a cylinder having a diameter of 17 mmφ. A slit light image 10 having a width of about 1.5 mm is obtained in the circumferential direction on the body surface.

【0027】スリット光光源3の前面に格子状の遮光板
8を設置して、暗部12,明暗部13,明部11,明暗
部13,暗部12・・の繰り返しパターンを形成する。
円筒体1の表面2はある程度の粗面(低光沢な表面)で
あり、明部11と暗部12の境界部分がOPC感光体ド
ラムに比べて明確でなく、明暗部13の領域が広くな
る。本発明者等の実験によれば、円筒体の円周方向のへ
こみ欠陥は、この明暗部13の領域内であれば黒い影が
できるか、あるいは明るく散乱して顕在化する。これ
は、明暗部13における欠陥部分に対する光の照射が、
遮光板8の開口部72(図12)からの照射光4が一方
向からの角度からの照射光であるためである。
A lattice-shaped light-shielding plate 8 is installed on the front surface of the slit light source 3 to form a repeating pattern of a dark portion 12, a bright / dark portion 13, a bright portion 11, a bright / dark portion 13, a dark portion 12 ...
The surface 2 of the cylindrical body 1 is a rough surface (low gloss surface) to some extent, the boundary portion between the bright portion 11 and the dark portion 12 is not clear as compared with the OPC photosensitive drum, and the area of the bright and dark portion 13 is wide. According to experiments conducted by the present inventors, the dent defect in the circumferential direction of the cylindrical body becomes a black shadow in the area of the bright and dark portion 13 or becomes visible by being scattered brightly. This is because the irradiation of light on the defective portion in the bright and dark portion 13 is
This is because the irradiation light 4 from the opening 72 (FIG. 12) of the light shielding plate 8 is the irradiation light from an angle from one direction.

【0028】明暗部13はスリット光4の繰り返しパタ
ーンにより複数箇所形成されるので、ラインセンサ6を
円筒体1の軸方向15に走査することが可能で、前記図
10で説明した方法に比べ高速検査が可能となる。遮光
板8の開口部7及び遮光部16の設定は、円筒体1の円
周方向のへこみの検出時間の重要な要因となる。開口部
7と遮光部16の幅と比率により、欠陥検出が可能とな
る明暗部13の幅が決まる。この明暗部13の幅により
遮光板8を切り換える回数と円筒体1を回転して全面を
検査する時間が決まる。
Since the bright and dark portions 13 are formed at a plurality of positions by the repeating pattern of the slit light 4, it is possible to scan the line sensor 6 in the axial direction 15 of the cylindrical body 1, which is faster than the method described in FIG. Inspection is possible. The setting of the opening 7 and the light shielding portion 16 of the light shielding plate 8 becomes an important factor in the detection time of the dent in the circumferential direction of the cylindrical body 1. The width and ratio of the opening 7 and the light-shielding portion 16 determine the width of the light-dark portion 13 that enables defect detection. The width of the bright and dark portion 13 determines the number of times the light shielding plate 8 is switched and the time for rotating the cylindrical body 1 to inspect the entire surface.

【0029】実験によれば、最も明暗部の幅が大きくな
り、円周方向のへこみを感度よく検出できるものとし
て、開口部16の幅を10mm、遮光部の幅を30mm
とする組み合わせにより、例えば幅が0.4mm、円周
方向の長さ2mm、深さ数μmの円周方向のへこみを検
出した。円筒体1の表面2上に形成されたの暗部12,
明暗部13,明部11,明暗部13,・・の幅の比率は
1:1:1:1となり、ロールの1回転目でラインセン
サ6は明暗部13を検出領域として円筒体1の表面全周
の検査を行い、次ぎに遮光板8の位置を遮光板駆動機構
9により移動してロールの2回転目を行って全面の円筒
体1の表面2の全周検査が完了する。
According to the experiment, the width of the bright and dark portions is the largest, and it is possible to detect the indentation in the circumferential direction with high sensitivity. The width of the opening 16 is 10 mm and the width of the light shielding portion is 30 mm.
For example, a depression having a width of 0.4 mm, a circumferential length of 2 mm, and a depth of several μm was detected in the circumferential direction. A dark portion 12 formed on the surface 2 of the cylindrical body 1,
The ratio of the widths of the light-dark portion 13, the light portion 11, the light-dark portion 13, ... Is 1: 1: 1: 1, and the line sensor 6 uses the light-dark portion 13 as a detection area at the first rotation of the roll and the surface of the cylindrical body 1. The entire circumference is inspected, and then the position of the light shielding plate 8 is moved by the light shielding plate driving mechanism 9 to perform the second rotation of the roll, and the entire circumference inspection of the surface 2 of the entire cylindrical body 1 is completed.

【0030】図2は本発明による円筒体の表面欠陥検査
方法を適用する装置構成の1実施例における動作説明図
であって、(a)は1回転目、(b)は2回転目のスリ
ット光像10の位置を示し、11a,11b、12a,
12b、13a,13bはそれぞれ円筒体1の1回転
目、2回転目の明部、暗部、明暗部を示す。同図におい
て、1回目のドラム回転による走査に続いて遮光板8を
移動したことにより、1回転目のロール面上の明暗部1
3aの分布が2回転目の明暗部13bに移動しているこ
とを示す図1の要部模式図である。
2A and 2B are operation explanatory views in one embodiment of the apparatus configuration to which the method for inspecting a surface defect of a cylindrical body according to the present invention is applied. FIG. 2A is a slit for the first rotation, and FIG. The position of the light image 10 is shown, and 11a, 11b, 12a,
Reference numerals 12b, 13a, and 13b denote the light portion, the dark portion, and the light / dark portion of the first and second rotations of the cylindrical body 1, respectively. In the figure, the light-shielding plate 8 is moved after the first scanning by the drum rotation, so that the light-dark portion 1 on the roll surface of the first rotation is changed.
It is a principal part schematic diagram of FIG. 1 which shows that the distribution of 3a is moving to the bright / dark part 13b of the 2nd rotation.

【0031】前記した遮光板8の開口部7と遮光部16
の幅においては、開口部7の間隔の4分の1の距離だけ
遮光板8をスリット光水平移動方向に平行移動させれば
よい。図3はラインセンサから出力される検査信号の説
明図であって、横軸はラインセンサのセンサ画素位置、
縦軸はセンサ信号レベルを示し、31はラインセンサか
らの検査出力、32はハイレベル領域、33はローレベ
ル領域、34a,34bは信号分布領域である。
The opening portion 7 and the light shielding portion 16 of the light shielding plate 8 described above.
With respect to the width of, the light shielding plate 8 may be moved in parallel in the slit light horizontal movement direction by a distance of ¼ of the distance between the openings 7. FIG. 3 is an explanatory diagram of the inspection signal output from the line sensor, where the horizontal axis represents the sensor pixel position of the line sensor,
The vertical axis represents the sensor signal level, 31 is the inspection output from the line sensor, 32 is the high level region, 33 is the low level region, and 34a and 34b are the signal distribution regions.

【0032】同図において、検査領域は明暗部13a,
13bであるため、ラインセンサ6(図1)のセンサ信
号31は図示したように、明部11がハイレベル領域3
2、暗部12がローレベル領域33にあるのに対して、
明暗部13は片上がりの不均一な信号分布領域34a,
34bとなる。これに対しては、センサ信号分布領域3
4a,34bに応じて、正方向の閾値36と負方向の閾
値37を設定して欠陥信号35を抽出する。
In the figure, the inspection area is a light and dark portion 13a,
Since it is 13b, the sensor signal 31 of the line sensor 6 (FIG. 1) has the bright portion 11 in the high level region 3 as shown in the figure.
2. While the dark part 12 is in the low level area 33,
The bright and dark portion 13 has a one-sided uneven signal distribution region 34a,
34b. For this, the sensor signal distribution region 3
The defect signal 35 is extracted by setting the threshold value 36 in the positive direction and the threshold value 37 in the negative direction according to 4a and 34b.

【0033】(a)に示した円筒体1の1回転目では明
暗部13のセンサ信号分布領域34aを検査領域とし、
(b)に示した円筒体1の2回転目では遮光板8の移動
により平行移動した明暗部13bに応じて信号分布領域
34bを検査領域として全面の検査が達成される。閾値
36,37のセンサ信号31に対する高さは、限度見本
の表面欠陥を測定して実験的に決定すればよい。
In the first rotation of the cylindrical body 1 shown in (a), the sensor signal distribution area 34a of the bright and dark portion 13 is used as an inspection area,
In the second rotation of the cylindrical body 1 shown in (b), the entire surface inspection is achieved by using the signal distribution region 34b as the inspection region in accordance with the bright and dark portion 13b which is moved in parallel by the movement of the light shielding plate 8. The height of the threshold values 36 and 37 with respect to the sensor signal 31 may be experimentally determined by measuring the surface defect of the limit sample.

【0034】図4は本発明による円筒体の表面欠陥検査
方法を適用する装置構成の応用例を説明する模式図であ
って、4’はスリット、5’は表面欠陥、8’は遮光
板、10’はスリット光像、図1と同一符号は同一部分
に対応し、前記実施例で説明した円筒体の円周方向の欠
陥以外の欠陥検出を行う方法を示す。すなわち、表面検
査対象である円筒体1の低光沢な表面の軸方向に存在す
る表面欠陥5’は、図1における遮光板8に替えて軸方
向に一様なスリット4’をもつ遮光板8’を設け、円筒
体1の軸方向と平行なスリット光像10’を当該表面2
に形成し、その反射光のレベル変化をラインセンサ6で
検出するものである。
FIG. 4 is a schematic diagram for explaining an application example of an apparatus configuration for applying the method for inspecting a surface defect of a cylindrical body according to the present invention. 4'is a slit, 5'is a surface defect, 8'is a light-shielding plate, Reference numeral 10 'denotes a slit light image, the same reference numerals as those in FIG. 1 correspond to the same portions, and shows a method for detecting defects other than the defects in the circumferential direction of the cylindrical body described in the above-mentioned embodiment. That is, the surface defect 5 ′ existing in the axial direction of the low-gloss surface of the cylindrical body 1 to be surface-inspected is replaced with the shading plate 8 in FIG. 1, and the shading plate 8 having a uniform slit 4 ′ in the axial direction. 'Is provided and a slit light image 10' parallel to the axial direction of the cylindrical body 1 is provided on the surface 2
The line sensor 6 detects the level change of the reflected light.

【0035】なお、上記実施例においては、スリット光
光源として開口部7をもつ遮光板8を機械的に移動する
ものを例として説明したが、これに限らず例えばスリッ
ト光源の全面に液晶シャッターアレイ等の電気的遮光手
段を設けることにより開口部と遮光部を形成してもよ
い。これにより任意の遮光パターンを形成することがで
き、欠陥の種類に対する開口部、遮光部のパラメータ変
更への対応や、検査時における遮光位置切り換えの時間
を大幅に短縮することが可能となる。
In the above embodiment, the light shielding plate 8 having the opening 7 is mechanically moved as the slit light source, but the invention is not limited to this, and for example, a liquid crystal shutter array is provided on the entire surface of the slit light source. The opening portion and the light shielding portion may be formed by providing an electric light shielding means such as. As a result, an arbitrary light-shielding pattern can be formed, it is possible to cope with the change of the parameters of the opening and the light-shielding portion depending on the type of defect, and to significantly reduce the time for switching the light-shielding position during inspection.

【0036】また、上記説明では、表面欠陥を検出する
被検査対象として複写機やプリンタを構成するヒートロ
ールを例として説明したが、これに限るものでなく、ヒ
ートロールと対にして定着装置として用いられるプレッ
シャーロール、接触式帯電ロール、その他パイプ状基体
やシャフト状基体の表面に樹脂やゴム材料を塗布して製
造されるロール類の円周方向のへこみ欠陥の検出にも有
効である。
Further, in the above description, the heat roll constituting a copying machine or a printer is described as an object to be inspected for detecting a surface defect, but the present invention is not limited to this, and the heat roll is paired with a fixing device as a fixing device. It is also effective for detecting a dent defect in the circumferential direction of pressure rolls, contact charging rolls used, and other rolls manufactured by applying a resin or rubber material to the surface of a pipe-shaped substrate or a shaft-shaped substrate.

【0037】[0037]

【発明の効果】以上説明したように、本発明によれば、
低光沢な表面をもつ円筒体等の軸方向に明部と暗部を交
互にもつスリット光を投光することで、軸方向から照射
される光の方向が一方向に限られる明暗部ができ、明暗
部で円筒体表面上の円周方向のへこみ欠陥が影の部分叉
は明るく散乱する部分となり、この散乱光を検出して当
該欠陥を検出できる。
As described above, according to the present invention,
By projecting slit light having alternating bright and dark parts in the axial direction of a cylinder with a low gloss surface, a bright and dark part in which the direction of light emitted from the axial direction is limited to one direction can be made, In the light and dark part, the circumferential dent defect on the surface of the cylinder becomes a shadow part or a brightly scattered part, and the defect can be detected by detecting this scattered light.

【0038】明部と暗部の繰り返しパターンのスリット
光像により当該円筒体の軸方向表面の複数箇所に明暗部
ができるため、ラインセンサの走査方向を軸方向として
円筒体全面の検査を高速に行うことが可能となる。本発
明は、従来の円筒体軸方向にスリット光を投写するスリ
ット光源装置に遮光板を付設するだけで特に円周方向の
穏やかな「へこみ」や「ふくらみ」欠陥を検出すること
のできる表面欠陥検査方法およびその装置を提供するこ
とができ、自動化装置として構成することが容易であ
る。
Since the bright and dark portions can be formed at a plurality of positions on the axial surface of the cylindrical body by the slit light image of the repeating pattern of the bright and dark portions, the entire surface of the cylindrical body can be inspected at high speed with the scanning direction of the line sensor as the axial direction. It becomes possible. The present invention is a surface defect capable of detecting a particularly gentle "dent" or "bulge" defect in the circumferential direction only by attaching a light shielding plate to a conventional slit light source device that projects slit light in the axial direction of a cylindrical body. It is possible to provide an inspection method and an apparatus therefor, and it is easy to configure it as an automated device.

【図面の簡単な説明】[Brief description of drawings]

【図1】 本発明による円筒体の表面欠陥検査方法を適
用する装置構成の1実施例を説明する模式図である。
FIG. 1 is a schematic diagram illustrating an embodiment of an apparatus configuration to which a method for inspecting a surface defect of a cylindrical body according to the present invention is applied.

【図2】 本発明による円筒体の表面欠陥検査方法を適
用する装置構成の1実施例における動作説明図である。
FIG. 2 is an operation explanatory diagram in one embodiment of an apparatus configuration to which the method for inspecting a surface defect of a cylindrical body according to the present invention is applied.

【図3】 ラインセンサから出力される検査信号の説明
図である。
FIG. 3 is an explanatory diagram of an inspection signal output from a line sensor.

【図4】 本発明による円筒体の表面欠陥検査方法を適
用する装置構成の応用例を説明する模式図である。
FIG. 4 is a schematic diagram for explaining an application example of an apparatus configuration to which the cylindrical body surface defect inspection method according to the present invention is applied.

【図5】 ヒートロール等の低光沢な表面をもつ円筒体
の表面欠陥の説明図である。
FIG. 5 is an explanatory diagram of surface defects of a cylindrical body having a low gloss surface such as a heat roll.

【図6】 従来の感光体ドラム表面の自動検査装置の第
1例の説明図である。
FIG. 6 is an explanatory diagram of a first example of a conventional automatic inspection device for the surface of a photosensitive drum.

【図7】 従来の円筒体表面の自動検査装置の第2例の
説明図である。
FIG. 7 is an explanatory diagram of a second example of a conventional automatic inspection device for the surface of a cylindrical body.

【図8】 従来の円筒体表面の自動検査装置の第3例の
説明図である。
FIG. 8 is an explanatory diagram of a third example of a conventional automatic inspection device for the surface of a cylindrical body.

【図9】 円筒体表面の自動検査装置の第4例の説明図
である。
FIG. 9 is an explanatory diagram of a fourth example of the automatic inspection device for the surface of the cylindrical body.

【図10】 本出願人の他の出願に係る円筒体の表面欠
陥検査装置の概略構成を説明する模式図である。
FIG. 10 is a schematic diagram illustrating a schematic configuration of a surface defect inspection device for a cylindrical body according to another application of the applicant.

【図11】 円周方向に連続する筋状の「へこみ」や擦
り傷の欠陥検出の問題点の説明図である。
FIG. 11 is an explanatory diagram of a problem in detecting defects such as streak-shaped “dents” and abrasions that are continuous in the circumferential direction.

【図12】 円周方向の緩やかなへこみや擦り傷等の表
面欠陥がスリット光の明暗部の位置となった時に生じる
影もしくは散乱部分の説明図である。
FIG. 12 is an explanatory diagram of a shadow or a scattering portion generated when a surface defect such as a gentle dent in the circumferential direction or a scratch is located at the bright and dark portion of the slit light.

【符号の説明】[Explanation of symbols]

1・・・・被検査対象である円筒体、2・・・・円筒体
の低光沢な表面、3・・・・スリット光光源、4・・・
・スリット光、5・・・・表面欠陥、6・・・・ライン
センサ、7・・・・遮光板の開口部、8・・・・遮光
板、9・・・・遮光板移動機構、10・・・・スリット
光像、11・・・・スリット光像の明部、12・・・・
同暗部、13・・・・スリット光像の明部と暗部との間
にある明暗部、14・・・・スリット光水平移動方向、
15・・・・円筒体軸方向、16・・・・遮光部、17
・・・・スリット光の中心線部分、18・・・・円筒体
回転機構。
1 ...- Cylinder body to be inspected, 2 ... Low-gloss surface of the cylinder body, 3 ...- Slit light source, 4 ...
・ Slit light, 5 ・ ・ ・ Surface defects, 6 ・ ・ ・ ・ Line sensor, 7 ・ ・ ・ ・ Aperture of light shield plate, 8 ・ ・ ・ ・ Light shield plate, 9 ・ ・ ・ ・ Light shield plate moving mechanism, 10・ ・ ・ ・ Slit light image, 11 ・ ・ ・ ・ Bright part of slit light image, 12 ・ ・ ・ ・
Same dark part, 13 ... Bright and dark part between the bright part and dark part of the slit light image, 14 ...
15 ... Cylindrical body axial direction, 16 ... Light-shielding portion, 17
・ ・ ・ Center line part of slit light, ・ ・ ・ 18 Cylindrical body rotation mechanism.

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 低光沢な表面をもつ円筒体の前記表面
に、前記円筒体の軸方向に沿って明部と暗部の繰り返し
パターンをもつスリット光像を形成し、前記低光沢な表
面に存在する表面欠陥による前記スリット光像の明部と
暗部との中間にある明暗部領域の反射光レベルの変化に
より前記表面欠陥を検知する方法としたことを特徴とす
る円筒体の表面欠陥検査方法。
1. A slit light image having a repeating pattern of bright portions and dark portions is formed on the surface of a cylindrical body having a low gloss surface along the axial direction of the cylindrical body, and is present on the low gloss surface. A method for inspecting a surface defect of a cylindrical body, wherein the surface defect is detected by a change in a reflected light level in a bright and dark part region located between a bright part and a dark part of the slit light image due to the surface defect.
【請求項2】 低光沢な表面をもつ円筒体の前記表面に
光を照射し、その反射光を受光して表面欠陥を検査する
円筒体の表面欠陥検査装置において、 前記円筒体の低光沢な表面に対して、前記円筒体の軸方
向に沿って明部と暗部の繰り返しパターンのスリット光
像を形成する遮光板をもつスリット光光源と、 前記円筒体の低光沢な表面に形成されたスリット光像を
前記円筒体の軸方向に沿って走査するラインセンサと、 前記スリット光像の明部と暗部の繰り返しパターンを前
記円筒体の軸方向に移動させる遮光板移動機構とを備
え、 前記低光沢な表面に存在する表面欠陥による前記スリッ
ト光像の明部と暗部の中間の明暗部の反射光レベルの変
化により前記円筒体の軸方向に沿って前記表面欠陥を検
知する構成としたことを特徴とする円筒体の表面欠陥検
査装置。
2. A surface defect inspection apparatus for a cylindrical body, which irradiates the surface of a cylindrical body having a low gloss surface with light and receives the reflected light to inspect for surface defects. A slit light source having a light shielding plate that forms a slit light image of a repeating pattern of bright portions and dark portions along the axial direction of the cylinder with respect to the surface, and a slit formed on the low-gloss surface of the cylinder. A line sensor that scans an optical image along the axial direction of the cylindrical body; and a light shielding plate moving mechanism that moves a repeating pattern of bright and dark portions of the slit optical image in the axial direction of the cylindrical body, It is configured to detect the surface defect along the axial direction of the cylindrical body by a change in the reflected light level of the bright and dark portion in the middle of the bright portion and the dark portion of the slit light image due to the surface defect existing on the glossy surface. Characteristic cylinder Surface defect inspection apparatus.
【請求項3】 低光沢な表面をもつ円筒体の前記表面に
光を照射し、その反射光を受光して表面欠陥を検査する
円筒体の表面欠陥検査装置において、 前記円筒体の低光沢な表面に対して、前記円筒体の軸方
向に沿って明部と暗部の繰り返しパターンのスリット光
像を形成する遮光板をもつスリット光光源と、 前記円筒体の低光沢な表面に形成されたスリット光像を
前記円筒体の軸方向に沿って走査するラインセンサと、 前記円筒体をその軸回りに回転させる円筒体回転機構
と、 前記スリット光像の明部と暗部の繰り返しパターンを前
記円筒体の1回転ごとに前記円筒体の軸方向に沿って移
動させる遮光板移動機構とを備え、 前記低光沢な表面に存在する表面欠陥による前記スリッ
ト光像の明部と暗部の中間の明暗部の反射光レベルの変
化により前記円筒体の全面に渡って前記表面欠陥を検知
する構成としたことを特徴とする円筒体の表面欠陥検査
装置。
3. A cylindrical surface defect inspection apparatus for irradiating the surface of a cylindrical body having a low gloss surface with light, and receiving the reflected light to inspect for surface defects. A slit light source having a light shielding plate that forms a slit light image of a repeating pattern of bright portions and dark portions along the axial direction of the cylinder with respect to the surface, and a slit formed on the low-gloss surface of the cylinder. A line sensor that scans an optical image along the axial direction of the cylindrical body, a cylindrical body rotating mechanism that rotates the cylindrical body around its axis, and a repeating pattern of bright and dark portions of the slit optical image that is the cylindrical body. And a light-shielding plate moving mechanism that moves along the axial direction of the cylindrical body for each rotation of the slit light image of the slit light image due to a surface defect existing on the low-gloss surface. For changes in reflected light level Ri surface defect inspection device of the cylinder, characterized in that over the entire surface of the cylindrical body and configured to detect the surface defects.
JP27022792A 1992-10-08 1992-10-08 Method and device for inspecting defect on cylinder surface Pending JPH06118007A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27022792A JPH06118007A (en) 1992-10-08 1992-10-08 Method and device for inspecting defect on cylinder surface

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27022792A JPH06118007A (en) 1992-10-08 1992-10-08 Method and device for inspecting defect on cylinder surface

Publications (1)

Publication Number Publication Date
JPH06118007A true JPH06118007A (en) 1994-04-28

Family

ID=17483322

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27022792A Pending JPH06118007A (en) 1992-10-08 1992-10-08 Method and device for inspecting defect on cylinder surface

Country Status (1)

Country Link
JP (1) JPH06118007A (en)

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JP2007040855A (en) * 2005-08-03 2007-02-15 Showa Denko Kk Surface inspection method and surface inspection device
JP2010014515A (en) * 2008-07-03 2010-01-21 Ricoh Co Ltd Surface defect inspecting device ofrolled-shape test object
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JP2011047681A (en) * 2009-08-25 2011-03-10 Sumitomo Chemical Co Ltd Inspection apparatus of mold for anti-glaring treatment
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Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005208054A (en) * 2003-12-25 2005-08-04 Showa Denko Kk Surface inspection method and device
JP2005257681A (en) * 2004-02-10 2005-09-22 Showa Denko Kk Surface inspection method, and device therefor
JP2007040853A (en) * 2005-08-03 2007-02-15 Showa Denko Kk Surface inspection method and surface inspection device
JP2007040855A (en) * 2005-08-03 2007-02-15 Showa Denko Kk Surface inspection method and surface inspection device
JP2010014515A (en) * 2008-07-03 2010-01-21 Ricoh Co Ltd Surface defect inspecting device ofrolled-shape test object
JP2010237157A (en) * 2009-03-31 2010-10-21 Fujifilm Corp Surface inspection device
JP2011047681A (en) * 2009-08-25 2011-03-10 Sumitomo Chemical Co Ltd Inspection apparatus of mold for anti-glaring treatment
JP2011232192A (en) * 2010-04-28 2011-11-17 Arc Harima Co Ltd Surface texture measurement device and surface texture measurement method
JP2013242398A (en) * 2012-05-18 2013-12-05 Ricoh Co Ltd Fixing method, fixing device, and image forming apparatus
JP2013079986A (en) * 2013-02-05 2013-05-02 Fujifilm Corp Surface inspection device

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