JP2005154157A - Manufacturing method of single-crystal zinc oxide nanosheet - Google Patents
Manufacturing method of single-crystal zinc oxide nanosheet Download PDFInfo
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- JP2005154157A JP2005154157A JP2003390842A JP2003390842A JP2005154157A JP 2005154157 A JP2005154157 A JP 2005154157A JP 2003390842 A JP2003390842 A JP 2003390842A JP 2003390842 A JP2003390842 A JP 2003390842A JP 2005154157 A JP2005154157 A JP 2005154157A
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- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 title claims abstract description 49
- 239000002135 nanosheet Substances 0.000 title claims abstract description 41
- 239000011787 zinc oxide Substances 0.000 title claims abstract description 23
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 9
- 239000013078 crystal Substances 0.000 title abstract description 10
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims abstract description 23
- 239000011701 zinc Substances 0.000 claims abstract description 21
- 229910052725 zinc Inorganic materials 0.000 claims abstract description 21
- 229910052984 zinc sulfide Inorganic materials 0.000 claims abstract description 8
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 7
- 239000005083 Zinc sulfide Substances 0.000 claims abstract description 6
- DRDVZXDWVBGGMH-UHFFFAOYSA-N zinc;sulfide Chemical compound [S-2].[Zn+2] DRDVZXDWVBGGMH-UHFFFAOYSA-N 0.000 claims abstract description 6
- 239000000843 powder Substances 0.000 claims abstract description 5
- 238000010438 heat treatment Methods 0.000 claims description 26
- 229910052757 nitrogen Inorganic materials 0.000 claims 1
- 230000003287 optical effect Effects 0.000 abstract description 6
- 229910001873 dinitrogen Inorganic materials 0.000 abstract description 5
- 239000011941 photocatalyst Substances 0.000 abstract description 5
- 238000002441 X-ray diffraction Methods 0.000 description 8
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 7
- 229920000049 Carbon (fiber) Polymers 0.000 description 6
- 239000004917 carbon fiber Substances 0.000 description 6
- 229910002804 graphite Inorganic materials 0.000 description 6
- 239000010439 graphite Substances 0.000 description 6
- 239000011810 insulating material Substances 0.000 description 6
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 6
- 230000006698 induction Effects 0.000 description 5
- 238000001228 spectrum Methods 0.000 description 5
- 239000000047 product Substances 0.000 description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000001000 micrograph Methods 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 238000005136 cathodoluminescence Methods 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000002073 nanorod Substances 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 239000012159 carrier gas Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- HQWPLXHWEZZGKY-UHFFFAOYSA-N diethylzinc Chemical compound CC[Zn]CC HQWPLXHWEZZGKY-UHFFFAOYSA-N 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000002086 nanomaterial Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000005424 photoluminescence Methods 0.000 description 1
- 238000000103 photoluminescence spectrum Methods 0.000 description 1
- 238000001878 scanning electron micrograph Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000001308 synthesis method Methods 0.000 description 1
- RNWHGQJWIACOKP-UHFFFAOYSA-N zinc;oxygen(2-) Chemical compound [O-2].[Zn+2] RNWHGQJWIACOKP-UHFFFAOYSA-N 0.000 description 1
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Abstract
Description
本発明は、発光ダイオードやダイオードレーザー等の光学デバイス、光触媒、センサー等への応用に際して有用である単結晶の酸化亜鉛ナノシートの製造方法に関する。 The present invention relates to a method for producing single-crystal zinc oxide nanosheets that are useful for application to optical devices such as light-emitting diodes and diode lasers, photocatalysts, and sensors.
II-VI族の化合物半導体である酸化亜鉛は、3.3eVのバンドギャップエネルギーを有し、青色や紫外光領域での光学デバイスへの応用が期待されている。一次元の酸化亜鉛ナノワイヤーやナノロッドは、酸化亜鉛とグラファイト粉末を不活性気体中で加熱する方法（たとえば、非特許文献１参照。）やジエチル亜鉛と酸素を反応させる方法（例えば、非特許文献２）等によって製造されている。
一次元の酸化亜鉛ナノワイヤーやナノロッドに対して、二次元の酸化亜鉛ナノシートは一般的な合成方法が知られていないので、その詳細な物性を評価できない状況にある。このような状況に鑑み、本発明は、二次元の単結晶酸化亜鉛ナノシートの製造方法を提供することを解決すべき課題としている。また、発光ダイオードやダイオードレーザー等の光学デバイス、光触媒、センサー等への応用に際して有用である単結晶の酸化亜鉛ナノシートの製造方法を提供することを解決すべき課題としている。 In contrast to one-dimensional zinc oxide nanowires and nanorods, a two-dimensional zinc oxide nanosheet is in a situation where its detailed physical properties cannot be evaluated because a general synthesis method is not known. In view of such a situation, an object of the present invention is to provide a method for producing a two-dimensional single crystal zinc oxide nanosheet. Another object of the present invention is to provide a method for producing a single-crystal zinc oxide nanosheet that is useful for application to optical devices such as light-emitting diodes and diode lasers, photocatalysts, and sensors.
硫化亜鉛粉末をグラファイト製るつぼに入れ、このるつぼを断熱材の炭素繊維で覆われたグラファイト誘導加熱円筒管を有する縦型高周波誘導加熱炉中の中央部に設置する。加熱炉を減圧にした後、窒素ガスを流しながら、るつぼの内容物を1450〜1600℃に、1〜2時間加熱する。この操作により、銀灰色の亜鉛ナノシートが断熱材である炭素繊維の表面に堆積する。次に、上記で生成した亜鉛ナノシートをアルミナ製のボートに入れ、このボートを抵抗加熱炉の中に設置し、空気中で、330〜390℃に3〜5時間加熱する。この加熱処理により、ボート内に白色の単結晶酸化亜鉛ナノシートが生成する。 Zinc sulfide powder is put into a graphite crucible, and this crucible is placed in the center of a vertical high frequency induction heating furnace having a graphite induction heating cylindrical tube covered with carbon fiber as a heat insulating material. After depressurizing the heating furnace, the contents of the crucible are heated to 1450-1600 ° C. for 1-2 hours while flowing nitrogen gas. By this operation, silver-gray zinc nanosheets are deposited on the surface of carbon fiber which is a heat insulating material. Next, the zinc nanosheet produced | generated above is put into the boat made from an alumina, this boat is installed in a resistance heating furnace, and it heats in air at 330-390 degreeC for 3 to 5 hours. By this heat treatment, white single crystal zinc oxide nanosheets are generated in the boat.
本発明により、二次元の酸化亜鉛ナノシートが製造可能となったので、その物理的性質等の詳細な測定や評価が出来るようになった。また、発光ダイオードやダイオードレーザー等の光学デバイス、光触媒、センサー等への応用に際して有用である単結晶の酸化亜鉛ナノシートの製造方法を提供出来るようになった。 According to the present invention, since a two-dimensional zinc oxide nanosheet can be produced, detailed measurement and evaluation of its physical properties and the like can be performed. In addition, it has become possible to provide a method for producing a single crystal zinc oxide nanosheet that is useful for application to optical devices such as light emitting diodes and diode lasers, photocatalysts, and sensors.
硫化亜鉛粉末をグラファイト製るつぼに入れ、このるつぼを断熱材である炭素繊維で覆われたグラファイト誘導加熱円筒管を有する縦型高周波誘導加熱炉中の中央部に取り付ける。加熱炉を減圧にした後、窒素ガスを流量150〜400sccmで流しながら、るつぼ内を1450〜1600℃に1〜2時間加熱する。加熱終了後、加熱炉を室温に冷却すると、断熱材である炭素繊維の表面に亜鉛ナノシートが堆積する。 Zinc sulfide powder is put into a graphite crucible, and this crucible is attached to the center of a vertical high frequency induction heating furnace having a graphite induction heating cylindrical tube covered with carbon fiber as a heat insulating material. After depressurizing the heating furnace, the inside of the crucible is heated to 1450-1600 ° C. for 1-2 hours while flowing nitrogen gas at a flow rate of 150-400 sccm. When the heating furnace is cooled to room temperature after the heating is completed, zinc nanosheets are deposited on the surface of the carbon fiber which is a heat insulating material.
この際、窒素ガスの流量は上記の範囲が好ましく、400sccmで十分にキャリアガスとしての役割を果たすのでこれ以上流す必要はない。150sccmよりも流量が少ないと亜鉛ナノシートの収量が低下するので好ましくない。加熱温度は1450〜1600℃が好ましく、1600℃よりも高いと亜鉛ナノシート中に亜鉛の粒子が混入する。1450℃よりも低いと亜鉛ナノシート中に硫化亜鉛のナノ構造物が混入する。加熱時間は上記の1〜2時間が好ましく、2時間で十分に反応が完結するのでこれ以上の時間をかける必要はない。1時間よりも短いと亜鉛ナノシートの収量が低下する。 At this time, the flow rate of the nitrogen gas is preferably within the above range, and 400 sccm sufficiently serves as a carrier gas, so it is not necessary to flow any more. If the flow rate is less than 150 sccm, the yield of zinc nanosheets is undesirably reduced. The heating temperature is preferably 1450 to 1600 ° C. When the heating temperature is higher than 1600 ° C, zinc particles are mixed in the zinc nanosheet. When the temperature is lower than 1450 ° C., zinc sulfide nanostructures are mixed in the zinc nanosheet. The heating time is preferably 1 to 2 hours as described above. Since the reaction is sufficiently completed in 2 hours, it is not necessary to spend more time. If it is shorter than 1 hour, the yield of zinc nanosheets decreases.
次に、上記で生成した亜鉛ナノシートをアルミナ製のボートに入れ、このボートを抵抗加熱炉の中に設置する。ボートの内容物を空気中で、330〜390℃に3〜5時間加熱する。この加熱操作を施すことにより、亜鉛ナノシートが酸化を受け、酸化亜鉛ナノシートに変換される。 Next, the zinc nanosheet produced | generated above is put into the boat made from an alumina, and this boat is installed in a resistance heating furnace. The boat contents are heated in air to 330-390 ° C. for 3-5 hours. By performing this heating operation, the zinc nanosheet is oxidized and converted into a zinc oxide nanosheet.
このとき、加熱温度は、330〜390℃の範囲が好ましく、390℃よりも高いとナノシートの形態が破壊される。330℃よりも低いと酸化が不十分となる。加熱時間は3〜5時間が好ましく、5時間で酸化が十分に行われるので、これ以上の時間をかける必要はない。3時間よりも短いと亜鉛ナノシートの酸化が不十分となるので好ましくない。最終生成物を分析することにより、幅が数十〜数百マイクロメートルで、厚さが30〜70ナノメートルの範囲の白色の六方晶系の単結晶酸化亜鉛ナノシートであることが確認できる。 At this time, the heating temperature is preferably in the range of 330 to 390 ° C. When the heating temperature is higher than 390 ° C., the nanosheet form is destroyed. If it is lower than 330 ° C, the oxidation becomes insufficient. The heating time is preferably 3 to 5 hours, and since oxidation is sufficiently performed in 5 hours, it is not necessary to spend more time. If it is shorter than 3 hours, oxidation of the zinc nanosheet becomes insufficient, which is not preferable. By analyzing the final product, it can be confirmed that it is a white hexagonal single crystal zinc oxide nanosheet having a width of several tens to several hundreds of micrometers and a thickness of 30 to 70 nanometers.
次に、実施例を示して、さらに具体的に説明する。
（実施例）シグマアルドリッチ社製の硫化亜鉛粉末（純度99.99%）2.5gをグラファイト製るつぼに入れ、このるつぼを断熱材の炭素繊維で覆われたグラファイト誘導加熱円筒管を有する縦型高周波誘導加熱炉中の中央部に取り付けた。加熱炉を2x10-1Torrの減圧にした後、窒素ガスを流量200sccmで流しながら、るつぼの内容物を1500℃に1.5時間加熱した。加熱炉を室温に冷却すると、断熱材の炭素繊維の表面に銀灰色の生成物が約100mg堆積した。
Next, an example is shown and it demonstrates still more concretely.
(Example) 2.5 g of zinc sulfide powder (purity 99.99%) manufactured by Sigma-Aldrich was put into a graphite crucible, and the crucible was covered with a graphite induction heating cylindrical tube covered with carbon fiber as a heat insulating material. Attached to the center of the furnace. After reducing the pressure of the heating furnace to 2 × 10 −1 Torr, the contents of the crucible were heated to 1500 ° C. for 1.5 hours while flowing nitrogen gas at a flow rate of 200 sccm. When the heating furnace was cooled to room temperature, about 100 mg of a silver gray product was deposited on the surface of the carbon fiber of the heat insulating material.
図１Aに、銀灰色の生成物の走査型電子顕微鏡像の写真を示した。幅が数百マイクロメートルのシート状物質であることが分かった。図１Bの(a)に、このナノシートのX線回折のパターンを示し、図１Bの(b)に、標準の亜鉛粉末のX線回折のパターンを示した。この結果から、格子定数a=2.662Å、c=4.943Åを有するウルツ鉱型の六方晶系の亜鉛であることが確認された。 FIG. 1A shows a scanning electron micrograph of the silver gray product. It was found to be a sheet-like material having a width of several hundred micrometers. FIG. 1B (a) shows an X-ray diffraction pattern of the nanosheet, and FIG. 1B (b) shows an X-ray diffraction pattern of a standard zinc powder. From this result, it was confirmed that it was a wurtzite hexagonal zinc having lattice constants a = 2.662% and c = 4.943%.
次に、上記の操作によって生成した亜鉛ナノシート約100mgをアルミナ製ボートに入れ、このボートを抵抗加熱炉中に設置した。ボートの中の亜鉛ナノシートを空気中で、350℃に4時間加熱した。加熱終了後、抵抗加熱炉を室温に冷却すると、ボートの中に約50mgの白色の物質が生成した。 Next, about 100 mg of the zinc nanosheet generated by the above operation was placed in an alumina boat, and this boat was placed in a resistance heating furnace. The zinc nanosheet in the boat was heated to 350 ° C. for 4 hours in air. After heating, when the resistance heating furnace was cooled to room temperature, about 50 mg of white material was produced in the boat.
図２Aに、白色生成物の走査型電子顕微鏡像の写真を示した。幅が数十〜数百マイクロメートルで、厚さが30〜70ナノメートルのシート状物質であることが確認された。図２Bの(a)に、このナノシートのX線回折のパターンを、図２Bの(b)に標準の酸化亜鉛粉末のX線回折のパターンを示した。格子定数a=3.244Å、c=5.201Åを有するウルツ鉱型六方晶系の単結晶酸化亜鉛であることが分かった。 FIG. 2A shows a scanning electron microscope image of the white product. It was confirmed to be a sheet-like material having a width of several tens to several hundreds of micrometers and a thickness of 30 to 70 nanometers. FIG. 2B (a) shows the X-ray diffraction pattern of the nanosheet, and FIG. 2B (b) shows the X-ray diffraction pattern of the standard zinc oxide powder. It was found to be a wurtzite hexagonal single crystal zinc oxide having lattice constants a = 3.2443.2 and c = 5.201Å.
図３に、白色生成物のX線エネルギー拡散スペクトルを示したが、亜鉛と酸素のピークが現れており、その原子比は1:0.86で、化学量論組成よりもやや酸素が少なかった。なお、この図に現れている銅のピークは試料を取り付ける際に用いた銅グリッドに由来するものである。 FIG. 3 shows an X-ray energy diffusion spectrum of the white product. A peak of zinc and oxygen appears, and the atomic ratio is 1: 0.86, which is slightly less oxygen than the stoichiometric composition. The copper peak appearing in this figure is derived from the copper grid used when attaching the sample.
図４Aに、室温における酸化亜鉛ナノシートのカソードルミネッセンスのスペクトルを示した。520nmと680nmに発光バンドを有することが分かった。図４Bに、室温におけるフォトルミネッセンスのスペクトルを示したが、545nmと635nmに非対称の発光バンドを有することが分かった。 FIG. 4A shows the cathodoluminescence spectrum of the zinc oxide nanosheet at room temperature. It was found to have emission bands at 520 nm and 680 nm. FIG. 4B shows the spectrum of photoluminescence at room temperature, and it was found that it has asymmetric emission bands at 545 nm and 635 nm.
本発明により、得られた単結晶酸化亜鉛ナノシートの発光現象が確認されたので、光学デバイスへの応用が期待されるとともに、光触媒、センサー等への応用も期待される。 Since the light emission phenomenon of the obtained single crystal zinc oxide nanosheet was confirmed by the present invention, application to an optical device is expected, and application to a photocatalyst, a sensor and the like is also expected.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100746743B1 (en) | 2006-01-06 | 2007-08-06 | 삼성전자주식회사 | 2D nano structure fabrication method and the 2D nano structure fabricated thereof |
| US8510776B2 (en) | 2007-07-26 | 2013-08-13 | Sony Corporation | Information providing system, information receiving terminal, information providing apparatus, information providing method and program |
| KR101337481B1 (en) | 2011-10-04 | 2013-12-06 | 동의대학교 산학협력단 | Method of manufacturing nanostructures |
| KR101337482B1 (en) | 2011-10-04 | 2013-12-06 | 동의대학교 산학협력단 | Method of synthesizing a nanostructures |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100746743B1 (en) | 2006-01-06 | 2007-08-06 | 삼성전자주식회사 | 2D nano structure fabrication method and the 2D nano structure fabricated thereof |
| US8510776B2 (en) | 2007-07-26 | 2013-08-13 | Sony Corporation | Information providing system, information receiving terminal, information providing apparatus, information providing method and program |
| KR101337481B1 (en) | 2011-10-04 | 2013-12-06 | 동의대학교 산학협력단 | Method of manufacturing nanostructures |
| KR101337482B1 (en) | 2011-10-04 | 2013-12-06 | 동의대학교 산학협력단 | Method of synthesizing a nanostructures |
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