JP2005152705A - Slit nozzle for cleaning, and cleaning device equipped with it - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a slit nozzle for cleaning which prevents a treatment liquid film from being cut by liquid droplets attached to the slit nozzle; and a cleaning device equipped with the nozzle. <P>SOLUTION: The slit nozzle for cleaning is equipped with an exterior body having a nozzle port 1 for jetting a treatment liquid in a thin film shape. The exterior body comprises a first platy member 2, a second platy member 3, and a spacer 5. The exterior body has a circular groove 16a formed on its upper side and at the end of the side having the nozzle port 1. The circular groove 16a is extended in the longitudinal direction of the nozzle port 1 so as to cover the section where the nozzle port 1 is formed, and at least one side of the circular groove 16a in the longitudinal direction is formed so as to reach the end of the lateral side. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

The present invention relates to a cleaning device for parts of the device. In particular, the present invention relates to a cleaning apparatus that sprays a processing liquid onto a target object in a thin film shape.

In the manufacturing process of a liquid crystal display device or a semiconductor device, in addition to a film forming process and a photo process for forming a circuit pattern on a substrate such as a glass substrate or a semiconductor wafer as a processing object, there is a cleaning process for cleaning the substrate. is there.

As the treatment liquid used in the cleaning process, pure water, chemical liquid, or the like is used. Cleaning devices include a dip method in which chemicals are stored in a cleaning tank and a substrate is immersed in the cleaning tank, and a single wafer method in which a processing solution is sprayed onto each substrate to clean it. In many cases, a single wafer method with high cleaning efficiency is employed.

When cleaning a substrate by the single wafer method, a cleaning slit nozzle is disposed above or below the substrate transport path, and the processing liquid is ejected toward the substrate transported from the cleaning slit nozzle. There is a device for cleaning.

FIG. 9 shows a cleaning slit nozzle based on a conventional technique. The cleaning slit nozzle is a general one for cleaning a substrate such as a semiconductor wafer or a liquid crystal glass substrate as an object to be cleaned with a treatment liquid such as pure water or ozone water. FIG. 9A is a perspective view for explaining a state in which the substrate is cleaned by the cleaning slit nozzle.
b) is a side view.

The substrate 8 as the object to be cleaned is transported to a plurality of transport pulleys 15 formed in a row. The substrate 8 moves in one direction of the arrow 65 on the upper side of the transport pulley 15. The cleaning slit nozzle 50 is disposed so as to eject the processing liquid in the direction opposite to the conveyance direction of the substrate 8.

The cleaning slit nozzle 50 has a nozzle port 1 formed in the exterior body. The exterior body includes a first plate-like member 2, a second plate-like member 3, and a spacer 5 sandwiched between the pair, and each member is fixed with a screw 7. The spacer 5 is formed so as to connect the outer peripheral portions of a pair of plate-like members, and the spacer 5 is not formed on a part of one surface of the cleaning slit nozzle 50, so that the treatment liquid is formed into a film. Nozzle port 1 is formed for spraying. The nozzle port 1 is formed in an elongated rectangle so that the processing liquid can be sprayed in a thin film shape.

In the cleaning slit nozzle 50, concave portions (not shown) are formed on the respective surfaces of the first plate-like member 2 and the second plate-like member 3 facing each other, and a space for supplying the processing liquid is formed. Is formed. A treatment liquid supply port 4 for supplying a treatment liquid is formed on the upper surface of the first plate-like member 2. Two treatment liquid supply ports 4 are formed at positions that are symmetrical with respect to the center of the nozzle port 1 in the longitudinal direction. The processing liquid supply port 4 and the space inside the cleaning slit nozzle communicate with each other. Further, the space inside the cleaning slit nozzle communicates with the nozzle port 1.

A hose (not shown) is connected to the processing liquid supply port 4 via a joint, and the processing liquid is supplied to the cleaning slit nozzle by a processing liquid supply means (not shown) such as a pump. At this time, the processing liquid is supplied under a predetermined pressure. The processing liquid supplied to the cleaning slit nozzle is ejected from the nozzle port 1 through the processing liquid supply port 4 and the internal space. The pressure of the sprayed processing liquid film 30 is adjusted by changing the pressure of the processing liquid supplied to the cleaning slit nozzle. The sprayed processing liquid film 30 can remove contaminants on the main surface of the substrate 8 by colliding with the substrate 8 or by chemical cleaning power of the processing liquid. The length of the nozzle port 1 in the longitudinal direction is such that the processing liquid film can collide with the entire width of the substrate 8.
It is formed to be longer than the width of.

In addition to the above, there is also a cleaning device that ejects the processing liquid downward from the cleaning slit nozzle (see, for example, Patent Document 1).
JP 2000-94325 A (page 3-4, Fig. 1-4)

In order to improve the ability to evenly wash the entire part to be cleaned when a thin processing liquid is sprayed from the cleaning slit nozzle and the object to be cleaned is cleaned, the thickness of the sprayed processing liquid film is set to the nozzle. It is important to make it uniform in the longitudinal direction of the mouth.

FIG. 10 is a schematic cross-sectional view of the cleaning tank 12 when the substrate is being cleaned. The cleaning slit nozzle 50, the substrate 8, and the transport pulley 15 for transporting the substrate 8 are disposed inside the cleaning tank 12. When the treatment liquid film 30 ejected from the cleaning slit nozzle 50 collides with the substrate 8 at the liquid film collision part 40, a part of the treatment liquid film 30 rebounds on the surface of the substrate 8, and the floating droplet 31 is generated. The floating droplet 31 floats inside the cleaning tank 12,
A part adheres to the ceiling part 14 in the tank which is the ceiling of the cleaning tank 12. The droplets adhering to the in-tank ceiling portion 14 overlap with each other to form a liquid reservoir 33, and a falling droplet 32 falling from the liquid reservoir 33 is generated. As shown by the arrow 60, the falling droplet 32 includes one that falls on the upper surface of the cleaning slit nozzle 50, that is, the upper surface of the first plate-like member. Also,
Some floating droplets 31 drift in the air and adhere directly to the main surface of the slit nozzle 50 for cleaning.

FIG. 11 shows a state of an attached droplet that is a droplet attached to the cleaning slit nozzle. The cleaning slit nozzle is disposed so that the cleaning slit nozzle itself is inclined in order to inject the treatment liquid film 30 with an inclination (see FIG. 9). Therefore, the adhering liquid droplet 34 adhering to the upper surface of the first plate-like member 2 of the cleaning slit nozzle is indicated by the arrow 6.
As shown in FIG. 7, the nozzle port 1 may slide down and come into contact with the processing liquid film 30. In this case, the flow of the treatment liquid film 30 is disturbed, and a film break portion 41 that is a portion where the film break occurs is generated. There is a problem that the portion of the substrate corresponding to the portion where the film cut portion 41 is generated is not cleaned, and the entire substrate cannot be cleaned uniformly.

Further, as disclosed in Patent Document 1 as a cleaning slit nozzle, even in an apparatus for causing a treatment liquid film to collide perpendicularly to a substrate, falling droplets or floating droplets from the ceiling in the tank are used for cleaning. It adheres to the surface of the exterior body of the slit nozzle. In some cases, the adhered droplets flow on the surface of the outer package and come into contact with the treatment liquid film, resulting in film breakage.

When the treatment liquid film is cut off, the cleaning performance is deteriorated, which adversely affects the productivity and the yield is deteriorated.

SUMMARY OF THE INVENTION An object of the present invention is to solve the above-described problems, and includes a cleaning slit nozzle that prevents a treatment liquid film from being cut off due to droplets adhering to the cleaning slit nozzle, and the cleaning slit nozzle. An object of the present invention is to provide a cleaning device.

In order to achieve the above object, a cleaning slit nozzle according to the present invention includes an exterior body including a nozzle port for injecting a treatment liquid in a thin film shape, and the exterior body is on the upper surface side of the nozzle port. The groove part formed in the edge part is included. The groove portion extends to include a section where the nozzle port is formed in the longitudinal direction of the nozzle port, and at least one of the groove portion in the longitudinal direction is formed to a lateral end. By adopting this configuration, it is possible to prevent the treatment liquid film from being cut off due to the adhering liquid droplets adhering to the cleaning slit nozzle.

Preferably, in the above invention, the groove portion is formed from the side end to the opposite end. More preferably, the groove is formed such that the depth of the groove increases from the substantially center in the longitudinal direction toward the side end and the opposite end. By adopting this configuration, the attached droplet can be guided to the sides on both sides of the cleaning slit nozzle.

Preferably, in the above invention, the groove has a polygonal cross-sectional shape perpendicular to the longitudinal direction. By adopting this configuration, it is possible to increase the cross-sectional area of the groove, and even if there are many attached droplets, the attached droplets do not overflow from the groove, and the droplets are guided to the side. Can do.

Preferably, in the above invention, the groove portion has an arc shape in cross section perpendicular to the longitudinal direction. By adopting this configuration, the flow of the attached droplet can be made smooth.

In the above invention, preferably, the groove portion has a V-shaped cross section perpendicular to the longitudinal direction. By adopting this configuration, the groove can be easily formed.

In order to achieve the above object, a cleaning slit nozzle according to the present invention includes an exterior body including a nozzle port for injecting a processing liquid in a thin film shape, and an end portion on the upper surface of the exterior body on the side where the nozzle port is located. And a protrusion formed on the surface. The protrusion extends so as to include a section in which the nozzle port is formed in the longitudinal direction of the nozzle port, and at least one of the protrusion in the longitudinal direction is formed to a lateral end. . By adopting this configuration, it is possible to prevent the treatment liquid film from being cut off due to the adhering liquid droplets adhering to the cleaning slit nozzle.

In the present invention, preferably, the protrusion is formed from the side end to the opposite end. More preferably, the protrusion is a length of the protrusion in a direction parallel to the upper surface and perpendicular to the longitudinal direction from a substantially center in the longitudinal direction toward the side end and the opposite end. Is formed to be short. By adopting this configuration, it is possible to guide the adhered droplets to the sides on both sides of the cleaning slit nozzle.

In order to achieve the above object, the cleaning slit nozzle according to the present invention is the same as the exterior body including the nozzle port for injecting the treatment liquid in a thin film shape and the surface of the exterior body on which the nozzle port is formed. And an overhang portion formed on the surface. The overhang is
The nozzle port extends so as to include a section where the nozzle port is formed in the longitudinal direction of the nozzle port, and is formed on both sides of the nozzle port away from the nozzle port.
By adopting this configuration, it is possible to prevent the treatment liquid film from being cut off due to the adhering liquid droplets adhering to the cleaning slit nozzle.

In the present invention, preferably, the overhang portion is formed from one end to the other end of the exterior body in the longitudinal direction. By adopting this configuration, it is possible to more reliably prevent the attached droplet from coming into contact with the treatment liquid film.

In the present invention, preferably, the overhang portion has a triangular prism shape. By adopting this configuration, the overhang portion can be easily formed.

In order to achieve the above object, a cleaning apparatus according to the present invention includes the above-described cleaning slit nozzle. By adopting this configuration, it is possible to provide a cleaning apparatus that prevents the treatment liquid film from being broken due to the adhered droplets attached to the cleaning slit nozzle.

ADVANTAGE OF THE INVENTION According to this invention, the slit nozzle for washing | cleaning which can prevent generation | occurrence | production of film | membrane breakage | shortage by the droplet adhering to the slit nozzle for washing | cleaning, and a washing | cleaning apparatus provided with the same can be provided.

(Embodiment 1)
(Constitution)
With reference to FIGS. 1 to 4, the cleaning slit nozzle according to the first embodiment of the present invention will be described.

FIG. 1 is an explanatory diagram of a first cleaning slit nozzle in the present embodiment.
FIG. 1A is a diagram illustrating a state in which the processing liquid is ejected from the first cleaning slit nozzle.

The first cleaning slit nozzle is disposed above the substrate 8 that is the object to be cleaned. The first cleaning slit nozzle has a nozzle port 1 formed in the exterior body. The exterior body includes a first plate-like member 2, a second plate-like member 3, and a spacer 5 sandwiched between the pair, and each member is fixed with a screw 7. Spacer 5
Is formed so as to connect the outer peripheral portions of these two plate-like members. A spacer 5 is not formed on a part of one surface of the outer package in the outer peripheral portion, and a nozzle port 1 for injecting the processing liquid into a film is formed. The nozzle port 1 is formed to be an elongated rectangle when the nozzle port 1 is viewed from the front. Inside the first cleaning slit nozzle, recesses (not shown) are formed on the surfaces of the first plate member 2 and the second plate member 3 facing each other, and a space for supplying the processing liquid. The part is formed. A treatment liquid supply port 4 for supplying a treatment liquid is formed on the upper surface of the first plate-like member 2. In the present embodiment, the two processing liquid supply ports 4 are formed at positions that are symmetrical with respect to the longitudinal center of the nozzle port 1. The processing liquid supply port 4, the space inside the cleaning slit nozzle, and the nozzle port 1 communicate with each other. The cleaning slit nozzle is arranged so as to eject the processing liquid in the direction opposite to the conveyance direction of the substrate 8 indicated by the arrow 65. A circular groove 16a is formed as a groove at the end of the upper surface of the exterior body of the first cleaning slit nozzle.

FIG. 1B is an enlarged perspective view of the tip of the first cleaning slit nozzle, and FIG.
) Is a side view of the tip of the first cleaning slit nozzle. The circular groove 16a is formed at the end portion on the side where the nozzle port 1 is formed, and is formed so as to contact the end surface where the nozzle port 1 is formed. The circular groove 16a is formed such that the cross section perpendicular to the longitudinal direction of the nozzle port 1 has an arc shape, and the other end on the opposite side from the one end of the first plate-like member 2 in the longitudinal direction. Is formed. Circular groove 16a
Is formed so as to be shallow at the center portion 17 of the substantially circular groove in the longitudinal direction and deep at the lateral ends on both sides. That is, the circular groove 16a is formed so that the depth of the circular groove 16a gradually increases from the substantially center in the longitudinal direction toward one side end and the opposite end.

FIG. 2 is an explanatory diagram of the second cleaning slit nozzle. FIG. 2A is an enlarged perspective view of the distal end portion of the second cleaning slit nozzle, and FIG. 2B is a side view of the distal end portion of the second cleaning slit nozzle. In the second cleaning slit nozzle, a square groove 19 is formed as a groove on the upper surface of the exterior body.

The square groove 19 is formed at an end portion on the side where the nozzle port 1 is formed, and the nozzle port 1
Is formed slightly apart from the end face on which is formed. The square groove 19 is formed from one side end to the other end of the exterior body in the longitudinal direction of the nozzle port 1. The square groove 19 is formed so that the shape in a cross section perpendicular to the longitudinal direction of the nozzle port 1 is a trapezoid. The square groove 19 is one of the two sides of the trapezoid parallel to each other.
It arrange | positions so that a short side may become the side in which the nozzle port 1 is formed. That is, the square groove 19 is formed so that the side where the nozzle opening 1 is formed becomes shallow. Further, the square groove 19 is formed so as to be shallow at the substantially central square groove central portion 20 in the longitudinal direction and deep at both side ends. That is, the nozzle port 1
The rectangular groove 19 is formed so that the depth of the rectangular groove 19 gradually increases from the approximate center in the longitudinal direction toward one side end and the opposite end. Since other configurations are the same as those of the first cleaning slit nozzle, description thereof will not be repeated here.

FIG. 3 shows an explanatory diagram of a third cleaning slit nozzle in the present embodiment.
FIG. 3A is an enlarged perspective view of the tip of the third cleaning slit nozzle, and FIG.
(B) is a side view of the front-end | tip part of the 3rd slit nozzle for washing | cleaning. In the third cleaning slit nozzle, a V-shaped groove 21 is formed as a groove on the upper surface of the exterior body.

The V-shaped groove is formed at the end portion on the side where the nozzle port 1 is formed, and is formed slightly apart from the end surface where the nozzle port 1 is formed. The V-shaped groove 21 is formed from one side end to the opposite end of the exterior body in a direction parallel to the longitudinal direction of the nozzle port 1. The V-shaped groove 21 is formed so that the shape in a cross section perpendicular to the longitudinal direction of the nozzle port 1 is V-shaped. The V-shaped groove 21 is formed so that the bottom of the groove is biased toward the end face where the nozzle port 1 is disposed. That is, the V-shaped groove 21 is formed such that the slope of the inclined surface on the side where the nozzle port 1 is disposed is steeper than the slope of the inclined surface toward the inside of the exterior body. The V-shaped groove 21 is
It is formed so as to be shallow at the substantially central V-shaped groove central portion 22 in the longitudinal direction and deep at both lateral ends. That is, the V-shaped groove 21 is formed so that the depth of the V-shaped groove 21 gradually increases from the approximate center in the longitudinal direction of the nozzle port 1 toward one side end and the opposite end. Since other configurations are the same as those of the first cleaning slit nozzle, description thereof will not be repeated here.

FIG. 4 is an explanatory diagram of a fourth cleaning slit nozzle in the present embodiment.
FIG. 4 is an enlarged perspective view of the tip of the fourth cleaning slit nozzle. In the fourth cleaning slit nozzle, a circular groove is formed as a groove on the upper surface of the exterior body.

The circular groove 16b of the fourth cleaning slit nozzle is formed at the end portion on the side where the nozzle port is formed, and is formed so as to contact the end surface where the nozzle port is formed. The circular groove 16b is formed up to the end of the exterior body on one side in the longitudinal direction of the nozzle opening, but the opposite side is interrupted on the way. That is, the circular groove 1
In 6b, one side in the longitudinal direction is opened to the outside, and the other side on the opposite side is closed. The interrupted position is outside the section 70 where the nozzle port 1 is formed in the longitudinal direction of the nozzle port 1. Further, the circular groove 16b is formed so as to gradually become deeper from the side where the groove is broken toward the side where the groove is open. Since other configurations are the same as those of the first cleaning slit nozzle, description thereof will not be repeated here.

(Action / Effect)
Referring to FIG. 1A, the processing liquid is supplied to the first cleaning slit nozzle in the present embodiment by a processing liquid supply means (not shown) such as a pump.
At this time, the processing liquid is supplied under a predetermined pressure. The processing liquid supplied to the cleaning slit nozzle is ejected from the nozzle port 1 through the processing liquid supply port 4 and the internal space. The pressure of the sprayed processing liquid film 30 is adjusted by changing the pressure of the processing liquid supplied to the cleaning slit nozzle. Substrate 8 to be cleaned
Are transported to a plurality of transport pulleys 15 formed in a row. The substrate 8 moves in one direction of an arrow 65 on the upper side of the transport pulley. Treatment liquid film 3 ejected from nozzle port 1
0 can remove contaminants on the main surface of the substrate 8 by colliding with the substrate 8 moving in the direction opposite to the jetting direction or by the chemical cleaning force of the processing liquid. The length of the nozzle port 1 in the longitudinal direction is formed to be longer than the width of the substrate 8 so that the treatment liquid film 30 collides with the entire width of the substrate 8.

As shown in FIG. 1 (b), during the cleaning of the object to be cleaned, the adhering liquid droplets 34 adhering to the upper surface of the first cleaning slit nozzle, according to the inclination of the upper surface of the first plate-like member 2, It moves toward the nozzle port 1. The adhering droplet 34 flows into the circular groove 16a formed on the upper surface of the first cleaning slit nozzle, and as shown by an arrow 61, on both sides of the first cleaning slit nozzle according to the gradient of the circular groove 16a. It flows toward. Therefore, it is possible to avoid the adhesion droplet 34 from coming into contact with the processing liquid film 30 ejected from the nozzle port 1 of the first cleaning slit nozzle. In this manner, the attached droplets 34 can be removed from the upper surface of the first cleaning slit nozzle without disturbing the flow of the treatment liquid film 30 and causing film breakage.

As shown in FIG. 2A, the same applies to the second cleaning slit nozzle, and the adhered liquid droplets adhering to the upper surface of the second cleaning slit nozzle are inclined to the upper surface of the first plate-like member 2. In response, the nozzle port 1 moves. However, the attached droplet is shown by the arrow 62.
As shown in FIG. 2, the square groove 19 formed on the upper surface of the second cleaning slit nozzle
Flows into the interior. The adhered droplets are discharged to the sides on both sides of the second cleaning slit nozzle according to the gradient of the square groove 19. Therefore, it is possible to prevent the adhered droplet from coming into contact with the treatment liquid film and causing the film to break.

As shown in FIG. 3A, the same applies to the third cleaning slit nozzle. That is, the attached droplets attached to the upper surface of the third cleaning slit nozzle move toward the nozzle port 1 in accordance with the inclination of the upper surface of the first plate-like member 2. However, the adhering liquid droplet flows into the V-shaped groove 21 formed on the upper surface of the third cleaning slit nozzle as indicated by an arrow 63. The attached droplets are discharged to the side of the third cleaning slit nozzle according to the gradient of the V-shaped groove 21. Therefore, it is possible to prevent the adhered droplet from coming into contact with the treatment liquid film and causing the film to break.

As described above, the groove portion is formed at the end portion of the upper surface of the exterior body where the nozzle port is formed up to the side end in the longitudinal direction of the nozzle port, whereby the nozzle port It can be prevented from dropping on the formed end face. Therefore, it is possible to prevent the treatment liquid film from being broken due to the adhered droplets.

In the cleaning slit nozzle, by forming a groove from one side end of the exterior body to the opposite end, it is possible to reliably prevent the adhered droplets from falling on the surface where the nozzle opening is formed. Can do. By forming the groove so that the depth of the groove increases from the approximate center in the longitudinal direction of the nozzle opening toward the side edges on both sides, the flow of the adhering droplets is divided into two, Can lead to the edge.

By making the cross-sectional shape perpendicular to the longitudinal direction of the nozzle opening of the groove portion into an arc shape like the first cleaning slit nozzle, it is possible to prevent droplets from staying inside the groove portion and Can be smooth. By making the above cross-sectional shape into a polygonal shape like the second cleaning slit nozzle, the cross-sectional area of the groove can be increased, and even under conditions where there are many adhered droplets, droplets from the groove Occurrence of film breakage can be prevented without overflowing. Moreover, a groove part can be easily formed by making said cross-sectional shape into a V shape like the 3rd cleaning slit nozzle.

In the present embodiment, a groove portion having a trapezoidal cross-sectional shape is exemplified as the polygonal shape, but the cross-sectional shape of the groove portion may be another shape such as a pentagon. Furthermore, the cross-sectional shape of the groove is not particularly limited, and it is sufficient that the cross-sectional area is large enough to guide the attached droplets to the end in the longitudinal direction of the nozzle port 1.

In the fourth cleaning slit nozzle of FIG. 4, one of the grooves is formed to the side end, but the opposite side is interrupted in the middle. Thus, the groove portion may be interrupted in the middle, and the section 70 in which the nozzle port is formed in the longitudinal direction of the nozzle port.
It is sufficient that the groove portion is formed so as to include one, and one of the grooves is formed up to the end of the exterior body. The fourth cleaning slit nozzle is directed from the one side to the opposite side,
By forming it so as to become gradually shallower, all the adhered droplets flowing into the circular groove 16b can be guided to one side of the fourth cleaning slit nozzle as indicated by an arrow 65. Therefore, it is possible to prevent the adhered liquid droplets from coming into contact with the processing liquid film ejected from the nozzle port, thereby preventing the occurrence of film breakage.

Further, although the bottom of the groove portion in the present embodiment has an inclination in the longitudinal direction of the slit opening, the above-mentioned bottom portion may be horizontal under the condition that the dropped droplet does not overflow. Further, the cleaning slit nozzle in the present embodiment is formed so that the longitudinal direction of the nozzle opening and the width direction of the substrate are parallel to each other, but it does not have to be particularly parallel. Moreover, the groove part should just be formed in the edge part in the side in which the nozzle opening of the exterior body is formed, may be in contact with the end surface in which the nozzle opening is formed, and may be slightly separated.

(Embodiment 2)
(Constitution)
With reference to FIG. 5 and FIG. 6, the slit nozzle for washing in Embodiment 2 based on this invention is demonstrated.

FIG. 5 is an explanatory diagram of a first cleaning slit nozzle in the present embodiment.
(A) is an enlarged perspective view of the slit nozzle for cleaning, and (b) is a side view of the tip.

The first cleaning slit nozzle in the present embodiment includes a protrusion formed on the exterior body in place of the groove in the first embodiment, and the inclined protrusion 23 is formed as the protrusion.
a is formed. The inclined convex portion 23a is formed so that the end surface of the protrusion and the end surface where the nozzle port is formed are on the same plane. The inclined convex portion 23 a is formed from one side end of the cleaning slit nozzle to the opposite end in the longitudinal direction of the nozzle port 1. The inclined convex portion 23a extends in a direction parallel to the upper surface of the cleaning slit nozzle and perpendicular to the longitudinal direction from the inclined convex portion central portion 24, which is substantially the center in the longitudinal direction, toward the lateral ends on both sides. The length is formed to be short.
In other words, when the inclined convex portion 23a is viewed from above, the central portion 24 of the inclined convex portion is formed so as to have the largest width, and is formed so that the width becomes shorter toward the ends on both sides. The upper surface of the inclined convex portion 23a is inclined so as to gradually increase as it approaches the end surface where the nozzle port 1 is formed from the inside of the exterior body.

FIG. 6 is an enlarged perspective view of the tip of the second cleaning slit nozzle in the present embodiment.

The second cleaning slit nozzle in the present embodiment includes a protruding portion on the exterior body instead of the groove portion in the first embodiment, and includes an inclined convex portion 23b as the protruding portion. The inclined convex portion 23b of the second cleaning slit nozzle is formed up to the end of the exterior body on one side in the longitudinal direction of the nozzle port 1, but the opposite side is interrupted on the way. The inclined convex part 23b is formed so as to include a section 70 in which the nozzle opening is formed in the longitudinal direction. The length of the inclined convex portion 23b in the direction parallel to the upper surface of the cleaning slit nozzle and perpendicular to the longitudinal direction of the nozzle port 1 is 0 at the one end and becomes longer as it goes toward the opposite side. It is formed as follows. That is, when the inclined convex portion 23b is viewed from above, it is formed in a triangle whose bottom is the interrupted side. The upper surface of the inclined convex part 23b is inclined so as to become higher from the inner side of the exterior body toward the end surface where the nozzle port 1 is formed.

Since other configurations are the same as those of the first cleaning slit nozzle in the first embodiment, description thereof will not be repeated here.

(Action / Effect)
As shown in FIG. 5, in the first cleaning slit nozzle, the adhering liquid droplets dropped on the upper surface of the first cleaning slit nozzle form a nozzle opening according to the gradient of the upper surface of the first cleaning slit nozzle. Move towards the end face. However, the adhering liquid droplet collides with the inclined convex portion 23a which is a protrusion, and moves in a direction changed to the side of the first cleaning slit nozzle as indicated by an arrow 64. Thereafter, the adhered droplets are removed to the side of the first cleaning slit nozzle along the shape of the inclined convex portion 23a. The attached droplets adhering to the upper surface of the inclined convex portion 23a also flow in the direction opposite to the end surface where the nozzle port 1 is formed according to the gradient of the upper surface of the inclined convex portion 23a, and then the first cleaning slit. Eliminated on the side of the nozzle. In this way, it is possible to prevent the adhered droplet from reaching the end surface where the nozzle opening is formed and coming into contact with the treatment liquid film, thereby preventing the occurrence of film breakage.

By forming the protruding portion from one side end of the exterior body in the longitudinal direction of the nozzle port 1 to the opposite end, it is possible to reliably prevent the adhered liquid droplets from falling on the end surface where the nozzle port is located. In addition, it is attached by being formed so that the length parallel to the upper surface and perpendicular to the longitudinal direction is shortened from the substantially center in the longitudinal direction toward one side end and the opposite end. The droplet flow can be divided into two to guide the adhered droplets to the sides on both sides of the cleaning slit nozzle.

The first cleaning slit nozzle in FIG. 5 has an inclined convex portion formed from one side end of the exterior body to the other end in the longitudinal direction of the nozzle opening. However, like the second cleaning slit nozzle shown in FIG. 6, the above-described longitudinal direction of the protrusion extends so as to include the section 70 in which the nozzle opening is formed, and one side is the side of the exterior body. It suffices if it is formed up to the end. By adopting this configuration, the arrow 68 is also used.
As shown in FIG. 5, it is possible to avoid the adhered droplets reaching the end face with the nozzle opening and coming into contact with the treatment liquid film, and the occurrence of film breakage can be prevented.

In the present embodiment, the inclined convex portion whose surface is a flat surface is formed, but when the inclined convex portion is viewed from above, the boundary between the inclined convex portion through which the attached droplet flows and the upper surface of the exterior body is a straight line. Alternatively, the shape may include a curved surface that draws an arc. Moreover, although the inclined convex part was formed as a projection part, it is not necessarily restricted to this shape, What is necessary is just a part which has the shape which protruded. For example, a flat plate-like wall may be formed on the upper surface of the cleaning slit nozzle so as to extend the end surface where the nozzle port is formed.

Since other operations and effects are the same as those of the first cleaning slit nozzle in the first embodiment, description thereof will not be repeated here.

(Embodiment 3)
(Constitution)
With reference to FIG. 7, the cleaning slit nozzle according to the third embodiment of the present invention will be described. FIG. 7A is an enlarged perspective view of the front end portion of the cleaning slit nozzle in the present embodiment, and FIG. 7B is a side view illustrating the use state of the cleaning slit nozzle in the present embodiment. is there. The cleaning slit nozzle in the present embodiment is used with its nozzle port facing substantially downward in the vertical direction.

In the cleaning slit nozzle in the present embodiment, an overhang portion 25 is formed instead of the groove portion in the first embodiment. The overhang portion 25 is formed so as to include a section where the nozzle port 1 in the longitudinal direction of the nozzle port 1 is formed on the same surface as the surface of the exterior body where the nozzle port 1 is formed. In the present embodiment, the overhang portion 25 is formed from one end of the exterior body to the other end in the longitudinal direction. The overhanging portion 25 is formed on both sides of the nozzle port 1 and has a triangular prism shape.

Since other configurations are the same as those of the first cleaning slit nozzle in the first embodiment, description thereof will not be repeated here.

(Action / Effect)
As shown in FIG. 7B, the cleaning slit nozzle according to the present embodiment is used with the nozzle port facing substantially vertically downward. The treatment liquid film sprayed from the nozzle port collides with the substrate 8 at the collision unit 40. An angle θ formed by the surfaces of the substrate 8 and the processing liquid film is approximately 90 °. Also in this cleaning slit nozzle, floating droplets and falling droplets adhere to the surface of the exterior body during the cleaning of the object to be cleaned. The adhering liquid droplets adhering to the cleaning slit nozzle, as shown by an arrow 66, along the exterior body of the cleaning slit nozzle,
Fall vertically downward. At this time, since the overhanging portion 25 is formed on the same surface as the surface on which the nozzle port 1 is formed, it is possible to prevent the adhered droplets from dropping along the overhanging portion 25 and coming into contact with the processing liquid film. it can. As a result, it is possible to prevent the treatment liquid film from being cut.

The overhang portion can be added later to the finished product of the cleaning slit nozzle by a method such as adhesion or welding. That is, the overhanging portion can be added to the cleaning slit nozzle based on the conventional technology that has already been used. By forming this overhang from one end surface in the longitudinal direction of the nozzle opening to the other end surface,
It is possible to reliably prevent the attached droplets from coming into contact with the treatment liquid film.

Further, by making the liquid in the overhanging portion into a triangular prism, the overhanging portion can be easily formed, and as shown by an arrow 66 in FIG. You can avoid doing that.

In the present embodiment, the projecting portion having a triangular prism shape is formed. However, the present invention is not particularly limited to this configuration, and a portion projecting from the surface on which the nozzle opening is formed may be formed. For example, not a three-dimensional shape like a convex part,
A plate-like planar overhang portion may be formed.

Since other operations and effects are the same as those of the first cleaning slit nozzle in the first embodiment, description thereof will not be repeated here.

(Embodiment 4)
With reference to FIG. 8, the cleaning apparatus in Embodiment 4 based on this invention is demonstrated. The above-described cleaning slit nozzle according to the present invention is arranged in a cleaning device.
FIG. 8 shows a cleaning device in which the first cleaning slit nozzle in the first embodiment is arranged among the above-described cleaning slit nozzles.

Main equipment such as the slit nozzle 50 for cleaning is arranged inside the cleaning tank 12. Inside the cleaning tank 12, a plurality of transport pulleys 15 are arranged in a row for transporting an object to be cleaned. The object to be cleaned here is the substrate 8. The transport pulley 15 is
It is connected to a rotating means (not shown), and the substrate 8 is placed on the transport pulley 15 and conveyed in the direction of the arrow 65. The cleaning slit nozzle 50 is disposed away from the conveyance path of the substrate 8. The cleaning slit nozzle 50 is arranged with an inclination, and is arranged so that the processing liquid can be sprayed in a direction opposite to the conveying direction of the object to be cleaned. A processing liquid supply pipe 9 is connected to the processing liquid supply port 4 on the upper surface of the cleaning slit nozzle 50 via a joint 10.

The processing liquid is supplied by an external processing liquid supply means such as a water supply pump (not shown). The processing liquid is supplied from the processing liquid supply port 4 to the cleaning slit nozzle 50 through the processing liquid supply pipe 9 and the joint 10. The treatment liquid becomes a film and is ejected from the nozzle opening of the cleaning slit nozzle 50. The sprayed processing liquid collides with the substrate 8 and the surface of the substrate 8 is cleaned. The substrate 8 is transported in the direction of arrow 65 even during the collision of the processing liquid, and the entire surface of the substrate 8 is cleaned. The processing liquid that has been cleaned by colliding with the substrate 8 is discharged from a drain pipe 13 connected to the bottom of the cleaning tank 12.

As described above, by using the cleaning slit nozzle of the present invention in a cleaning apparatus, it is possible to provide a cleaning apparatus capable of performing uniform cleaning without causing film breakage in the treatment liquid film. In addition, it is possible to provide a cleaning device that can reduce defective products that are insufficiently cleaned and improve the product yield.

In the above description, the plate-shaped substrate is used as the object to be cleaned. However, the present invention is not limited to the plate-shaped object to be cleaned, and the cleaning slit nozzle and the cleaning device for the three-dimensional object to be cleaned are also described. Can be applied. Further, the present invention is not limited to the manufacturing process of a semiconductor device or a liquid crystal device, and can be used for a cleaning process of any device.

In addition, the said embodiment disclosed this time is an illustration in all the points, Comprising: It is not restrictive. The scope of the present invention is defined by the terms of the claims, rather than the description above, and includes all modifications within the scope and meaning equivalent to the terms of the claims.

(A), (b) and (c) is explanatory drawing of the 1st slit nozzle for washing | cleaning in Embodiment 1 based on this invention. (A) And (b) is explanatory drawing of the 2nd slit nozzle for washing | cleaning in Embodiment 1 based on this invention. (A) And (b) is explanatory drawing of the 3rd slit nozzle for washing | cleaning in Embodiment 1 based on this invention. It is explanatory drawing of the 4th slit nozzle for washing | cleaning in Embodiment 1 based on this invention. (A) And (b) is explanatory drawing of the 1st slit nozzle for washing | cleaning in Embodiment 2 based on this invention. It is explanatory drawing of the 2nd slit nozzle for washing | cleaning in Embodiment 2 based on this invention. (A) And (b) is explanatory drawing of the slit nozzle for washing | cleaning in Embodiment 3 based on this invention. It is a schematic sectional drawing of the washing | cleaning apparatus in Embodiment 4 based on this invention. (A) And (b) is explanatory drawing which shows a mode that it wash | cleans with the slit nozzle for washing | cleaning based on the prior art. It is a schematic sectional drawing explaining the washing | cleaning apparatus based on a prior art. It is a perspective view explaining the malfunction of the slit nozzle for washing based on the conventional technology.

Explanation of symbols

1 Nozzle port, 2 First plate member, 3 Second plate member, 4 Treatment liquid supply port, 5
Spacer, 7 Screw, 8 Substrate, 9 Treatment liquid supply pipe, 10 Joint, 12
Washing tank, 13 drainage pipe, 14 ceiling in tank, 15 transport pulley, 16a, 16b
Circular groove, 17 Circular groove central part, 19 Square groove, 20 Rectangular groove central part, 21 V
G-shaped groove, 22 V-shaped groove central part, 23a, 23b Inclined convex part, 24 Inclined convex part central part, 25 Overhang part, 30 Treatment liquid film, 31 Floating liquid drop, 32 Falling liquid drop, 3
3 Liquid reservoir, 34 Adhering droplet, 40 Liquid film collision part, 41 Film cut part, 50 Cleaning slit nozzle, 60, 61, 62, 63, 64, 65, 66, 67, 68
Arrow, 70 intervals, θ angle.

Claims (13)

An exterior body including a nozzle port for injecting a treatment liquid into a thin film is provided,
The exterior body includes a groove portion formed at an end portion of the upper surface on the side where the nozzle port is located,
The groove extends so as to include a section in which the nozzle port is formed in the longitudinal direction of the nozzle port, and at least one of the groove in the longitudinal direction is formed to a lateral end. Slit nozzle. The cleaning slit nozzle according to claim 1, wherein the groove is formed from the side end to the opposite end. 3. The cleaning slit nozzle according to claim 2, wherein the groove is formed so that a depth of the groove increases from a substantially center in the longitudinal direction toward the side end and the opposite end. . The cleaning slit nozzle according to claim 1, wherein the groove has a polygonal cross-sectional shape perpendicular to the longitudinal direction. The cleaning slit nozzle according to claim 1, wherein the groove portion has a circular arc shape in cross-section perpendicular to the longitudinal direction. The cleaning slit nozzle according to claim 1, wherein the groove portion has a V-shaped cross-section perpendicular to the longitudinal direction. An exterior body including a nozzle port for injecting the treatment liquid into a thin film; and
A protrusion formed on an end portion of the outer body on the side having the nozzle opening,
The protrusion extends so as to include a section where the nozzle opening is formed in the longitudinal direction of the nozzle opening, and at least one of the protrusions in the longitudinal direction is formed to a lateral end. , Slit nozzle for cleaning. The cleaning slit nozzle according to claim 7, wherein the protrusion is formed from the side end to the opposite end. The protrusion is configured such that the length of the protrusion in a direction parallel to the upper surface and perpendicular to the longitudinal direction decreases from the approximate center in the longitudinal direction toward the lateral end and the opposite end. The slit nozzle for washing according to claim 8 formed in. An exterior body including a nozzle port for injecting the treatment liquid into a thin film; and
A projecting portion formed on the same surface as the surface on which the nozzle port of the exterior body is formed,
The overhang portion extends so as to include a section in which the nozzle port is formed in the longitudinal direction of the nozzle port, and is formed on both sides of the nozzle port away from the nozzle port. . The cleaning nozzle according to claim 10, wherein the protruding portion is formed from one end to the other end of the exterior body in the longitudinal direction. The cleaning slit nozzle according to claim 10, wherein the protruding portion has a triangular prism shape. A cleaning apparatus comprising the cleaning slit nozzle according to claim 1, 7 or 10.

Images