JP2005116788A - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
- Publication number
- JP2005116788A JP2005116788A JP2003349377A JP2003349377A JP2005116788A JP 2005116788 A JP2005116788 A JP 2005116788A JP 2003349377 A JP2003349377 A JP 2003349377A JP 2003349377 A JP2003349377 A JP 2003349377A JP 2005116788 A JP2005116788 A JP 2005116788A
- Authority
- JP
- Japan
- Prior art keywords
- interlayer insulating
- insulating film
- film
- semiconductor device
- bonding pad
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/02—Bonding areas ; Manufacturing methods related thereto
- H01L24/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L24/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/02—Bonding areas ; Manufacturing methods related thereto
- H01L24/03—Manufacturing methods
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/0212—Auxiliary members for bonding areas, e.g. spacers
- H01L2224/02122—Auxiliary members for bonding areas, e.g. spacers being formed on the semiconductor or solid-state body
- H01L2224/02163—Auxiliary members for bonding areas, e.g. spacers being formed on the semiconductor or solid-state body on the bonding area
- H01L2224/02165—Reinforcing structures
- H01L2224/02166—Collar structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/05001—Internal layers
- H01L2224/05075—Plural internal layers
- H01L2224/0508—Plural internal layers being stacked
- H01L2224/05085—Plural internal layers being stacked with additional elements, e.g. vias arrays, interposed between the stacked layers
- H01L2224/05089—Disposition of the additional element
- H01L2224/05093—Disposition of the additional element of a plurality of vias
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/05001—Internal layers
- H01L2224/05075—Plural internal layers
- H01L2224/0508—Plural internal layers being stacked
- H01L2224/05085—Plural internal layers being stacked with additional elements, e.g. vias arrays, interposed between the stacked layers
- H01L2224/05089—Disposition of the additional element
- H01L2224/05093—Disposition of the additional element of a plurality of vias
- H01L2224/05096—Uniform arrangement, i.e. array
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01004—Beryllium [Be]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01005—Boron [B]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01006—Carbon [C]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01013—Aluminum [Al]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01014—Silicon [Si]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01015—Phosphorus [P]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01019—Potassium [K]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01022—Titanium [Ti]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01029—Copper [Cu]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01033—Arsenic [As]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/0105—Tin [Sn]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01073—Tantalum [Ta]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01074—Tungsten [W]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01078—Platinum [Pt]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/049—Nitrides composed of metals from groups of the periodic table
- H01L2924/0495—5th Group
- H01L2924/04953—TaN
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Wire Bonding (AREA)
Abstract
【解決手段】 シリコン基板1上に第1ないし第5の層間絶縁膜2、3、4、5、6が積層され、層間絶縁膜2、3、4、5、6の最上層の第5の層間絶縁膜6上にボンディングパッド7が形成された半導体装置において、ボンディングパッド7の下の領域と、その外側とで層間絶縁膜2、3、4、5、6間の接合面を分断し、さらに、ボンディングパッド7の下の領域内の層間絶縁膜2、3、4、5、6間の接合面を分割するように層間絶縁膜2、3、4、5、6を貫通する格子形状の第1ないし第4のビア32、42、52、62を設け、ビア32、42、52、62でボンディングパッド7を支持した。
【選択図】 図1
Description
上記ボンディングパッドの下の領域と、その外側とで上記層間絶縁膜間の接合面を分断するように上記層間絶縁膜を貫通するビアを設け、上記ビアで上記ボンディングパッドを支持したものである。
上記ボンディングパッドの下の領域と、その外側とで上記層間絶縁膜間の接合面を分断するように上記層間絶縁膜を貫通するビアを設け、上記ビアで上記ボンディングパッドを支持したものであるので、層間絶縁膜間のストレスを緩和することができるとともに、層間絶縁膜の機械的強度を補償することができる。
図1は、本発明に係る半導体装置の実施の形態1を示す平面図(a)及びA−A断面図(b)である。同図に示したように、半導体基板であるシリコン基板1の上に、第1の層間絶縁膜2が形成されている。第1の層間膜2は、例えば、約500nm厚さのUSG膜である。
まず、シリコン基板1にSTI(Shallow Trench Isolation)法で、例えば、300nmのトレンチ分離を形成し(図示せず)、次に、第1の層間絶縁膜2を、例えば、HPD酸化膜を800nm堆積した後CMP法で300nm研磨して形成する(図2(a))。
次に、図に示していない配線層領域において、第1の層間絶縁膜2に、下部の素子領域に至る、例えば、直径0.10μmのコンタクトホールを開口し、CVD(Chemical Vapor Deposition)法で、バリアメタル、例えば、厚さ20nmのTiN/厚さ20nmのTiと、厚さ200nmのタングステン(W)とを堆積し、CMP(Chemical Mechanical Polishing)で研磨して、素子と電気的に接続されたWプラグを形成する。Wプラグに接続された第1の配線層を形成する。
次に、例えば、300nm厚さのp−TEOS膜を堆積し、レジストパターンを形成し、このレジストパターンをマスクとしてp−TEOS膜に第1配線のパターンを形成する。
次に、バリアメタル、例えば、厚さ10nmのTa/厚さ10nmのTaNを堆積し、スパッタ法でCuシードを100nm堆積した後、さらに、Cuをメッキ法で1000nm堆積し、CMP法でp−TEOS膜上のCu及びバリアメタルを研磨して除去する。
次に、例えば、CVD法で厚さ50nmのp−SiCを堆積して、ストッパー膜21を形成し、次に、厚さ600nmのp−SiOCを堆積し、CMP法で100nm研磨して第2の層間膜3を形成し、さらに、ボンディングパッド領域において、レジストパターン33を形成し、レジストパターン33をマスクとしてエッチングを行い、第2の層間膜3に互いに交差する並列のスリット34を形成する(図2(a))。スリット34は、幅1μmで5μmピッチとする。形成するスリット34は、格子状の形状にする。
次に、図に示していない配線層領域において、第2の層間絶縁膜3に、第1の配線層に接続されたWプラグ及び第2配線層を形成した後、バリアメタル、例えば、Ta/TaNをそれぞれ10nm/10nm堆積し、スパッタ法でCuシードを100nm堆積した後、さらに、Cuをメッキ法で1000nm堆積し、CMP法でp−TEOS膜上のCu及びバリアメタルを除去して、第1のビア32を形成する(図2(b))。
図4は、本発明に係る半導体装置の実施の形態2を示す平面図(a)及びB−B断面図(b)である。同図に示したように、シリコン基板1の上に、第1の層間膜2が形成されている。第1の層間膜2は、例えば、約500nm厚さのUSG膜である。
図8は、本発明に係る半導体装置の実施の形態3を示す平面図(a)及びC−C断面図(b)である。同図に示したように、シリコン基板1の上に、第1の層間膜2が形成されている。第1の層間膜2は、例えば、約500nm厚さのUSG膜である。
4 第2の層間絶縁膜、5 第3の層間絶縁膜、6 第4の層間絶縁膜、
7 ボンディングパッド、21,31,41,51 ストッパー膜、
32 第1のビア、33 レジストパターン、34、44、64 スリット、
35、65 ホール、42 第2のビア、52 第3のビア、62 第4のビア、
63 第1のパッシベーション膜、71 第2のパッシベーション膜、72 開口部。
Claims (9)
- 半導体基板上に複数層の層間絶縁膜が積層され、上記層間絶縁膜の最上層の層間絶縁膜上にボンディングパッドが形成された半導体装置において、
上記ボンディングパッドの下の領域と、その外側とで上記層間絶縁膜間の接合面を分断するように上記層間絶縁膜を貫通するビアを設け、上記ビアで上記ボンディングパッドを支持したことを特徴とする半導体装置。 - 上記ビアが、上記ボンディングパッドの下の領域内における上記層間絶縁膜間の接合面を複数に分割していることを特徴とする請求項1記載の半導体装置。
- 上記ビアが、格子状に形成されていることを特徴とする請求項1記載の半導体装置。
- 上記ビアが、上記層間絶縁膜の接合面に底面を有する升形状であることを特徴とする請求項1記載の半導体装置。
- 上記ビアが、上下に隣り合う層間絶縁膜に設けられ、上下に積み重ねられていることを特徴とする請求項1ないし4のいずれかに記載の半導体装置。
- 上記ビアが、スリット状に形成されていることを特徴とする請求項1記載の半導体装置。
- 上記スリット状のビアが、上下に隣り合う層間絶縁膜に設けられ、上下の上記ビアのスリット形状が互いに交差していることを特徴とする請求項6記載の半導体装置。
- 互いに交差している上記スリット状のビアが、さらに上下に積み重ねられていることを特徴とする請求項7記載の半導体装置。
- 上記層間絶縁膜の少なくとも一部に、誘電率が3より小さい低誘電体膜を含むことを特徴とする請求項1ないし8のいずれかに記載の半導体装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003349377A JP2005116788A (ja) | 2003-10-08 | 2003-10-08 | 半導体装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003349377A JP2005116788A (ja) | 2003-10-08 | 2003-10-08 | 半導体装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005116788A true JP2005116788A (ja) | 2005-04-28 |
JP2005116788A5 JP2005116788A5 (ja) | 2006-11-24 |
Family
ID=34541260
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003349377A Pending JP2005116788A (ja) | 2003-10-08 | 2003-10-08 | 半導体装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2005116788A (ja) |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005327763A (ja) * | 2004-05-12 | 2005-11-24 | Nec Electronics Corp | 半導体装置 |
JP2007019128A (ja) * | 2005-07-06 | 2007-01-25 | Sony Corp | 半導体装置 |
WO2007116463A1 (ja) * | 2006-03-31 | 2007-10-18 | Fujitsu Limited | 半導体装置 |
JP2007324332A (ja) * | 2006-05-31 | 2007-12-13 | Nec Electronics Corp | 半導体装置及びその製造方法 |
JP2012134543A (ja) * | 2012-03-08 | 2012-07-12 | Fujitsu Ltd | 半導体装置 |
KR101184375B1 (ko) | 2010-05-10 | 2012-09-20 | 매그나칩 반도체 유한회사 | 패드 영역의 크랙 발생을 방지하는 반도체 장치 및 그 제조 방법 |
US8450796B2 (en) | 2009-04-28 | 2013-05-28 | Mitsubishi Electric Corporation | Power semiconductor device |
US8742584B2 (en) | 2009-11-18 | 2014-06-03 | Panasonic Corporation | Semiconductor device |
US11876043B2 (en) | 2019-09-16 | 2024-01-16 | Samsung Electronics Co., Ltd. | Semiconductor devices having vias on a scribe lane region |
-
2003
- 2003-10-08 JP JP2003349377A patent/JP2005116788A/ja active Pending
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005327763A (ja) * | 2004-05-12 | 2005-11-24 | Nec Electronics Corp | 半導体装置 |
JP2007019128A (ja) * | 2005-07-06 | 2007-01-25 | Sony Corp | 半導体装置 |
WO2007116463A1 (ja) * | 2006-03-31 | 2007-10-18 | Fujitsu Limited | 半導体装置 |
JP5280840B2 (ja) * | 2006-03-31 | 2013-09-04 | 富士通株式会社 | 半導体装置 |
JP2007324332A (ja) * | 2006-05-31 | 2007-12-13 | Nec Electronics Corp | 半導体装置及びその製造方法 |
US8450796B2 (en) | 2009-04-28 | 2013-05-28 | Mitsubishi Electric Corporation | Power semiconductor device |
US8742584B2 (en) | 2009-11-18 | 2014-06-03 | Panasonic Corporation | Semiconductor device |
KR101184375B1 (ko) | 2010-05-10 | 2012-09-20 | 매그나칩 반도체 유한회사 | 패드 영역의 크랙 발생을 방지하는 반도체 장치 및 그 제조 방법 |
JP2012134543A (ja) * | 2012-03-08 | 2012-07-12 | Fujitsu Ltd | 半導体装置 |
US11876043B2 (en) | 2019-09-16 | 2024-01-16 | Samsung Electronics Co., Ltd. | Semiconductor devices having vias on a scribe lane region |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US10483125B2 (en) | Semiconductor device and method for manufacturing same | |
US11056450B2 (en) | Semiconductor device | |
JP4250006B2 (ja) | 半導体装置及びその製造方法 | |
US8456008B2 (en) | Structure and process for the formation of TSVs | |
JP4946436B2 (ja) | 半導体装置及びその製造方法 | |
JP4646993B2 (ja) | 半導体装置 | |
JP4280204B2 (ja) | 半導体装置 | |
JP2011146563A (ja) | 半導体装置 | |
TWI660468B (zh) | 封裝結構及其製造方法 | |
JP2005116788A (ja) | 半導体装置 | |
CN100388476C (zh) | 具有带加固图形的多层布线布置的半导体器件及生产方法 | |
JP5078823B2 (ja) | 半導体装置 | |
JP2006228977A (ja) | 半導体装置及び半導体装置の製造方法 | |
JP2006114724A (ja) | 半導体装置及びその製造方法 | |
JP5932079B2 (ja) | 半導体装置 | |
JP2008124070A (ja) | 半導体装置 | |
JP5801329B2 (ja) | 半導体装置 | |
JP5214571B2 (ja) | 半導体装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
RD01 | Notification of change of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7421 Effective date: 20060123 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20061005 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20061005 |
|
RD01 | Notification of change of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7421 Effective date: 20071101 |
|
RD01 | Notification of change of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7421 Effective date: 20071101 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20090225 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20090303 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20090804 |