JP2005109376A5 - - Google Patents

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Publication number
JP2005109376A5
JP2005109376A5 JP2003344013A JP2003344013A JP2005109376A5 JP 2005109376 A5 JP2005109376 A5 JP 2005109376A5 JP 2003344013 A JP2003344013 A JP 2003344013A JP 2003344013 A JP2003344013 A JP 2003344013A JP 2005109376 A5 JP2005109376 A5 JP 2005109376A5
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JP
Japan
Prior art keywords
transparent substrate
substrate
alignment
notch
rotating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2003344013A
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English (en)
Japanese (ja)
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JP2005109376A (ja
JP4343640B2 (ja
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Publication date
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Priority to JP2003344013A priority Critical patent/JP4343640B2/ja
Priority claimed from JP2003344013A external-priority patent/JP4343640B2/ja
Publication of JP2005109376A publication Critical patent/JP2005109376A/ja
Publication of JP2005109376A5 publication Critical patent/JP2005109376A5/ja
Application granted granted Critical
Publication of JP4343640B2 publication Critical patent/JP4343640B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2003344013A 2003-10-02 2003-10-02 透明基板の位置合わせ方法 Expired - Fee Related JP4343640B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003344013A JP4343640B2 (ja) 2003-10-02 2003-10-02 透明基板の位置合わせ方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003344013A JP4343640B2 (ja) 2003-10-02 2003-10-02 透明基板の位置合わせ方法

Publications (3)

Publication Number Publication Date
JP2005109376A JP2005109376A (ja) 2005-04-21
JP2005109376A5 true JP2005109376A5 (enExample) 2006-11-16
JP4343640B2 JP4343640B2 (ja) 2009-10-14

Family

ID=34537774

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003344013A Expired - Fee Related JP4343640B2 (ja) 2003-10-02 2003-10-02 透明基板の位置合わせ方法

Country Status (1)

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JP (1) JP4343640B2 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010032372A (ja) 2008-07-29 2010-02-12 Toshiba Corp エッジ検出方法
JP2014086578A (ja) * 2012-10-19 2014-05-12 Applied Materials Inc オリエンタチャンバ
US11043437B2 (en) * 2019-01-07 2021-06-22 Applied Materials, Inc. Transparent substrate with light blocking edge exclusion zone
JP7446131B2 (ja) 2020-03-12 2024-03-08 キヤノン株式会社 検出装置、露光装置および物品製造方法
JP7781668B2 (ja) * 2022-02-22 2025-12-08 キヤノン株式会社 搬送装置、基板処理装置、搬送方法および物品製造方法

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