JP2005093783A - Multilayer printed circuit board having recess for embedding electronic component, and its manufacturing method - Google Patents

Multilayer printed circuit board having recess for embedding electronic component, and its manufacturing method Download PDF

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JP2005093783A
JP2005093783A JP2003326064A JP2003326064A JP2005093783A JP 2005093783 A JP2005093783 A JP 2005093783A JP 2003326064 A JP2003326064 A JP 2003326064A JP 2003326064 A JP2003326064 A JP 2003326064A JP 2005093783 A JP2005093783 A JP 2005093783A
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printed wiring
wiring board
electronic component
recess
mounting
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Satoshi Otsuki
聡 大槻
Hiroshi Nishimura
洋志 西村
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Shinko Seisakusho KK
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Shinko Seisakusho KK
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a multilayer printed wiring board having a recess for embedding an electronic component and capable of forming high density wiring and performing high density packaging causing no insulation failure nor problem in packaging, and to provide a method for manufacturing it. <P>SOLUTION: The method for manufacturing the multilayer printed wiring board comprises steps of forming the recess for embedding the electronic component by laser machining, and exposing a circuit pattern for packaging the electronic component at the bottom of the recess. An insulating material hard to be laser-machined is filled in a gap of the circuit pattern for packaging the electronic component, and the insulating material easy to be laser-machined is used for a second insulating layer with its part removed when the recess is formed. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

本発明は、電子部品埋込み用の窪みを備える多層プリント配線板およびその製造方法に関する。   The present invention relates to a multilayer printed wiring board having a recess for embedding an electronic component and a method for manufacturing the same.

電子機器の軽薄短小化および多機能化に伴い、電子機器に使用する多層プリント配線板にも、高速度化、薄板化の要求が高まっている。また、電子機器に使用する電子部品の再配線用に、多層プリント配線板を用いることが増えているが、その場合には、一層の高密度化、薄板化が求められている。   As electronic devices become lighter, thinner, and more multifunctional, there is an increasing demand for higher speed and thinner multilayer printed wiring boards used in electronic devices. In addition, the use of multilayer printed wiring boards is increasing for rewiring of electronic components used in electronic devices. In that case, higher density and thinner boards are required.

そのため、比較的、厚い電子部品および半導体のベアチップ等を、多層プリント配線板の窪みに搭載したり、挟み込むことにより、層厚を抑えたり、面積を低減することが可能な多層プリント配線板に対する要求が、年々増加している。   Therefore, there is a need for a multilayer printed wiring board that can suppress the layer thickness or reduce the area by mounting or sandwiching relatively thick electronic components and semiconductor bare chips, etc. in the depression of the multilayer printed wiring board. However, it is increasing year by year.

たとえば、特開平5−343856号公報には、電子部品または電子回路の機能を備えたハイブリッドモジュールを内部に挟んだ多層プリント配線板が記載されている。   For example, Japanese Patent Application Laid-Open No. 5-343856 discloses a multilayer printed wiring board in which a hybrid module having functions of electronic components or electronic circuits is sandwiched.

従来、電子部品埋込み用の窪みを備える多層プリント配線板を製造する場合、積層後に内層の回路パターンを削り出す方法が用いられてきた。内層の回路パターンを刃物によって削り出す場合、切削装置の上下方向位置精度と、多層プリント配線板の厚さバラツキを吸収するために、70〜100μmの厚さの内層銅厚が必要となるが、この厚さでは、近年、増加しているフリップチップ実装に対応する、たとえば120μmピッチ以下の回路パターンを形成することは困難である。   Conventionally, when manufacturing a multilayer printed wiring board provided with a recess for embedding an electronic component, a method of cutting out an inner layer circuit pattern after lamination has been used. When cutting out the circuit pattern of the inner layer with a blade, the inner layer copper thickness of 70 to 100 μm is required to absorb the vertical position accuracy of the cutting device and the thickness variation of the multilayer printed wiring board. With this thickness, it is difficult to form a circuit pattern with a pitch of, for example, 120 μm or less corresponding to flip chip mounting that has been increasing in recent years.

この対策として、削り出し加工をレーザー加工機で行う方法があるが、多層プリント配線板には、各回路パターンごとに絶縁体が設けられており、回路パターン上の絶縁体樹脂を十分に除去できる条件で加工を行うと、回路パターンの間隙の部分の絶縁体まで加工が進んで、さらに下層の導体近傍に至って絶縁不良を招いたり、回路パターンの支持強度が不十分になって、実装時の不具合の原因となる問題があった。
特開平5−343856号公報
As a countermeasure for this, there is a method in which machining is performed with a laser processing machine, but the multilayer printed wiring board is provided with an insulator for each circuit pattern, and the insulator resin on the circuit pattern can be sufficiently removed. If processing is performed under the conditions, the processing proceeds to the insulator in the gap portion of the circuit pattern, and further reaches the vicinity of the lower conductor, leading to poor insulation, and the circuit pattern support strength becomes insufficient, There was a problem that caused the bug.
JP-A-5-343856

本発明の目的は、絶縁不良を生じず、実装時の不具合がなく、高密度配線および高密度実装を可能とする電子部品埋込み用の窪みを備える多層プリント配線板およびその製造方法を提供することにある。   An object of the present invention is to provide a multilayer printed wiring board having a recess for embedding electronic components that does not cause insulation failure, has no defects during mounting, and enables high-density wiring and high-density mounting, and a method for manufacturing the same. It is in.

本発明は、回路パターンを有する複数の絶縁体層と絶縁体基板とからなり、かつ、電子部品埋込み用の窪みを備える多層プリント配線板の製造方法に係り、第1の態様では、前記電子部品実装用の回路パターンより内側に形成される第1の絶縁体層にレーザー加工されにくい絶縁体を用い、前記電子部品実装用の回路パターンより外側にある第2の絶縁体層にレーザー加工されやすい絶縁体を用い、多層プリント配線板を形成した後、レーザー加工により第2の絶縁体層に孔をあけて電子部品埋込み用の窪みを形成し、当該窪みの底部において電子部品実装用の回路パターンを露出させることを特徴とする。   The present invention relates to a method of manufacturing a multilayer printed wiring board comprising a plurality of insulator layers having a circuit pattern and an insulator substrate, and having a recess for embedding an electronic component. An insulator that is difficult to be laser-processed is used for the first insulator layer formed on the inner side of the circuit pattern for mounting, and laser processing is easily performed on the second insulator layer that is on the outer side of the circuit pattern for mounting electronic components. After forming a multilayer printed wiring board using an insulator, a hole is formed in the second insulator layer by laser processing to form a recess for embedding an electronic component, and a circuit pattern for mounting an electronic component at the bottom of the recess It is characterized by exposing.

第1の絶縁体層にレーザー加工されにくい絶縁体を用いる代わりに、第1の絶縁体層の表面に形成される前記電子部品実装用の回路パターンの間隙にレーザー加工されにくい絶縁体を充填してもよい。   Instead of using an insulator that is difficult to laser process for the first insulator layer, an insulator that is difficult to laser process is filled in the gap between the circuit patterns for mounting electronic components formed on the surface of the first insulator layer. May be.

別の態様では、電子部品を埋め込むための孔を有する上側プリント配線板と電子部品実装用の回路パターンを備える下側プリント配線板とを接着剤層を介して接合して多層プリント配線板を形成する際に、前記電子部品実装用の回路パターンの間隙にレーザー加工されにくい絶縁体を充填しておき、その後、レーザー加工により接着剤層の前記孔に対応する部分を除去して、前記孔と接着剤層とで窪みを形成し、当該窪みの底部において、前記電子部品実装用の回路パターンを露出させることを特徴とする。   In another aspect, a multilayer printed wiring board is formed by bonding an upper printed wiring board having holes for embedding electronic components and a lower printed wiring board having a circuit pattern for mounting electronic components via an adhesive layer. When filling, the gap between the circuit patterns for mounting the electronic component is filled with an insulator that is difficult to be laser processed, and then the portion corresponding to the hole of the adhesive layer is removed by laser processing, A recess is formed with the adhesive layer, and the circuit pattern for mounting the electronic component is exposed at the bottom of the recess.

上記態様では、電子部品を埋め込むための孔を上側プリント配線板に形成してから、下側プリント配線板と接合して多層プリント配線板を形成しているが、上側プリント配線板に孔を形成せずに多層プリント配線板を作製した後、切削加工により上側プリント配線板の一部に孔をあけて、窪みの一部を形成し、その後、レーザー加工により窪みを形成するように、上側プリント配線板の残部と前記接着剤層を除去して、当該窪みの底部において、前記電子部品実装用の回路パターンを露出させるようにしてもよい。   In the above aspect, a hole for embedding an electronic component is formed in the upper printed wiring board and then joined to the lower printed wiring board to form a multilayer printed wiring board. However, a hole is formed in the upper printed wiring board. The upper printed circuit board is made so that a multi-layer printed wiring board is manufactured without cutting, and a hole is formed in a part of the upper printed wiring board by cutting to form a part of the recess, and then a recess is formed by laser processing. The remaining part of the wiring board and the adhesive layer may be removed so that the circuit pattern for mounting the electronic component is exposed at the bottom of the recess.

上記の製造方法により作製された電子部品埋込み用の窪みを備えた多層プリント配線板は、電子部品実装用の回路パターン間隙の絶縁体の損傷による絶縁性能の低下を防止でき、かつ、電子部品実装用の回路パターンを保護することにより確実な電子部品の実装を達成できる。   The multilayer printed wiring board provided with the recess for embedding the electronic component produced by the above manufacturing method can prevent the deterioration of the insulation performance due to the damage of the insulator in the circuit pattern gap for mounting the electronic component, and the electronic component mounting. By protecting the circuit pattern for use, reliable electronic component mounting can be achieved.

本発明により、従来技術における、回路パターン間隙の下地絶縁体の損傷が著しく、機械的強度が劣り、絶縁信頼性が乏しいという問題点を解消し、かつ、高密度配線および高密度実装が可能な電子部品埋込み用の窪みを備える多層プリント配線板およびその製造方法を提供することができる。   The present invention eliminates the problems in the prior art that the underlying insulator in the circuit pattern gap is significantly damaged, the mechanical strength is inferior, and the insulation reliability is poor, and high-density wiring and high-density mounting are possible. A multilayer printed wiring board having a recess for embedding an electronic component and a method for manufacturing the same can be provided.

本発明の第1態様による電子部品埋込み用の窪みを備える多層プリント配線板の製造方法では、まず、内層配線層を有する絶縁体基板に、回路パターンを有する複数の絶縁体層を積層することにより多層プリント配線板を形成する。   In the method of manufacturing a multilayer printed wiring board having a recess for embedding an electronic component according to the first aspect of the present invention, first, a plurality of insulator layers having circuit patterns are laminated on an insulator substrate having an inner wiring layer. A multilayer printed wiring board is formed.

本発明の場合、前記電子部品実装用の回路パターンより内側に形成される第1の絶縁体層にレーザー加工されにくい絶縁体を用い、前記電子部品実装用の回路パターンより外側にある第2の絶縁体層にレーザー加工されやすい絶縁体を用いる。   In the case of the present invention, the first insulator layer formed inside the circuit pattern for mounting the electronic component is made of an insulator that is difficult to be laser processed, and the second layer located outside the circuit pattern for mounting the electronic component. An insulator that is easily laser processed is used for the insulator layer.

たとえば、第1の絶縁体層は、内層配線層を有する絶縁体基板に、接着シート、プリプレグ(ガラス繊維布に絶縁樹脂を含浸させ、半硬化させたもの)等を介して、銅箔を両面に圧着させることで形成し、その後、エッチングを施し、開口部を形成し、開口部の接着シートやプリプレグを除去し、開口部にメッキによりマイクロビア接続を形成し、選択的にエッチングすることにより、電子部品実装用の回路パターンが形成されている。   For example, the first insulator layer is a copper foil coated on both sides of an insulating substrate having an inner wiring layer with an adhesive sheet, a prepreg (a glass fiber cloth impregnated with an insulating resin and semi-cured), etc. After that, by etching, forming an opening, removing the adhesive sheet and prepreg of the opening, forming a micro via connection by plating in the opening, and selectively etching A circuit pattern for mounting electronic components is formed.

かかる第1の絶縁体層を構成する接着シートには、無機フィラー、短繊維等の含有率が多く、レーザー加工性に劣るもの、たとえば、日立化成製高弾性銅箔付き接着フィルムを使用する。   For the adhesive sheet constituting the first insulator layer, an adhesive film having a high content of inorganic fillers, short fibers and the like and inferior in laser processability, for example, an adhesive film with high elasticity copper foil manufactured by Hitachi Chemical is used.

次に、第1の絶縁体層と同様に、第2の絶縁体層を形成して多層化するが、第2の絶縁体層を構成する接着シートには、無機フィラー、短繊維等の含有率が少なく、レーザー加工性に優れたもの、たとえば、三井金属鉱業製樹脂付き銅箔を使用する。   Next, similarly to the first insulator layer, a second insulator layer is formed to be multilayered, but the adhesive sheet constituting the second insulator layer contains an inorganic filler, a short fiber, etc. The one with a low rate and excellent laser processability, for example, a copper foil with resin made by Mitsui Mining & Mining is used.

このようにして、多層プリント配線板を形成した後、レーザー加工により、第2の絶縁体層に電子部品埋込み用の窪みを形成し、当該窪みの底部において第1の絶縁体層に形成された電子部品実装用の回路パターンを露出させる。   After forming the multilayer printed wiring board in this way, a recess for embedding an electronic component was formed in the second insulator layer by laser processing, and the first insulator layer was formed at the bottom of the recess. Expose the circuit pattern for mounting electronic components.

このとき、第1の絶縁体層は、レーザー加工されにくい絶縁体より構成されているため、加工の際に損傷を受けがたい。これにより、電子部品が実装される回路パターンを備える第1の絶縁体層の機械的強度および絶縁信頼性の低下が防止される。   At this time, since the first insulator layer is made of an insulator that is difficult to be laser processed, it is difficult to be damaged during processing. Thereby, the mechanical strength of the 1st insulator layer provided with the circuit pattern in which an electronic component is mounted and the fall of insulation reliability are prevented.

本発明の第2態様では、多層プリント配線板の構成は第1の態様と同様であるが、第1の絶縁体層にレーザー加工されにくい絶縁体を用いる代わりに、第1の絶縁体層の表面に形成される前記電子部品実装用の回路パターンの間隙にレーザー加工されにくい絶縁体を充填する。当該絶縁体には、無機フィラー、短繊維等の含有率が多く、レーザー加工性に劣る素材、たとえば、山栄化学製アンダーコート剤を使用する。この場合、第1の絶縁体層自体には、任意の絶縁体を使用することができる。   In the second aspect of the present invention, the configuration of the multilayer printed wiring board is the same as that of the first aspect, but instead of using an insulator that is difficult to be laser processed for the first insulator layer, An insulator that is difficult to be laser-processed is filled in the gap between the circuit patterns for mounting electronic components formed on the surface. For the insulator, a material having a high content of inorganic fillers, short fibers and the like and inferior in laser processability, for example, an undercoat agent manufactured by Yamaei Chemical is used. In this case, any insulator can be used for the first insulator layer itself.

本発明の第3態様では、電子部品を埋め込むための孔を有する上側プリント配線板と電子部品実装用の回路パターンを備える下側プリント配線板とを接着剤層を介して接合して多層プリント配線板を形成する。この場合、下側プリント配線板の表面に形成される前記電子部品実装用の回路パターンの間隙にレーザー加工されにくい絶縁体を充填しておく。その後、レーザー加工により接着剤層の前記孔に対応する部分を除去して、当該窪みの底部において、前記電子部品実装用の回路パターンを露出させる。接着剤層には、無機フィラー、短繊維等の含有率が少なく、レーザー加工性に優れた接着シート、たとえば、日立化成製または巴川製紙所製エポキシ系接着フィルムを使用する。   In the third aspect of the present invention, an upper printed wiring board having a hole for embedding an electronic component and a lower printed wiring board provided with a circuit pattern for mounting the electronic component are joined via an adhesive layer to form a multilayer printed wiring. Form a plate. In this case, the gap between the circuit patterns for mounting electronic components formed on the surface of the lower printed wiring board is filled with an insulator that is difficult to be laser processed. Then, the part corresponding to the said hole of an adhesive bond layer is removed by laser processing, and the said circuit pattern for electronic component mounting is exposed in the bottom part of the said hollow. For the adhesive layer, an adhesive sheet having a low content of inorganic fillers, short fibers and the like and excellent in laser processability, for example, an epoxy adhesive film manufactured by Hitachi Chemical or Yodogawa Paper Mill is used.

本発明の第3態様では、電子部品を埋め込むための孔を上側プリント配線板に形成してから、下側プリント配線板と接合して多層プリント配線板を形成しているが、本発明の第4態様では、上側プリント配線板に孔を形成せずに多層プリント配線板を作製した後、切削加工により上側プリント配線板の一部に孔をあけて窪みの一部とし、その後、レーザー加工により窪みを形成するように、上側プリント配線板の残部と前記接着剤層を除去して、当該窪みの底部において、前記電子部品実装用の回路パターンを露出させる。   In the third aspect of the present invention, a hole for embedding an electronic component is formed in the upper printed wiring board and then joined to the lower printed wiring board to form a multilayer printed wiring board. In 4th aspect, after producing a multilayer printed wiring board without forming a hole in an upper side printed wiring board, a hole is made in a part of upper side printed wiring board by cutting, and it is made into a part of hollow after that, by laser processing The remainder of the upper printed wiring board and the adhesive layer are removed so as to form a recess, and the circuit pattern for mounting the electronic component is exposed at the bottom of the recess.

(実施例1)
図1は、本発明の実施例1により、多層プリント配線板(18)を製造する方法を示す一連の断面図である。
(Example 1)
FIG. 1 is a series of cross-sectional views showing a method of manufacturing a multilayer printed wiring board (18) according to Embodiment 1 of the present invention.

(I):
(A)絶縁体基板(1)の表裏両面または片面(図示では両面)に、銅箔(2)を設けて積層板を得る。
(I):
(A) A copper foil (2) is provided on both the front and back surfaces or one surface (both surfaces in the drawing) of the insulating substrate (1) to obtain a laminated board.

(B)該積層板の所望の部位に開口部(3)を設け、
(C)該開口部側壁にメッキ(4)を施してスルーホールを得る。
(B) An opening (3) is provided in a desired portion of the laminate,
(C) Plating (4) is performed on the side wall of the opening to obtain a through hole.

(D)該積層板の銅箔を選択的にエッチングすることにより、銅箔(2)から内層配線層(5)を形成し、該内層配線層(5)が表裏両面に形成された第1の内層配線板を形成する。   (D) By selectively etching the copper foil of the laminate, the inner wiring layer (5) is formed from the copper foil (2), and the inner wiring layer (5) is formed on both the front and back surfaces. Forming an inner layer wiring board.

絶縁体基板(1)としては、各種機能性繊維をコア材とした基板や長短の有機分子を組み合わせた有機フィルム基板等も利用できる。たとえば、ガラス基材−エポキシ樹脂積層板(ガラスエポキシ積層板)、ガラス基材−ポリイミド樹脂積層板、ガラス基材−テフロン(登録商標)樹脂積層板、アラミド基材-エポキシ樹脂積層板、エチレン・フッ素基材−エポキシ樹脂積層板、ポリフェニレンエーテル樹脂積層板、ポリエステルエステル・ポリエーテルイミド共重合体基板(シート)、アクリル共重合体基板(シート)、ポリイミドシートなどを用いることができる。   As the insulator substrate (1), a substrate using various functional fibers as a core material, an organic film substrate combining long and short organic molecules, and the like can be used. For example, glass substrate-epoxy resin laminate (glass epoxy laminate), glass substrate-polyimide resin laminate, glass substrate-Teflon (registered trademark) laminate, aramid substrate-epoxy resin laminate, ethylene Fluorine substrate-epoxy resin laminate, polyphenylene ether resin laminate, polyester ester / polyetherimide copolymer substrate (sheet), acrylic copolymer substrate (sheet), polyimide sheet, and the like can be used.

(II):
(E)第1の内層配線板に、接着シート(6)、プリプレグ(ガラス繊維布に絶縁樹脂を含浸させ、半硬化させたもので、接着シートの機能を有する)等を介して、銅箔(2)を両面に加熱加圧接着をする。
(II):
(E) A copper foil through an adhesive sheet (6), a prepreg (a glass fiber cloth is impregnated with an insulating resin and semi-cured, and has a function of an adhesive sheet), etc. (2) Heat and pressure adhesion is performed on both sides.

接着シート(6)としては、レーザー加工性が悪く、ガラス繊維プリプレグ、有機不織布プリプレグ、無機フィラー等を多量に含む樹脂シート等、たとえば、日立化成製ガラス基材エポキシ樹脂プリプレグを用いる。接着シート(6)は無孔のものでよい。   As the adhesive sheet (6), laser processability is poor and a glass fiber prepreg, an organic nonwoven fabric prepreg, a resin sheet containing a large amount of inorganic filler, etc., for example, a glass substrate epoxy resin prepreg made by Hitachi Chemical is used. The adhesive sheet (6) may be non-porous.

(F)該銅箔(2)の所望部位をエッチングして開口し、開口部(7)に露出した接着シートやプリプレグを除去し、
(G)開口部(7)にメッキを施してマイクロビア接続を形成し、該銅箔(2)を選択的にエッチングして、回路パターン(5)を形成する。
(F) Etching and opening a desired portion of the copper foil (2), removing the adhesive sheet and prepreg exposed in the opening (7),
(G) The opening (7) is plated to form a micro via connection, and the copper foil (2) is selectively etched to form a circuit pattern (5).

(III):
工程(G)で回路パターン(5)を形成する際に、電子部品埋込み用の窪み(工程K参照)を形成する箇所には、電子部品実装用の回路パターン(9)を備えておく。
(III):
When the circuit pattern (5) is formed in the step (G), a circuit pattern (9) for mounting an electronic component is provided in a place where a recess for embedding the electronic component (see step K) is formed.

以上の(I)から(III)の各工程により、第1の多層プリント配線板中間体(14−1)が形成される。   The first multilayer printed wiring board intermediate (14-1) is formed by the steps (I) to (III).

(IV):
(H)第1の多層プリント配線板中間体(14−1)に、接着シート(11)、プリプレグ(ガラス繊維布に絶縁樹脂を含浸させ、半硬化させたもの)等を介して、銅箔(2)を両面に加熱加圧接着をする。
(IV):
(H) Copper foil through the first multilayer printed wiring board intermediate (14-1) via an adhesive sheet (11), a prepreg (a glass fiber cloth impregnated with an insulating resin and semi-cured), etc. (2) Heat and pressure adhesion is performed on both sides.

接着シート(11)としては、フィラーや、強化用繊維含有率が少なく、レーザー加工性が良い樹脂シート等、たとえば、三井金属鉱業製樹脂付き銅箔を用いる。接着シート(11)は無孔でよい。   As the adhesive sheet (11), a filler, a resin sheet with a low reinforcing fiber content, and good laser processability, such as a copper foil with resin manufactured by Mitsui Mining & Mining, is used. The adhesive sheet (11) may be non-porous.

(I)該銅箔(2)の所望部位をエッチングして開口し、開口部に露出した接着シートやプリプレグを除去し、
(J)開口部(7)にメッキを施してマイクロビア接続を形成し、次いで、第1の多層プリント配線板中間体(14−1)の表面の銅箔(2)を選択的にエッチングして、回路パターン(8)を形成する。以上により、第2の多層プリント配線板中間体(14−2)を形成する。
(I) Etching and opening a desired portion of the copper foil (2), removing the adhesive sheet and prepreg exposed in the opening,
(J) Plating the opening (7) to form a microvia connection, and then selectively etching the copper foil (2) on the surface of the first multilayer printed wiring board intermediate (14-1) Thus, a circuit pattern (8) is formed. Thus, the second multilayer printed wiring board intermediate (14-2) is formed.

接着シート(11)は、単独でも用いることができるが、導体層表面を化学処理した後に、接着シートを介して、複数枚の絶縁体基板と銅箔を組み合せ、前記と同様な手順で、多層化することもできる。   The adhesive sheet (11) can be used alone, but after chemically treating the surface of the conductor layer, a plurality of insulator substrates and copper foil are combined via the adhesive sheet, It can also be converted.

(V):
(K)電子部品埋込み用の窪みを形成する箇所(13)をレーザー加工によって座ぐり、電子部品実装用の回路パターン(9)を露出させる。この場合、接着シート(11)はレーザー加工性が良好であるが、接着シート(6)は、レーザー加工性が悪いため、当該レーザー加工において、接着シート(6)より下の層まで加工が及ぶことが防止される。以上により、電子部品を埋め込む窪みを備える多層プリント配線板(18)を製造する。
(V):
(K) The part (13) where the recess for embedding the electronic component is formed is spotted by laser processing to expose the circuit pattern (9) for mounting the electronic component. In this case, although the adhesive sheet (11) has good laser processability, the adhesive sheet (6) has poor laser processability, and thus, in the laser processing, processing reaches a layer below the adhesive sheet (6). It is prevented. By the above, a multilayer printed wiring board (18) provided with the hollow which embeds an electronic component is manufactured.

このようにして得られた多層プリント配線板の電子部品実装用回路間の絶縁体の目減りは、絶縁層厚の1/2以下に抑えることができた。また、多層プリント配線板10個について、85℃、相対湿度85%の環境下で、窪みの底の100μmピッチの実装用回路間、および当該回路と下層回路間に、直流10Vの電圧を1000時間にわたって印加した結果、1×1011Ω以上の絶縁抵抗が維持された。 The loss of the insulator between the electronic component mounting circuits of the multilayer printed wiring board thus obtained could be suppressed to ½ or less of the insulating layer thickness. In addition, for 10 multilayer printed wiring boards, a voltage of DC 10 V was applied for 1000 hours between the mounting circuit with a pitch of 100 μm at the bottom of the recess and between the circuit and the lower layer circuit in an environment of 85 ° C. and 85% relative humidity. As a result, the insulation resistance of 1 × 10 11 Ω or more was maintained.

(実施例2)
図2は、本発明の実施例2により、多層プリント配線板(18)を製造する方法を示す一連の断面図である。
(Example 2)
FIG. 2 is a series of cross-sectional views showing a method of manufacturing a multilayer printed wiring board (18) according to Embodiment 2 of the present invention.

(I):
(A)実施例1と同様に、絶縁体基板(1)の表裏両面または片面(図示では両面)に、銅箔(2)を設けて積層板を得る。
(I):
(A) Similarly to Example 1, a copper foil (2) is provided on both the front and back sides or one side (both sides in the drawing) of the insulating substrate (1) to obtain a laminated board.

(B)該積層板の所望の部位に開口部(3)を設け、
(C)該開口部側壁にメッキ(4)を施してスルーホールを得る。
(B) An opening (3) is provided in a desired portion of the laminate,
(C) Plating (4) is performed on the side wall of the opening to obtain a through hole.

(D)次に、該積層板の銅箔を選択的にエッチングすることにより、内層配線層が表裏両面に形成された第1の内層配線板を形成する。   (D) Next, by selectively etching the copper foil of the laminated board, a first inner wiring board having inner wiring layers formed on both front and back surfaces is formed.

(II):
(E)第1の内層配線板に、接着シート(6)、プリプレグ(ガラス繊維布に絶縁樹脂を含浸させ、半硬化させたもの)等を介して、銅箔(2)を両面に加熱加圧接着をする。接着シート(6)は任意のものを使用できる。接着シート(6)は無孔のものでよい。
(II):
(E) The copper foil (2) is heated on both sides of the first inner wiring board through an adhesive sheet (6), a prepreg (a glass fiber cloth impregnated with an insulating resin and semi-cured), etc. Apply pressure bonding. Any adhesive sheet (6) can be used. The adhesive sheet (6) may be non-porous.

(F)そして、該銅箔(2)の所望部位をエッチングして開口し、開口部(7)に露出した接着シートやプリプレグを除去し、
(G)開口部(7)にメッキを施してマイクロビア接続を形成し、該銅箔(2)を選択的にエッチングして、回路パターン(5)を形成する。
(F) Then, the desired portion of the copper foil (2) is etched and opened, and the adhesive sheet and prepreg exposed in the opening (7) are removed,
(G) The opening (7) is plated to form a micro via connection, and the copper foil (2) is selectively etched to form a circuit pattern (5).

(III):
工程(G)で回路パターンを形成する際に、電子部品埋込み用の窪み(工程(L)参照)を形成する箇所には、電子部品実装用の回路パターン(9)を備えておく。
(III):
When forming a circuit pattern in the step (G), a circuit pattern (9) for mounting an electronic component is prepared in a place where a recess for embedding an electronic component (see step (L)) is formed.

以上の(I)から(III)の工程により、第1の多層プリント配線板中間体(14−1)が形成される。   Through the steps (I) to (III), the first multilayer printed wiring board intermediate (14-1) is formed.

(IV):
(H)第1の多層プリント配線板中間体(14−1)の電子部品実装用の回路パターン(9)の周囲または全面の回路パターンの間隙に、絶縁体(10)を充填する。絶縁体(10)としては、レーザー加工性が悪く、無機フィラー、ガラス繊維短繊維を多量に含む樹脂等、たとえば、山栄化学製アンダーコート剤を用いる。以上により、第2の多層プリント配線板中間体(14−2)を形成する。
(IV):
(H) The insulator (10) is filled in the space around the circuit pattern (9) for mounting the electronic components on the first multilayer printed wiring board intermediate (14-1) or in the gap between the circuit patterns on the entire surface. As the insulator (10), the laser processability is poor, and an inorganic filler, a resin containing a large amount of short glass fiber, etc., for example, an undercoat agent made by Yamaei Chemical is used. Thus, the second multilayer printed wiring board intermediate (14-2) is formed.

(V):
(I)第2の多層プリント配線板中間体(14−2)に、接着シート(11)、プリプレグ(ガラス繊維布に絶縁樹脂を含浸させ、半硬化させたもの)等を介して、銅箔(2)を両面に加熱加圧接着をする。接着シート(11)としては、フィラーや、強化用繊維含有率が少なく、レーザー加工性が良い樹脂シート等を用いる。
(V):
(I) Copper foil through the second multilayer printed wiring board intermediate (14-2) via an adhesive sheet (11), a prepreg (a glass fiber cloth impregnated with an insulating resin and semi-cured), etc. (2) Heat and pressure adhesion is performed on both sides. As the adhesive sheet (11), a filler or a resin sheet having a low reinforcing fiber content and good laser processability is used.

(J)そして、該銅箔(2)の所望部位をエッチングして開口し、開口部(7)に露出した接着シートやプリプレグを除去し、
(K)開口部(7)にメッキを施してマイクロビア接続を形成し、次いで、第2の多層プリント配線板中間体(14−2)の表面の銅箔(2)を選択的にエッチングして、回路パターン(8)を形成する。以上により、第3の多層プリント配線板中間体(17)を形成する。
(J) Then, a desired portion of the copper foil (2) is etched and opened, and the adhesive sheet and prepreg exposed in the opening (7) are removed,
(K) The opening (7) is plated to form a micro via connection, and then the copper foil (2) on the surface of the second multilayer printed wiring board intermediate (14-2) is selectively etched. Thus, a circuit pattern (8) is formed. Thus, the third multilayer printed wiring board intermediate (17) is formed.

(VI):
(L)次に、電子部品埋込み用の窪みを形成する箇所(13)をレーザー加工によって座ぐり、電子部品実装用の回路パターン(9)を露出させる。この場合、接着シート(11)はレーザー加工性が良好であるが、回路パターン(9)の周囲または全面の回路パターンの間隙に充填された絶縁体(10)のレーザー加工性が悪いため、絶縁体(10)で覆われたところでは、当該レーザー加工において、接着シート(6)まで加工が及ぶことが防止される。以上により、電子部品を埋め込む窪みを備える多層プリント配線板(18)を製造する。
(VI):
(L) Next, the part (13) where the recess for embedding the electronic component is formed is spotted by laser processing to expose the circuit pattern (9) for mounting the electronic component. In this case, the adhesive sheet (11) has good laser processability, but the insulator (10) filled around the circuit pattern (9) or in the gap between the circuit patterns on the entire surface has poor laser processability. In the place covered with the body (10), the laser processing prevents the processing from reaching the adhesive sheet (6). By the above, a multilayer printed wiring board (18) provided with the hollow which embeds an electronic component is manufactured.

このようにして得られた多層プリント配線板の電子部品実装用回路間の絶縁体の目減りは、絶縁層厚の1/10以下に抑えることができた。また、多層プリント配線板10個について、85℃、相対湿度85%の環境下で、窪みの底の100μmピッチの実装用回路間、および当該回路と下層回路間に、直流10Vの電圧を1000時間にわたって印加した結果、1×1011Ω以上の絶縁抵抗が維持された。 The loss of the insulator between the electronic component mounting circuits of the multilayer printed wiring board thus obtained could be suppressed to 1/10 or less of the insulating layer thickness. In addition, for 10 multilayer printed wiring boards, a voltage of DC 10V was applied for 1000 hours between the mounting circuit of 100 μm pitch at the bottom of the recess and between the circuit and the lower layer circuit in an environment of 85 ° C. and 85% relative humidity. As a result, the insulation resistance of 1 × 10 11 Ω or more was maintained.

(実施例3)
図3から図5は、本発明の実施例3により、電子部品用の回路を有する下側プリント配線板(15)と該電子部品を埋め込むための孔を設けた上側プリント配線板(16)を接合することにより、多層プリント配線板(18)を製造する方法を示す一連の断面図である。
(Example 3)
3 to 5 show a lower printed wiring board (15) having a circuit for an electronic component and an upper printed wiring board (16) provided with a hole for embedding the electronic component, according to a third embodiment of the present invention. It is a series of sectional views showing a method of manufacturing a multilayer printed wiring board (18) by bonding.

(I):
(A)図3は、前記下側プリント配線板(15)を製造する方法を示す。絶縁体基板(1)の表裏両面または片面(図示では両面)に、銅箔(2)を設けて積層板を得る。
(I):
(A) FIG. 3 shows a method of manufacturing the lower printed wiring board (15). A copper foil (2) is provided on both the front and back surfaces or one surface (both surfaces in the drawing) of the insulator substrate (1) to obtain a laminate.

(B)該積層板の所望の部位に開口部(3)を設け、
(C)該開口部側壁にメッキ(4)を施してスルーホールを得る。
(B) An opening (3) is provided in a desired portion of the laminate,
(C) Plating (4) is performed on the side wall of the opening to obtain a through hole.

(D)次に、該積層板の銅箔を選択的にエッチングすることにより内装配線層(5)を形成し、内層配線層(5)が表裏両面に形成された第1の内層配線板を形成する。   (D) Next, the internal wiring layer (5) is formed by selectively etching the copper foil of the laminated board, and the first inner layer wiring board having the inner layer wiring layer (5) formed on both the front and back surfaces is formed. Form.

(II):
(E)第1の内層配線板に、接着シート(6)、プリプレグ(ガラス繊維布に絶縁樹脂を含浸させ、半硬化させたもの)等を介して、銅箔(2)を両面に加熱加圧接着をする。接着シート(6)は任意のものを使用できる。
(II):
(E) The copper foil (2) is heated on both sides of the first inner wiring board through an adhesive sheet (6), a prepreg (a glass fiber cloth impregnated with an insulating resin and semi-cured), etc. Apply pressure bonding. Any adhesive sheet (6) can be used.

(F)そして、該銅箔(2)の所望部位をエッチングして開口し、開口部(7)に露出した接着シートやプリプレグを除去し、開口部(7)にメッキを施してマイクロビア接続を形成し、
(G)次いで、上側プリント配線板(16)と接着する側の銅箔(2)を選択的にエッチングして、回路パターン(5)を形成する。
(F) Then, the desired portion of the copper foil (2) is etched and opened, the adhesive sheet and prepreg exposed at the opening (7) are removed, and the opening (7) is plated to connect to micro vias. Form the
(G) Next, the copper foil (2) to be bonded to the upper printed wiring board (16) is selectively etched to form a circuit pattern (5).

(III):
工程Gで、回路パターン(5)を形成する際に、上側プリント配線板の電子部品埋込み用の窪み(13)に対応する箇所には、電子部品実装用の回路パターン(9)を備えておく。
(III):
When forming the circuit pattern (5) in the step G, a circuit pattern (9) for mounting an electronic component is provided at a location corresponding to the recess (13) for embedding the electronic component in the upper printed wiring board. .

以上の(I)から(III)の工程により、下側プリント配線板中間体(14)が形成される。   By the steps (I) to (III), the lower printed wiring board intermediate body (14) is formed.

(IV):
(H)下側プリント配線板中間体(14)の電子部品実装用の回路パターン(9)の周囲または全面の回路パターンの間隙に、絶縁体(10)を充填する。絶縁体(10)としては、実施例2と同様に、レーザー加工性が悪く、無機フィラー、ガラス繊維短繊維などを多量に含む樹脂等を用いる。以上により下側プリント配線板(15)を形成する。
(IV):
(H) The insulator (10) is filled in the gap between the circuit patterns (9) around the entire printed circuit board (9) for mounting the electronic component on the lower printed wiring board intermediate (14). As the insulator (10), as in Example 2, laser processability is poor and a resin containing a large amount of inorganic filler, short glass fiber, or the like is used. Thus, the lower printed wiring board (15) is formed.

下側プリント配線板(15)は、単独でも用いることができるが、導体層表面を化学処理した後に、接着シートを介して、複数枚の絶縁体基板と銅箔を組み合せ、前記と同様な手順で、多層化することもできる。   The lower printed wiring board (15) can be used alone, but after chemically treating the surface of the conductor layer, a plurality of insulator substrates and copper foil are combined through an adhesive sheet, and the same procedure as described above is performed. Thus, it can be multi-layered.

(V):
図4に、前記上側プリント配線板を製造する方法を示す。
(V):
FIG. 4 shows a method for manufacturing the upper printed wiring board.

(I)下側プリント配線板(15)と同様に、上側プリント配線板を形成する。   (I) An upper printed wiring board is formed in the same manner as the lower printed wiring board (15).

(J)上側プリント配線板(16)において、電子部品を埋め込む箇所には、パンチング加工、ルーター加工またはドリリング加工などにより、所望の大きさの孔(12)を設ける。なお、上側プリント配線板(16)にも、接着シートとの密着向上のために、導体層表面の化学処理を行うことが可能である。   (J) In the upper printed wiring board (16), a hole (12) having a desired size is provided at a portion where the electronic component is embedded by punching, router processing, drilling processing, or the like. The upper printed wiring board (16) can also be subjected to chemical treatment on the surface of the conductor layer in order to improve adhesion with the adhesive sheet.

(VI):
図5は、前記下側プリント配線板(15)と上側プリント配線板(16)とを接合して、電子部品埋込み用の窪みを備える多層プリント配線板(18)を製造する方法を示す。
(VI):
FIG. 5 shows a method of manufacturing a multilayer printed wiring board (18) having a recess for embedding an electronic component by joining the lower printed wiring board (15) and the upper printed wiring board (16).

(K)すなわち、接着シート(11)を介して、下側プリント配線板(15)と、上側プリント配線板(16)とを、電極の位置や窓の位置などを位置合わせしながら重ね合わせた後、加熱圧着して、電子部品埋込み用の窪みを備える第3の多層プリント配線板中間体(17−1)を形成する。   (K) That is, the lower printed wiring board (15) and the upper printed wiring board (16) were overlapped with the position of the electrode, the position of the window, and the like through the adhesive sheet (11). Then, a third multilayer printed wiring board intermediate (17-1) having a recess for embedding an electronic component is formed by thermocompression bonding.

(VII):
(L)このままでは、下側プリント配線板(15)と、上側プリント配線板(16)との電気的接続が取れていないため、貫通孔(3)を開口し、
(M)さらに、両プリント配線板を電気的に接続するために、貫通孔(3)の内面をメッキしてスルーホール(4)を形成する。
(VII):
(L) As it is, since the lower printed wiring board (15) and the upper printed wiring board (16) are not electrically connected, the through hole (3) is opened.
(M) Further, in order to electrically connect both printed wiring boards, the inner surface of the through hole (3) is plated to form a through hole (4).

(VIII):
(N)さらに、第3の多層プリント配線板中間体(17−1)の上面と下面の銅箔を選択的にエッチングして、外層配線(8)を形成し、第4の多層プリント配線板中間体(17−2)を得る。
(VIII):
(N) Further, the copper foil on the upper and lower surfaces of the third multilayer printed wiring board intermediate (17-1) is selectively etched to form the outer layer wiring (8), and the fourth multilayer printed wiring board Intermediate (17-2) is obtained.

(IX):
(O)次に、接着シート(11)における電子部品埋込み用の窪み(13)に対応する箇所をレーザー加工によって座ぐり、電子部品実装用の回路パターン(9)を露出させる。この場合、接着シート(11)のレーザー加工性は良好であるが、回路パターン(9)の周囲または全面の回路パターンの間隙に充填された絶縁体(10)のレーザー加工性が悪いため、絶縁体(10)のあるところでは、当該レーザー加工において、下側プリント配線板(15)の接着シート(6)まで加工が及ぶことが防止される。以上により、電子部品を埋め込む窪みを備える多層プリント配線板(18)を製造する。
(IX):
(O) Next, a portion corresponding to the recess (13) for embedding the electronic component in the adhesive sheet (11) is spotted by laser processing to expose the circuit pattern (9) for mounting the electronic component. In this case, the laser processability of the adhesive sheet (11) is good, but the insulator (10) filled around the circuit pattern (9) or in the gap between the circuit patterns on the entire surface is poor in laser processability. Where the body (10) is located, the laser processing prevents the processing from reaching the adhesive sheet (6) of the lower printed wiring board (15). By the above, a multilayer printed wiring board (18) provided with the hollow which embeds an electronic component is manufactured.

このようにして得られた多層プリント配線板の電子部品実装用回路間の絶縁体の目減りは、絶縁層厚の1/10以下に抑えることができた。また、多層プリント配線板10個について、85℃、相対湿度85%の環境下で、窪みの底の100μmピッチの実装用回路間、および当該回路と下層回路間に、直流10Vの電圧を1000時間にわたって印加した結果、1×1011Ω以上の絶縁抵抗が維持された。 The loss of the insulator between the electronic component mounting circuits of the multilayer printed wiring board thus obtained could be suppressed to 1/10 or less of the insulating layer thickness. In addition, for 10 multilayer printed wiring boards, a voltage of DC 10 V was applied for 1000 hours between the mounting circuit with a pitch of 100 μm at the bottom of the recess and between the circuit and the lower layer circuit in an environment of 85 ° C. and 85% relative humidity. As a result, the insulation resistance of 1 × 10 11 Ω or more was maintained.

(実施例4)
図6から図8は、本発明の実施例4により、電子部品用の回路を有する下側プリント配線板(15)と外電支部品を埋め込むための孔を設けた上側プリント配線板(16)を接合することにより、多層プリント配線層(18)の製造方法例を示す一連の断面図である。
Example 4
FIGS. 6 to 8 show a lower printed wiring board (15) having a circuit for electronic components and an upper printed wiring board (16) provided with holes for embedding external power supply components according to the fourth embodiment of the present invention. It is a series of sectional views showing a manufacturing method example of a multilayer printed wiring layer (18) by bonding.

図6は、前記下側プリント配線板(15)を製造する方法を示す。本実施例における下側プリント配線板(15)を形成するまでの工程は、実施例3と同様である。したがって、下側プリント配線板(15)の電子部品実装用の回路パターン(9)の周囲または全面の回路パターンの間隙には、レーザー加工性が悪い絶縁体(10)が充填されている。   FIG. 6 shows a method of manufacturing the lower printed wiring board (15). The steps until the lower printed wiring board (15) is formed in this embodiment are the same as those in the third embodiment. Therefore, an insulator (10) having poor laser processability is filled in the gap between the circuit patterns (9) around the entire printed circuit board (9) for mounting the electronic component on the lower printed wiring board (15).

図7は、前記上側プリント配線板(16)を製造する方法を示す。   FIG. 7 shows a method of manufacturing the upper printed wiring board (16).

(I)下側プリント配線板(15)と同様に、上側プリント配線板(16)を形成する。本実施例では、この段階では、電子部品を埋め込む箇所に孔を設ける加工は施していない。なお、上側プリント配線板(16)にも、接着シートとの密着向上のために、導体層表面の化学処理を行うことが可能である。   (I) The upper printed wiring board (16) is formed in the same manner as the lower printed wiring board (15). In the present embodiment, at this stage, the process of providing a hole at a position where the electronic component is embedded is not performed. The upper printed wiring board (16) can also be subjected to chemical treatment on the surface of the conductor layer in order to improve adhesion with the adhesive sheet.

図8は、前記下側プリント配線板(15)と上側プリント配線板(16)を接合して、電子部品埋込み用の窪みを備える多層プリント配線板(18)を製造する方法を示す。   FIG. 8 shows a method of manufacturing a multilayer printed wiring board (18) having a recess for embedding an electronic component by joining the lower printed wiring board (15) and the upper printed wiring board (16).

(J)接着シート(11)を介して、下側プリント配線板(15)と、上側プリント配線板(16)とを、電極の位置などを位置合わせしながら重ね合わせた後、加熱圧着して、第3の多層プリント配線板中間体(17-1)を形成する。   (J) Via the adhesive sheet (11), the lower printed wiring board (15) and the upper printed wiring board (16) are overlaid while aligning the positions of the electrodes, and then thermocompression bonded. Then, a third multilayer printed wiring board intermediate (17-1) is formed.

このままでは、下側プリント配線板(15)と、上側プリント配線板(16)との電気的接続が取れていない。   In this state, the lower printed wiring board (15) and the upper printed wiring board (16) are not electrically connected.

したがって、
(K)貫通孔(3)を開口する。
Therefore,
(K) Open the through hole (3).

(L)さらに、両プリント配線板を電気的に接続するために、貫通孔(3)の内面をメッキしてスルーホール(4)を形成する。   (L) Furthermore, in order to electrically connect both printed wiring boards, the inner surface of the through hole (3) is plated to form a through hole (4).

(M)さらに、第3の多層プリント配線板中間体(17−1)の上面と下面の銅箔を選択的にエッチングして、外層回路(8)を形成し、第4の多層プリント配線板中間体(17-2)を得る。   (M) Further, the outer multilayer circuit (8) is formed by selectively etching the upper and lower copper foils of the third multilayer printed wiring board intermediate (17-1), and the fourth multilayer printed wiring board. Intermediate (17-2) is obtained.

(N)次に、エンドミル等の刃物により、電子部品を埋め込む窪みの部分を、上側プリント配線板(16)を貫通して、接着シート(11)の中間まで、座ぐる。   (N) Next, with a blade such as an end mill, the recessed portion in which the electronic component is embedded penetrates the upper printed wiring board (16) to the middle of the adhesive sheet (11).

(O)引き続いて、接着シート(11)の窪みの部分に対して、レーザー加工を施し、電子部品実装用の回路パターン(9)を露出させる。この場合、接着シート(11)のレーザー加工性は良好であるが、回路パターン(9)の周囲または全面の回路パターンの間隙に充填された絶縁体(10)のレーザー加工性が悪いため、当該レーザー加工において、下側プリント配線板の接着シート(6)まで加工が及ぶことが防止される。以上により、電子部品を埋め込む窪みを備える多層プリント配線板(18)を製造する。   (O) Subsequently, laser processing is performed on the hollow portion of the adhesive sheet (11) to expose the circuit pattern (9) for mounting the electronic component. In this case, although the laser processability of the adhesive sheet (11) is good, the laser processability of the insulator (10) filled around the circuit pattern (9) or in the gap between the circuit patterns on the entire surface is poor. In the laser processing, the processing is prevented from reaching the adhesive sheet (6) of the lower printed wiring board. By the above, a multilayer printed wiring board (18) provided with the hollow which embeds an electronic component is manufactured.

このようにして得られた多層プリント配線板の電子部品実装用回路間の絶縁体の目減りは、絶縁層厚の1/10以下に抑えることができた。また、多層プリント配線板10個について、85℃、相対湿度85%の環境下で、窪みの底の100μmピッチの実装用回路間、および当該回路と下層回路間に、直流10Vの電圧を1000時間にわたって印加した結果、1×1011Ω以上の絶縁抵抗が維持された。 The loss of the insulator between the electronic component mounting circuits of the multilayer printed wiring board thus obtained could be suppressed to 1/10 or less of the insulating layer thickness. In addition, for 10 multilayer printed wiring boards, a voltage of DC 10V was applied for 1000 hours between the mounting circuit of 100 μm pitch at the bottom of the recess and between the circuit and the lower layer circuit in an environment of 85 ° C. and 85% relative humidity. As a result, the insulation resistance of 1 × 10 11 Ω or more was maintained.

本発明の実施例1に係る多層プリント配線板の製造方法を示す一連の断面図である。It is a series of sectional views showing a manufacturing method of a multilayer printed wiring board concerning Example 1 of the present invention. 本発明の実施例2に係る多層プリント配線板の製造方法を示す一連の断面図である。It is a series of sectional views showing a method for manufacturing a multilayer printed wiring board according to Example 2 of the present invention. 本発明の実施例3に係る下側プリント配線板の製造方法を示す一連の断面図である。It is a series of sectional views showing a method for manufacturing a lower printed wiring board according to Example 3 of the present invention. 本発明の実施例3に係る上側プリント配線板の製造方法を示す一連の断面図である。It is a series of sectional views showing a manufacturing method of the upper side printed wiring board according to Example 3 of the present invention. 本発明の実施例3に係る多層プリント配線板の製造方法を示す一連の断面図である。It is a series of sectional views showing a method for manufacturing a multilayer printed wiring board according to Example 3 of the present invention. 本発明の実施例4に係る下側プリント配線板の製造方法を示す一連の断面図である。It is a series of sectional views showing a manufacturing method of a lower printed wiring board according to Example 4 of the present invention. 本発明の実施例4に係る上側プリント配線板の製造方法を示す断面図である。It is sectional drawing which shows the manufacturing method of the upper side printed wiring board which concerns on Example 4 of this invention. 本発明の実施例4に係る多層プリント配線板の製造方法を示す断面図である。It is sectional drawing which shows the manufacturing method of the multilayer printed wiring board which concerns on Example 4 of this invention. 本発明の実施例2の製造方法により作製された多層プリント配線板を示す断面図である。It is sectional drawing which shows the multilayer printed wiring board produced by the manufacturing method of Example 2 of this invention.

符号の説明Explanation of symbols

1 絶縁体基板
2 銅箔
3 貫通孔
4 スルーホール
5 内層配線
6 接着シート
7 マイクロビア
8 外層配線
9 電子部品実装用の回路
10 絶縁体
11 接着シート
12 孔
13 電子部品埋込み用の窪み
14−1 第1の多層プリント配線板中間体
14−2 第2の多層プリント配線板中間体
15 下側プリント配線板
16 上側プリント配線板
17−1 第3の多層プリント配線板中間体
17−2 第4の多層プリント配線板中間体
18 多層プリント配線板
DESCRIPTION OF SYMBOLS 1 Insulator board | substrate 2 Copper foil 3 Through-hole 4 Through-hole 5 Inner layer wiring 6 Adhesive sheet 7 Micro via 8 Outer layer wiring 9 Circuit for electronic component mounting 10 Insulator 11 Adhesive sheet 12 Hole 13 Indentation 14-1 for embedding electronic components First multilayer printed wiring board intermediate 14-2 Second multilayer printed wiring board intermediate 15 Lower printed wiring board 16 Upper printed wiring board 17-1 Third multilayer printed wiring board intermediate 17-2 Fourth Multilayer printed wiring board intermediate 18 Multilayer printed wiring board

Claims (7)

電子部品実装用の回路パターンを挟んで、内側の第1の絶縁体層と、外側の第2の絶縁体層を有し、第2の絶縁体層に電子部品埋込み用の窪みを形成し、当該窪みの底部において前記電子部品実装用の回路パターンを露出させる多層プリント配線板の製造方法において、前記電子部品実装用の回路パターンより内側にある第1の絶縁体層にレーザー加工されにくい絶縁体を用い、前記電子部品実装用の回路パターンより外側にある第2の絶縁体層にレーザー加工されやすい絶縁体を用い、該第2の絶縁体層の一部をレーザー加工により除去して前記窪みを形成することを特徴とする電子部品埋込み用の窪みを備える多層プリント配線板の製造方法。   Sandwiching a circuit pattern for mounting an electronic component, and having an inner first insulator layer and an outer second insulator layer, forming a recess for embedding an electronic component in the second insulator layer; In the manufacturing method of the multilayer printed wiring board in which the circuit pattern for mounting the electronic component is exposed at the bottom of the recess, the insulator that is difficult to be laser-processed on the first insulator layer inside the circuit pattern for mounting the electronic component And using the insulator that is easily laser-processed for the second insulator layer outside the circuit pattern for mounting the electronic component, and removing the part of the second insulator layer by laser processing to form the depression A method of manufacturing a multilayer printed wiring board having a recess for embedding an electronic component, characterized in that: 電子部品実装用の回路パターンの外側に絶縁体層を有し、該絶縁体層に電子部品埋込み用の窪みを形成し、当該窪みの底部において電子部品実装用の回路パターンを露出させる多層プリント配線板の製造方法において、前記電子部品実装用の回路パターンの間隙にレーザー加工されにくい絶縁体を充填し、前記電子部品実装用の回路パターンより外側にある絶縁体層にレーザー加工されやすい絶縁体を用いて、該絶縁体層の一部をレーザー加工により除去して前記窪みを形成することを特徴とする電子部品埋込み用の窪みを備える多層プリント配線板の製造方法。   Multilayer printed wiring having an insulator layer outside a circuit pattern for mounting an electronic component, forming a recess for embedding the electronic component in the insulator layer, and exposing the circuit pattern for mounting the electronic component at the bottom of the recess In the board manufacturing method, an insulator that is difficult to be laser-processed is filled in a gap between the circuit patterns for mounting electronic components, and an insulator that is easily laser-processed is formed on an insulator layer outside the circuit pattern for mounting electronic components. A method of manufacturing a multilayer printed wiring board having a recess for embedding an electronic component, wherein the recess is formed by removing a part of the insulator layer by laser processing. 電子部品を埋め込むための孔を有する上側プリント配線板と、電子部品実装用の回路パターンを備える下側プリント配線板とを、接着剤層を介して接合して多層プリント配線板を形成し、レーザー加工により接着剤層の前記孔に対応する部分を除去して、当該窪みの底部において、前記電子部品実装用の回路パターンを露出させる多層プリント配線板の製造方法において、前記電子部品実装用の回路パターンの間隙にレーザー加工されにくい絶縁体を充填することを特徴とする電子部品埋込み用の窪みを備える多層プリント配線板の製造方法。   A multilayer printed wiring board is formed by bonding an upper printed wiring board having holes for embedding electronic components and a lower printed wiring board having a circuit pattern for mounting electronic components via an adhesive layer, and forming a laser. In the method for manufacturing a multilayer printed wiring board, by removing a portion corresponding to the hole of the adhesive layer by processing and exposing the circuit pattern for mounting the electronic component at the bottom of the recess, the circuit for mounting the electronic component is provided. A method of manufacturing a multilayer printed wiring board having a recess for embedding an electronic component, wherein an insulator that is difficult to be laser processed is filled in a gap between patterns. 電子部品を埋め込むための窪みを形成すべき上側プリント配線板と、電子部品実装用の回路パターンを備える下側プリント配線板とを、接着剤層を介して接合して多層プリント配線板を形成し、下側プリント配線板の電子部品実装用の回路パターンの間隙にレーザー加工されにくい絶縁体を充填し、上側プリント配線板の前記孔を形成すべき部分に切削加工、および、その後のレーザー加工を行って、窪みを形成するとともに、前記接着剤層を除去して、当該窪みの底部において、前記電子部品実装用の回路パターンを露出させることを特徴とする電子部品埋込み用の窪みを備える多層プリント配線板の製造方法。   A multilayer printed wiring board is formed by bonding an upper printed wiring board to be provided with a recess for embedding electronic components and a lower printed wiring board having a circuit pattern for mounting electronic components via an adhesive layer. Fill the gap between the circuit patterns for mounting the electronic components on the lower printed wiring board with an insulator that is difficult to laser process, and perform cutting and subsequent laser processing on the portion of the upper printed wiring board where the hole should be formed. A multilayer print provided with a recess for embedding an electronic component, wherein the recess is formed and the adhesive layer is removed to expose the circuit pattern for mounting the electronic component at the bottom of the recess A method for manufacturing a wiring board. 電子部品実装用の回路パターンを挟んで内側の第1の絶縁体層と外側の第2の絶縁体層を有し、第2の絶縁体層に電子部品埋込み用の窪みを形成し、当該窪みの底部において電子部品実装用の回路パターンが露出している多層プリント配線板であって、レーザー加工されにくい絶縁体により第1の絶縁体層が形成され、レーザー加工されやすい絶縁体により第2の絶縁体層が形成され、該第2の絶縁体層に前記窪みが設けられていることを特徴とする電子部品埋込み用の窪みを備える多層プリント配線板。   It has an inner first insulator layer and an outer second insulator layer across a circuit pattern for mounting an electronic component, and a recess for embedding an electronic component is formed in the second insulator layer. A multilayer printed wiring board in which a circuit pattern for mounting an electronic component is exposed at the bottom of the substrate, wherein a first insulator layer is formed by an insulator that is difficult to be laser processed, and a second insulator is formed by an insulator that is easily laser processed. A multilayer printed wiring board comprising a recess for embedding an electronic component, wherein an insulator layer is formed, and the recess is provided in the second insulator layer. レーザー加工による電子部品埋込み用の窪みを有し、当該窪みの底部において電子部品実装用の回路パターンが露出している多層プリント配線板であって、前記電子部品実装用の回路パターンの間隙にレーザー加工されにくい絶縁体が充填されていることを特徴とする電子部品埋込み用の窪みを備える多層プリント配線板。   A multilayer printed wiring board having a recess for embedding an electronic component by laser processing and having a circuit pattern for mounting an electronic component exposed at the bottom of the recess, wherein a laser is inserted in the gap between the circuit patterns for mounting the electronic component. A multilayer printed wiring board provided with a recess for embedding an electronic component, which is filled with an insulator that is difficult to process. 電子部品を埋め込むための孔を有する上側プリント配線板と、電子部品実装用の回路パターンを備える下側プリント配線板とを、接着剤層を介して接合してなる多層プリント配線板において、前記電子部品実装用の回路パターンの間隙にレーザー加工されにくい絶縁体が充填されており、前記電子部品を埋め込むための窪みが上側プリント配線板の前記孔と接着剤層とで形成されることにより、当該窪みの底部において、前記電子部品実装用の回路パターンが露出していることを特徴とする電子部品埋込み用の窪みを備える多層プリント配線板。   In a multilayer printed wiring board in which an upper printed wiring board having a hole for embedding an electronic component and a lower printed wiring board having a circuit pattern for mounting the electronic component are joined via an adhesive layer, the electronic The gap between the circuit patterns for component mounting is filled with an insulator that is difficult to be laser-processed, and a recess for embedding the electronic component is formed by the hole and the adhesive layer of the upper printed wiring board. A multilayer printed wiring board comprising a recess for embedding an electronic component, wherein the circuit pattern for mounting the electronic component is exposed at a bottom of the recess.
JP2003326064A 2003-09-18 2003-09-18 Multilayer printed circuit board having recess for embedding electronic component, and its manufacturing method Pending JP2005093783A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016114775A1 (en) * 2015-01-14 2016-07-21 Hewlett Packard Enterprise Development Lp Forming a recess in a multi-layered device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016114775A1 (en) * 2015-01-14 2016-07-21 Hewlett Packard Enterprise Development Lp Forming a recess in a multi-layered device

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