JP2005081465A5 - - Google Patents
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- JP2005081465A5 JP2005081465A5 JP2003314106A JP2003314106A JP2005081465A5 JP 2005081465 A5 JP2005081465 A5 JP 2005081465A5 JP 2003314106 A JP2003314106 A JP 2003314106A JP 2003314106 A JP2003314106 A JP 2003314106A JP 2005081465 A5 JP2005081465 A5 JP 2005081465A5
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Priority Applications (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003314106A JP4329014B2 (ja) | 2003-09-05 | 2003-09-05 | 微細構造体の製造方法および微細構造体、表示装置、ならびに記録装置の製造方法および記録装置 |
| CNA2004800251485A CN1845872A (zh) | 2003-09-05 | 2004-08-31 | 制造细微结构的方法,细微结构,显示单元,制造记录装置的方法以及记录装置 |
| KR1020067004424A KR20060073611A (ko) | 2003-09-05 | 2004-08-31 | 미세 구조체의 제조 방법 및 미세 구조체, 표시 장치 및기록 장치의 제조 방법 및 기록 장치 |
| PCT/JP2004/012520 WO2005023705A1 (ja) | 2003-09-05 | 2004-08-31 | 微細構造体の製造方法および微細構造体、表示装置、ならびに記録装置の製造方法および記録装置 |
| US10/570,077 US20080315746A1 (en) | 2003-09-05 | 2004-08-31 | Method of Manufacturing Fine Structure, Fine Structure, Display Unit, Method of Manufacturing Recoding Device, and Recoding Device |
| EP04772476A EP1661851A1 (en) | 2003-09-05 | 2004-08-31 | Fine structure body-producing method, fine structure body, display device, recording device-producing method, and recording device |
| TW093126732A TW200526516A (en) | 2003-09-05 | 2004-09-03 | Fine structure body-producing method, fine structure body, display device, recording device-producing method, and recording device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003314106A JP4329014B2 (ja) | 2003-09-05 | 2003-09-05 | 微細構造体の製造方法および微細構造体、表示装置、ならびに記録装置の製造方法および記録装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005081465A JP2005081465A (ja) | 2005-03-31 |
| JP2005081465A5 true JP2005081465A5 (https=) | 2006-12-07 |
| JP4329014B2 JP4329014B2 (ja) | 2009-09-09 |
Family
ID=34269789
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003314106A Expired - Fee Related JP4329014B2 (ja) | 2003-09-05 | 2003-09-05 | 微細構造体の製造方法および微細構造体、表示装置、ならびに記録装置の製造方法および記録装置 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US20080315746A1 (https=) |
| EP (1) | EP1661851A1 (https=) |
| JP (1) | JP4329014B2 (https=) |
| KR (1) | KR20060073611A (https=) |
| CN (1) | CN1845872A (https=) |
| TW (1) | TW200526516A (https=) |
| WO (1) | WO2005023705A1 (https=) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5374801B2 (ja) * | 2004-08-31 | 2013-12-25 | 富士通株式会社 | 炭素元素からなる線状構造物質の形成体及び形成方法 |
| KR100735488B1 (ko) * | 2006-02-03 | 2007-07-04 | 삼성전기주식회사 | 질화갈륨계 발광다이오드 소자의 제조방법 |
| KR101002336B1 (ko) * | 2008-02-04 | 2010-12-20 | 엘지디스플레이 주식회사 | 나노 디바이스, 이를 포함하는 트랜지스터, 나노 디바이스및 이를 포함하는 트랜지스터의 제조 방법 |
| US8084310B2 (en) * | 2008-10-23 | 2011-12-27 | Applied Materials, Inc. | Self-aligned multi-patterning for advanced critical dimension contacts |
| JP5740819B2 (ja) * | 2010-02-22 | 2015-07-01 | 株式会社ニコン | 空間光変調器の製造方法、空間光変調器、照明光発生装置および露光装置 |
| JP5657645B2 (ja) * | 2010-03-31 | 2015-01-21 | 株式会社カネカ | 構造体、局在型表面プラズモン共鳴センサ用チップ、及び局在型表面プラズモン共鳴センサ、並びにこれらの製造方法 |
| CN102324351A (zh) * | 2011-09-07 | 2012-01-18 | 郑州航空工业管理学院 | 一种新型碳纳米管场发射冷阴极及其制造方法 |
| US8557675B2 (en) | 2011-11-28 | 2013-10-15 | Globalfoundries Inc. | Methods of patterning features in a structure using multiple sidewall image transfer technique |
| US8669186B2 (en) | 2012-01-26 | 2014-03-11 | Globalfoundries Inc. | Methods of forming SRAM devices using sidewall image transfer techniques |
| JP5888685B2 (ja) * | 2014-07-01 | 2016-03-22 | 国立大学法人名古屋大学 | カーボンナノウォールを用いた電子デバイス |
| CN104900802B (zh) * | 2015-04-27 | 2018-02-13 | 江苏多维科技有限公司 | 用于自旋电子器件钉扎层的快速热处理方法和装置 |
| CN112233702B (zh) * | 2020-10-26 | 2021-10-01 | 东北师范大学 | 一种水凝胶修饰的高稳定碳基全息光盘的制备方法及应用 |
| CN115841933B (zh) * | 2023-02-24 | 2023-04-21 | 四川新能源汽车创新中心有限公司 | 冷阴极尖锥及其制备方法、冷阴极尖锥阵列及其制备方法 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06204034A (ja) * | 1992-12-25 | 1994-07-22 | Sony Corp | 磁性素子及びその製造方法 |
| JPH08321085A (ja) * | 1995-03-23 | 1996-12-03 | Sony Corp | 極微小構造素子、その製造方法、記録方法、情報伝達方法、配線及び論理素子 |
| EP1135792A4 (en) * | 1998-09-28 | 2005-06-08 | Xidex Corp | METHOD FOR PRODUCING CARBON NANOROES AS FUNCTIONAL ELEMENTS OF MEMS COMPONENTS |
| US6146227A (en) * | 1998-09-28 | 2000-11-14 | Xidex Corporation | Method for manufacturing carbon nanotubes as functional elements of MEMS devices |
| EP1072693A1 (en) * | 1999-07-27 | 2001-01-31 | Iljin Nanotech Co., Ltd. | Chemical vapor deposition apparatus and method of synthesizing carbon nanotubes using the apparatus |
| US6401526B1 (en) * | 1999-12-10 | 2002-06-11 | The Board Of Trustees Of The Leland Stanford Junior University | Carbon nanotubes and methods of fabrication thereof using a liquid phase catalyst precursor |
| JP2003115259A (ja) * | 2001-10-03 | 2003-04-18 | Sony Corp | 電子放出装置及びその製造方法、冷陰極電界電子放出素子及びその製造方法、冷陰極電界電子放出表示装置及びその製造方法、並びに、薄膜のエッチング方法 |
-
2003
- 2003-09-05 JP JP2003314106A patent/JP4329014B2/ja not_active Expired - Fee Related
-
2004
- 2004-08-31 WO PCT/JP2004/012520 patent/WO2005023705A1/ja not_active Ceased
- 2004-08-31 EP EP04772476A patent/EP1661851A1/en not_active Withdrawn
- 2004-08-31 US US10/570,077 patent/US20080315746A1/en not_active Abandoned
- 2004-08-31 CN CNA2004800251485A patent/CN1845872A/zh active Pending
- 2004-08-31 KR KR1020067004424A patent/KR20060073611A/ko not_active Withdrawn
- 2004-09-03 TW TW093126732A patent/TW200526516A/zh unknown