JP2005072757A5 - - Google Patents

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Publication number
JP2005072757A5
JP2005072757A5 JP2003297275A JP2003297275A JP2005072757A5 JP 2005072757 A5 JP2005072757 A5 JP 2005072757A5 JP 2003297275 A JP2003297275 A JP 2003297275A JP 2003297275 A JP2003297275 A JP 2003297275A JP 2005072757 A5 JP2005072757 A5 JP 2005072757A5
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JP
Japan
Prior art keywords
vibrator
resonator
electromechanical resonator
temperature
voltage
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JP2003297275A
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English (en)
Japanese (ja)
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JP4442158B2 (ja
JP2005072757A (ja
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Priority to JP2003297275A priority Critical patent/JP4442158B2/ja
Priority claimed from JP2003297275A external-priority patent/JP4442158B2/ja
Publication of JP2005072757A publication Critical patent/JP2005072757A/ja
Publication of JP2005072757A5 publication Critical patent/JP2005072757A5/ja
Application granted granted Critical
Publication of JP4442158B2 publication Critical patent/JP4442158B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2003297275A 2003-08-21 2003-08-21 マイクロ電気機械システムの共振器およびその駆動方法 Expired - Fee Related JP4442158B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003297275A JP4442158B2 (ja) 2003-08-21 2003-08-21 マイクロ電気機械システムの共振器およびその駆動方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003297275A JP4442158B2 (ja) 2003-08-21 2003-08-21 マイクロ電気機械システムの共振器およびその駆動方法

Publications (3)

Publication Number Publication Date
JP2005072757A JP2005072757A (ja) 2005-03-17
JP2005072757A5 true JP2005072757A5 (https=) 2006-07-06
JP4442158B2 JP4442158B2 (ja) 2010-03-31

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003297275A Expired - Fee Related JP4442158B2 (ja) 2003-08-21 2003-08-21 マイクロ電気機械システムの共振器およびその駆動方法

Country Status (1)

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JP (1) JP4442158B2 (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4760384B2 (ja) * 2006-01-10 2011-08-31 セイコーエプソン株式会社 Ｍｅｍｓ振動子
EP2037574A1 (en) * 2006-06-15 2009-03-18 Koichi Hirama Composite resonator
JP4930769B2 (ja) * 2006-09-04 2012-05-16 セイコーインスツル株式会社 発振器
JP4945204B2 (ja) * 2006-09-08 2012-06-06 株式会社東芝 アクチュエータ
JP4690436B2 (ja) * 2008-05-01 2011-06-01 株式会社半導体理工学研究センター Ｍｅｍｓ共振器、ｍｅｍｓ発振回路及びｍｅｍｓデバイス
JP5344175B2 (ja) * 2009-12-22 2013-11-20 セイコーエプソン株式会社 Ｍｅｍｓ発振器及びその製造方法

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