JP2005056869A - Transfer-type substrate stage of aligner - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a transfer-type substrate stage of an aligner which is capable of transferring a tape substrate as an object of exposure and of arranging tape substrates of several sizes at an accurate position before an exposure operation is carried out. <P>SOLUTION: The transfer-type substrate stage of the aligner comprises: a base; a transfer means which is set movable in the widthwise direction of the tape substrate corresponding to the size of it introduced onto the top surface of the base and capable of moving the tape substrate in its lengthwise direction restraining both its side ends from moving in a vertical direction; an alignment means which is arranged in interlock with the transfer means and capable of moving the tape substrate to an accurate position restraining both its sides from moving in its widthwise direction; and a vacuum plate which is arranged on the top surface of the base to suck up and fix the tape substrate transferred to a working position by the transfer means and the alignment means. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an exposure apparatus that forms a pattern on a tape substrate using ultraviolet rays. In particular, the present invention relates to an exposure apparatus that transports a tape substrate, which is an object of an exposure operation, and accurately positions objects of various sizes before the exposure operation. The present invention relates to a transfer-type substrate stage of an exposure apparatus that is arranged on the substrate.
[0002]
[Prior art]
In general, an exposure apparatus is used in a process for manufacturing a PDP, S / M (Shadow Mask), PCB, C / F (Color Filter), LCD, semiconductor, etc., and includes a mask, an illumination system, and an adjustment stage. Then, a pattern is formed on the tape substrate using a mercury lamp that emits ultraviolet rays.
FIG. 1 is a front view showing a general exposure apparatus.
[0003]
In general, as shown in FIG. 1, the exposure apparatus includes a mercury lamp 12 that emits ultraviolet rays and a condenser mirror 14 that allows the ultraviolet rays emitted from the mercury lamp 12 to travel in one direction. An optical system 10 that forms a pattern by irradiating the tape substrate 40 with ultraviolet rays emitted from the lamp 12 through a photomask, and the tape substrate 40 is exposed to the ultraviolet rays radiated by the optical system 10. And a transfer substrate stage that is exposed to ultraviolet rays so that a highly accurate pattern is formed while the tape substrate 40 is placed at an accurate position.
[0004]
Here, the transfer substrate stage is moved by the transfer device 20, the base 1, the transfer device 20 installed on the base 1 to move the tape substrate 40 along the upper surface of the base, and the transfer device 20. And an alignment device 30 that positions the tape substrate 40 at an accurate position so that the tape substrate 40 is exposed to ultraviolet rays emitted from the optical system 10 to form a highly accurate pattern.
[0005]
The transfer device 20 is installed on the inlet side and the outlet side of the base so that the tape substrate supplied from the first reel 22 around which the tape substrate 40 is wound is supplied horizontally to the upper surface of the base 1. Between the pair of guide rollers 24 and the pair of guide rollers 24 so that the tape substrate 40 is disposed in parallel at a portion where the tape substrate 40 is exposed to ultraviolet rays. The guide roller 24 and the second reel 28 that is driven to wind the tape substrate 40 that has passed through the support roller 26 are configured.
[0006]
The aligning device 30 is installed between the two pairs of support rollers 26 and can be raised or lowered so as to be in contact with the lower surface of the tape substrate 40, thereby accurately positioning the tape substrate 40 before the exposure operation. An alignment pin portion 32 that is arranged at various positions to form a highly accurate pattern, and a pneumatic cylinder 36 that allows the alignment pin portion 32 installed at the upper end of the cylinder arm 34 to move in the vertical direction. And is configured.
[0007]
The pneumatic cylinder 36 is connected to a hydraulic pressure generator 36a that raises or lowers the cylinder arm 34 by supplying compressed air to the upper and lower sides of the cylinder head.
[0008]
FIG. 2 is a plan view showing a tape substrate on which a pattern is formed on a general exposure apparatus, FIG. 3A is a side view showing an alignment apparatus of an exposure apparatus according to the prior art, and FIG. FIG. 4A is an operation diagram showing an aligner of an exposure apparatus according to the prior art, FIG. 4A is a plan view showing a fixing pin of the exposure apparatus according to the prior art, and FIG. 4B is an exposure apparatus according to the prior art. It is a front view which shows this fixing pin.
[0009]
As shown in FIGS. 2 to 4 (b), the tape substrate 40 is formed with a plurality of continuous holes 42 at both ends thereof, and is positioned between the support rollers 26 by the transfer device 20. The alignment pin portion 32 is raised and inserted into the hole 42 so that the alignment pin portion 32 is disposed at an accurate position.
[0010]
Here, the alignment pin portion 32 includes a main body 32a fixed to the upper end of the cylinder arm 34 of the hydraulic cylinder 36, a number of pins 32b protruding upward from the upper surface of the main body 32a, and the tape substrate 40. A plurality of vacuum holes 32 c formed on one side of the main body 32 a and connected to the vacuum generator 38 are configured to adsorb the tape substrate 40 when the arrangement is completed.
[0011]
According to such a configuration, the alignment pin portion 32 is raised by the cylinder 36 and inserted into the hole 42 of the tape substrate to perform the alignment operation, and the vacuum generator 38 is driven to suck the tape substrate 40. Let
When the alignment pin portion 32 is lowered by the cylinder 36, the tape substrate 40 is released from the restraint by the pin 32 b and can be moved by the transfer device 20.
[0012]
However, in the transfer-type substrate stage of the exposure apparatus according to the prior art, the tape substrate 40 is aligned by the alignment pin portion 32 whose shape cannot be changed. The alignment pin portion 32, the guide roller 24, the support roller 26 and the like have to be replaced, and it takes a long time to replace the new product with a model, resulting in a decrease in production capacity. there were.
[0013]
[Problems to be solved by the invention]
The present invention has been made in view of the above-described problems of the prior art. By improving the structure of the transfer-type substrate stage so that the positions of the guide roller, the support roller, and the aligning means can be changed, the components can be obtained. Various types of tape substrates can be transferred without being replaced, and can be aligned at the correct position. Therefore, the transferable substrate stage of the exposure apparatus can save time and cost for replacing with a new product model. The purpose is to provide.
[0014]
[Means for Solving the Problems]
In order to achieve the above object, the transfer substrate stage of the exposure apparatus according to the present invention is movable in the width direction of the tape substrate in accordance with the size of the base and the tape substrate put on the upper surface of the base. And a transfer means that moves while restraining both side ends of the tape substrate in the vertical direction, and a tape that is provided so as to interlock with the transfer means and restricts both side surfaces of the tape substrate in the width direction. Alignment means for moving the substrate to an accurate position, and the tape substrate is provided on the upper surface of the base, and the tape substrate is sucked so that the transfer substrate and the tape substrate transferred to the working position by the alignment means are fixed. A vacuum plate.
[0015]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, an embodiment of a transfer substrate stage of an exposure apparatus according to the present invention will be described in detail with reference to the accompanying drawings.
FIG. 5A is a plan view showing a transfer substrate stage of the exposure apparatus according to the present invention, and FIG. 5B is a front view showing the transfer substrate stage of the exposure apparatus according to the present invention.
[0016]
As shown in FIGS. 5A and 5B, the transfer substrate stage of the exposure apparatus according to the present invention moves the base 50 and the tape substrate 90 thrown along the upper surface of the base 50. In particular, when the tape substrate 90 of different sizes is moved, the transfer device 60 is provided so as to be able to move in the width direction of the tape substrate 90 and move the tape substrates 90 of various sizes. , And an alignment device 70 which is provided so as to be interlocked with the transfer device 60 and restrains both side surfaces of the tape substrate 90 so that the tape substrate 90 is moved to an accurate position.
[0017]
Further, suction holes formed in the upper surface of the base 50 are formed on the surface so that the tape substrate 90 is fixed when the tape substrate 90 is supplied to an accurate position by the transfer device 60 and the alignment device 70. A vacuum plate 80 for sucking air through 81 is installed.
[0018]
FIG. 6 is a side view showing a transfer device of the exposure apparatus according to the present invention.
As shown in FIG. 6, the transfer device 60 includes a drive unit 61 that is arranged in pairs on the rear side of the base 50 and moves both sides of the tape substrate 90 that moves along the upper surface while restraining the drive unit 61. And a driven portion 67 that is disposed in pairs on the front side of the plate 50, meshes with both side ends of the tape substrate 90, and is rotated according to the tape substrate 90 transferred by the driving unit 61.
[0019]
The drive unit 61 is installed such that upper and lower drive rollers 62a and 62b engaged with the upper and lower surfaces of the tape substrate 90 can rotate in the moving direction of the tape substrate 90, and the lower drive roller 62b rotates. A driven pulley 63 installed on the shaft, a driving pulley 65 connected via a timing belt 64 so as to be interlocked with the driven pulley 63, and a rotating shaft 66a inserted in the center of the driving pulley 65 for rotation. And a motor 66 for generating a force.
[0020]
Here, since the gear teeth corresponding to each other are formed on the outer peripheral surfaces of the upper drive roller 62a and the lower drive roller 62b, the upper drive roller 62a rotates while meshing with the lower drive roller 62b. .
Further, since the drive pulleys 65 are formed in pairs so as to face the rotation shaft 66a of the motor 66, each drive pulley 65 can be formed long in the width direction of the base 50, and the driven pulley 65 Even when the pulley 63 and the driving roller 62 are moved in the front-rear direction of the base 50, the timing belt 64 can slide along the outer peripheral surface of the driving pulley 65 and transmit the rotational force of the driving pulley 65 to the driven pulley 63. .
[0021]
The driven portion 67 is arranged in pairs with upper and lower driven rollers 68a and 68b meshing with the upper and lower surfaces of the tape substrate 90, and is rotated according to the tape substrate 90 transferred by the driving unit 61.
That is, the tape substrate 90 meshes with the drive unit 61 located on the rear side of the base 50 and is moved from the front to the rear, but the driven portion 67 located on the front side of the drive unit 61 has the tape substrate 90. The tape substrate 90 is driven to move with the movement of the tape substrate 90. Therefore, when the drive unit 61 rotates, tension is always applied between the drive unit 61 and the driven unit 67 so that the tape substrate 90 does not hang down. Can proceed.
[0022]
FIG. 7 is a side view showing the aligner of the exposure apparatus according to the present invention.
In the aligning device 70, the driving roller 62 and the driven pulley 63 are installed so that the tape substrate 90 transported by the driving unit 61 is placed at an accurate position before being exposed to ultraviolet rays. Depending on the width of the tape substrate 90 that is installed on one side of the moving stage 75 and is supplied so as to face the upper side of the base 50 so as to be variable. And a control unit (not shown) that senses the width of the tape substrate 90 when the tape substrate 90 is supplied to the base 50 and sends a drive signal to the drive unit. And the interval of the moving stage 75 is adjusted in accordance with the sensed width of the tape substrate 90.
[0023]
The drive means includes an alignment motor 77 installed on one side of the base 50, and a drive shaft 78 connected to the alignment motor 77 and formed with a screw whose opposite sides run in the opposite direction around the center. A pair of ball bearings 79 coupled to both sides of the drive shaft 78 and fixed to one side of the moving stage 75, and when the alignment motor 77 is driven in one direction, When the distance between the moving stages 75 is reduced and the alignment motor 77 is driven in the other direction, the distance between the moving stages 75 is increased.
[0024]
The alignment device 70 is installed so as to be movable in the width direction of the base 50, and is installed at a plurality of guide bars 71 that restrain both side surfaces of the tape substrate 90 in the width direction, and at the tip of the guide bar 71. And a guide plate 72 disposed on the upper surface and the lower surface of the tape substrate 90 so as to be separated from each other by a predetermined distance and blocking vertical vibrations of the tape substrate 90 restrained by the guide bar 71.
[0025]
Meanwhile, multiple rows of rails 52 are installed on the lower surface of the base 50 in the width direction of the base 50, and the lower end of the moving stage 75 corresponds to the rails 52 so as to slide along the rails 52. A plurality of rail guides 76 are formed so that the moving stage 75 can be easily moved on the upper side of the base 50 when the alignment motor 77 is operated.
[0026]
The alignment device 70 is installed on the inlet side and the outlet side of the base 50, and supports the lower side of the tape substrate 90 so that the tape substrate 90 is supplied horizontally, thereby preventing the roller 73 from drooping. Further included.
[0027]
The operation of the transfer substrate stage of the exposure apparatus configured as described above will be described as follows.
First, when power is applied, the motor 66 is driven and the drive pulley 65, the driven pulley 63 and the drive roller 61 are interlocked to supply the tape substrate 90 between a pair of the drive rollers 61, and the control unit A width of the tape substrate 90 supplied by a sensor (not shown) is sensed and a control signal is transmitted to the alignment motor 77.
After that, when the alignment motor 77 is driven in accordance with the input signal, the ball bearing 79 is moved while the drive shaft 78 formed with screws in different directions is rotated, so that the moving stage 75 is moved. The distance between them is adjusted.
[0028]
When the distance between the moving stages 75 is adjusted in this way, the tape substrate 90 is moved to an accurate position by the guide bar 71 installed on the moving stage 75, and the tape substrate 90 advances to an accurate exposure position. After that, the tape substrate 90 is fixed at the working position while air is sucked through the suction holes 81 of the vacuum plate 80.
[0029]
In the above detailed description, the transfer substrate stage of the exposure apparatus according to the present invention has been described with reference to the accompanying drawings, but the present invention is not limited to the embodiments and drawings disclosed in the present specification. It goes without saying that various modifications including materials can be made by those skilled in the art within the scope of the technical idea.
[0030]
【The invention's effect】
The transfer type substrate stage of the exposure apparatus according to the present invention configured as described above has a pair of moving stages provided with a driving roller for transferring the tape substrate and a guide bar for supplying the tape substrate to an accurate position. The distance between the moving stages can be adjusted according to the width of the tape substrate supplied from one side of the base by installing it so that the distance can be adjusted on the front side and the rear side. As a result, even when the product model is changed, a high-productivity exposure operation can be realized without changing the transfer device and the alignment device. Can do.
[Brief description of the drawings]
FIG. 1 is a front view showing a main part of a general exposure apparatus.
FIG. 2 is a plan view of a substrate manufactured by a general exposure apparatus.
FIG. 3A is a side view showing an aligner of an exposure apparatus according to the prior art.
(B) Operation | movement figure which shows the aligning apparatus of the exposure apparatus which concerns on a prior art.
FIG. 4A is a plan view showing a fixing pin portion of an exposure apparatus according to the prior art.
(B) The front view which shows the fixing pin part of the exposure apparatus which concerns on a prior art.
FIG. 5A is a plan view showing a transfer substrate stage of the exposure apparatus according to the present invention.
(B) The front view which shows the transfer-type substrate stage of the exposure apparatus which concerns on this invention.
FIG. 6 is a side view showing a transfer device of the exposure apparatus according to the present invention.
FIG. 7 is a side view showing alignment means of the exposure apparatus according to the present invention.
[Explanation of symbols]
50 base 52 rail 60 transfer device 61 drive unit 62 drive roller 63 driven pulley 64 timing belt 65 drive pulley 66a rotary shaft 66 motor 67 driven unit 68 driven roller 70 alignment device 71 guide bar 72 guide plate 73 guide roller 75 moving stage 76 rail Guide 77 Alignment motor 78 Drive shaft 79 Ball bearing 80 Vacuum plate 81 Adsorption hole 90 Tape substrate

Claims (11)

With the base;
Transfer means for moving both side ends of the tape substrate placed on the upper surface of the base while restraining the tape substrate in the vertical direction;
Alignment means provided to be interlocked with the transfer means and restraining both side surfaces of the tape substrate in the width direction so that the tape substrate is moved to an accurate position;
An exposure apparatus comprising: a vacuum plate that is installed on an upper surface of the base and sucks the tape substrate so that the tape substrate transferred to the working position by the transfer unit and the alignment unit is fixed. Transportable substrate stage. 2. The transfer type substrate stage of an exposure apparatus according to claim 1, wherein the transfer means is installed so as to be movable in the width direction of the tape substrate according to the size of the tape substrate. The transfer means is disposed in pairs on the rear side of the base, and is a drive unit that transfers while restraining both side ends of the tape substrate;
And a driven portion that is arranged in pairs on the front side of the base, engages with both side edges of the tape substrate, and rotates according to the tape substrate transferred by the driving unit. 3. A transfer type substrate stage of the exposure apparatus according to 2. The drive unit is engaged with the upper and lower surfaces of the tape substrate, and upper and lower drive rollers are installed so as to be rotatable in the moving direction of the tape substrate;
A driven pulley installed on a drive roller rotating shaft of any of the upper and lower drive rollers;
A drive pulley connected by a timing belt so as to be interlocked with the driven pulley; and a motor that generates a rotational force by inserting a rotation shaft in a central portion of the drive pulley. A transfer type substrate stage of an exposure apparatus according to claim 3. The transfer substrate stage of the exposure apparatus is configured such that a pair of driving pulleys are installed on a rotating shaft of the motor, and the timing belt is slidably installed along an outer peripheral surface of the driving pulley. 5. The transfer substrate stage of an exposure apparatus according to claim 4, wherein the transfer substrate stage is long in the width direction. The said driven part was comprised from the upper and lower driven roller installed so that it might each mesh with the upper and lower surfaces of the said tape board | substrate, and might be rotated according to the transfer of the said tape board | substrate. Transfer substrate stage for exposure equipment. The alignment means includes a moving stage installed in pairs on the front side and the rear side of the base so that the distance between them can be varied by installing the driving roller and the driven pulley;
Drive means installed on one side of the moving stage and adjusting the distance between the moving stages according to the width of the tape substrate supplied;
The control unit according to claim 1, further comprising: a control unit that senses the width of the tape substrate when the tape substrate is supplied to the base and transmits a drive signal to the driving unit. Transfer substrate stage for exposure equipment. The drive means includes a drive motor installed on one side of the base, a drive shaft connected to the drive motor, and a screw formed on both sides of the drive shaft in opposite directions, and both sides of the drive shaft. And a pair of ball bearings fixed to one side of the moving stage, and
8. The exposure according to claim 7, wherein when the motor is driven in one direction, the interval between the moving stages is narrowed, and when the motor is driven in the other direction, the interval between the moving stages is increased. Transfer substrate stage of the device. A plurality of rails are installed on the lower surface of the base in the width direction of the base, and a plurality of rail guides corresponding to the rails are formed at the lower end of the moving stage so as to slide along the rails. 8. The transfer substrate stage of an exposure apparatus according to claim 7, wherein the transfer substrate stage is an exposure apparatus. A plurality of guide bars installed so as to be movable in the width direction of the base and restraining both side surfaces of the tape in the width direction;
A guide plate that is installed at the tip of the guide bar and is arranged at a predetermined distance from the upper and lower surfaces of the tape substrate to block vertical vibration of the tape substrate restrained by the guide bar. 8. The transfer substrate stage of an exposure apparatus according to claim 7, wherein The alignment apparatus further includes guide rollers that are installed on an inlet side and an outlet side of the base and support a lower side of the tape substrate so that the tape substrate is horizontally supplied to an upper surface of the base. A transfer type substrate stage of an exposure apparatus according to claim 7.

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