JP2005042709A5 - - Google Patents

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Publication number
JP2005042709A5
JP2005042709A5 JP2004173085A JP2004173085A JP2005042709A5 JP 2005042709 A5 JP2005042709 A5 JP 2005042709A5 JP 2004173085 A JP2004173085 A JP 2004173085A JP 2004173085 A JP2004173085 A JP 2004173085A JP 2005042709 A5 JP2005042709 A5 JP 2005042709A5
Authority
JP
Japan
Prior art keywords
blade
main shaft
fixed
vacuum pump
spiral
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004173085A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005042709A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2004173085A priority Critical patent/JP2005042709A/ja
Priority claimed from JP2004173085A external-priority patent/JP2005042709A/ja
Priority to US10/887,234 priority patent/US7645126B2/en
Priority to EP04016346A priority patent/EP1496263A3/en
Publication of JP2005042709A publication Critical patent/JP2005042709A/ja
Publication of JP2005042709A5 publication Critical patent/JP2005042709A5/ja
Pending legal-status Critical Current

Links

JP2004173085A 2003-07-10 2004-06-10 真空ポンプ Pending JP2005042709A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2004173085A JP2005042709A (ja) 2003-07-10 2004-06-10 真空ポンプ
US10/887,234 US7645126B2 (en) 2003-07-10 2004-07-09 Vacuum pump and semiconductor manufacturing apparatus
EP04016346A EP1496263A3 (en) 2003-07-10 2004-07-12 Vacuum pump and semiconductor manufacturing apparatus

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003195407 2003-07-10
JP2004173085A JP2005042709A (ja) 2003-07-10 2004-06-10 真空ポンプ

Publications (2)

Publication Number Publication Date
JP2005042709A JP2005042709A (ja) 2005-02-17
JP2005042709A5 true JP2005042709A5 (enExample) 2006-08-24

Family

ID=33455617

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004173085A Pending JP2005042709A (ja) 2003-07-10 2004-06-10 真空ポンプ

Country Status (3)

Country Link
US (1) US7645126B2 (enExample)
EP (1) EP1496263A3 (enExample)
JP (1) JP2005042709A (enExample)

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US7717684B2 (en) * 2003-08-21 2010-05-18 Ebara Corporation Turbo vacuum pump and semiconductor manufacturing apparatus having the same
DE602004025916D1 (de) * 2004-07-20 2010-04-22 Varian Spa Rotationsvakuumpumpe und ihr Auswuchtverfahren
US7645116B2 (en) * 2005-04-28 2010-01-12 Ebara Corporation Turbo vacuum pump
JP4711185B2 (ja) * 2006-02-27 2011-06-29 株式会社デンソー 半導体装置の異物除去装置及び異物除去方法
DE102006043327A1 (de) * 2006-09-15 2008-03-27 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
JP5764283B2 (ja) * 2007-12-27 2015-08-19 エドワーズ株式会社 真空ポンプ
DE102008024764A1 (de) * 2008-05-23 2009-11-26 Oerlikon Leybold Vacuum Gmbh Mehrstufige Vakuumpumpe
DE102008035891A1 (de) * 2008-07-31 2010-02-04 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
JP5369591B2 (ja) 2008-10-03 2013-12-18 株式会社島津製作所 ターボ分子ポンプ
DE102008056352A1 (de) * 2008-11-07 2010-05-12 Oerlikon Leybold Vacuum Gmbh Vakuumpumpenrotor
WO2010061939A1 (ja) * 2008-11-25 2010-06-03 株式会社 荏原製作所 ドライ真空ポンプユニット
JP2010127119A (ja) * 2008-11-25 2010-06-10 Ebara Corp ドライ真空ポンプユニット
JP5562058B2 (ja) * 2010-02-04 2014-07-30 株式会社荏原製作所 ターボ分子ポンプ
CN102834620B (zh) * 2010-09-28 2016-03-02 埃地沃兹日本有限公司 排气泵
US9080576B2 (en) * 2011-02-13 2015-07-14 Applied Materials, Inc. Method and apparatus for controlling a processing system
JP6054089B2 (ja) * 2011-08-19 2016-12-27 東芝メディカルシステムズ株式会社 超音波診断装置、医用画像処理装置および医用画像処理プログラム
EP2775148B1 (en) * 2011-10-31 2019-03-27 Edwards Japan Limited Stationary member and vacuum pump
GB2498816A (en) 2012-01-27 2013-07-31 Edwards Ltd Vacuum pump
US10100414B2 (en) 2012-01-30 2018-10-16 General Electric Company Surface modified magnetic material
JP6190580B2 (ja) * 2012-09-13 2017-08-30 エドワーズ株式会社 真空ポンプの回転部及び真空ポンプ
DE102012110029A1 (de) * 2012-10-19 2014-04-24 Atlas Copco Energas Gmbh Turbomaschine zur Verdichtung eines gas- oder dampfförmigen Fluids
EP2757266B1 (en) * 2013-01-22 2016-03-16 Agilent Technologies, Inc. Rotary vacuum pump
DE102013100853A1 (de) * 2013-01-29 2014-07-31 Pfeiffer Vacuum Gmbh Verfahren zum Beschichten und/oder Lackieren von Magnetringen eines Rotor-Magnetlagers, Rotor-Magnetlager sowie Vakuumpumpe
US8950649B2 (en) * 2013-03-14 2015-02-10 Us Synthetic Corporation Apparatus for brazing radial bearings and related methods
WO2015055374A1 (en) * 2013-10-16 2015-04-23 Asml Netherlands B.V. Radiation source, lithographic apparatus device manufacturing method, sensor system and sensing method
DE102013114290A1 (de) * 2013-12-18 2015-06-18 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102014109004A1 (de) * 2014-06-26 2015-12-31 Pfeiffer Vacuum Gmbh Siegbahnstufe
DE102014112553A1 (de) * 2014-09-01 2016-03-03 Pfeiffer Vacuum Gmbh Vakuumpumpe
JP6616611B2 (ja) * 2015-07-23 2019-12-04 エドワーズ株式会社 排気システム
EP3139044B1 (de) * 2015-09-04 2020-04-22 Pfeiffer Vacuum Gmbh Verfahren zum wuchten eines rotors einer vakuumpumpe oder eines rotors einer rotationseinheit für eine vakuumpumpe
US11319813B2 (en) * 2016-02-02 2022-05-03 Monarch Power Technology (Hong Kong) Limited Tapering spiral gas turbine with polygon electric generator for combined cooling, heating, power, pressure, work, and water
DE202016003991U1 (de) * 2016-06-29 2017-10-02 Leybold Gmbh Vakuumpumpe
CN106089760A (zh) * 2016-08-02 2016-11-09 美佳德科技（无锡）有限公司 隔热旋涡气泵
JP2018035684A (ja) * 2016-08-29 2018-03-08 株式会社島津製作所 真空ポンプ
FR3058162B1 (fr) * 2016-11-02 2021-01-01 Commissariat Energie Atomique Procede de depot de films minces de chalcogenure
GB201715151D0 (en) 2017-09-20 2017-11-01 Edwards Ltd A drag pump and a set of vacuum pumps including a drag pump
US10557471B2 (en) * 2017-11-16 2020-02-11 L Dean Stansbury Turbomolecular vacuum pump for ionized matter and plasma fields
US11369025B2 (en) * 2018-01-15 2022-06-21 Fuji Corporation Backup block and screen-printing machine
JP7390108B2 (ja) * 2019-03-13 2023-12-01 エドワーズ株式会社 真空ポンプおよび真空ポンプの回転体
CN110513312B (zh) * 2019-09-05 2024-07-30 东莞市鸿生五金塑胶科技有限公司 充放气气泵
JP7672849B2 (ja) * 2021-03-17 2025-05-08 エドワーズ株式会社 真空ポンプ
TWI773235B (zh) * 2021-04-08 2022-08-01 日揚科技股份有限公司 長效運轉的轉子結構
CN113931874A (zh) * 2021-10-12 2022-01-14 广州市凯卫莎环保科技有限公司 一种叶轮及其加工方法和应用其的高温离心风机
CN113833685B (zh) * 2021-11-26 2022-03-22 北京中科科仪股份有限公司 一种分子泵主轴攒量测量装置及测量方法
CN116314000B (zh) * 2023-04-18 2025-10-03 无锡釜川科技股份有限公司 一种硅片浸入清洗用压紧机构

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JP2897424B2 (ja) * 1990-11-30 1999-05-31 ダイキン工業株式会社 真空ポンプ
JPH05141389A (ja) * 1991-11-15 1993-06-08 Vacuum Prod Kk 真空ポンプ
US6332752B2 (en) * 1997-06-27 2001-12-25 Ebara Corporation Turbo-molecular pump
DE29717079U1 (de) * 1997-09-24 1997-11-06 Leybold Vakuum GmbH, 50968 Köln Compoundpumpe
JP3092063B2 (ja) * 1998-06-17 2000-09-25 セイコー精機株式会社 ターボ分子ポンプ
TW504548B (en) * 1998-06-30 2002-10-01 Ebara Corp Turbo molecular pump
ES2160389T3 (es) * 1998-12-18 2001-11-01 Lothar Reckert Rodete para sopladores radiales.
DE19930952A1 (de) * 1999-07-05 2001-01-11 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE19941134C1 (de) * 1999-08-30 2000-12-28 Mtu Muenchen Gmbh Schaufelkranz für eine Gasturbine
JP2001132683A (ja) * 1999-10-29 2001-05-18 Applied Materials Inc ターボ分子ポンプ
GB9927493D0 (en) * 1999-11-19 2000-01-19 Boc Group Plc Improved vacuum pumps
JP2002138987A (ja) * 2000-10-31 2002-05-17 Seiko Instruments Inc 真空ポンプ
JP2003269367A (ja) * 2002-03-13 2003-09-25 Boc Edwards Technologies Ltd 真空ポンプ

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