JP2005037896A5 - - Google Patents
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- Publication number
- JP2005037896A5 JP2005037896A5 JP2004139679A JP2004139679A JP2005037896A5 JP 2005037896 A5 JP2005037896 A5 JP 2005037896A5 JP 2004139679 A JP2004139679 A JP 2004139679A JP 2004139679 A JP2004139679 A JP 2004139679A JP 2005037896 A5 JP2005037896 A5 JP 2005037896A5
- Authority
- JP
- Japan
- Prior art keywords
- optical system
- projection optical
- imaging optical
- imaging
- projection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004139679A JP2005037896A (ja) | 2003-05-23 | 2004-05-10 | 投影光学系、露光装置及びデバイスの製造方法 |
US10/851,869 US6995833B2 (en) | 2003-05-23 | 2004-05-21 | Projection optical system, exposure apparatus, and device manufacturing method |
TW093114474A TWI282487B (en) | 2003-05-23 | 2004-05-21 | Projection optical system, exposure apparatus, and device manufacturing method |
CNB2004100453671A CN1307456C (zh) | 2003-05-23 | 2004-05-21 | 投影光学系统、曝光装置及器件的制造方法 |
EP04012075A EP1480065A3 (en) | 2003-05-23 | 2004-05-21 | Projection optical system, exposure apparatus, and device manufacturing method |
KR1020040036790A KR100678484B1 (ko) | 2003-05-23 | 2004-05-24 | 투영광학계, 노광장치 및 디바이스의 제조방법 |
US11/267,858 US7053986B2 (en) | 2003-05-23 | 2005-11-03 | Projection optical system, exposure apparatus, and device manufacturing method |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003146442 | 2003-05-23 | ||
JP2003189594 | 2003-07-01 | ||
JP2004139679A JP2005037896A (ja) | 2003-05-23 | 2004-05-10 | 投影光学系、露光装置及びデバイスの製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005037896A JP2005037896A (ja) | 2005-02-10 |
JP2005037896A5 true JP2005037896A5 (ru) | 2007-04-12 |
Family
ID=34222133
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004139679A Pending JP2005037896A (ja) | 2003-05-23 | 2004-05-10 | 投影光学系、露光装置及びデバイスの製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2005037896A (ru) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007005558A (ja) * | 2005-06-23 | 2007-01-11 | Canon Inc | 反射屈折型投影光学系及びそれを有する露光装置 |
JP2007242774A (ja) | 2006-03-07 | 2007-09-20 | Canon Inc | 露光装置及び方法、並びに、デバイス製造方法 |
JP5462625B2 (ja) * | 2006-08-14 | 2014-04-02 | カール・ツァイス・エスエムティー・ゲーエムベーハー | 瞳ミラーを有する反射屈折投影対物器械、投影露光装置及び方法 |
EP1890191A1 (en) | 2006-08-14 | 2008-02-20 | Carl Zeiss SMT AG | Catadioptric projection objective with pupil mirror |
JP6819773B2 (ja) | 2016-09-06 | 2021-01-27 | 株式会社ニコン | 反射屈折等倍アフォーカル瞳孔リレー及びこれを採用した光学撮影系 |
-
2004
- 2004-05-10 JP JP2004139679A patent/JP2005037896A/ja active Pending
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