JP2005033161A5 - - Google Patents
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- JP2005033161A5 JP2005033161A5 JP2003392584A JP2003392584A JP2005033161A5 JP 2005033161 A5 JP2005033161 A5 JP 2005033161A5 JP 2003392584 A JP2003392584 A JP 2003392584A JP 2003392584 A JP2003392584 A JP 2003392584A JP 2005033161 A5 JP2005033161 A5 JP 2005033161A5
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003392584A JP4655471B2 (ja) | 2002-11-22 | 2003-11-21 | 半導体装置 |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002340186 | 2002-11-22 | ||
JP2003176327 | 2003-06-20 | ||
JP2003392584A JP4655471B2 (ja) | 2002-11-22 | 2003-11-21 | 半導体装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2005033161A JP2005033161A (ja) | 2005-02-03 |
JP2005033161A5 true JP2005033161A5 (ja) | 2006-10-12 |
JP4655471B2 JP4655471B2 (ja) | 2011-03-23 |
Family
ID=34222098
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003392584A Expired - Fee Related JP4655471B2 (ja) | 2002-11-22 | 2003-11-21 | 半導体装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4655471B2 (ja) |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3303601B2 (ja) * | 1995-05-19 | 2002-07-22 | 日産自動車株式会社 | 溝型半導体装置 |
JPH098290A (ja) * | 1995-06-20 | 1997-01-10 | Mitsubishi Electric Corp | 半導体装置及びその製造方法 |
JP3395559B2 (ja) * | 1997-01-28 | 2003-04-14 | 株式会社豊田中央研究所 | 半導体装置 |
JP4655351B2 (ja) * | 2000-11-01 | 2011-03-23 | 富士電機システムズ株式会社 | トレンチ型半導体装置の製造方法 |
JP4797265B2 (ja) * | 2001-03-21 | 2011-10-19 | 富士電機株式会社 | 半導体装置および半導体装置の製造方法 |
JP4764975B2 (ja) * | 2001-05-30 | 2011-09-07 | 富士電機株式会社 | 半導体装置 |
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2003
- 2003-11-21 JP JP2003392584A patent/JP4655471B2/ja not_active Expired - Fee Related