JP2005033161A5 - - Google Patents

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Publication number
JP2005033161A5
JP2005033161A5 JP2003392584A JP2003392584A JP2005033161A5 JP 2005033161 A5 JP2005033161 A5 JP 2005033161A5 JP 2003392584 A JP2003392584 A JP 2003392584A JP 2003392584 A JP2003392584 A JP 2003392584A JP 2005033161 A5 JP2005033161 A5 JP 2005033161A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2003392584A
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JP2005033161A (ja
JP4655471B2 (ja
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Priority to JP2003392584A priority Critical patent/JP4655471B2/ja
Priority claimed from JP2003392584A external-priority patent/JP4655471B2/ja
Publication of JP2005033161A publication Critical patent/JP2005033161A/ja
Publication of JP2005033161A5 publication Critical patent/JP2005033161A5/ja
Application granted granted Critical
Publication of JP4655471B2 publication Critical patent/JP4655471B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2003392584A 2002-11-22 2003-11-21 半導体装置 Expired - Fee Related JP4655471B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003392584A JP4655471B2 (ja) 2002-11-22 2003-11-21 半導体装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2002340186 2002-11-22
JP2003176327 2003-06-20
JP2003392584A JP4655471B2 (ja) 2002-11-22 2003-11-21 半導体装置

Publications (3)

Publication Number Publication Date
JP2005033161A JP2005033161A (ja) 2005-02-03
JP2005033161A5 true JP2005033161A5 (ja) 2006-10-12
JP4655471B2 JP4655471B2 (ja) 2011-03-23

Family

ID=34222098

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003392584A Expired - Fee Related JP4655471B2 (ja) 2002-11-22 2003-11-21 半導体装置

Country Status (1)

Country Link
JP (1) JP4655471B2 (ja)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3303601B2 (ja) * 1995-05-19 2002-07-22 日産自動車株式会社 溝型半導体装置
JPH098290A (ja) * 1995-06-20 1997-01-10 Mitsubishi Electric Corp 半導体装置及びその製造方法
JP3395559B2 (ja) * 1997-01-28 2003-04-14 株式会社豊田中央研究所 半導体装置
JP4655351B2 (ja) * 2000-11-01 2011-03-23 富士電機システムズ株式会社 トレンチ型半導体装置の製造方法
JP4797265B2 (ja) * 2001-03-21 2011-10-19 富士電機株式会社 半導体装置および半導体装置の製造方法
JP4764975B2 (ja) * 2001-05-30 2011-09-07 富士電機株式会社 半導体装置

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