JP2005012202A - Chuck apparatus, cleaning equipment and cleaning method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a chuck apparatus that can maintain the rotation performance of a chuck roller for a long period of time and that can chuck a work without being accompanied with the staining of the work. <P>SOLUTION: A chuck apparatus 1 of this invention has a chuck roller 5 that touches the peripheral edge of a work 1 and chucks the work 1. The chuck roller 5 is rotatably attached to an axis 4 through a slide bearing 7 made of resin, which is composed of mechanical material resin as a matrix resin added and mixed with lubricative power. Polyacetal is desirable for the mechanical material resin, while a lubricative polytetrafluoroethylene powder is desirable for the lubricative powder. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a chuck device for chucking various workpieces such as a substrate for a recording disk (magnetic disk, optical disk, etc.), a semiconductor wafer (silicon wafer, compound semiconductor wafer, etc.), a glass substrate for liquid crystal display, a ceramic substrate, etc. The present invention relates to a cleaning device including a chuck device and a cleaning method using the chuck device.

  For example, a magnetic disk for a hard disk is generally manufactured by sequentially forming various layers such as an electroless Ni—P plating layer and a magnetic recording layer on the surface of an aluminum (including an alloy thereof) substrate. Has been.

  In this magnetic disk manufacturing process, before and after the step of forming various layers on the surface of the substrate, the surface of the substrate is scrubbed to remove fine particles, polishing liquid, etc. adhering to the surface of the substrate. Things have been done.

  In this cleaning, a chuck device is used to chuck the substrate. This chuck device has a plurality of chuck rollers, and chucks the substrate by bringing these chuck rollers into contact with the outer peripheral edge of the substrate at intervals in the circumferential direction. (For example, see Patent Documents 1-3.)

  When cleaning the substrate, the substrate is cleaned with the chuck roller in contact with its outer peripheral edge so that the contact portion with the chuck roller at the outer peripheral edge of the substrate and its vicinity can also be cleaned. The brush is rotated in response to the rotational force of the brush. Further, the chuck roller is rotated about the axis following the rotation of the substrate.

  Conventionally, the chuck roller of this chuck device is directly rotatably attached to a stainless steel shaft.

Thus, in the conventional chuck device, the chuck roller is made of a relatively soft resin so that the substrate is not damaged when chucking the substrate.
JP 2001-23159 A (Claim 1) JP 2001-341827 A (Claim 1) JP-A-3-245530 (page 2, FIG. 1)

  However, the above-described chuck roller made of a relatively soft resin is inferior in wear resistance, and thus has a drawback of being easily worn at the contact portion with the shaft. When the contact portion with the chuck roller shaft is worn in this manner, the smoothness of the rotation operation of the chuck roller is lowered, and as a result, there arises a problem that the substrate is not sufficiently cleaned.

  Therefore, in order to prevent wear due to contact with the shaft of the chuck roller, it is proposed that the chuck roller is rotatably attached to the shaft via a rolling bearing (that is, a ball bearing or a roller bearing). However, according to this proposed method, a problem arises in that dirt substances (for example, lubricating oil adhering to the rolling elements) flow out of the rolling bearing during cleaning and contaminate the substrate.

  The present invention has been made in view of the above-described technical background, and an object of the present invention is to ensure good rotation performance of the chuck roller over a long period of time, and to chuck the work without contamination of the work. It is an object of the present invention to provide a chuck device, a cleaning device including the chuck device, and a cleaning method using the chuck device.

  In order to achieve the above object, the present invention provides the following means.

  [1] In a chuck device having a chuck roller that abuts on the outer peripheral edge of a workpiece and chucks the workpiece, the chuck roller is made of a resin slip in which a lubricating powder is added to a mechanical material resin as a matrix resin. A chuck device, wherein the chuck device is rotatably attached to a shaft via a bearing.

  [2] The chuck device according to [1], wherein the mechanical material resin is polyacetal.

  [3] The chuck device according to item 1 or 2, wherein the lubricating powder is a powder of hexagonal boron nitride, graphite, molybdenum disulfide, or a fluororesin.

  [4] The fluororesin is selected from the group consisting of polytetrafluoroethylene, fluorinated ethylene polypropylene copolymer, tetrafluoroethylene / perfluoroalkyl vinyl ether copolymer, polychlorotrifluoroethylene, ethylene tetrafluoroethylene copolymer, and polyvinylidene fluoride. 4. The chuck device according to item 3, which is any one of the above.

  [5] The chuck device according to item 3, wherein the fluororesin is polytetrafluoroethylene.

  [6] The chuck device according to item 1 or 2, wherein the polytetrafluoroethylene powder is a polytetrafluoroethylene powder, and an addition rate of the lubricating powder is set in a range of 10 to 30% by mass.

  [7] The chuck device according to [6], wherein an average particle diameter of the polytetrafluoroethylene powder is set in a range of 0.1 to 1 μm.

  [8] The chuck device according to any one of items 1 to 7, wherein the chuck roller is made of ultra high molecular weight polyethylene.

  [9] The chuck device according to any one of items 1 to 8, wherein the workpiece is a magnetic disk substrate.

  [10] A cleaning device comprising the chuck device according to any one of the preceding items 1 to 9, wherein the workpiece is cleaned while being chucked by a chuck roller of the chuck device.

  [11] A cleaning method using the chuck device according to any one of [1] to [9] above, wherein the workpiece is cleaned while being chucked by a chuck roller of the chuck device.

  Next, the invention of each of the above items will be described.

  In the invention of [1], the sliding bearing of the chuck roller is made of a resin in which a lubricating powder is mixed and added to a mechanical material resin as a matrix resin, and thus has the following effects.

  That is, the wear resistance of the sliding bearing is improved by using the mechanical material resin as the matrix resin. Furthermore, the lubricity (slidability) of the sliding bearing is improved by adding a lubricating powder to the mechanical material resin. As a result, the rotation performance of the chuck roller is ensured satisfactorily over a long period of time, and the service life (endurance time) of the chuck roller is extended.

  Of course, since the bearing of the chuck roller is not a rolling bearing (that is, a ball bearing or a roller bearing) but a sliding bearing, there is no possibility that dirt components flow out from the bearing. Therefore, the workpiece can be chucked without contamination of the workpiece.

  In the invention of [1], the mechanical material resin includes polyacetal (POM), monomer casting nylon (UMC), fluororesin, polyamide, high-density polyethylene, polypropylene, polyimide, aromatic polyester, polyphenylenesulfur. Filled, polyetheretherketone, phenol resin, BT resin and the like are used.

  On the other hand, the material of the chuck roller is not limited. As the chuck roller, those made of various resins such as various polyethylenes such as ultra high molecular weight polyethylene described later, polyetheretherketone, polyamide (for example, nylon) are used.

  In the invention of [2], since the mechanical material resin is polyacetal, the wear resistance of the sliding bearing is reliably improved.

  In the invention of [3], the lubricity of the sliding bearing is reliably improved when the lubricious powder is a powder of hexagonal boron nitride (hBN), graphite, molybdenum disulfide or a fluororesin.

  In the invention of [4], the fluororesin is polytetrafluoroethylene, fluorinated ethylene polypropylene copolymer, tetrafluoroethylene / perfluoroalkyl vinyl ether copolymer (PFA), polychlorotrifluoroethylene, ethylene tetrafluoroethylene copolymer, and polyvinylidene fluoride. By being any one selected from the group consisting of the above, the lubricity of the sliding bearing is further improved.

  In the invention [5], since the fluororesin is polytetrafluoroethylene, the lubricity of the sliding bearing is further improved as in the invention [4].

  In the invention of [6], since the addition rate of the polytetrafluoroethylene powder is set in the range of 10 to 30% by mass, the lubricity of the sliding bearing is improved reliably, and the addition of the polytetrafluoroethylene powder is performed. It is possible to prevent a decrease in wear resistance and a decrease in mechanical strength of the slide bearing.

  That is, when the addition ratio of the polytetrafluoroethylene powder as the lubricating powder is less than 10% by mass, the lubricity is not sufficiently imparted to the sliding bearing. On the other hand, if the addition ratio exceeds 30% by mass, the wear resistance of the sliding bearing is lowered and the mechanical strength of the sliding bearing (ie, bending strength, compressive strength, tensile strength, impact strength, etc.). As a result, the service life (endurance time) of the chuck roller is reduced.

  In addition, in the invention of [6], a particularly desirable range of the addition rate of the polytetrafluoroethylene powder is 15 to 25% by mass.

  In the invention of [7], the lubricity of the sliding bearing is more reliably improved by setting the average particle size of the polytetrafluoroethylene powder in the range of 0.1 to 1 μm.

  That is, when the average particle size of the polytetrafluoroethylene powder is less than 0.1 μm, the lubricity is poor. On the other hand, when the average particle diameter exceeds 1 μm, the polytetrafluoroethylene powder is easily detached, and as a result, the lubricity of the slide bearing is lowered.

  In addition, in the invention of [7], the particularly preferable range of the average particle size of the polytetrafluoroethylene powder is 0.3 to 0.7 μm.

  In the invention of [8], since the chuck roller is made of ultra high molecular weight polyethylene, it is possible to prevent a problem that both the workpiece and the chuck roller are damaged when the chuck roller is chucked on the workpiece. Furthermore, the wear resistance of the chuck roller is improved, and the durability time (the service life) of the chuck roller is extended.

  In the invention of [9], since the workpiece is a magnetic disk substrate, the substrate can be chucked without contamination of the magnetic disk substrate.

  In the invention of [10], since the cleaning device includes the chuck device according to any one of the preceding items 1 to 9, the rotation performance of the chuck roller is ensured for a long period of time, and the workpiece is maintained for a long period of time. It becomes possible to clean well.

  In the invention of [11], since the workpiece is cleaned while being chucked by the chuck roller of the chuck device using the chuck device according to any one of the preceding items 1 to 9, the workpiece is cleaned well over a long period of time. can do.

  Depending on the above, the present invention can achieve the following effects.

  According to the invention of [1], the chuck roller is rotatably attached to the shaft via a resin-made sliding bearing in which lubricating powder is mixed and added to a machine material resin as a matrix resin. The workpiece can be chucked without contamination, and the rotation performance of the chuck roller can be secured over a long period of time, thereby extending the service life of the chuck roller.

  According to the invention of [2], since the mechanical material resin is polyacetal, it is possible to reliably improve the wear resistance of the sliding bearing.

  According to the invention of [3], since the lubricating powder is a predetermined powder, the lubricity of the sliding bearing can be improved with certainty.

  According to the invention [4], since the fluororesin is a predetermined resin, the lubricity of the sliding bearing can be further improved.

  According to the invention [5], since the fluororesin is polytetrafluoroethylene, the lubricity of the slide bearing can be further improved as in the case of the invention [4].

  According to the invention of [6], since the addition ratio of the polytetrafluoroethylene powder as the lubricating powder is set within a predetermined range, the lubricity of the sliding bearing can be improved reliably, and the polytetrafluoroethylene powder can be improved. It is possible to prevent a decrease in wear resistance and a decrease in mechanical strength of the slide bearing due to the addition of the fluoroethylene powder.

  According to the invention of [7], since the average particle size of the polytetrafluoroethylene powder is set within a predetermined range, the lubricity of the slide bearing can be further improved.

  According to the invention of [8], since the chuck roller is made of ultra high molecular weight polyethylene, it is possible to prevent a problem that both the workpiece and the chuck roller are damaged when the chuck roller is chucked on the workpiece. Furthermore, the wear resistance of the chuck roller is improved, and the service life of the chuck roller can be extended.

  According to the invention [9], the substrate can be chucked without contamination of the magnetic disk substrate.

  According to the invention [10], the rotational performance of the chuck roller can be ensured over a long period of time, and the workpiece can be washed well over a long period of time.

  According to the invention of [11], it is possible to clean the work well over a long period of time.

  Next, a preferred embodiment of the present invention will be described with reference to the drawings.

  In FIG. 1, (1) is a chuck device according to an embodiment of the present invention, (10) is a cleaning device according to an embodiment of the present invention, and (W) is aluminum (including an alloy thereof) as a disk-shaped workpiece. The same shall apply hereinafter.) Substrate.

  The substrate (W) is for a magnetic disk used for a hard disk of a computer. In this substrate (W), various layers such as an electroless Ni—P plating layer and a magnetic recording layer are sequentially formed on the surfaces on both sides in the thickness direction. By forming various layers in this way, a magnetic disk is manufactured.

  The cleaning device (10) is used for cleaning and removing fine particles and polishing liquid adhering to the surface of the substrate (W) before and after the step of forming various layers on the surface of the substrate (W). It is. As shown in FIGS. 1 and 4, the cleaning device (10) is disposed so as to face the turntable (11) and a plurality (six in the figure) of the chuck devices (1). A pair of cleaning brushes (12) and a cover (13) that prevents the cleaning liquid from splashing are provided.

  The turntable (11) is rotated in a vertical plane by a rotation drive device (not shown). As shown in FIG. 4, a plurality of the chuck devices (1) are erected on the turntable (11) at intervals in the circumferential direction. The turntable (11) is rotated intermittently to sequentially shift the substrate (W) to the substrate receiving stage (21), the substrate cleaning stage (22), and the substrate unloading stage (23). Is.

  As shown in FIG. 2, each chuck device (1) includes a plurality (three in the same figure) of gripping finger portions (2) and chuck rollers (2) provided at the tip of each finger portion (2). 5).

  The finger part (2) extends in a substantially horizontal direction in a state where the chuck device (1) is provided on the turntable (11). As shown in FIG. 3, a shaft mounting hole (3) is provided at the tip of the finger (2), and the shaft (4) is press-fitted into the shaft mounting hole (3). The shaft (4) is attached to the tip of the finger (2) so as to protrude in the horizontal direction. The shaft (4) is made of metal. More specifically, the shaft (4) is made of stainless steel such as SUS303.

  The chuck roller (5) is for contacting the outer peripheral edge of the substrate (W) to chuck the substrate (W). A slide bearing mounting hole (6) is provided in the central shaft portion of the chuck roller (5), and two cylindrical slide bearings (specifically, radial slide bearings are described in detail) in the mounting hole (6). ) (7) is press-fitted side by side in the axial direction, so that the sliding bearing (7) is fixedly attached to the central shaft portion of the chuck roller (5). The shaft (4) is inserted into the shaft hole (7a) of the sliding bearing (7), so that the chuck roller (5) is rotatably attached to the shaft (4) via the sliding bearing (7). ing. Furthermore, an E-ring (E-shaped retaining ring) (8) is attached to the tip of the shaft (4) so that the shaft (4) is not pulled out from the shaft hole (7a).

  Further, a groove (9) having a substantially V-shaped cross section extending in the circumferential direction is formed on the outer peripheral surface of the chuck roller (5) over the entire circumference.

  Thus, as shown in FIG. 2, the plurality of chuck rollers (5) of the chuck device (1) abut against the outer peripheral edge of the substrate (W) at intervals in the circumferential direction. The substrate (W) is chucked. In this state where the substrate (W) is chucked, the substrate (W) is arranged in a vertical plane as shown in FIG. 3, and the outer peripheral edge of the substrate (W) is formed in the groove ( 9).

  The cover (13) is transparent as shown in FIG. The cover (13) is disposed at a position corresponding to the substrate cleaning stage (22) of the turntable (11) (see FIG. 4). The substrate (W) transferred to the substrate cleaning stage (22) of the turntable (11) is surrounded by this cover (13). Then, the substrate (W) is cleaned under this surrounding state.

  The pair of cleaning brushes (12) are rotationally driven in the cover (13) with the substrate (W) transferred to the substrate cleaning stage (22) of the turntable (11) sandwiched in the thickness direction. (Not shown) is driven to rotate.

  In FIG. 1, (15) is a cleaning liquid hose, and (16) is a cleaning liquid spout provided at the tip of the cleaning liquid hose (15).

  Thus, the cleaning device (10) is operated as follows.

  That is, in the cleaning device (10), the substrate (W) is first moved to 2 by the chuck rollers (5) of the two chuck devices (1) waiting on the substrate receiving stage (21) of the turntable (11). These are chucked simultaneously (see FIG. 4).

  Next, when the turntable (11) is rotated by a predetermined angle (120 ° in the figure), the substrate (W) is transferred to the substrate cleaning stage (22) while being in a chucked state.

  Next, as shown in FIG. 1, a pair of rotating liquid is supplied while supplying the cleaning liquid ejected from the cleaning liquid outlet (16) of the cleaning liquid hose (15) to the surfaces on both sides in the thickness direction of the substrate (W). The substrate (W) is sandwiched by the cleaning brush (12), and in this state, both surfaces of the substrate (W) are simultaneously cleaned by the pair of cleaning brushes (12). By this cleaning, fine particles, polishing liquid and the like adhering to both surfaces of the substrate (W) are removed.

  During this cleaning, the substrate (W) is rotated by receiving the rotational force of the cleaning brush (12) with the chuck roller (5) in contact with the outer peripheral edge thereof. By rotating the substrate (W) in this manner, the contact portion of the outer peripheral edge portion of the substrate (W) with the chuck roller (5) and the vicinity thereof are also cleaned. Further, the chuck roller (5) is rotated about the shaft (4) following the rotation of the substrate (W).

  When the cleaning of the substrate (W) is completed, the turntable (11) rotates by a predetermined angle (120 ° in the figure) (see FIG. 4). As a result, the substrate (W) is moved to the take-out stage (23) of the turntable (11) and taken out by the substrate take-out device (not shown).

  Thus, in the chuck device (1) of the cleaning device (10), the sliding bearing (7) of the chuck roller (5) is made of a resin obtained by mixing and adding a lubricating powder to a machine material resin as a matrix resin. Has been. Therefore, the sliding bearing (7) of the chuck roller (5) has the following advantages.

  That is, since a mechanical material resin is used as the matrix resin, the sliding bearing (7) has excellent wear resistance. Further, since the lubricating powder is mixed and added to this mechanical material resin, the sliding bearing (7) also has an excellent lubricating property (sliding property). Therefore, the rotation performance of the chuck roller (5) can be secured over a long period of time, and the service life (service life) of the chuck roller (5) can be extended.

  On the other hand, since the cleaning device (10) includes the chuck device (1), the substrate (W) can be cleaned well over a long period of time.

  The mechanical material resin is described in, for example, “Plastic Reader” (published by Plastics Age Co., Ltd., 1992), but has excellent mechanical strength, high elastic modulus, impact resistance, and wear resistance. It is a material with excellent physical properties such as heat resistance and chemical resistance.

  As the mechanical material resin, polyacetal, monomer casting nylon, fluororesin, polyamide, high-density polyethylene, polypropylene, polyimide, aromatic polyester, polyphenylene sulfide, polyether ether ketone, phenol resin, BT resin, etc. are used. In the present invention, it is desirable to use polyacetal. By carrying out like this, the abrasion resistance of a sliding bearing (7) can be improved reliably.

  The lubricating powder is preferably hexagonal boron nitride (hBN), graphite, molybdenum disulfide, or fluororesin powder. In this case, the lubricity of the sliding bearing (7) can be improved reliably.

  Further, the fluororesin was selected from the group consisting of polytetrafluoroethylene, fluorinated ethylene polypropylene copolymer, tetrafluoroethylene / perfluoroalkyl vinyl ether copolymer, polychlorotrifluoroethylene, ethylene tetrafluoroethylene copolymer, and polyvinylidene fluoride. Any one is desirable. In this case, the lubricity of the sliding bearing (7) is further improved. In particular, the fluororesin is preferably polytetrafluoroethylene.

  Furthermore, the lubricating powder is a polytetrafluoroethylene powder, and the addition rate of the polytetrafluoroethylene powder as the lubricating powder is preferably set in the range of 10 to 30% by mass. The reason is as follows.

  That is, when the addition rate of the polytetrafluoroethylene powder is less than 10% by mass, the lubrication of the sliding bearing (7) is not sufficient. On the other hand, if the addition ratio exceeds 30% by mass, the wear resistance of the sliding bearing (7) is lowered, and the mechanical strength (that is, bending strength, compressive strength, tensile strength) of the sliding bearing (7). , Impact strength, etc.) decreases. Therefore, it is desirable that the addition ratio of the polytetrafluoroethylene powder is set in the range of 10 to 30% by mass, and by doing so, the lubricity of the sliding bearing (7) is surely improved and the polytetrafluoroethylene powder is added. It is possible to prevent a decrease in wear resistance and a decrease in mechanical strength of the sliding bearing (7) due to the addition of the fluoroethylene powder. The range of the addition rate of especially desirable polytetrafluoroethylene powder is 15 to 25% by mass.

  Furthermore, it is desirable that the average particle size of the polytetrafluoroethylene powder is set in the range of 0.1 to 1 μm. The reason is as follows.

  That is, when the average particle size of the tetratetrafluoroethylene powder is less than 0.1 μm, the lubricity is poor. On the other hand, when the average particle diameter exceeds 1 μm, the polytetrafluoroethylene powder is easily detached, and as a result, the lubricity of the sliding bearing (7) is lowered. Therefore, it is desirable that the average particle diameter of the polytetrafluoroethylene powder is set in the range of 0.1 to 1 μm, and by doing so, the lubricity of the sliding bearing (7) can be improved reliably. . A particularly desirable range of the average particle size of the polytetrafluoroethylene powder is 0.3 to 0.7 μm.

  On the other hand, as the chuck roller (5), those made of various resins such as polyethylene (PE), polyetheretherketone (PEEK), polyamide (for example, nylon) (PA) are used. Then, it is desirable to be made of ultra high molecular weight polyethylene (UHMWPE) having an average molecular weight of 2 million or more. By doing so, it is possible to prevent a problem that both the substrate (W) and the chuck roller (5) are damaged when the chuck roller (5) is chucked to the substrate (W). Furthermore, the wear resistance of the chuck roller (5) is improved, and the service life (endurance time) of the chuck roller (5) is extended.

  Naturally, in the chuck device (1) of the cleaning device (10) of the above embodiment, the bearing of the chuck roller (5) is not a rolling bearing (that is, a ball bearing or a roller bearing) but a sliding bearing (7). There is no risk of contamination components flowing out of the bearing during cleaning. Therefore, the substrate (W) can be chucked without contamination of the substrate (W), and the contamination occurrence rate (ie defective rate) of the substrate (W) can be reduced.

  Although a preferred embodiment of the present invention has been described above, the present invention is not limited to that shown in the above embodiment, and various setting changes can be made.

  For example, the workpiece chucked by the chuck device according to the present invention is not limited to the magnetic disk substrate (W), and may be, for example, an optical disk substrate or a semiconductor wafer (silicon wafer, compound). A semiconductor wafer or the like, or a glass substrate for a liquid crystal display.

  Next, specific examples and comparative examples of the present invention will be shown.

[Investigation of lubricity and durability of sliding bearings]
The cleaning device (10) of the above embodiment was prepared. The configurations of the chuck roller (5) and the sliding bearing (7) in the chuck device (1) of the cleaning device (10) are as follows. For convenience of explanation, polyacetal is abbreviated as “POM” and polytetrafluoroethylene is abbreviated as “PTFE”.

<Chuck roller>
Material: Ultra high molecular weight polyethylene (average molecular weight 5.5 million)
<Sliding bearing>
Matrix resin: POM
Lubricating powder: PTFE powder PTFE powder addition rate: as shown in Table 1 PTFE powder average particle size: as shown in Table 1 Note that the PTFE powder addition rate is the total resin constituting the sliding bearing (7) This is the addition rate of the PTFE powder with respect to the mass, that is, the percentage obtained by dividing the mass of the added PTFE powder by the total mass of the mass of the POM (ie, matrix resin) and the mass of the added PTFE powder. .

  Next, the lubricity and durability of the chuck roller (5) in the chuck device (1) of the cleaning device (10) are cleaned by cleaning the magnetic disk aluminum substrate (W) as a workpiece by the cleaning device (10). investigated. The results are shown in Table 1.

  As shown in the table, when the sliding bearing (7) of the chuck roller (5) is made of a resin obtained by mixing and adding PTFE powder as a lubricating powder to POM as a matrix resin, a sliding bearing is used. It was confirmed that the lubricity of (7) was good and the durability time was long. In particular, when the addition rate of PTFE powder is set in a range of 10 to 30%, or when the average particle size of PTFE powder is set in a range of 0.1 to 1 μm, a sliding bearing (7) It was confirmed that the lubricity of the resin was extremely good and the durability time was remarkably increased.

[Investigation of workpiece contamination rate]
A cleaning device (Example 18) in which the bearing of the chuck roller (5) is a sliding bearing (7) and a cleaning device (Comparative Example 2) in which the bearing of the chuck roller (5) is a ball bearing were prepared. The configurations of the chuck roller (5) and the bearing are as follows.

<Chuck roller>
Material: Ultra high molecular weight polyethylene (average molecular weight 5.5 million)
<Sliding bearing>
Matrix resin: POM
Lubricating powder: PTFE powder Addition ratio of PTFE powder: shown in Table 2 Average particle diameter of PTFE powder: shown in Table 2 <Ball bearing>
Ball (rolling element) material: stainless steel

  Next, the cleaning substrate (10) was used to clean the magnetic disk aluminum substrate (W) as a workpiece, and the contamination rate of the substrate (work) was investigated.

  The results are shown in Table 2. Note that the contamination occurrence rate is the contamination occurrence rate of the substrate (work) when the total cleaning time has passed 200 hours. This contamination occurrence rate was calculated by observing both surfaces of 25 substrates (W) with a microscope and examining the presence or absence of contamination.

  As shown in the table, when the bearing of the chuck roller (5) is a sliding bearing (7) (Example 18), the bearing of the chuck roller (5) is a ball bearing (Comparative Example 2). In addition, it was confirmed that the occurrence rate of dirt was significantly reduced.

  In addition, when the bearing of the chuck roller (5) is a ball bearing, the cause of the increase in the contamination rate is that the contaminants (for example, lubricating oil adhering to the balls) flow out from the ball bearing during cleaning, and the substrate (W ) Is contaminated, and it is estimated that the occurrence rate of dirt increased.

It is a principal part perspective view of the washing | cleaning apparatus provided with the chuck device which concerns on one Embodiment of this invention. It is an expansion perspective view of the chuck device of the cleaning device. It is principal part sectional drawing of the chuck | zipper apparatus of the washing | cleaning apparatus. It is a front view of the turntable of the washing | cleaning apparatus.

Explanation of symbols

1 ... Chuck device
2 ... gripping finger
3 ... Shaft mounting hole
4 ... axis
5 ... Chuck roller
6 ... Mounting holes for sliding bearings
7 ... Slide bearing
7a ... Shaft hole
8 ... E-ring
9 ... Groove
10 ... Cleaning device
11 ... Turntable
12 ... Cleaning brush
13 ... Cover
15 ... Cleaning liquid hose
16… Cleaning liquid outlet
21… Board receiving stage (work receiving stage)
22 ... Substrate cleaning stage (work cleaning stage)
23… Board extraction stage (work extraction stage)
W ... Substrate (workpiece)

Claims (11)

In a chuck device having a chuck roller that abuts on the outer peripheral edge of the workpiece and chucks the workpiece,
A chuck device, wherein the chuck roller is rotatably attached to a shaft via a resin-made sliding bearing in which lubricating powder is mixed and added to a mechanical material resin as a matrix resin. The chuck device according to claim 1, wherein the mechanical material resin is polyacetal. The chuck device according to claim 1, wherein the lubricating powder is a powder of hexagonal boron nitride, graphite, molybdenum disulfide, or a fluororesin. The fluororesin is any one selected from the group consisting of polytetrafluoroethylene, fluorinated ethylene polypropylene copolymer, tetrafluoroethylene / perfluoroalkyl vinyl ether copolymer, polychlorotrifluoroethylene, ethylene tetrafluoroethylene copolymer, and polyvinylidene fluoride. The chuck device according to claim 3, which is one type. The chuck device according to claim 3, wherein the fluororesin is polytetrafluoroethylene. The lubricating powder is polytetrafluoroethylene powder,
The chuck device according to claim 1 or 2, wherein an addition rate of the polytetrafluoroethylene powder is set in a range of 10 to 30% by mass. The chuck device according to claim 6, wherein an average particle diameter of the polytetrafluoroethylene powder is set in a range of 0.1 to 1 μm. The chuck device according to claim 1, wherein the chuck roller is made of ultra high molecular weight polyethylene. The chuck device according to claim 1, wherein the workpiece is a magnetic disk substrate. A cleaning device comprising the chuck device according to claim 1, wherein the workpiece is cleaned while being chucked by a chuck roller of the chuck device. A cleaning method using the chuck device according to claim 1, wherein the workpiece is cleaned while being chucked by a chuck roller of the chuck device.

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