JP2005005578A5 - - Google Patents

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Publication number
JP2005005578A5
JP2005005578A5 JP2003169162A JP2003169162A JP2005005578A5 JP 2005005578 A5 JP2005005578 A5 JP 2005005578A5 JP 2003169162 A JP2003169162 A JP 2003169162A JP 2003169162 A JP2003169162 A JP 2003169162A JP 2005005578 A5 JP2005005578 A5 JP 2005005578A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2003169162A
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Japanese (ja)
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JP2005005578A (en
JP4532853B2 (en
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Publication date
Application filed filed Critical
Priority to JP2003169162A priority Critical patent/JP4532853B2/en
Priority claimed from JP2003169162A external-priority patent/JP4532853B2/en
Publication of JP2005005578A publication Critical patent/JP2005005578A/en
Publication of JP2005005578A5 publication Critical patent/JP2005005578A5/ja
Application granted granted Critical
Publication of JP4532853B2 publication Critical patent/JP4532853B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2003169162A 2003-06-13 2003-06-13 Semiconductor device Expired - Fee Related JP4532853B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003169162A JP4532853B2 (en) 2003-06-13 2003-06-13 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003169162A JP4532853B2 (en) 2003-06-13 2003-06-13 Semiconductor device

Publications (3)

Publication Number Publication Date
JP2005005578A JP2005005578A (en) 2005-01-06
JP2005005578A5 true JP2005005578A5 (en) 2006-06-08
JP4532853B2 JP4532853B2 (en) 2010-08-25

Family

ID=34094387

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003169162A Expired - Fee Related JP4532853B2 (en) 2003-06-13 2003-06-13 Semiconductor device

Country Status (1)

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JP (1) JP4532853B2 (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101007478B1 (en) 2006-02-07 2011-01-12 미쓰비시덴키 가부시키가이샤 Semiconductor device and method for manufacturing same
JP2007234942A (en) * 2006-03-02 2007-09-13 Nissan Motor Co Ltd Method of manufacturing semiconductor device
JP4698767B2 (en) 2008-08-21 2011-06-08 パナソニック株式会社 Semiconductor device
JP2010182762A (en) * 2009-02-04 2010-08-19 Oki Semiconductor Co Ltd Semiconductor element and method for manufacturing same
JP2012114104A (en) * 2009-02-24 2012-06-14 Hitachi Ltd Storage insulation gate type field effect transistor
JP5428435B2 (en) * 2009-03-24 2014-02-26 株式会社デンソー Semiconductor device provided with Schottky barrier diode and manufacturing method thereof
US8421151B2 (en) 2009-10-22 2013-04-16 Panasonic Corporation Semiconductor device and process for production thereof
US8563986B2 (en) * 2009-11-03 2013-10-22 Cree, Inc. Power semiconductor devices having selectively doped JFET regions and related methods of forming such devices
JP2012064741A (en) * 2010-09-16 2012-03-29 Mitsubishi Electric Corp Semiconductor device and method of manufacturing the same
JP6549972B2 (en) * 2015-11-20 2019-07-24 株式会社日立製作所 Semiconductor device and method of manufacturing the same
WO2019092870A1 (en) * 2017-11-13 2019-05-16 新電元工業株式会社 Wide gap semiconductor device
JP7414499B2 (en) 2019-12-05 2024-01-16 株式会社豊田中央研究所 nitride semiconductor device

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6164165A (en) * 1984-09-05 1986-04-02 Matsushita Electric Ind Co Ltd Mos type field-effect transistor
JPH0382163A (en) * 1989-08-25 1991-04-08 Hitachi Ltd Power mosfet and manufacture thereof
JPH03133180A (en) * 1989-10-19 1991-06-06 Matsushita Electron Corp Semiconductor device
JPH04276663A (en) * 1991-03-05 1992-10-01 Nec Yamagata Ltd Semiconductor device
JPH05299658A (en) * 1992-04-20 1993-11-12 Nec Kansai Ltd Semiconductor device and manufacture thereof
JP3395520B2 (en) * 1996-06-04 2003-04-14 富士電機株式会社 Insulated gate bipolar transistor
JPH10242458A (en) * 1997-02-25 1998-09-11 Toshiba Corp Semiconductor device
JP4806852B2 (en) * 2001-03-12 2011-11-02 株式会社デンソー Silicon carbide semiconductor device and manufacturing method thereof

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