JP2004534452A5 - - Google Patents
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- Publication number
- JP2004534452A5 JP2004534452A5 JP2003506100A JP2003506100A JP2004534452A5 JP 2004534452 A5 JP2004534452 A5 JP 2004534452A5 JP 2003506100 A JP2003506100 A JP 2003506100A JP 2003506100 A JP2003506100 A JP 2003506100A JP 2004534452 A5 JP2004534452 A5 JP 2004534452A5
- Authority
- JP
- Japan
- Prior art keywords
- switch
- switching device
- load
- capacitance
- ncd
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000003990 capacitor Substances 0.000 claims 2
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB0114675A GB2378065B (en) | 2001-06-15 | 2001-06-15 | High voltage switching apparatus |
| PCT/GB2002/002732 WO2002103904A2 (en) | 2001-06-15 | 2002-06-14 | High voltage switching apparatus |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2004534452A JP2004534452A (ja) | 2004-11-11 |
| JP2004534452A5 true JP2004534452A5 (https=) | 2006-01-05 |
| JP4326940B2 JP4326940B2 (ja) | 2009-09-09 |
Family
ID=9916706
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003506100A Expired - Fee Related JP4326940B2 (ja) | 2001-06-15 | 2002-06-14 | 高電圧スイッチング装置 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US7256637B2 (https=) |
| EP (1) | EP1396082B1 (https=) |
| JP (1) | JP4326940B2 (https=) |
| AU (1) | AU2002345159A1 (https=) |
| GB (1) | GB2378065B (https=) |
| WO (1) | WO2002103904A2 (https=) |
Families Citing this family (26)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB0503439D0 (en) * | 2005-02-18 | 2005-03-30 | E2V Tech Uk Ltd | High voltage switching apparatus |
| WO2006121893A2 (en) * | 2005-05-06 | 2006-11-16 | Titon Energy | Power factor correction apparatus and method of producing a power factor correction capacitance for a specified load |
| US9008275B2 (en) | 2012-05-01 | 2015-04-14 | Analogic Corporation | Voltage switching in an imaging modality that utilizes radiation to image an object |
| US10978955B2 (en) | 2014-02-28 | 2021-04-13 | Eagle Harbor Technologies, Inc. | Nanosecond pulser bias compensation |
| US11539352B2 (en) | 2013-11-14 | 2022-12-27 | Eagle Harbor Technologies, Inc. | Transformer resonant converter |
| WO2015073921A1 (en) | 2013-11-14 | 2015-05-21 | Eagle Harbor Technologies, Inc. | This disclosure relates generally to a high voltage nanosecond pulser. |
| US10892140B2 (en) | 2018-07-27 | 2021-01-12 | Eagle Harbor Technologies, Inc. | Nanosecond pulser bias compensation |
| US10020800B2 (en) | 2013-11-14 | 2018-07-10 | Eagle Harbor Technologies, Inc. | High voltage nanosecond pulser with variable pulse width and pulse repetition frequency |
| US10483089B2 (en) | 2014-02-28 | 2019-11-19 | Eagle Harbor Technologies, Inc. | High voltage resistive output stage circuit |
| US11227745B2 (en) | 2018-08-10 | 2022-01-18 | Eagle Harbor Technologies, Inc. | Plasma sheath control for RF plasma reactors |
| US11004660B2 (en) | 2018-11-30 | 2021-05-11 | Eagle Harbor Technologies, Inc. | Variable output impedance RF generator |
| US11430635B2 (en) | 2018-07-27 | 2022-08-30 | Eagle Harbor Technologies, Inc. | Precise plasma control system |
| WO2018148182A1 (en) | 2017-02-07 | 2018-08-16 | Eagle Harbor Technologies, Inc. | Transformer resonant converter |
| JP6902167B2 (ja) | 2017-08-25 | 2021-07-14 | イーグル ハーバー テクノロジーズ, インク.Eagle Harbor Technologies, Inc. | ナノ秒パルスを使用する任意波形の発生 |
| US11532457B2 (en) | 2018-07-27 | 2022-12-20 | Eagle Harbor Technologies, Inc. | Precise plasma control system |
| US11302518B2 (en) | 2018-07-27 | 2022-04-12 | Eagle Harbor Technologies, Inc. | Efficient energy recovery in a nanosecond pulser circuit |
| US11810761B2 (en) | 2018-07-27 | 2023-11-07 | Eagle Harbor Technologies, Inc. | Nanosecond pulser ADC system |
| US11222767B2 (en) * | 2018-07-27 | 2022-01-11 | Eagle Harbor Technologies, Inc. | Nanosecond pulser bias compensation |
| US12456604B2 (en) | 2019-12-24 | 2025-10-28 | Eagle Harbor Technologies, Inc. | Nanosecond pulser RF isolation for plasma systems |
| CN109713931B (zh) * | 2018-12-06 | 2020-05-19 | 西安交通大学 | 基于真空密闭环境的纳秒上升时间强脉冲电流发生装置 |
| TWI783203B (zh) | 2019-01-08 | 2022-11-11 | 美商鷹港科技股份有限公司 | 奈秒脈波產生器電路 |
| TWI778449B (zh) | 2019-11-15 | 2022-09-21 | 美商鷹港科技股份有限公司 | 高電壓脈衝電路 |
| EP4486072A3 (en) | 2019-12-24 | 2025-04-09 | Eagle Harbor Technologies, Inc. | Nanosecond pulser rf isolation for plasma systems |
| US11967484B2 (en) | 2020-07-09 | 2024-04-23 | Eagle Harbor Technologies, Inc. | Ion current droop compensation |
| US11824542B1 (en) | 2022-06-29 | 2023-11-21 | Eagle Harbor Technologies, Inc. | Bipolar high voltage pulser |
| JP7833099B2 (ja) | 2022-09-29 | 2026-03-18 | イーグル ハーバー テクノロジーズ，インク． | 高電圧プラズマ制御 |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3678362A (en) * | 1970-09-17 | 1972-07-18 | Us Army | Solid state pulser using parallel storage capacitors |
| WO1981001924A1 (fr) * | 1979-12-28 | 1981-07-09 | Int Rectifier Corp Jp Ltd | Configuration de circuit de transistor a effet de champ |
| US4720668A (en) * | 1986-06-20 | 1988-01-19 | Lee Fred C | Zero-voltage switching quasi-resonant converters |
| KR0115015Y1 (ko) * | 1991-09-19 | 1998-10-01 | 이헌조 | 스위칭소자 구동회로 |
| US5395394A (en) * | 1993-06-17 | 1995-03-07 | Hewlett-Packard Corporation | Defibrillator with a high voltage solid state relay |
| US5568035A (en) * | 1993-10-15 | 1996-10-22 | Sony/Tektronix Corporation | Variable-capacitance power supply apparatus |
| US5723913A (en) * | 1994-12-06 | 1998-03-03 | Performance Controls, Inc. | High-voltage electronic switching circuit |
| JPH0993908A (ja) * | 1995-09-22 | 1997-04-04 | Denshi Seigyo Group:Kk | 半導体スイッチ駆動回路 |
| US5930125A (en) * | 1996-08-28 | 1999-07-27 | Siemens Medical Systems, Inc. | Compact solid state klystron power supply |
| AU7164696A (en) * | 1996-09-23 | 1998-04-14 | Eldec Corporation | Solid-state high voltage switch and switching power supply |
| US6327163B1 (en) * | 1999-04-27 | 2001-12-04 | Science Research Laboratory, Inc. | Solid state pulsed power supply |
| GB2356752B (en) * | 1999-11-29 | 2004-08-11 | Eev Ltd | Switching arrangements |
| JP2001238470A (ja) * | 2000-02-21 | 2001-08-31 | Ngk Insulators Ltd | パルス電力発生用スイッチ回路 |
| US6552598B2 (en) * | 2001-07-20 | 2003-04-22 | Vitaly Gelman | Semiconductor high voltage electrical energy transmission switching system and method |
-
2001
- 2001-06-15 GB GB0114675A patent/GB2378065B/en not_active Expired - Lifetime
-
2002
- 2002-06-14 US US10/480,527 patent/US7256637B2/en not_active Expired - Lifetime
- 2002-06-14 JP JP2003506100A patent/JP4326940B2/ja not_active Expired - Fee Related
- 2002-06-14 WO PCT/GB2002/002732 patent/WO2002103904A2/en not_active Ceased
- 2002-06-14 EP EP02743366.3A patent/EP1396082B1/en not_active Expired - Lifetime
- 2002-06-14 AU AU2002345159A patent/AU2002345159A1/en not_active Abandoned
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