JP2004534452A5 - - Google Patents
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- Publication number
- JP2004534452A5 JP2004534452A5 JP2003506100A JP2003506100A JP2004534452A5 JP 2004534452 A5 JP2004534452 A5 JP 2004534452A5 JP 2003506100 A JP2003506100 A JP 2003506100A JP 2003506100 A JP2003506100 A JP 2003506100A JP 2004534452 A5 JP2004534452 A5 JP 2004534452A5
- Authority
- JP
- Japan
- Prior art keywords
- switch
- switching device
- load
- capacitance
- ncd
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000003990 capacitor Substances 0.000 claims 2
Claims (6)
- 負荷の両端にパルスを供給する高電圧スイッチング装置であって、
前記負荷に電気エネルギーを供給するコンデンサと、
前記コンデンサを負荷に接続するスイッチスタックと、
を備え、
前記スイッチスタックが、直列接続された複数のスイッチモジュールと、該スイッチモジュールの両端に並列接続された複数の負荷キャパシタンスとを含む高電圧スイッチング装置。 - 前記各スイッチモジュールが、スイッチの両端に並列接続されたキャパシタンスnCdを有し、ここでCdは負荷のキャパシタンスであり、nはスイッチモジュールの数である請求項1に記載のスイッチング装置。
- 前記並列接続された負荷キャパシタンスnCdが、nCd>>Cであるように選択され、Cは前記各スイッチモジュールの浮遊容量である請求項2に記載のスイッチング装置。
- 前記スイッチモジュールがFETスイッチを含む請求項1、2、又は3に記載のスイッチング装置。
- 前記FETスイッチが、負荷キャパシタンスと共に回路基板上に配置され、前記回路基板が互いに極めて近接して積層される請求項4に記載のスイッチング装置。
- 前記各スイッチモジュールが、並列に配置された複数のスイッチを含み、該スイッチの各々の両端にキャパシタンスnCd/Mが配置され、ここでMはスイッチの個数である請求項1から5のいずれかに記載のスイッチング装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0114675A GB2378065B (en) | 2001-06-15 | 2001-06-15 | High voltage switching apparatus |
PCT/GB2002/002732 WO2002103904A2 (en) | 2001-06-15 | 2002-06-14 | High voltage switching apparatus |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2004534452A JP2004534452A (ja) | 2004-11-11 |
JP2004534452A5 true JP2004534452A5 (ja) | 2006-01-05 |
JP4326940B2 JP4326940B2 (ja) | 2009-09-09 |
Family
ID=9916706
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003506100A Expired - Fee Related JP4326940B2 (ja) | 2001-06-15 | 2002-06-14 | 高電圧スイッチング装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US7256637B2 (ja) |
EP (1) | EP1396082B1 (ja) |
JP (1) | JP4326940B2 (ja) |
AU (1) | AU2002345159A1 (ja) |
GB (1) | GB2378065B (ja) |
WO (1) | WO2002103904A2 (ja) |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB0503439D0 (en) | 2005-02-18 | 2005-03-30 | E2V Tech Uk Ltd | High voltage switching apparatus |
WO2006121893A2 (en) * | 2005-05-06 | 2006-11-16 | Titon Energy | Power factor correction apparatus and method of producing a power factor correction capacitance for a specified load |
US9008275B2 (en) | 2012-05-01 | 2015-04-14 | Analogic Corporation | Voltage switching in an imaging modality that utilizes radiation to image an object |
EP3069445B1 (en) | 2013-11-14 | 2023-04-05 | Eagle Harbor Technologies, Inc. | High voltage nanosecond pulser |
US10892140B2 (en) | 2018-07-27 | 2021-01-12 | Eagle Harbor Technologies, Inc. | Nanosecond pulser bias compensation |
US10978955B2 (en) | 2014-02-28 | 2021-04-13 | Eagle Harbor Technologies, Inc. | Nanosecond pulser bias compensation |
US11539352B2 (en) | 2013-11-14 | 2022-12-27 | Eagle Harbor Technologies, Inc. | Transformer resonant converter |
US10020800B2 (en) | 2013-11-14 | 2018-07-10 | Eagle Harbor Technologies, Inc. | High voltage nanosecond pulser with variable pulse width and pulse repetition frequency |
US10483089B2 (en) | 2014-02-28 | 2019-11-19 | Eagle Harbor Technologies, Inc. | High voltage resistive output stage circuit |
US11004660B2 (en) | 2018-11-30 | 2021-05-11 | Eagle Harbor Technologies, Inc. | Variable output impedance RF generator |
US11430635B2 (en) | 2018-07-27 | 2022-08-30 | Eagle Harbor Technologies, Inc. | Precise plasma control system |
US11227745B2 (en) | 2018-08-10 | 2022-01-18 | Eagle Harbor Technologies, Inc. | Plasma sheath control for RF plasma reactors |
CN110692188B (zh) | 2017-02-07 | 2022-09-09 | 鹰港科技有限公司 | 变压器谐振转换器 |
JP6902167B2 (ja) | 2017-08-25 | 2021-07-14 | イーグル ハーバー テクノロジーズ, インク.Eagle Harbor Technologies, Inc. | ナノ秒パルスを使用する任意波形の発生 |
US11222767B2 (en) * | 2018-07-27 | 2022-01-11 | Eagle Harbor Technologies, Inc. | Nanosecond pulser bias compensation |
US11302518B2 (en) | 2018-07-27 | 2022-04-12 | Eagle Harbor Technologies, Inc. | Efficient energy recovery in a nanosecond pulser circuit |
US11532457B2 (en) | 2018-07-27 | 2022-12-20 | Eagle Harbor Technologies, Inc. | Precise plasma control system |
CN109713931B (zh) * | 2018-12-06 | 2020-05-19 | 西安交通大学 | 基于真空密闭环境的纳秒上升时间强脉冲电流发生装置 |
KR20240028538A (ko) | 2019-01-08 | 2024-03-05 | 이글 하버 테크놀로지스, 인코포레이티드 | 나노초 펄서 회로의 효율적 에너지 회수 |
TWI778449B (zh) | 2019-11-15 | 2022-09-21 | 美商鷹港科技股份有限公司 | 高電壓脈衝電路 |
US11527383B2 (en) | 2019-12-24 | 2022-12-13 | Eagle Harbor Technologies, Inc. | Nanosecond pulser RF isolation for plasma systems |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3678362A (en) * | 1970-09-17 | 1972-07-18 | Us Army | Solid state pulser using parallel storage capacitors |
EP0048758B1 (en) * | 1979-12-28 | 1985-09-25 | International Rectifier Corporation Japan, Ltd. | Field effect transistor circuit configuration |
US4720668A (en) * | 1986-06-20 | 1988-01-19 | Lee Fred C | Zero-voltage switching quasi-resonant converters |
KR0115015Y1 (ko) * | 1991-09-19 | 1998-10-01 | 이헌조 | 스위칭소자 구동회로 |
US5395394A (en) * | 1993-06-17 | 1995-03-07 | Hewlett-Packard Corporation | Defibrillator with a high voltage solid state relay |
US5568035A (en) * | 1993-10-15 | 1996-10-22 | Sony/Tektronix Corporation | Variable-capacitance power supply apparatus |
US5723913A (en) * | 1994-12-06 | 1998-03-03 | Performance Controls, Inc. | High-voltage electronic switching circuit |
JPH0993908A (ja) * | 1995-09-22 | 1997-04-04 | Denshi Seigyo Group:Kk | 半導体スイッチ駆動回路 |
US5930125A (en) * | 1996-08-28 | 1999-07-27 | Siemens Medical Systems, Inc. | Compact solid state klystron power supply |
AU7164696A (en) * | 1996-09-23 | 1998-04-14 | Eldec Corporation | Solid-state high voltage switch and switching power supply |
US6327163B1 (en) * | 1999-04-27 | 2001-12-04 | Science Research Laboratory, Inc. | Solid state pulsed power supply |
GB2356752B (en) * | 1999-11-29 | 2004-08-11 | Eev Ltd | Switching arrangements |
JP2001238470A (ja) * | 2000-02-21 | 2001-08-31 | Ngk Insulators Ltd | パルス電力発生用スイッチ回路 |
US6552598B2 (en) * | 2001-07-20 | 2003-04-22 | Vitaly Gelman | Semiconductor high voltage electrical energy transmission switching system and method |
-
2001
- 2001-06-15 GB GB0114675A patent/GB2378065B/en not_active Expired - Lifetime
-
2002
- 2002-06-14 WO PCT/GB2002/002732 patent/WO2002103904A2/en active Application Filing
- 2002-06-14 EP EP02743366.3A patent/EP1396082B1/en not_active Expired - Lifetime
- 2002-06-14 US US10/480,527 patent/US7256637B2/en not_active Expired - Lifetime
- 2002-06-14 AU AU2002345159A patent/AU2002345159A1/en not_active Abandoned
- 2002-06-14 JP JP2003506100A patent/JP4326940B2/ja not_active Expired - Fee Related
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