WO2008087583A3 - Switchable capacitor array - Google Patents

Switchable capacitor array Download PDF

Info

Publication number
WO2008087583A3
WO2008087583A3 PCT/IB2008/050122 IB2008050122W WO2008087583A3 WO 2008087583 A3 WO2008087583 A3 WO 2008087583A3 IB 2008050122 W IB2008050122 W IB 2008050122W WO 2008087583 A3 WO2008087583 A3 WO 2008087583A3
Authority
WO
WIPO (PCT)
Prior art keywords
capacitor array
switchable capacitor
capacitance
mems switch
capacitance value
Prior art date
Application number
PCT/IB2008/050122
Other languages
French (fr)
Other versions
WO2008087583A2 (en
Inventor
Bezooijen Adrianus Van
Jongh Maurice De
Original Assignee
Nxp Bv
Bezooijen Adrianus Van
Jongh Maurice De
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nxp Bv, Bezooijen Adrianus Van, Jongh Maurice De filed Critical Nxp Bv
Priority to KR1020097017136A priority Critical patent/KR101379100B1/en
Priority to JP2009546036A priority patent/JP5147857B2/en
Priority to DE112008000067.0T priority patent/DE112008000067B4/en
Publication of WO2008087583A2 publication Critical patent/WO2008087583A2/en
Publication of WO2008087583A3 publication Critical patent/WO2008087583A3/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H7/00—Multiple-port networks comprising only passive electrical elements as network components
    • H03H7/38—Impedance-matching networks
    • H03H7/40—Automatic matching of load impedance to source impedance

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Ceramic Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Micromachines (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Filters That Use Time-Delay Elements (AREA)
  • Electronic Switches (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
  • Input Circuits Of Receivers And Coupling Of Receivers And Audio Equipment (AREA)

Abstract

A switchable capacitor array (22) has a plurality of cells arranged in parallel between input (30) and output (32) to provide a controllable capacitance. The switched capacitors are implemented by capacitance-type MEMS switches (38). The cells of lower capacitance value include more than one MEMS switch in series thus reducing the voltage across each lower capacitance value MEMS switch.
PCT/IB2008/050122 2007-01-18 2008-01-15 Switchable capacitor array WO2008087583A2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
KR1020097017136A KR101379100B1 (en) 2007-01-18 2008-01-15 Switchable capacitor array
JP2009546036A JP5147857B2 (en) 2007-01-18 2008-01-15 Switchable capacitor array
DE112008000067.0T DE112008000067B4 (en) 2007-01-18 2008-01-15 Switchable capacitor array, variable impedance circuit with switchable capacitor array, and method of operating a switched capacitor array

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP07100723.1 2007-01-18
EP07100723 2007-01-18

Publications (2)

Publication Number Publication Date
WO2008087583A2 WO2008087583A2 (en) 2008-07-24
WO2008087583A3 true WO2008087583A3 (en) 2008-11-27

Family

ID=39278285

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IB2008/050122 WO2008087583A2 (en) 2007-01-18 2008-01-15 Switchable capacitor array

Country Status (4)

Country Link
JP (1) JP5147857B2 (en)
KR (1) KR101379100B1 (en)
DE (1) DE112008000067B4 (en)
WO (1) WO2008087583A2 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010094297A1 (en) * 2009-02-17 2010-08-26 Epcos Ag Adaptive impedance matching network
JP5488962B2 (en) * 2009-08-06 2014-05-14 日立金属株式会社 Antenna circuit
EP3696861A1 (en) 2012-04-30 2020-08-19 Wispry, Inc. Mixed-technology combination of programmable elements
US9496110B2 (en) 2013-06-18 2016-11-15 Globalfoundries Inc. Micro-electro-mechanical system (MEMS) structure and design structures
US9641201B2 (en) 2014-04-29 2017-05-02 Infineon Technologies Ag System and method for a radio frequency integrated circuit
US9590592B2 (en) 2014-11-24 2017-03-07 Cypress Semiconductor Corporation Configurable capacitor arrays and switched capacitor circuits

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6232847B1 (en) * 1997-04-28 2001-05-15 Rockwell Science Center, Llc Trimmable singleband and tunable multiband integrated oscillator using micro-electromechanical system (MEMS) technology
US20020079743A1 (en) * 2000-12-22 2002-06-27 Qing Ma MEMS-switched stepped variable capacitor and method of making same
US20020101907A1 (en) * 2001-01-26 2002-08-01 Dent Paul W. Adaptive antenna optimization network
US20040100341A1 (en) * 2002-11-22 2004-05-27 Luetzelschwab Roland C. Mems-tuned high power, high efficiency, wide bandwidth power amplifier
WO2006054246A1 (en) * 2004-11-19 2006-05-26 Koninklijke Philips Electronics N.V. Device comprising a controlled matching stage

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6693573B1 (en) * 2003-03-19 2004-02-17 Raytheon Company Mixed technology MEMS/BiCMOS LC bandpass sigma-delta for direct RF sampling
DE102004028068A1 (en) * 2004-06-09 2005-12-29 Epcos Ag oscillator
JP2008516511A (en) * 2004-10-08 2008-05-15 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ Array of capacitors switched by MOS transistors
JP2006216763A (en) * 2005-02-03 2006-08-17 Toshiba Corp Capacitor array circuit and voltage-controlled oscillator
CN101213631B (en) 2005-05-02 2012-03-28 爱普科斯公司 Capacitive rf-mems device and its manufacture method

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6232847B1 (en) * 1997-04-28 2001-05-15 Rockwell Science Center, Llc Trimmable singleband and tunable multiband integrated oscillator using micro-electromechanical system (MEMS) technology
US20020079743A1 (en) * 2000-12-22 2002-06-27 Qing Ma MEMS-switched stepped variable capacitor and method of making same
US20020101907A1 (en) * 2001-01-26 2002-08-01 Dent Paul W. Adaptive antenna optimization network
US20040100341A1 (en) * 2002-11-22 2004-05-27 Luetzelschwab Roland C. Mems-tuned high power, high efficiency, wide bandwidth power amplifier
WO2006054246A1 (en) * 2004-11-19 2006-05-26 Koninklijke Philips Electronics N.V. Device comprising a controlled matching stage

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
BRANK J ET AL: "RF MEMS-BASED TUNABLE FILTERS", INTERNATIONAL JOURNAL OF MICROWAVE AND MILLIMETER-WAVE COMPUTER-AIDED ENGINEERING, WILEY, NEW YORK, NY, US, vol. 11, no. 5, September 2001 (2001-09-01), pages 276 - 284, XP009016563, ISSN: 1050-1827 *
GOLDSMITH C L ET AL: "RF MEMS VARIABLE CAPACITORS FOR TUNABLE FILTERS", INTERNATIONAL JOURNAL OF MICROWAVE AND MILLIMETER-WAVE COMPUTER-AIDED ENGINEERING, WILEY, NEW YORK, NY, US, vol. 9, no. 4, July 1999 (1999-07-01), pages 362 - 374, XP009016571, ISSN: 1050-1827 *
JOHN PAPAPOLYMEROU ET AL: "Reconfigurable Double-Stub Tuners Using MEMS Switches for Intelligent RF Front-Ends", IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, IEEE SERVICE CENTER, PISCATAWAY, NJ, US, vol. 51, no. 1, 1 January 2003 (2003-01-01), XP011076839, ISSN: 0018-9480 *
YUMIN LU ET AL: "A novel mems impedance tuner simultaneously optimized for maximum impedance range and power handling", MICROWAVE SYMPOSIUM DIGEST, 2005 IEEE MTT-S INTERNATIONAL LONG BEACH, CA, USA 12-17 JUNE 2005, PISCATAWAY, NJ, USA,IEEE, 12 June 2005 (2005-06-12), pages 927 - 930, XP010844634, ISBN: 978-0-7803-8846-8 *

Also Published As

Publication number Publication date
KR101379100B1 (en) 2014-03-28
WO2008087583A2 (en) 2008-07-24
DE112008000067B4 (en) 2016-03-24
KR20090101315A (en) 2009-09-24
JP5147857B2 (en) 2013-02-20
DE112008000067T5 (en) 2009-11-26
JP2010517354A (en) 2010-05-20

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