JP2004527642A - 表面処理 - Google Patents

表面処理 Download PDF

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Publication number
JP2004527642A
JP2004527642A JP2003502078A JP2003502078A JP2004527642A JP 2004527642 A JP2004527642 A JP 2004527642A JP 2003502078 A JP2003502078 A JP 2003502078A JP 2003502078 A JP2003502078 A JP 2003502078A JP 2004527642 A JP2004527642 A JP 2004527642A
Authority
JP
Japan
Prior art keywords
substrate
coating layer
plasma
coating
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2003502078A
Other languages
English (en)
Japanese (ja)
Other versions
JP2004527642A5 (cg-RX-API-DMAC10.html
Inventor
グッドウィン、アンドリュー・ジェイムズ
メルラン、パトリック・ジャック・ジャン
バドヤル、ジャス・パル・シン
ウォード、リューク
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dow Corning Ireland Ltd
Original Assignee
Dow Corning Ireland Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dow Corning Ireland Ltd filed Critical Dow Corning Ireland Ltd
Publication of JP2004527642A publication Critical patent/JP2004527642A/ja
Publication of JP2004527642A5 publication Critical patent/JP2004527642A5/ja
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D4/00—Coating compositions, e.g. paints, varnishes or lacquers, based on organic non-macromolecular compounds having at least one polymerisable carbon-to-carbon unsaturated bond ; Coating compositions, based on monomers of macromolecular compounds of groups C09D183/00 - C09D183/16
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L27/00—Materials for grafts or prostheses or for coating grafts or prostheses
    • A61L27/28—Materials for coating prostheses
    • A61L27/34—Macromolecular materials
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
    • C08J7/04—Coating
    • C08J7/0427—Coating with only one layer of a composition containing a polymer binder
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
    • C08J7/04—Coating
    • C08J7/056—Forming hydrophilic coatings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/60—Deposition of organic layers from vapour phase
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D2201/00—Polymeric substrate or laminate
    • B05D2201/02—Polymeric substrate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/14—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by electrical means
    • B05D3/141—Plasma treatment
    • B05D3/145—After-treatment
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J2483/00—Characterised by the use of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon with or without sulfur, nitrogen, oxygen, or carbon only; Derivatives of such polymers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Medicinal Chemistry (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Polymers & Plastics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Dermatology (AREA)
  • Animal Behavior & Ethology (AREA)
  • Wood Science & Technology (AREA)
  • Engineering & Computer Science (AREA)
  • Oral & Maxillofacial Surgery (AREA)
  • Transplantation (AREA)
  • Epidemiology (AREA)
  • Materials Engineering (AREA)
  • General Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Paints Or Removers (AREA)
  • Laminated Bodies (AREA)
JP2003502078A 2001-06-06 2002-06-05 表面処理 Pending JP2004527642A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB0113751.2A GB0113751D0 (en) 2001-06-06 2001-06-06 Surface treatment
PCT/GB2002/002543 WO2002098962A1 (en) 2001-06-06 2002-06-05 Surface treatment

Publications (2)

Publication Number Publication Date
JP2004527642A true JP2004527642A (ja) 2004-09-09
JP2004527642A5 JP2004527642A5 (cg-RX-API-DMAC10.html) 2006-01-12

Family

ID=9916016

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003502078A Pending JP2004527642A (ja) 2001-06-06 2002-06-05 表面処理

Country Status (5)

Country Link
US (1) US20040146660A1 (cg-RX-API-DMAC10.html)
EP (1) EP1401929A1 (cg-RX-API-DMAC10.html)
JP (1) JP2004527642A (cg-RX-API-DMAC10.html)
GB (1) GB0113751D0 (cg-RX-API-DMAC10.html)
WO (1) WO2002098962A1 (cg-RX-API-DMAC10.html)

Cited By (8)

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WO2010093010A1 (ja) * 2009-02-16 2010-08-19 リンテック株式会社 積層体、その製造方法、電子デバイス用部材及び電子デバイス
US8771834B2 (en) 2010-09-21 2014-07-08 Lintec Corporation Formed body, production method thereof, electronic device member and electronic device
US8846200B2 (en) 2010-09-21 2014-09-30 Lintec Corporation Gas-barrier film, process for producing same, member for electronic device, and electronic device
US8865810B2 (en) 2009-03-26 2014-10-21 Lintec Corporation Formed article, method for producing same, electronic device member, and electronic device
US9340869B2 (en) 2008-08-19 2016-05-17 Lintec Corporation Formed article, method for producing the same, electronic device member, and electronic device
US9365922B2 (en) 2009-05-22 2016-06-14 Lintec Corporation Formed article, method of producing same, electronic device member, and electronic device
US9540519B2 (en) 2010-03-31 2017-01-10 Lintec Corporation Formed article, method for producing same, electronic device member, and electronic device
US9556513B2 (en) 2010-08-20 2017-01-31 Lintec Corporation Molding, production method therefor, part for electronic devices and electronic device

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KR20070072900A (ko) * 2004-10-29 2007-07-06 다우 글로벌 테크놀로지스 인크. 플라즈마 강화 화학 기상 증착에 의한 내마모성 코팅
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US20060246218A1 (en) * 2005-04-29 2006-11-02 Guardian Industries Corp. Hydrophilic DLC on substrate with barrier discharge pyrolysis treatment
KR101264673B1 (ko) * 2005-06-24 2013-05-20 엘지디스플레이 주식회사 소프트 몰드를 이용한 미세 패턴 형성방법
US8025985B2 (en) * 2005-08-11 2011-09-27 E. I. Du Pont De Nemours And Company Porous metallized sheets coated with an inorganic layer having low emissivity and high moisture vapor permeability
US20080317974A1 (en) * 2005-08-26 2008-12-25 Fujifilm Manufacturing Europe B.V. Method and Arrangement for Generating and Controlling a Discharge Plasma
CN101291876A (zh) * 2005-10-19 2008-10-22 松下电器产业株式会社 金属氧化膜的形成方法、金属氧化膜及光学电子设备
JP2009526129A (ja) 2006-02-09 2009-07-16 フジフィルム マニュファクチャリング ユーロプ ビー．ブイ． 短パルス大気圧グロー放電方法及び装置
JP2009538989A (ja) * 2006-05-30 2009-11-12 フジフィルム マニュファクチャリング ユーロプ ビー．ブイ． パルス化大気圧グロー放電を使用する堆積の方法及び装置
EP2032738A1 (en) * 2006-06-16 2009-03-11 Fuji Film Manufacturing Europe B.V. Method and apparatus for atomic layer deposition using an atmospheric pressure glow discharge plasma
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JP5506401B2 (ja) * 2007-02-13 2014-05-28 フジフィルム マニュファクチャリング ユーロプ ビー．ブイ． 磁気マスクデバイスを使用する基板プラズマ処理
EP2235735B1 (en) * 2008-02-01 2015-09-30 Fujifilm Manufacturing Europe B.V. Method and apparatus for plasma surface treatment of a moving substrate
EP2241165B1 (en) * 2008-02-08 2011-08-31 Fujifilm Manufacturing Europe B.V. Method for manufacturing a multi_layer stack structure with improved wvtr barrier property
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US9564309B2 (en) 2013-03-14 2017-02-07 Asm Ip Holding B.V. Si precursors for deposition of SiN at low temperatures
US9824881B2 (en) 2013-03-14 2017-11-21 Asm Ip Holding B.V. Si precursors for deposition of SiN at low temperatures
US9576792B2 (en) 2014-09-17 2017-02-21 Asm Ip Holding B.V. Deposition of SiN
US10410857B2 (en) 2015-08-24 2019-09-10 Asm Ip Holding B.V. Formation of SiN thin films
US10580645B2 (en) * 2018-04-30 2020-03-03 Asm Ip Holding B.V. Plasma enhanced atomic layer deposition (PEALD) of SiN using silicon-hydrohalide precursors
KR20220081905A (ko) 2020-12-09 2022-06-16 에이에스엠 아이피 홀딩 비.브이. 실리콘 질화물 증착용 실리콘 전구체
CN119081205B (zh) * 2024-09-30 2025-12-12 大连理工大学 具有抗油渗透涂层的聚二甲基硅氧烷弹性体的制备方法

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Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9340869B2 (en) 2008-08-19 2016-05-17 Lintec Corporation Formed article, method for producing the same, electronic device member, and electronic device
WO2010093010A1 (ja) * 2009-02-16 2010-08-19 リンテック株式会社 積層体、その製造方法、電子デバイス用部材及び電子デバイス
JPWO2010093010A1 (ja) * 2009-02-16 2012-08-16 リンテック株式会社 積層体、その製造方法、電子デバイス用部材及び電子デバイス
US8865810B2 (en) 2009-03-26 2014-10-21 Lintec Corporation Formed article, method for producing same, electronic device member, and electronic device
US9365922B2 (en) 2009-05-22 2016-06-14 Lintec Corporation Formed article, method of producing same, electronic device member, and electronic device
US9540519B2 (en) 2010-03-31 2017-01-10 Lintec Corporation Formed article, method for producing same, electronic device member, and electronic device
US9556513B2 (en) 2010-08-20 2017-01-31 Lintec Corporation Molding, production method therefor, part for electronic devices and electronic device
US8771834B2 (en) 2010-09-21 2014-07-08 Lintec Corporation Formed body, production method thereof, electronic device member and electronic device
US8846200B2 (en) 2010-09-21 2014-09-30 Lintec Corporation Gas-barrier film, process for producing same, member for electronic device, and electronic device

Also Published As

Publication number Publication date
WO2002098962A1 (en) 2002-12-12
EP1401929A1 (en) 2004-03-31
GB0113751D0 (en) 2001-07-25
US20040146660A1 (en) 2004-07-29

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