JP2004526913A5 - - Google Patents

Download PDF

Info

Publication number
JP2004526913A5
JP2004526913A5 JP2002567724A JP2002567724A JP2004526913A5 JP 2004526913 A5 JP2004526913 A5 JP 2004526913A5 JP 2002567724 A JP2002567724 A JP 2002567724A JP 2002567724 A JP2002567724 A JP 2002567724A JP 2004526913 A5 JP2004526913 A5 JP 2004526913A5
Authority
JP
Japan
Prior art keywords
permeable membrane
electrode pad
valve
current
flow path
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2002567724A
Other languages
English (en)
Japanese (ja)
Other versions
JP4383053B2 (ja
JP2004526913A (ja
Filing date
Publication date
Priority claimed from US09/790,530 external-priority patent/US6626417B2/en
Application filed filed Critical
Publication of JP2004526913A publication Critical patent/JP2004526913A/ja
Publication of JP2004526913A5 publication Critical patent/JP2004526913A5/ja
Application granted granted Critical
Publication of JP4383053B2 publication Critical patent/JP4383053B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP2002567724A 2001-02-23 2002-02-22 超小型流体用バルブ、および、超小型バルブ用マイクロアクチュエータ Expired - Lifetime JP4383053B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/790,530 US6626417B2 (en) 2001-02-23 2001-02-23 Microfluidic valve and microactuator for a microvalve
PCT/US2002/005222 WO2002068849A1 (en) 2001-02-23 2002-02-22 Microfluidic valve and microactuator for a microvalve

Publications (3)

Publication Number Publication Date
JP2004526913A JP2004526913A (ja) 2004-09-02
JP2004526913A5 true JP2004526913A5 (cg-RX-API-DMAC7.html) 2005-12-22
JP4383053B2 JP4383053B2 (ja) 2009-12-16

Family

ID=25150974

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002567724A Expired - Lifetime JP4383053B2 (ja) 2001-02-23 2002-02-22 超小型流体用バルブ、および、超小型バルブ用マイクロアクチュエータ

Country Status (5)

Country Link
US (1) US6626417B2 (cg-RX-API-DMAC7.html)
EP (1) EP1379802A4 (cg-RX-API-DMAC7.html)
JP (1) JP4383053B2 (cg-RX-API-DMAC7.html)
CA (1) CA2438810C (cg-RX-API-DMAC7.html)
WO (1) WO2002068849A1 (cg-RX-API-DMAC7.html)

Families Citing this family (52)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ATE363030T1 (de) * 1999-02-23 2007-06-15 Matsushita Electric Works Ltd Mikroaktuator
WO2002073673A1 (en) 2001-03-13 2002-09-19 Rochester Institute Of Technology A micro-electro-mechanical switch and a method of using and making thereof
AU2002303933A1 (en) * 2001-05-31 2002-12-09 Rochester Institute Of Technology Fluidic valves, agitators, and pumps and methods thereof
US7378775B2 (en) 2001-10-26 2008-05-27 Nth Tech Corporation Motion based, electrostatic power source and methods thereof
US7211923B2 (en) 2001-10-26 2007-05-01 Nth Tech Corporation Rotational motion based, electrostatic power source and methods thereof
WO2003040541A1 (en) * 2001-11-08 2003-05-15 Siemens Vdo Automotive Inc. Electro-active polymer as a fuel vapor control valve actuator
TW551387U (en) * 2002-04-22 2003-09-01 Ind Tech Res Inst Water gel actuated micro pump
US7648619B2 (en) * 2002-06-04 2010-01-19 Industrial Technology Research Hydrogel-driven micropump
US7287328B2 (en) 2003-08-29 2007-10-30 Rochester Institute Of Technology Methods for distributed electrode injection
US7217582B2 (en) 2003-08-29 2007-05-15 Rochester Institute Of Technology Method for non-damaging charge injection and a system thereof
DE102004008009A1 (de) * 2003-12-23 2005-07-28 Robert Bosch Gmbh Integriertes Mikroventil und Verfahren zum Herstellen eines Mikroventils
US20050211937A1 (en) * 2003-12-29 2005-09-29 Popadiuc Peter O Method of sealing machine components
US8581308B2 (en) 2004-02-19 2013-11-12 Rochester Institute Of Technology High temperature embedded charge devices and methods thereof
US20050196321A1 (en) * 2004-03-03 2005-09-08 Zhili Huang Fluidic programmable array devices and methods
WO2006083833A2 (en) * 2005-01-31 2006-08-10 President And Fellows Of Harvard College Valves and reservoirs for microfluidic systems
US8628055B2 (en) 2005-07-27 2014-01-14 The Board Of Trustees Of The University Of Illinois Bi-direction rapid action electrostatically actuated microvalve
KR20080063268A (ko) * 2005-07-27 2008-07-03 더 보오드 오브 트러스티스 오브 더 유니버시티 오브 일리노이즈 정전기적으로 작동되는 양방향 고속 동작의 마이크로밸브
US8123834B2 (en) 2005-10-06 2012-02-28 The Board Of Trustees Of The University Of Illinois High gain selective metal organic framework preconcentrators
WO2007044690A2 (en) * 2005-10-07 2007-04-19 The General Hospital Corporation Devices and methods for cell manipulation
US7913928B2 (en) 2005-11-04 2011-03-29 Alliant Techsystems Inc. Adaptive structures, systems incorporating same and related methods
EP2111551A1 (en) * 2006-12-20 2009-10-28 Applied Biosystems, LLC Devices and methods for flow control in microfluidic structures
US7871570B2 (en) * 2007-02-23 2011-01-18 Joseph Zhili Huang Fluidic array devices and systems, and related methods of use and manufacturing
WO2008124046A1 (en) * 2007-04-04 2008-10-16 Micropoint Bioscience Inc.. Micromachined electrowetting microfluidic valve
US8123841B2 (en) 2008-01-16 2012-02-28 The Board Of Trustees Of The University Of Illinois Column design for micro gas chromatograph
US8269029B2 (en) 2008-04-08 2012-09-18 The Board Of Trustees Of The University Of Illinois Water repellent metal-organic frameworks, process for making and uses regarding same
US20100059120A1 (en) * 2008-09-11 2010-03-11 General Electric Company Microfluidic device and methods for droplet generation and manipulation
DE102008048064A1 (de) * 2008-09-19 2010-04-08 Jobst Technologies Gmbh Mikrofluidisches Ventil, mikrofluidische Pumpe, mikrofluidisches System und ein Herstellungsverfahren
WO2010073020A1 (en) 2008-12-24 2010-07-01 Heriot-Watt University A microfluidic system and method
IT1398480B1 (it) * 2009-12-17 2013-03-01 Silicon Biosystems Spa Sistema microfluidico
GB2481425A (en) 2010-06-23 2011-12-28 Iti Scotland Ltd Method and device for assembling polynucleic acid sequences
DE102010061909A1 (de) * 2010-11-24 2012-05-24 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Fluidischer Aktor mit verformbarer Verschlussanordnung und langer Lagerfähigkeit
US9162226B2 (en) 2011-05-12 2015-10-20 The United States Of America, As Represented By The Secretary Of Commerce Foldable microfluidic devices using double-sided tape
WO2012170068A2 (en) * 2011-06-05 2012-12-13 University Of British Columbia Wireless microactuators and control methods
US8975193B2 (en) 2011-08-02 2015-03-10 Teledyne Dalsa Semiconductor, Inc. Method of making a microfluidic device
US20130032210A1 (en) * 2011-08-02 2013-02-07 Teledyne Dalsa Semiconductor, Inc. Integrated microfluidic device with actuator
EP2811206A4 (en) * 2012-01-31 2015-10-14 Jatco Ltd CONTROL VALVE BODY STRUCTURE FOR AUTOMATIC GEARBOX
FR2987282B1 (fr) * 2012-02-24 2017-12-29 Fonds De L'espci Georges Charpak Microcanal avec dispositif d'ouverture et/ou fermeture et/ou pompage
US9493228B2 (en) * 2012-11-28 2016-11-15 The Boeing Company High heat transfer rate reusable thermal protection system
WO2014153092A1 (en) 2013-03-14 2014-09-25 The Board Of Trustees Of The Leland Stanford Junior University Capillary barriers for staged loading of microfluidic devices
WO2017046802A1 (en) * 2015-09-16 2017-03-23 Technion Research & Development Foundation Limited Dynamic microfluidic devices and use thereof
SG11201806190TA (en) 2016-01-29 2018-08-30 Purigen Biosystems Inc Isotachophoresis for purification of nucleic acids
JP6654951B2 (ja) * 2016-03-31 2020-02-26 株式会社エンプラス 流体取扱装置
US20200039812A1 (en) * 2016-10-07 2020-02-06 Xinyu Liu A microfluidic analytical platform for autonomous immunoassays
WO2019028197A1 (en) 2017-08-02 2019-02-07 Purigen Biosystems, Inc. SYSTEMS, DEVICES AND METHODS FOR ISOTACHOPHORESIS
US11331618B2 (en) * 2018-03-07 2022-05-17 Encite Llc R2R microelectromechanical gas concentrator
JP7071641B2 (ja) * 2018-10-18 2022-05-19 日本電信電話株式会社 積層体、積層体の製造方法および形状制御デバイス
CN109695779B (zh) * 2019-01-25 2020-07-31 京东方科技集团股份有限公司 流体开关阀及其制备方法、控制方法、微流控器件
US11236846B1 (en) * 2019-07-11 2022-02-01 Facebook Technologies, Llc Fluidic control: using exhaust as a control mechanism
US12229340B2 (en) * 2020-06-19 2025-02-18 Meta Platforms Technologies, Llc Selective laser etching of layered fluidistors
US20220061705A1 (en) * 2020-08-05 2022-03-03 The Regents Of The University Of California Programmable epidermal microfluidic valving system for wearable biofluid management and contextual biomarker analysis
TWI755075B (zh) * 2020-09-25 2022-02-11 研能科技股份有限公司 微型流體輸送裝置
CN116068047A (zh) * 2021-10-29 2023-05-05 中国科学院声学研究所 一种具有自除冰功能的乐甫波结冰传感器及制备方法

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4581624A (en) * 1984-03-01 1986-04-08 Allied Corporation Microminiature semiconductor valve
US4966646A (en) 1986-09-24 1990-10-30 Board Of Trustees Of Leland Stanford University Method of making an integrated, microminiature electric-to-fluidic valve
JP3111319B2 (ja) * 1990-08-31 2000-11-20 ウエストンブリッジ・インターナショナル・リミテッド 位置検出器を備えた弁及び前記弁を組み込んだマイクロポンプ
US5058856A (en) * 1991-05-08 1991-10-22 Hewlett-Packard Company Thermally-actuated microminiature valve
US6051380A (en) 1993-11-01 2000-04-18 Nanogen, Inc. Methods and procedures for molecular biological analysis and diagnostics
DE4234237C2 (de) 1992-10-10 2000-11-30 Bosch Gmbh Robert Temperaturkompensierter Mikroaktor
US5309943A (en) 1992-12-07 1994-05-10 Ford Motor Company Micro-valve and method of manufacturing
US5378583A (en) 1992-12-22 1995-01-03 Wisconsin Alumni Research Foundation Formation of microstructures using a preformed photoresist sheet
US5338416A (en) 1993-02-05 1994-08-16 Massachusetts Institute Of Technology Electrochemical etching process
JP3418741B2 (ja) 1993-05-27 2003-06-23 フラウンホッファー−ゲゼルシャフト ツァ フェルダールング デァ アンゲヴァンテン フォアシュンク エー.ファオ. 超小型弁
US6071394A (en) 1996-09-06 2000-06-06 Nanogen, Inc. Channel-less separation of bioparticles on a bioelectronic chip by dielectrophoresis
US5788468A (en) 1994-11-03 1998-08-04 Memstek Products, Llc Microfabricated fluidic devices
AU7671696A (en) * 1996-01-18 1997-08-11 University Of New Mexico Soft actuators and artificial muscles
US5785295A (en) * 1996-08-27 1998-07-28 Industrial Technology Research Institute Thermally buckling control microvalve
US5865417A (en) * 1996-09-27 1999-02-02 Redwood Microsystems, Inc. Integrated electrically operable normally closed valve
US5971355A (en) 1996-11-27 1999-10-26 Xerox Corporation Microdevice valve structures to fluid control
US6123316A (en) * 1996-11-27 2000-09-26 Xerox Corporation Conduit system for a valve array
KR100356101B1 (ko) * 1996-12-04 2003-01-14 우릴크 로보우 육류 또는 야채 또는 농산물 및 사료를 소독 또는 살균하기 위한 방법 및 장치.
US5796152A (en) 1997-01-24 1998-08-18 Roxburgh Ltd. Cantilevered microstructure
US5780748A (en) 1997-01-29 1998-07-14 Hewlett-Packard Company Flow device having parallel flow surfaces which move toward and away from one another to adjust the flow channel in proportion to applied force
US6072509A (en) * 1997-06-03 2000-06-06 Eastman Kodak Company Microfluidic printing with ink volume control
US5965410A (en) 1997-09-02 1999-10-12 Caliper Technologies Corp. Electrical current for controlling fluid parameters in microchannels
US5993414A (en) 1998-04-23 1999-11-30 Medtronic, Inc. Implantable device
US6056269A (en) * 1999-01-15 2000-05-02 Hewlett-Packard Company Microminiature valve having silicon diaphragm

Similar Documents

Publication Publication Date Title
JP2004526913A5 (cg-RX-API-DMAC7.html)
JP4383053B2 (ja) 超小型流体用バルブ、および、超小型バルブ用マイクロアクチュエータ
US7052594B2 (en) Devices and methods for controlling fluid flow using elastic sheet deflection
US7192001B2 (en) Thermopneumatic microvalve
KR100610908B1 (ko) 전기작동식 일체형 마이크로밸브
CN101463910B (zh) 新颖的静电寻址微型阀
DK2556282T3 (en) Microvalve with valve elastically deformable lip, the preparation method and micropump
DE60119970D1 (de) Durch elektrisch aktive polymere oder durch materialien mit formgedächtnis aktivierte ventile, einrichtung damit und verfahren zu ihrer verwendung
JP2008519398A5 (cg-RX-API-DMAC7.html)
EP1215426A3 (en) Electrostrictive valve for modulating a fluid flow
JP2016501348A5 (cg-RX-API-DMAC7.html)
JP4531409B2 (ja) 泡で動かされる弁、弁システム、および、弁を流れる流体を制御する方法
Lisec et al. Thermally driven microvalve with buckling behaviour for pneumatic applications
CN206637105U (zh) 一种用于微流控芯片的电磁微阀
JPWO2009157474A1 (ja) マイクロバルブ及びバルブシート部材
CN102797872A (zh) 一种基于超磁致伸缩薄膜驱动器的平面线圈驱动式微阀
TWI636775B (zh) 微型泵浦
KR100950926B1 (ko) 전자석에 의해 구동되는 박막을 구비한 마이크로펌프
CN105805412B (zh) 基于pzt压电致动的双刀型闸微阀装置
Lemke et al. Fabrication of normally-closed bidirectional micropumps in silicon–polymer technology featuring photopatternable silicone valve lips
Ogden et al. A latchable valve for high-pressure microfluidics
CN221683608U (zh) 一种恒容积开关阀
US20050072147A1 (en) Micro-fluidic actuator
Feng et al. Fabrication and characterization of thermally driven fast turn-on microvalve with adjustable backpressure design
US20160123498A1 (en) Micro-electric mechanical system control valve and method for controlling a sensitive fluid