JP2004521398A5 - - Google Patents

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Publication number
JP2004521398A5
JP2004521398A5 JP2003521410A JP2003521410A JP2004521398A5 JP 2004521398 A5 JP2004521398 A5 JP 2004521398A5 JP 2003521410 A JP2003521410 A JP 2003521410A JP 2003521410 A JP2003521410 A JP 2003521410A JP 2004521398 A5 JP2004521398 A5 JP 2004521398A5
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JP
Japan
Prior art keywords
exit surface
portions
optically
convex
concave
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2003521410A
Other languages
English (en)
Japanese (ja)
Other versions
JP2004521398A (ja
Filing date
Publication date
Priority claimed from DE10139355A external-priority patent/DE10139355A1/de
Application filed filed Critical
Publication of JP2004521398A publication Critical patent/JP2004521398A/ja
Publication of JP2004521398A5 publication Critical patent/JP2004521398A5/ja
Pending legal-status Critical Current

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JP2003521410A 2001-08-17 2002-06-03 光線を光学的に均質化するための配置および装置 Pending JP2004521398A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10139355A DE10139355A1 (de) 2001-08-17 2001-08-17 Anordnung und Vorrichtung zur optischen Strahlhomogenisierung
PCT/EP2002/006042 WO2003016963A2 (de) 2001-08-17 2002-06-03 Anordnung und vorrichtung zur optischen strahlhomogenisierung

Publications (2)

Publication Number Publication Date
JP2004521398A JP2004521398A (ja) 2004-07-15
JP2004521398A5 true JP2004521398A5 (https=) 2005-05-26

Family

ID=7695049

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003521410A Pending JP2004521398A (ja) 2001-08-17 2002-06-03 光線を光学的に均質化するための配置および装置

Country Status (9)

Country Link
US (1) US20040223225A1 (https=)
EP (1) EP1421415B1 (https=)
JP (1) JP2004521398A (https=)
KR (1) KR20040032928A (https=)
CN (1) CN100414322C (https=)
AT (1) ATE549655T1 (https=)
AU (1) AU2002319192A1 (https=)
DE (1) DE10139355A1 (https=)
WO (1) WO2003016963A2 (https=)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10327733C5 (de) * 2003-06-18 2012-04-19 Limo Patentverwaltung Gmbh & Co. Kg Vorrichtung zur Formung eines Lichtstrahls
DE102004020250A1 (de) * 2004-04-26 2005-11-10 Hentze-Lissotschenko Patentverwaltungs Gmbh & Co. Kg Vorrichtung und Verfahren zur optischen Strahlhomogenisierung
JP4579575B2 (ja) 2004-05-14 2010-11-10 株式会社半導体エネルギー研究所 レーザ照射方法及びレーザ照射装置
JP3963275B2 (ja) * 2004-07-16 2007-08-22 株式会社エンプラス 面光源装置、照明ユニット及び光束制御部材
DE102004039936A1 (de) * 2004-08-17 2006-02-23 Hentze-Lissotschenko Patentverwaltungs Gmbh & Co. Kg Vorrichtung zur Homogenisierung von Licht sowie Verfahren zur Herstellung der Vorrichtung
US7400456B2 (en) * 2004-09-21 2008-07-15 Avago Technologies Ecbu Ip Pte Ltd Lens having seamless profile defined by cubic polynomial function
KR101098338B1 (ko) * 2005-04-22 2011-12-26 삼성전자주식회사 광학 패키지, 광학 렌즈 및 이를 갖는 백라이트 어셈블리및 표시장치
EP1934647A1 (de) * 2005-09-30 2008-06-25 LIMO Patentverwaltung GmbH & Co. KG Vorrichtung zur homogenisierung von licht
CN101310208A (zh) 2005-10-27 2008-11-19 Limo专利管理有限及两合公司 使光均匀化的装置
US7907341B2 (en) * 2006-09-28 2011-03-15 Sumitomo Electric Industries, Ltd. Laser processing method and laser processing apparatus
DE102008017947A1 (de) 2008-04-09 2009-10-15 Limo Patentverwaltung Gmbh & Co. Kg Vorrichtung, Anordnung und Verfahren zur Homogenisierung zumindest teilweise kohärenten Laserlichts
DE102008024697B4 (de) 2008-05-21 2014-02-27 Limo Patentverwaltung Gmbh & Co. Kg Vorrichtung zur Homogenisierung zumindest teilweise kohärenten Laserlichts
DE102008027231B4 (de) * 2008-06-06 2016-03-03 Limo Patentverwaltung Gmbh & Co. Kg Vorrichtung zur Strahlformung
DE102009010693A1 (de) 2009-02-26 2010-09-02 Limo Patentverwaltung Gmbh & Co. Kg Vorrichtung zur Homogenisierung von Laserstrahlung
US9046500B2 (en) * 2012-12-20 2015-06-02 Kla-Tencor Corporation Adaptable illuminating apparatus, system, and method for extreme ultra-violet light
NL2017493B1 (en) * 2016-09-19 2018-03-27 Kulicke & Soffa Liteq B V Optical beam homogenizer based on a lens array
DE102024129500A1 (de) 2024-10-11 2026-04-16 SurFunction GmbH Gegenstand mit einer mit einer ersten periodischen Struktur versehenen Oberfläche

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3476463A (en) * 1965-05-11 1969-11-04 Perkin Elmer Corp Coherent light optical system yielding an output beam of desired intensity distribution at a desired equiphase surface
JPS49114434A (https=) * 1973-02-12 1974-10-31
AU553164B2 (en) * 1980-10-31 1986-07-03 Allergan Humphrey Objective refractor for the eye
US4560259A (en) * 1980-10-31 1985-12-24 Humphrey Instruments, Inc. Objective refractor for the eye
US4605282A (en) * 1983-12-22 1986-08-12 Pyramid Optical, Inc. Line lens and method of design therefor
US5400114A (en) * 1991-09-05 1995-03-21 Hitachi, Ltd. Rear-projection screen and a rear projection image display employing the rear-projection screen
DE19635942A1 (de) * 1996-09-05 1998-03-12 Vitaly Dr Lissotschenko Optisches Strahlformungssystem
US6115181A (en) * 1996-11-22 2000-09-05 3M Innovative Properties Company Variable beam splitter having opposed alternating convex and concave lens structures
JPH10253916A (ja) * 1997-03-10 1998-09-25 Semiconductor Energy Lab Co Ltd レーザー光学装置
JP2000111714A (ja) * 1998-09-30 2000-04-21 Konica Corp ソフトフォーカスフィルタおよびソフトフォーカスフィルタユニット
JP2000321404A (ja) * 1999-05-12 2000-11-24 Keiwa Inc 光拡散シート

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