JP2004520589A5 - - Google Patents
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- Publication number
- JP2004520589A5 JP2004520589A5 JP2002561899A JP2002561899A JP2004520589A5 JP 2004520589 A5 JP2004520589 A5 JP 2004520589A5 JP 2002561899 A JP2002561899 A JP 2002561899A JP 2002561899 A JP2002561899 A JP 2002561899A JP 2004520589 A5 JP2004520589 A5 JP 2004520589A5
- Authority
- JP
- Japan
- Prior art keywords
- stylus holder
- housing
- freedom
- stylus
- measurement probe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 241001422033 Thestylus Species 0.000 claims 15
- 239000000523 sample Substances 0.000 claims 11
- 238000005259 measurement Methods 0.000 claims 10
- 239000000725 suspension Substances 0.000 claims 4
- 238000001514 detection method Methods 0.000 claims 3
- 238000006073 displacement reaction Methods 0.000 claims 3
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GBGB0102324.1A GB0102324D0 (en) | 2001-01-30 | 2001-01-30 | Capacitance type displacement responsive device and a suspension system for a displacement responsive device |
| PCT/GB2002/000413 WO2002061378A1 (en) | 2001-01-30 | 2002-01-30 | Capacitive displacement sensor |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2004520589A JP2004520589A (ja) | 2004-07-08 |
| JP2004520589A5 true JP2004520589A5 (enExample) | 2006-01-05 |
| JP4578771B2 JP4578771B2 (ja) | 2010-11-10 |
Family
ID=9907768
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002561899A Expired - Fee Related JP4578771B2 (ja) | 2001-01-30 | 2002-01-30 | 測定プローブ |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US6683780B2 (enExample) |
| EP (2) | EP1967826B1 (enExample) |
| JP (1) | JP4578771B2 (enExample) |
| CN (1) | CN1307406C (enExample) |
| AT (1) | ATE404849T1 (enExample) |
| DE (1) | DE60228167D1 (enExample) |
| GB (1) | GB0102324D0 (enExample) |
| RU (1) | RU2293945C2 (enExample) |
| WO (1) | WO2002061378A1 (enExample) |
Families Citing this family (54)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB0508388D0 (en) | 2005-04-26 | 2005-06-01 | Renishaw Plc | Surface sensing device with optical sensor |
| GB0512138D0 (en) * | 2005-06-15 | 2005-07-20 | Renishaw Plc | Method of determining measurement probe orientation |
| CN100487361C (zh) * | 2007-09-06 | 2009-05-13 | 浙江大学 | 基于电容测量原理的平面电容传感器 |
| DE102008038134A1 (de) | 2007-09-13 | 2009-04-16 | Hexagon Metrology Gmbh | Tastkopf |
| GB0804467D0 (en) * | 2008-03-11 | 2008-04-16 | Renishaw Plc | Touch trigger measurement probe |
| DE102008019115B4 (de) * | 2008-04-16 | 2014-05-22 | Siemens Aktiengesellschaft | Wägezelle |
| DE102008036377A1 (de) * | 2008-08-05 | 2010-02-11 | Continental Teves Ag & Co. Ohg | Winkelsensoranordnung |
| GB0904180D0 (en) | 2009-03-11 | 2009-04-22 | Renishaw Plc | Apparatus and method for digitising impedance |
| CN102003974B (zh) * | 2009-08-28 | 2012-06-13 | 鸿富锦精密工业(深圳)有限公司 | 运动感测器 |
| TWI420109B (zh) * | 2009-09-01 | 2013-12-21 | Hon Hai Prec Ind Co Ltd | 運動感測器 |
| EP2479530A1 (en) | 2011-01-19 | 2012-07-25 | Renishaw PLC | Analogue measurement probe for a machine tool apparatus and method of operation |
| EP2479531A1 (en) | 2011-01-19 | 2012-07-25 | Renishaw plc | Analogue measurement probe for a machine tool apparatus |
| EP2665988B1 (en) | 2011-01-19 | 2015-08-12 | Renishaw Plc. | Analogue measurement probe for a machine tool apparatus |
| KR20130061958A (ko) * | 2011-12-02 | 2013-06-12 | 한국전자통신연구원 | 전자펜의 필압 측정장치 |
| DE102012210277B3 (de) * | 2012-06-19 | 2013-08-22 | Behr-Hella Thermocontrol Gmbh | Kapazitiver Sensor zur Erfassung der Bewegung eines Objekts |
| JP5939633B2 (ja) * | 2012-07-05 | 2016-06-22 | 株式会社ワコム | 容量可変型コンデンサ |
| US8978487B2 (en) | 2012-12-13 | 2015-03-17 | Blackberry Limited | Capacitive force sensor with magnetic spring |
| CN103175499B (zh) * | 2013-03-20 | 2016-05-11 | 北京科技大学 | 一种管材局部腐蚀蚀坑深度的便携式测量仪 |
| CN103234440B (zh) * | 2013-04-18 | 2015-08-19 | 赵飚 | 三维测量头 |
| CN103411525B (zh) * | 2013-06-05 | 2016-01-20 | 电子科技大学 | 一种圆柱电容位移传感器及调理电路 |
| GB201310398D0 (en) | 2013-06-11 | 2013-07-24 | Renishaw Plc | Additive manufacturing apparatus and method |
| US10335901B2 (en) * | 2013-06-10 | 2019-07-02 | Renishaw Plc | Selective laser solidification apparatus and method |
| CN103557781B (zh) * | 2013-09-10 | 2017-06-30 | 林立 | 双单极电容差分位移传感器 |
| DE102013015237A1 (de) | 2013-09-13 | 2015-03-19 | Blum-Novotest Gmbh | Rauheits-Messinstrument zum Einsatz in einer Werkzeugmaschine und Verfahren zur Rauheitsmessung in einer Werkzeugmaschine |
| CN104135811A (zh) * | 2014-08-13 | 2014-11-05 | 哈尔滨工业大学 | 一种可在三自由度运动的多探针支架 |
| CN105556432A (zh) * | 2015-02-13 | 2016-05-04 | 先进矽有限公司 | 具有尖端压力传感器的主动笔 |
| GB201505458D0 (en) | 2015-03-30 | 2015-05-13 | Renishaw Plc | Additive manufacturing apparatus and methods |
| CN105180813B (zh) * | 2015-09-30 | 2019-06-07 | 北方民族大学 | 一种直接入射式光臂放大型二维线性测头 |
| CN105136038B (zh) * | 2015-09-30 | 2019-06-07 | 北方民族大学 | 一种直接入射式光臂放大型三维扫描测头 |
| US9933867B2 (en) | 2015-12-30 | 2018-04-03 | Synaptics Incorporated | Active pen capacitive displacement gauge |
| JP6715110B2 (ja) * | 2016-06-30 | 2020-07-01 | 日本精機株式会社 | ストロークセンサ及び鞍乗り型車両 |
| JP6542743B2 (ja) * | 2016-11-18 | 2019-07-10 | 株式会社ミツトヨ | 測定プローブ |
| CN106839959B (zh) * | 2016-12-19 | 2019-05-03 | 西安交通大学 | 一种多向位移测量测头 |
| US10866080B2 (en) * | 2018-11-01 | 2020-12-15 | Mitutoyo Corporation | Inductive position detection configuration for indicating a measurement device stylus position |
| CN108007357A (zh) * | 2017-11-14 | 2018-05-08 | 成都华量传感器有限公司 | 板弹簧测量结构及位移传感器 |
| IT201800005159A1 (it) * | 2018-05-08 | 2019-11-08 | Trasduttore di posizione capacitivo e relativo dispsoitivo joystick e metodo di controllo. | |
| US11644298B2 (en) | 2018-11-01 | 2023-05-09 | Mitutoyo Corporation | Inductive position detection configuration for indicating a measurement device stylus position |
| US10914570B2 (en) * | 2018-11-01 | 2021-02-09 | Mitutoyo Corporation | Inductive position detection configuration for indicating a measurement device stylus position |
| US11740064B2 (en) | 2018-11-01 | 2023-08-29 | Mitutoyo Corporation | Inductive position detection configuration for indicating a measurement device stylus position |
| US11543899B2 (en) | 2018-11-01 | 2023-01-03 | Mitutoyo Corporation | Inductive position detection configuration for indicating a measurement device stylus position and including coil misalignment compensation |
| CN109916289B (zh) * | 2019-03-22 | 2020-08-07 | 哈尔滨工业大学 | 一种自变向电感式位移测量传感器 |
| JP6815440B2 (ja) * | 2019-06-12 | 2021-01-20 | 株式会社ミツトヨ | 測定プローブ |
| CN112729642B (zh) * | 2020-12-07 | 2023-01-13 | 北京星航机电装备有限公司 | 一种压簧力值的测试工装及测试方法 |
| US11644299B2 (en) | 2020-12-31 | 2023-05-09 | Mitutoyo Corporation | Inductive position sensor signal gain control for coordinate measuring machine probe |
| KR102586865B1 (ko) * | 2021-02-18 | 2023-10-06 | 황강선 | 컴팩트 타입의 기계 부품 검사용 탐침 유닛 및 이를 이용한 다중 탐침 검사장치 |
| EP4148372A1 (en) | 2021-09-09 | 2023-03-15 | Renishaw PLC | Measurement probe |
| DE102021210531A1 (de) | 2021-09-22 | 2023-03-23 | Dr. Johannes Heidenhain Gmbh | Tastkopf |
| US11713956B2 (en) | 2021-12-22 | 2023-08-01 | Mitutoyo Corporation | Shielding for sensor configuration and alignment of coordinate measuring machine probe |
| US11733021B2 (en) | 2021-12-22 | 2023-08-22 | Mitutoyo Corporation | Modular configuration for coordinate measuring machine probe |
| JP2023167383A (ja) * | 2022-05-12 | 2023-11-24 | 株式会社キーエンス | 画像測定装置及びタッチプローブ |
| EP4386311B1 (en) | 2022-12-15 | 2026-06-24 | Hexagon Innovation Hub GmbH | Touch trigger probe with capacitive sensor |
| EP4679030A1 (en) | 2024-07-11 | 2026-01-14 | Renishaw plc | A scanning probe and method |
| CN118518587B (zh) * | 2024-07-22 | 2024-09-17 | 常州锦奥制辊机械有限公司 | 一种镜面辊表面缺陷检测装置及检测方法 |
| EP4790358A1 (en) | 2025-02-06 | 2026-08-12 | Renishaw plc | Measurement method and apparatus |
Family Cites Families (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2892152A (en) | 1953-09-22 | 1959-06-23 | Buisson Pierre | System for measuring small displacements of a body along three coordinate axes |
| US3928796A (en) | 1973-11-30 | 1975-12-23 | Int Lead Zinc Res | Capacitive displacement transducer |
| US4303919A (en) * | 1978-12-04 | 1981-12-01 | John Dimeff | Non-contacting device for sensing multi-component motion |
| FR2489500A1 (fr) * | 1980-08-28 | 1982-03-05 | Option Sa | Traducteur electrique de rotation ou de translation, utilisant un effet capacitif entre des elements conducteurs multiples en deplacement relatif guide |
| US4462162A (en) * | 1981-06-30 | 1984-07-31 | Rolls-Royce Limited | Probe for measuring workpieces |
| FR2519137A1 (fr) * | 1981-12-24 | 1983-07-01 | Europ Agence Spatiale | Detecteur de position a deux axes pour dispositif a suspension magnetique |
| SU1357697A1 (ru) * | 1986-03-24 | 1987-12-07 | Всесоюзный Научно-Исследовательский И Конструкторский Институт Средств Измерения В Машиностроении | Нулева измерительна головка |
| GB8607199D0 (en) * | 1986-03-24 | 1986-04-30 | Renishaw Plc | Position sensing probe |
| GB8808614D0 (en) * | 1988-04-12 | 1988-05-11 | Renishaw Plc | Displacement-responsive devices with capacitive transducers |
| US4961055A (en) | 1989-01-04 | 1990-10-02 | Vickers, Incorporated | Linear capacitance displacement transducer |
| GB9004117D0 (en) * | 1990-02-23 | 1990-04-18 | Renishaw Plc | Touch probe |
| GB9111382D0 (en) * | 1991-05-25 | 1991-07-17 | Renishaw Metrology Ltd | Improvements in measuring probes |
| JP3235001B2 (ja) * | 1993-08-03 | 2001-12-04 | ニッタ株式会社 | 静電容量式センサー |
| US5576704A (en) * | 1994-12-01 | 1996-11-19 | Caterpillar Inc. | Capacitive joystick apparatus |
| US5691646A (en) * | 1994-12-07 | 1997-11-25 | Mitutoya Corporation | Capacitance-type displacement measuring device with electrodes having spiral patterns |
| JP3256443B2 (ja) | 1996-09-20 | 2002-02-12 | 株式会社ミツトヨ | 静電容量式変位測定装置 |
| JPH10122809A (ja) * | 1996-10-24 | 1998-05-15 | Olympus Optical Co Ltd | 球面アクチュエータ |
| JP2000193408A (ja) * | 1998-10-20 | 2000-07-14 | Fuji Oozx Inc | エンジンバルブの位置測定装置 |
| GB9907643D0 (en) | 1999-04-06 | 1999-05-26 | Renishaw Plc | Measuring probe |
| DE102008019115B4 (de) * | 2008-04-16 | 2014-05-22 | Siemens Aktiengesellschaft | Wägezelle |
-
2001
- 2001-01-30 GB GBGB0102324.1A patent/GB0102324D0/en not_active Ceased
-
2002
- 2002-01-30 JP JP2002561899A patent/JP4578771B2/ja not_active Expired - Fee Related
- 2002-01-30 WO PCT/GB2002/000413 patent/WO2002061378A1/en not_active Ceased
- 2002-01-30 AT AT02710997T patent/ATE404849T1/de not_active IP Right Cessation
- 2002-01-30 EP EP08011666.8A patent/EP1967826B1/en not_active Expired - Lifetime
- 2002-01-30 DE DE60228167T patent/DE60228167D1/de not_active Expired - Lifetime
- 2002-01-30 CN CNB028002350A patent/CN1307406C/zh not_active Expired - Lifetime
- 2002-01-30 EP EP02710997A patent/EP1261845B1/en not_active Expired - Lifetime
- 2002-01-30 RU RU2002129578/28A patent/RU2293945C2/ru not_active IP Right Cessation
- 2002-01-30 US US10/239,163 patent/US6683780B2/en not_active Expired - Lifetime
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