JP2004519083A - Ｘ線発生装置 - Google Patents
Ｘ線発生装置 Download PDFInfo
- Publication number
- JP2004519083A JP2004519083A JP2002565337A JP2002565337A JP2004519083A JP 2004519083 A JP2004519083 A JP 2004519083A JP 2002565337 A JP2002565337 A JP 2002565337A JP 2002565337 A JP2002565337 A JP 2002565337A JP 2004519083 A JP2004519083 A JP 2004519083A
- Authority
- JP
- Japan
- Prior art keywords
- liquid metal
- carrier
- gap
- contact surface
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910001338 liquidmetal Inorganic materials 0.000 claims abstract description 174
- 230000002093 peripheral effect Effects 0.000 claims description 17
- 238000005086 pumping Methods 0.000 claims description 11
- 239000000463 material Substances 0.000 claims description 4
- 239000007788 liquid Substances 0.000 abstract description 3
- 241001012508 Carpiodes cyprinus Species 0.000 description 12
- 238000010894 electron beam technology Methods 0.000 description 7
- 230000005540 biological transmission Effects 0.000 description 6
- 238000011109 contamination Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 239000000314 lubricant Substances 0.000 description 4
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 2
- 229910052790 beryllium Inorganic materials 0.000 description 2
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 229910052733 gallium Inorganic materials 0.000 description 2
- 230000006698 induction Effects 0.000 description 2
- 230000005499 meniscus Effects 0.000 description 2
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 2
- 229910052753 mercury Inorganic materials 0.000 description 2
- 238000010008 shearing Methods 0.000 description 2
- 238000011144 upstream manufacturing Methods 0.000 description 2
- 229910000645 Hg alloy Inorganic materials 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 1
- 238000005119 centrifugation Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000003595 mist Substances 0.000 description 1
- 238000013021 overheating Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000004513 sizing Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/08—Anodes; Anti cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2235/00—X-ray tubes
- H01J2235/08—Targets (anodes) and X-ray converters
- H01J2235/081—Target material
- H01J2235/082—Fluids, e.g. liquids, gases
Landscapes
- X-Ray Techniques (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE10106740A DE10106740A1 (de) | 2001-02-14 | 2001-02-14 | Röntgenstrahler mit einem Target aus einem flüssigen Metall |
| PCT/IB2002/000335 WO2002065505A1 (en) | 2001-02-14 | 2002-01-30 | A device for generating x-rays |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2004519083A true JP2004519083A (ja) | 2004-06-24 |
Family
ID=7673952
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002565337A Pending JP2004519083A (ja) | 2001-02-14 | 2002-01-30 | Ｘ線発生装置 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US6925151B2 (enExample) |
| EP (1) | EP1362360B1 (enExample) |
| JP (1) | JP2004519083A (enExample) |
| DE (2) | DE10106740A1 (enExample) |
| WO (1) | WO2002065505A1 (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017217228A1 (ja) * | 2016-06-15 | 2017-12-21 | ウシオ電機株式会社 | Ｘ線発生装置 |
| JP2021500702A (ja) * | 2017-10-18 | 2021-01-07 | ケーエルエー コーポレイション | 半導体計測用の液体金属回転式アノードｘ線源 |
Families Citing this family (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10130070A1 (de) * | 2001-06-21 | 2003-01-02 | Philips Corp Intellectual Pty | Röntgenstrahler mit Flüssigmetall-Target |
| US7127036B2 (en) * | 2002-03-08 | 2006-10-24 | Koninklijke Philips Electronics, N.V. | Device for generating X-rays having a liquid metal anode |
| US6873683B2 (en) * | 2003-05-27 | 2005-03-29 | General Electric Company | Axial flux motor driven anode target for X-ray tube |
| DE102004013618B4 (de) * | 2004-03-19 | 2007-07-26 | Yxlon International Security Gmbh | Verfahren zum Betrieb einer magnetohydrodynamischen Pumpe, Flüssigmetallanode für eine Röntgenquelle sowie Röntgenstrahler |
| EP1738389B1 (en) * | 2004-04-13 | 2007-08-29 | Koninklijke Philips Electronics N.V. | A device for generating x-rays having a liquid metal anode |
| DE102004031973B4 (de) * | 2004-07-01 | 2006-06-01 | Yxlon International Security Gmbh | Abschirmung einer Röntgenquelle |
| DE102008026938A1 (de) * | 2008-06-05 | 2009-12-17 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Strahlungsquelle und Verfahren zum Erzeugen von Röntgenstrahlung |
| US7929667B1 (en) * | 2008-10-02 | 2011-04-19 | Kla-Tencor Corporation | High brightness X-ray metrology |
| HUP1000635A2 (en) | 2010-11-26 | 2012-05-29 | Ge Hungary Kft | Liquid anode x-ray source |
| MX2013010435A (es) | 2011-03-11 | 2014-01-17 | Univ California | Una fuente triboelectrica de rayos x. |
| US8938048B2 (en) | 2012-03-27 | 2015-01-20 | Tribogenics, Inc. | X-ray generator device |
| US9208985B2 (en) * | 2012-06-14 | 2015-12-08 | Tribogenics, Inc. | Friction driven x-ray source |
| US9291578B2 (en) * | 2012-08-03 | 2016-03-22 | David L. Adler | X-ray photoemission microscope for integrated devices |
| US9244028B2 (en) | 2012-11-07 | 2016-01-26 | Tribogenics, Inc. | Electron excited x-ray fluorescence device |
| US9008277B2 (en) | 2013-03-15 | 2015-04-14 | Tribogenics, Inc. | Continuous contact X-ray source |
| US9173279B2 (en) | 2013-03-15 | 2015-10-27 | Tribogenics, Inc. | Compact X-ray generation device |
| US9412553B2 (en) | 2013-03-15 | 2016-08-09 | Tribogenics, Inc. | Transmission X-ray generator |
| US11170965B2 (en) * | 2020-01-14 | 2021-11-09 | King Fahd University Of Petroleum And Minerals | System for generating X-ray beams from a liquid target |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE890246C (de) | 1940-03-03 | 1953-09-17 | Heinrich Dr Med Chantraine | Roentgenroehre mit einer aus einer umlaufenden metallischen Fluessigkeit, z. B. Quecksilber, bestehenden Anode |
| US4551800A (en) * | 1982-11-26 | 1985-11-05 | General Electric Company | Integrated hybrid image remasking in a subtraction angiography method |
| US4559557A (en) * | 1984-06-01 | 1985-12-17 | General Electric Company | Region-of-interest digital subtraction angiography |
| US4953191A (en) * | 1989-07-24 | 1990-08-28 | The United States Of America As Represented By The United States Department Of Energy | High intensity x-ray source using liquid gallium target |
| US5052034A (en) * | 1989-10-30 | 1991-09-24 | Siemens Aktiengesellschaft | X-ray generator |
| DE19821939A1 (de) * | 1998-05-15 | 1999-11-18 | Philips Patentverwaltung | Röntgenstrahler mit einem Flüssigmetall-Target |
-
2001
- 2001-02-14 DE DE10106740A patent/DE10106740A1/de not_active Withdrawn
-
2002
- 2002-01-30 EP EP02710223A patent/EP1362360B1/en not_active Expired - Lifetime
- 2002-01-30 WO PCT/IB2002/000335 patent/WO2002065505A1/en not_active Ceased
- 2002-01-30 DE DE60230387T patent/DE60230387D1/de not_active Expired - Lifetime
- 2002-01-30 US US10/257,996 patent/US6925151B2/en not_active Expired - Fee Related
- 2002-01-30 JP JP2002565337A patent/JP2004519083A/ja active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017217228A1 (ja) * | 2016-06-15 | 2017-12-21 | ウシオ電機株式会社 | Ｘ線発生装置 |
| JP2017224490A (ja) * | 2016-06-15 | 2017-12-21 | ウシオ電機株式会社 | Ｘ線発生装置 |
| US10672584B2 (en) | 2016-06-15 | 2020-06-02 | Ushio Denki Kabushiki Kaisha | X-ray generator |
| JP2021500702A (ja) * | 2017-10-18 | 2021-01-07 | ケーエルエー コーポレイション | 半導体計測用の液体金属回転式アノードｘ線源 |
| JP7095083B2 (ja) | 2017-10-18 | 2022-07-04 | ケーエルエー コーポレイション | 半導体計測用の液体金属回転式アノードｘ線照明源、ｘ線ベース計測システム、ｘ線放射発生方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2002065505A1 (en) | 2002-08-22 |
| DE10106740A1 (de) | 2002-08-22 |
| EP1362360B1 (en) | 2008-12-17 |
| DE60230387D1 (enExample) | 2009-01-29 |
| EP1362360A1 (en) | 2003-11-19 |
| US20030142789A1 (en) | 2003-07-31 |
| US6925151B2 (en) | 2005-08-02 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
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| A977 | Report on retrieval |
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| A521 | Request for written amendment filed |
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