JP2004511754A - Icチップのための熱交換器への流体温度および熱交換器からの流体温度の関数として、icチップの温度を加熱および冷却される流体で調整するためのシステム - Google Patents
Icチップのための熱交換器への流体温度および熱交換器からの流体温度の関数として、icチップの温度を加熱および冷却される流体で調整するためのシステム Download PDFInfo
- Publication number
- JP2004511754A JP2004511754A JP2001586479A JP2001586479A JP2004511754A JP 2004511754 A JP2004511754 A JP 2004511754A JP 2001586479 A JP2001586479 A JP 2001586479A JP 2001586479 A JP2001586479 A JP 2001586479A JP 2004511754 A JP2004511754 A JP 2004511754A
- Authority
- JP
- Japan
- Prior art keywords
- fluid
- temperature
- reservoir
- heat exchanger
- hot
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012530 fluid Substances 0.000 title claims abstract description 160
- 230000001105 regulatory effect Effects 0.000 title description 3
- 230000004044 response Effects 0.000 claims description 20
- 238000001816 cooling Methods 0.000 claims description 17
- 238000010438 heat treatment Methods 0.000 claims description 3
- 238000012360 testing method Methods 0.000 abstract description 40
- 230000007423 decrease Effects 0.000 abstract description 12
- 230000008859 change Effects 0.000 description 14
- 230000004048 modification Effects 0.000 description 6
- 238000012986 modification Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 238000005094 computer simulation Methods 0.000 description 4
- 230000007246 mechanism Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 230000009467 reduction Effects 0.000 description 4
- 238000004088 simulation Methods 0.000 description 4
- 230000003247 decreasing effect Effects 0.000 description 3
- 238000010926 purge Methods 0.000 description 3
- 238000009529 body temperature measurement Methods 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 229920002545 silicone oil Polymers 0.000 description 2
- 238000013016 damping Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000004069 differentiation Effects 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D23/00—Control of temperature
- G05D23/19—Control of temperature characterised by the use of electric means
- G05D23/1927—Control of temperature characterised by the use of electric means using a plurality of sensors
- G05D23/193—Control of temperature characterised by the use of electric means using a plurality of sensors sensing the temperaure in different places in thermal relationship with one or more spaces
- G05D23/1931—Control of temperature characterised by the use of electric means using a plurality of sensors sensing the temperaure in different places in thermal relationship with one or more spaces to control the temperature of one space
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D23/00—Control of temperature
- G05D23/01—Control of temperature without auxiliary power
- G05D23/13—Control of temperature without auxiliary power by varying the mixing ratio of two fluids having different temperatures
- G05D23/1393—Control of temperature without auxiliary power by varying the mixing ratio of two fluids having different temperatures characterised by the use of electric means
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D23/00—Control of temperature
- G05D23/19—Control of temperature characterised by the use of electric means
- G05D23/1919—Control of temperature characterised by the use of electric means characterised by the type of controller
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Automation & Control Theory (AREA)
- Remote Sensing (AREA)
- Control Of Temperature (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Tests Of Electronic Circuits (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/574,784 US6412551B1 (en) | 2000-05-19 | 2000-05-19 | System for regulating the temperature of IC-chips with a fluid which is heated and cooled as a function of the fluid temperatures to and from heat exchangers for the IC-chips |
| PCT/US2001/013718 WO2001090766A2 (en) | 2000-05-19 | 2001-04-30 | System for regulating the temperature of ic-chips with a fluid which is heated and cooled as a function of the fluid temperatures to and from heat exchangers for the ic-chips |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2004511754A true JP2004511754A (ja) | 2004-04-15 |
| JP2004511754A5 JP2004511754A5 (enExample) | 2005-01-27 |
Family
ID=24297626
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001586479A Pending JP2004511754A (ja) | 2000-05-19 | 2001-04-30 | Icチップのための熱交換器への流体温度および熱交換器からの流体温度の関数として、icチップの温度を加熱および冷却される流体で調整するためのシステム |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US6412551B1 (enExample) |
| EP (1) | EP1282828B1 (enExample) |
| JP (1) | JP2004511754A (enExample) |
| DE (1) | DE60100904D1 (enExample) |
| WO (1) | WO2001090766A2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010535417A (ja) * | 2007-07-30 | 2010-11-18 | 株式会社アドバンテスト | 電子部品の温度制御装置 |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6856037B2 (en) * | 2001-11-26 | 2005-02-15 | Sony Corporation | Method and apparatus for converting dissipated heat to work energy |
| US6658736B1 (en) * | 2002-08-09 | 2003-12-09 | Unisys Corporation | Method of fabricating a heat exchanger, for regulating the temperature of multiple integrated circuit modules, having a face of a solid malleable metal coated with a release agent |
| US7832461B2 (en) * | 2006-04-28 | 2010-11-16 | Hewlett-Packard Development Company, L.P. | Cooling systems and methods |
| US7349213B2 (en) * | 2006-06-29 | 2008-03-25 | International Business Machines Corporation | Coolant control unit, and cooled electronics system and method employing the same |
| TW201249029A (en) * | 2011-05-20 | 2012-12-01 | Hon Hai Prec Ind Co Ltd | Controller IC adapter tool |
| CN102339655B (zh) * | 2011-08-30 | 2015-07-08 | 中国科学院微电子研究所 | 温控可充气真空辐射设备 |
| PL3286515T3 (pl) * | 2015-02-24 | 2024-01-03 | Sustainable Energy Solutions, Inc. | Sposoby dynamicznej wymiany ciepła i układów |
| JP2022166632A (ja) * | 2021-04-21 | 2022-11-02 | Smc株式会社 | 温調装置 |
| KR102458920B1 (ko) * | 2022-02-21 | 2022-10-25 | 삼성전자주식회사 | 유체 공급 장치 |
Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49139663U (enExample) * | 1973-03-23 | 1974-12-02 | ||
| US4060997A (en) * | 1976-03-31 | 1977-12-06 | Application Engineering Corporation | Water chiller control |
| US4495777A (en) * | 1983-01-10 | 1985-01-29 | Babington Thomas G | Load shaving system |
| JPH0363485A (ja) * | 1989-07-31 | 1991-03-19 | Canon Inc | 温度制御装置 |
| JPH05288801A (ja) * | 1992-04-13 | 1993-11-05 | Sumitomo Electric Ind Ltd | 温度特性試験装置 |
| JPH0729967A (ja) * | 1992-08-14 | 1995-01-31 | Texas Instr Inc <Ti> | 低温半導体プロセッシング装置及び方法 |
| JPH07151441A (ja) * | 1993-11-30 | 1995-06-16 | Orion Mach Co Ltd | 液体冷却装置の液温制御装置 |
| JPH07208827A (ja) * | 1994-01-14 | 1995-08-11 | Thermo King Corp | 冷凍装置及びその作動方法 |
| JPH07308592A (ja) * | 1994-05-17 | 1995-11-28 | Orion Mach Co Ltd | 恒温槽の液体温度調節装置 |
| US5977785A (en) * | 1996-05-28 | 1999-11-02 | Burward-Hoy; Trevor | Method and apparatus for rapidly varying the operating temperature of a semiconductor device in a testing environment |
| JPH11345870A (ja) * | 1998-06-02 | 1999-12-14 | Tokyo Electron Ltd | 多段容器の温度管理装置 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5174364A (en) * | 1988-09-21 | 1992-12-29 | Nec Corporation | Cooling abnormality detection system for electronic equipment |
| DE68922061T2 (de) * | 1988-10-03 | 1995-08-31 | Canon Kk | Vorrichtung zum Regeln der Temperatur. |
| JP2937406B2 (ja) * | 1990-04-26 | 1999-08-23 | 甲府日本電気株式会社 | 冷却装置 |
| JP2852152B2 (ja) * | 1992-02-06 | 1999-01-27 | 甲府日本電気株式会社 | 電子装置の冷却装置 |
| US5266778A (en) * | 1992-05-29 | 1993-11-30 | Hollister, Inc. | Dynamic temperature control for use with a heating and/or cooling system including at least one temperature sensor |
| US5395451A (en) * | 1993-05-26 | 1995-03-07 | Schmidt-Bretten, Inc. | Paint temperature control system |
| JP3329663B2 (ja) * | 1996-06-21 | 2002-09-30 | 株式会社日立製作所 | 電子装置用冷却装置 |
-
2000
- 2000-05-19 US US09/574,784 patent/US6412551B1/en not_active Expired - Lifetime
-
2001
- 2001-04-30 WO PCT/US2001/013718 patent/WO2001090766A2/en not_active Ceased
- 2001-04-30 JP JP2001586479A patent/JP2004511754A/ja active Pending
- 2001-04-30 EP EP01930884A patent/EP1282828B1/en not_active Expired - Lifetime
- 2001-04-30 DE DE60100904T patent/DE60100904D1/de not_active Expired - Lifetime
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49139663U (enExample) * | 1973-03-23 | 1974-12-02 | ||
| US4060997A (en) * | 1976-03-31 | 1977-12-06 | Application Engineering Corporation | Water chiller control |
| US4495777A (en) * | 1983-01-10 | 1985-01-29 | Babington Thomas G | Load shaving system |
| JPH0363485A (ja) * | 1989-07-31 | 1991-03-19 | Canon Inc | 温度制御装置 |
| JPH05288801A (ja) * | 1992-04-13 | 1993-11-05 | Sumitomo Electric Ind Ltd | 温度特性試験装置 |
| JPH0729967A (ja) * | 1992-08-14 | 1995-01-31 | Texas Instr Inc <Ti> | 低温半導体プロセッシング装置及び方法 |
| JPH07151441A (ja) * | 1993-11-30 | 1995-06-16 | Orion Mach Co Ltd | 液体冷却装置の液温制御装置 |
| JPH07208827A (ja) * | 1994-01-14 | 1995-08-11 | Thermo King Corp | 冷凍装置及びその作動方法 |
| JPH07308592A (ja) * | 1994-05-17 | 1995-11-28 | Orion Mach Co Ltd | 恒温槽の液体温度調節装置 |
| US5977785A (en) * | 1996-05-28 | 1999-11-02 | Burward-Hoy; Trevor | Method and apparatus for rapidly varying the operating temperature of a semiconductor device in a testing environment |
| JPH11345870A (ja) * | 1998-06-02 | 1999-12-14 | Tokyo Electron Ltd | 多段容器の温度管理装置 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010535417A (ja) * | 2007-07-30 | 2010-11-18 | 株式会社アドバンテスト | 電子部品の温度制御装置 |
| US8896335B2 (en) | 2007-07-30 | 2014-11-25 | Advantest Corporation | Thermal controller for electronic devices |
Also Published As
| Publication number | Publication date |
|---|---|
| EP1282828B1 (en) | 2003-10-01 |
| EP1282828A2 (en) | 2003-02-12 |
| US6412551B1 (en) | 2002-07-02 |
| WO2001090766A2 (en) | 2001-11-29 |
| DE60100904D1 (de) | 2003-11-06 |
| WO2001090766A3 (en) | 2002-05-23 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20080403 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20101221 |
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| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20110705 |