JP2004356624A5 - - Google Patents

Claims (24)

A mounting table on which the processing object is mounted in order to perform a predetermined heat treatment on the processing object in the processing container, and heating means for heating the processing object, and the mounting table is used as the processing container. In the mounting table structure having a support column that stands up and supports from the bottom of the
A heat-resistant top cover member, side cover member, and bottom cover member are provided on the top, side, and bottom surfaces of the mounting table, respectively, and a heat-resistant opaque back cover member is provided on the bottom surface of the mounting table. A mounting table structure characterized by The mounting table structure according to claim 1, wherein the lower surface cover member is provided on a lower surface of the opaque back surface cover member. The upper surface cover member is set to have a diameter substantially the same as the diameter of the mounting table. A convex portion is formed on the upper surface of the upper surface cover member, and the convex portion is recessed in a concave shape. The mounting table structure according to claim 1, wherein an accommodation recess for mounting the object to be processed is formed. The mounting table structure according to any one of claims 1 to 3, wherein an upper surface of a peripheral edge portion of the upper surface cover member is covered in contact with a part of the side surface cover member. The mounting table structure according to claim 1, wherein an opaque quartz cover member is provided on a side surface of the mounting table. The mounting table structure according to claim 2, wherein a gap is formed between the opaque back cover member and the bottom cover member. The mounting table structure according to claim 6, wherein a projecting leg for forming the gap is formed on a lower surface of the opaque back cover member. A mounting table that mounts the object to be processed for performing a predetermined heat treatment on the object to be processed in the processing container, and a column that supports the mounting table upright from the bottom of the processing container. In the stand structure,
The mounting table and the support column are each formed of quartz glass, the heating unit is embedded in the mounting table, the column is formed in a cylindrical shape, and the power supply line to the heating unit is formed from the center of the mounting table. A mounting table structure that is pulled out and inserted downward in the cylindrical column. The mounting table is formed by joining an upper plate, an intermediate plate, and a lower plate, and a wiring groove for accommodating the heating means in one of the lower surface of the upper plate and the upper surface of the intermediate plate 9. A wiring groove that accommodates the power supply line extending from the heating means is formed in one of the lower surface of the middle plate and the upper surface of the lower surface. The mounting table structure described. The mounting table structure according to claim 8 or 9, wherein an opaque upper surface cover member is provided on an upper surface of the mounting table. In the mounting table, a backside gas hole for supplying a purge gas is formed on the upper surface of the mounting table, and a quartz tube for supplying a gas is connected to the backside gas hole. The mounting table structure according to claim 8, wherein: 12. The mounting table structure according to claim 11, wherein the quartz tube is disposed outside the support column, and upper and lower ends thereof are attached and fixed by welding. The mounting table structure according to claim 8, wherein the quartz glass is transparent quartz glass. The mounting table structure according to claim 8, wherein a heat-resistant opaque back cover member is provided on the lower surface side of the mounting table. The mounting table structure according to any one of claims 8 to 14, wherein an upper surface cover member, a side surface cover member, and a lower surface cover member each having heat resistance are provided on an upper surface, a side surface, and a lower surface of the mounting table. The mounting table structure according to any one of claims 8 to 15, wherein a cushion member for preventing breakage of the support is interposed at a lower end portion of the support. 15. The mounting table structure according to claim 2, wherein the opaque back cover member is opaque quartz glass. The mounting table structure according to any one of claims 1 to 17, wherein a column cover member having heat resistance is provided on a side surface of the column. The upper surface cover member, the side surface cover member, the lower surface cover member, and the support column cover member constitute a cover member, and the lower surface cover member and the support column cover member are integrally formed, and the cover 19. The mounting table structure according to claim 18, wherein the whole member can be disassembled and assembled. The other cover members except the upper surface cover member and the opaque back surface cover member formed on the upper surface of the mounting table are each made of transparent quartz glass, and the surface of the transparent quartz glass cover member has a film attached thereto. The mounting table structure according to any one of claims 2, 6, 7, 15, and 19, wherein a surface roughening treatment for preventing peeling is performed. A seal member is provided at a joint portion at the lower end of the support column, and an opaque member is provided in the vicinity of the seal member for blocking heat released from the mounting table side to the seal member. The mounting table structure according to claim 1, wherein: The whole support column is made of an opaque member, an opaque member is installed inside the support column, and the seal member at the lower end of the support column is protected from the heat released from the mounting table side. Mounting table structure. A processing vessel that can be evacuated;
The mounting table structure according to any one of claims 1 to 22,
Gas supply means for supplying a predetermined processing gas into the processing container;
A heat treatment apparatus comprising: The heat treatment apparatus according to claim 23, wherein the heating means of the mounting table is composed of two heating zones on the inner side and the outer side.