JP2004318135A - 光スイッチ用構造及びスイッチング方法 - Google Patents

光スイッチ用構造及びスイッチング方法 Download PDF

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Publication number
JP2004318135A
JP2004318135A JP2004112439A JP2004112439A JP2004318135A JP 2004318135 A JP2004318135 A JP 2004318135A JP 2004112439 A JP2004112439 A JP 2004112439A JP 2004112439 A JP2004112439 A JP 2004112439A JP 2004318135 A JP2004318135 A JP 2004318135A
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JP
Japan
Prior art keywords
liquid metal
coupled
chamber
layer
slag
Prior art date
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JP2004112439A
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English (en)
Japanese (ja)
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JP2004318135A5 (enExample
Inventor
Marvin Glenn Wong
グレン ウォン マービン
Arthur Fong
フォン アーサー
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Agilent Technologies Inc
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Agilent Technologies Inc
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Application filed by Agilent Technologies Inc filed Critical Agilent Technologies Inc
Publication of JP2004318135A publication Critical patent/JP2004318135A/ja
Publication of JP2004318135A5 publication Critical patent/JP2004318135A5/ja
Withdrawn legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H29/00—Switches having at least one liquid contact
    • H01H29/28—Switches having at least one liquid contact with level of surface of contact liquid displaced by fluid pressure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H29/00—Switches having at least one liquid contact
    • H01H2029/008—Switches having at least one liquid contact using micromechanics, e.g. micromechanical liquid contact switches or [LIMMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H57/00—Electrostrictive relays; Piezoelectric relays
    • H01H2057/006—Micromechanical piezoelectric relay
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H57/00—Electrostrictive relays; Piezoelectric relays

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  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
JP2004112439A 2003-04-14 2004-04-06 光スイッチ用構造及びスイッチング方法 Withdrawn JP2004318135A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/413,070 US6818844B2 (en) 2003-04-14 2003-04-14 Method and structure for a slug assisted pusher-mode piezoelectrically actuated liquid metal optical switch

Publications (2)

Publication Number Publication Date
JP2004318135A true JP2004318135A (ja) 2004-11-11
JP2004318135A5 JP2004318135A5 (enExample) 2007-05-17

Family

ID=33131357

Family Applications (1)

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JP2004112439A Withdrawn JP2004318135A (ja) 2003-04-14 2004-04-06 光スイッチ用構造及びスイッチング方法

Country Status (2)

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US (1) US6818844B2 (enExample)
JP (1) JP2004318135A (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6961487B2 (en) * 2003-04-14 2005-11-01 Agilent Technologies, Inc. Method and structure for a pusher-mode piezoelectrically actuated liquid metal optical switch
US7274840B2 (en) * 2003-07-23 2007-09-25 Avago Technologies Fiber Ip (Singapore) Pte. Ltd. Clean and test for fluid within a reflection optical switch system
US7019236B2 (en) * 2004-03-11 2006-03-28 Agilent Technologies, Inc. Switch with lid
KR101051732B1 (ko) * 2009-11-12 2011-07-25 한국전자통신연구원 미세 액체 금속 액적의 형상 변화를 이용한 ｒｆ ｍｅｍｓ 스위치

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Also Published As

Publication number Publication date
US6818844B2 (en) 2004-11-16
US20040200708A1 (en) 2004-10-14

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