JP2004304036A - Device for manufacturing electronic circuit substrate - Google Patents

Device for manufacturing electronic circuit substrate Download PDF

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Publication number
JP2004304036A
JP2004304036A JP2003096786A JP2003096786A JP2004304036A JP 2004304036 A JP2004304036 A JP 2004304036A JP 2003096786 A JP2003096786 A JP 2003096786A JP 2003096786 A JP2003096786 A JP 2003096786A JP 2004304036 A JP2004304036 A JP 2004304036A
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JP
Japan
Prior art keywords
substrate
electronic circuit
solder resist
pattern
resist pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2003096786A
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Japanese (ja)
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JP4505191B2 (en
Inventor
Atsushi Matsuura
淳 松浦
Masakazu Kishi
雅一 岸
Takeshi Yamaguchi
山口  剛
Bunji Uchiyama
文二 内山
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Via Mechanics Ltd
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Hitachi Via Mechanics Ltd
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Priority to JP2003096786A priority Critical patent/JP4505191B2/en
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  • Manufacturing Of Printed Wiring (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a device for manufacturing an electronic circuit substrate capable of accurately positioning a solder resist pattern at a circuit pattern, and improving the yield of a product. <P>SOLUTION: An ink jet nozzle 2 for discharging liquid droplets of a fluid containing volatile components with which conductive particles are mixed, a laser head 4 for heating, an ink jet nozzle 5 for discharging liquid droplets of a fluid constituted of insulating materials, a laser head 7 for heating and an ink jet nozzle 8 for discharging ink for print are successively arranged so as to face an Y table 33 freely positioned to XY directions on which a substrate 1 is placed. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

【0001】
【発明の属する技術分野】
本発明は、合成樹脂、ガラス、セラミック等の基板材料の表面に線幅が数μm〜数10μmの回路パターンとソルダーレジストパターンおよびシンボルマークを形成するための電子回路基板の製造装置に関する。
【0002】
【従来の技術】
電子回路基板は、基板の表面上に回路パターンを形成された後、ソルダーレジストパターンが形成され、さらにシンボルマークを印刷されて製品になる。
はじめに、従来の回路パターン形成手順を説明する。
【0003】
図5は、従来の回路パターン形成手順を示す図であり、(a1)〜(f1)は製作例を、(a2)〜(f2)は基板の表面を示している。
同図(a1)および(a2)に示すように、両面基板12は、絶縁性の樹脂12aの上下表面に銅箔12bを貼り付けた構造になっている。
このような両面基板12の上部表面全面に、同図(b1)および(b2)に示すようにフォトレジスト13を塗布した後、同図(c1)および(c2)に示すように、形成しようとする回路パターンに応じた穴14aが形成されたフォトマスク14を両面基板12の上部に配置する。この状態でフォトマスク14の上部にレジスト露光装置15を配置し、フォトマスク14を光16により照射する。すると、穴14aに重なるフォトレジスト13が露光して、露光レジスト13aになる。
【0004】
その後、同図(d1)および(d2)に示すように、露光させた両面基板12を現像液浴槽17に浸漬し、現像液17aにより露光レジスト13aが除去された両面基板12を洗浄・乾燥した後、同図(e1)および(e2)に示すように、両面基板12をエッチング液浴槽18に浸漬する。すると、エッチング液18aにより、露光レジスト13aの下部にあった銅箔12bが溶解(エッチング)され、両面基板11表面に貼り付けられた銅箔12bは回路パターン部だけが残る。
【0005】
エッチングが終了した両面基板12を洗浄・乾燥した後、同図(f1)および(f2)に示すように、両面基板12をレジスト剥離溶液浴槽19に浸漬し、レジスト剥離溶液19aによりフォトレジスト13を除去した後、洗浄・乾燥することにより、回路パターンが形成される。
【0006】
次に、従来のソルダーレジストパターンおよびシンボルマークの印刷手順を説明する。
図6は、従来のソルダーレジストパターンおよびシンボルマークの印刷手順を示す図であり、(g1)〜(i1)は製作例を、(g2)〜(i2)は基板の表面を示す図である。
【0007】
同図(g1)に示すように、予めソルダーレジストパターンが形成されたマスクスクリーン20aを両面基板12の上部に配置する。マスクスクリーン20aは形成しようとするソルダーレジストパターンに応じて、ソルダーレジストインク22が透過するようにメッシュのパターンが形成されている。この状態で同図(g2)に示すように、ソルダーレジストインク22をマスクスクリーン20a上に配置し、スキージ21によりソルダーレジストインク22をマスクスクリーン20aから押し出すことにより両面基板12上にスクリーン印刷すると、同図(h1)および(h2)に示すように、ソルダーレジストパターン22aが形成される。
【0008】
ソルダーレジストパターンが形成された両面基板12を乾燥し、同図(i1)に示すように、形成しようとするシンボルマークパターンが形成されたマスクスクリーン20bを両面基板12の上部に配置する。マスクスクリーン20bは、シンボルマークインク23が透過するようにメッシュのパターンが形成されている。シンボルマークインク23をマスクスクリーン20b上に配置し、スキージ21によりシンボルマークインク23をマスクスクリーン20bから押し出すことにより両面基板12上にスクリーン印刷すると、同図(i2)に示すように、シンボルマーク印刷が完了する。シンボルマークパターン23aを乾燥させると、電子部品を表面実装可能な製品としての両面基板12(すなわち電子回路基板)が完成する。
【0009】
電子回路の微細化が進み、ビア(上層と下層に配置された導体を電気的に接続するための穴である。)のランドとラインとの間隔を数〜十数μmにすることが要求されるようになっている。
【0010】
【発明が解決しようとする課題】
しかし、従来の電子回路基板の製造手順では、回路パターンに対してソルダーレジストパターンを配置することが困難であり、ソルダーレジストパターンが例えばずれてランド上に配置されたり、回路パターンがむき出しになることがあったため、製品の歩留りが低下した。また、位置決め精度向上のため設備費が高価になった。
【0011】
本発明の目的は、上記従来技術における課題を解決し、ソルダーレジストパターンを回路パターンに対して正確に位置決めすることができ、製品の歩留りを向上させることができる電子回路基板の製造装置を提供するにある。
【0012】
【課題を解決するための手段】
上記した課題は、電子回路基板の製造装置として、基板を載置するテーブルと、溶液による回路パターン形成手段と、乾燥手段と、溶液によるソルダーレジストパターン形成手段と、を設け、前記テーブルに対向させて、前記回路パターン形成手段と、前記乾燥手段と、前記ソルダーレジストパターン形成手段を配置し、前記テーブルから前記基板を取り外すことなく、電子回路基板を形成することにより解決される。
【0013】
【発明の実施の形態】
(第1の実施形態)
図1は、本発明の第1の実施形態に係る電子回路基板製造装置の構成図であり、(a)は正面図、(b)は側面図、(c)はヘッド部の拡大図である。
同図において、電子回路基板製造装置MのXテーブル31はX方向に配置されたX軸案内装置30上を位置決め自在である。Xテーブル31上には、Y方向にY軸案内装置32が配置されている。Yテーブル33はY軸案内装置32上を位置決め自在である。絶縁材料からなる基板1はYテーブル33上に固定されている。
【0014】
電子回路基板製造装置MのYテーブル33と対向する位置にはヘッド保持装置40が配置されている。ヘッド保持装置40のY方向には、インクジェットノズル2と、加熱用レーザヘッド4と、インクジェットノズル5と、加熱用レーザヘッド7と、インクジェットノズル8が順に配置されている。インクジェットノズル2と、インクジェットノズル5、インクジェットノズル8は、それぞれ複数がX方向に並べて配置されている。
【0015】
インクジェットノズル2は、導電性粒子が混入された、揮発性成分を含む流動体の液滴3を吐出する。加熱用レーザヘッド4、7は、レーザを出力する。インクジェットノズル5は、絶縁材料からなる流動体液滴6を吐出する。インクジェットノズル8は印刷用のインクを吐出する。
【0016】
次に、電子回路基板の製造手順を説明する。
図2、図3は、電子回路基板の製造手順を説明する模式図であり、上段は平面図、下段は側面図である。
【0017】
(1)第1の工程(回路パターン形成工程)
同図(a)に示すように、基板1をX方向(図の右方)に移動させながら、インクジェットノズル2により導電性粒子(図示を省略する)が混入された揮発性成分を含む流動体の液滴を回路パターンに合わせて吐出させ、基板1上に導電性パターン3aを形成する。
なお、回路パターンの線幅を数μm〜数10μmにする場合、液滴の直径を2μm前後、液滴に混入する導電性粒子の大きさを数nm〜50nm前後にすると、良い結果を得ることができる。
また、線幅10μmの回路パターンを形成する場合、液滴の直径を2μmとすると、1個の液滴が基板1表面上で直径5〜7μm程度に広がるので、液滴の基板1上での広がりが例えば50%程度重なるようにすると良い。
また、導電性粒子が混入した流動体としては、例えばハリマ化成工業株式会社の商品名「ナノペースト」を用いることができる。
【0018】
(2)第2の工程(回路パターン乾燥、固化工程)
同図(b)に示すように、所望の距離だけ基板1をY方向(図の下方)に移動させる。その後、基板1をX方向(図の左方)に移動させながらインクジェットノズル2により導電性粒子が混入された揮発性成分を含む流動体の液滴を回路パターンに合わせて吐出させ、基板1上に導電性パターン3aを形成する。
同時に、加熱用レーザヘッド4からレーザを照射し、第1の工程で形成された回路パターンを加熱することにより、揮発性成分を揮発させて乾燥させると共に、導電性粒子を積極的に固化させる。
また、図示の基板1の場合は、後述するソルダーレジストパターン6a形成工程を同時に行う。
【0019】
(3)第3の工程(ソルダーレジストパターン形成工程)
図3(c)に示すように、所望の距離だけ基板1をY方向(図の下方)に移動させる。その後、基板1をX方向(図の右方)に移動させながらインクジェットノズル5により基板1上にソルダーレジストパターン6aを形成する。
また、図示の基板1の場合、図3(c)に示すように、加熱用レーザヘッド7からレーザを照射し、第3の工程で形成されたソルダーレジストパターン6aを加熱することにより、揮発性成分を揮発させて固化ソルダーレジストパターン6bを形成する。
【0020】
(4)第4の工程(シンボルマーク印刷工程)
図4(d)に示すように、所望の距離だけ基板1をY方向(図の下方)に移動させる。その後、基板1をX方向(図の左方)に移動させながらインクジェットノズル8により、基板1上に、黒色またはそれに近い色の塗料であるシンボルマーク印刷用インクの液滴を吐出させてシンボルマーク9aを印刷する。そして、印刷塗布されたシンボルマーク9aを自然乾燥させる。
このように、基板1をYテーブル33から取り外す必要がないので、線幅が数μm〜数10μmの回路パターンに対してソルダーレジストパターンを正確に配置することができる。
なお、インクジェットノズル2、5、7に代えて、例えば、万年筆のペン先部と同様に、スリットを介してそれぞれのインクを流すようにしても良い。
また、回路パターンを形成するのに先立ち、基板1の表面を5μm程度に粗化させてもよい。
【0021】
(第2の実施形態)
図4は、本発明の第2の実施形態を示す図であり、インクジェットノズル2、加熱用レーザヘッド4、インクジェットノズル5、加熱用レーザヘッド7およびインクジェットノズル8をそれぞれ1個にした場合の基板作成手順を説明する図であり、(a1)〜(e1)は製造手順を、(a2)〜(e2)は基板表面を示す図である。
【0022】
この第2の実施形態の場合、上記第1の実施形態に比べてテーブルの移動回数が増加するため回路形成に要する時間が長くなるが、装置構成が簡単であり、制御が容易になる。
なお、動作は実質的に上記第1の実施形態と同じであるため、詳細な説明を省略する。
【0023】
【発明の効果】
以上説明したように、本発明によれば、ソルダーレジストパターンを回路パターンに対して正確に位置決めすることができ、製品の歩留りを向上させることができる。また、洗浄工程を必要としないので、装置を構成が簡単になる。
【図面の簡単な説明】
【図1】本発明に係る電子回路基板製造装置の構成図である。
【図2】本発明に係る電子回路基板の製造手順を説明する模式図である。
【図3】本発明に係る電子回路基板の製造手順を説明する模式図である。
【図4】本発明に係る他の電子回路基板の製造手順を説明する模式図である。
【図5】従来技術の説明図である。
【図6】従来技術の説明図である。
【符号の説明】
1 基板
2 インクジェットノズル
4 加熱用レーザヘッド
5 インクジェットノズル
7 熱用レーザヘッド
8 インクジェットノズル
33 Yテーブル
[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to an electronic circuit board manufacturing apparatus for forming a circuit pattern having a line width of several μm to several tens μm, a solder resist pattern, and a symbol mark on a surface of a substrate material such as synthetic resin, glass, and ceramic.
[0002]
[Prior art]
An electronic circuit board is formed as a product after a circuit pattern is formed on the surface of the board, a solder resist pattern is formed, and a symbol mark is printed.
First, a conventional circuit pattern forming procedure will be described.
[0003]
FIG. 5 is a diagram showing a conventional circuit pattern forming procedure, in which (a1) to (f1) show a production example, and (a2) to (f2) show the surface of a substrate.
As shown in the figures (a1) and (a2), the double-sided board 12 has a structure in which a copper foil 12b is attached to upper and lower surfaces of an insulating resin 12a.
A photoresist 13 is applied to the entire upper surface of such a double-sided substrate 12 as shown in FIGS. (B1) and (b2), and then is formed as shown in FIGS. (C1) and (c2). A photomask 14 in which holes 14 a corresponding to the circuit pattern to be formed are formed is disposed above the double-sided substrate 12. In this state, a resist exposure device 15 is arranged above the photomask 14, and the photomask 14 is irradiated with light 16. Then, the photoresist 13 overlapping the hole 14a is exposed, and becomes the exposed resist 13a.
[0004]
Thereafter, as shown in FIGS. 2D and 2D, the exposed double-sided substrate 12 is immersed in a developer bath 17 and the double-sided substrate 12 from which the exposure resist 13a has been removed by the developer 17a is washed and dried. Thereafter, the double-sided substrate 12 is immersed in an etching solution bath 18 as shown in FIGS. Then, the copper foil 12b below the exposure resist 13a is dissolved (etched) by the etching solution 18a, and only the circuit pattern portion remains on the copper foil 12b attached to the surface of the double-sided substrate 11.
[0005]
After the etched double-sided substrate 12 is washed and dried, the double-sided substrate 12 is immersed in a resist stripping solution bath 19, and the photoresist 13 is removed with a resist stripping solution 19a, as shown in FIGS. After removal, the circuit pattern is formed by washing and drying.
[0006]
Next, a conventional solder resist pattern and symbol mark printing procedure will be described.
FIG. 6 is a diagram showing a conventional procedure for printing a solder resist pattern and a symbol mark, wherein (g1) to (i1) show a production example, and (g2) to (i2) show the surface of a substrate.
[0007]
As shown in FIG. 1G, a mask screen 20 a on which a solder resist pattern is formed in advance is disposed on the upper surface of the double-sided substrate 12. The mesh pattern is formed on the mask screen 20a so that the solder resist ink 22 is transmitted according to the solder resist pattern to be formed. In this state, when the solder resist ink 22 is arranged on the mask screen 20a and the squeegee 21 pushes out the solder resist ink 22 from the mask screen 20a as shown in FIG. As shown in (h1) and (h2), solder resist patterns 22a are formed.
[0008]
The double-sided substrate 12 on which the solder resist pattern is formed is dried, and a mask screen 20b on which a symbol mark pattern to be formed is formed is placed on the upper side of the double-sided substrate 12, as shown in FIG. The mask screen 20b has a mesh pattern formed so that the symbol mark ink 23 is transmitted therethrough. When the symbol mark ink 23 is arranged on the mask screen 20b and the squeegee 21 pushes the symbol mark ink 23 out of the mask screen 20b to perform screen printing on the double-sided substrate 12, the symbol mark ink is printed as shown in FIG. Is completed. When the symbol mark pattern 23a is dried, the double-sided board 12 (ie, electronic circuit board) as a product on which electronic components can be surface-mounted is completed.
[0009]
As the miniaturization of electronic circuits progresses, it is required that the distance between the land and the line of a via (a hole for electrically connecting a conductor disposed in an upper layer and a lower layer) be several to several tens μm. It has become so.
[0010]
[Problems to be solved by the invention]
However, in the conventional electronic circuit board manufacturing procedure, it is difficult to arrange the solder resist pattern with respect to the circuit pattern. For example, the solder resist pattern is displaced on the land and the circuit pattern is exposed. As a result, the product yield was reduced. In addition, the equipment cost has been increased due to the improvement in positioning accuracy.
[0011]
SUMMARY OF THE INVENTION An object of the present invention is to solve the above-mentioned problems in the prior art, and to provide an electronic circuit board manufacturing apparatus capable of accurately positioning a solder resist pattern with respect to a circuit pattern and improving product yield. It is in.
[0012]
[Means for Solving the Problems]
The above-described problem is to provide an electronic circuit board manufacturing apparatus, which includes a table on which a substrate is placed, a circuit pattern forming unit using a solution, a drying unit, and a solder resist pattern forming unit using a solution. Thus, the problem is solved by disposing the circuit pattern forming means, the drying means, and the solder resist pattern forming means, and forming an electronic circuit board without removing the substrate from the table.
[0013]
BEST MODE FOR CARRYING OUT THE INVENTION
(1st Embodiment)
1A and 1B are configuration diagrams of an electronic circuit board manufacturing apparatus according to a first embodiment of the present invention, wherein FIG. 1A is a front view, FIG. 1B is a side view, and FIG. 1C is an enlarged view of a head unit. .
In the figure, the X table 31 of the electronic circuit board manufacturing apparatus M can be positioned on the X-axis guide device 30 arranged in the X direction. On the X table 31, a Y-axis guide device 32 is arranged in the Y direction. The Y table 33 can be positioned on the Y-axis guide device 32. The substrate 1 made of an insulating material is fixed on a Y table 33.
[0014]
A head holding device 40 is arranged at a position facing the Y table 33 of the electronic circuit board manufacturing apparatus M. In the Y direction of the head holding device 40, the inkjet nozzle 2, the heating laser head 4, the inkjet nozzle 5, the heating laser head 7, and the inkjet nozzle 8 are arranged in this order. A plurality of the inkjet nozzles 2, the inkjet nozzles 5, and the inkjet nozzles 8 are respectively arranged in the X direction.
[0015]
The inkjet nozzle 2 discharges a droplet 3 of a fluid containing a volatile component into which conductive particles are mixed. The heating laser heads 4 and 7 output a laser. The ink jet nozzle 5 discharges a fluid droplet 6 made of an insulating material. The ink jet nozzle 8 discharges printing ink.
[0016]
Next, a procedure for manufacturing the electronic circuit board will be described.
2 and 3 are schematic views for explaining a manufacturing procedure of the electronic circuit board. The upper part is a plan view, and the lower part is a side view.
[0017]
(1) First step (circuit pattern forming step)
As shown in FIG. 1A, a fluid containing a volatile component mixed with conductive particles (not shown) by the inkjet nozzle 2 while moving the substrate 1 in the X direction (to the right in the figure). Is discharged according to the circuit pattern to form a conductive pattern 3 a on the substrate 1.
When the line width of the circuit pattern is set to several μm to several tens of μm, good results can be obtained by setting the diameter of the droplet to around 2 μm and the size of the conductive particles mixed into the droplet to around several nm to 50 nm. Can be.
When a circuit pattern having a line width of 10 μm is formed, if one droplet has a diameter of 2 μm, one droplet spreads on the surface of the substrate 1 to a diameter of about 5 to 7 μm. It is preferable that the spreads overlap by about 50%, for example.
Further, as the fluid mixed with the conductive particles, for example, “Nanopaste” (trade name of Harima Chemicals, Inc.) can be used.
[0018]
(2) Second step (circuit pattern drying and solidifying step)
As shown in FIG. 2B, the substrate 1 is moved in the Y direction (downward in the figure) by a desired distance. Thereafter, while the substrate 1 is moved in the X direction (left side in the figure), droplets of a fluid containing a volatile component mixed with conductive particles are ejected by the inkjet nozzle 2 in accordance with the circuit pattern, and the substrate 1 is discharged. Then, a conductive pattern 3a is formed.
At the same time, by irradiating a laser from the heating laser head 4 to heat the circuit pattern formed in the first step, the volatile components are volatilized and dried, and the conductive particles are positively solidified.
In the case of the substrate 1 shown in the figure, a solder resist pattern 6a forming step described later is simultaneously performed.
[0019]
(3) Third step (solder resist pattern forming step)
As shown in FIG. 3C, the substrate 1 is moved by a desired distance in the Y direction (downward in the figure). Thereafter, a solder resist pattern 6a is formed on the substrate 1 by the inkjet nozzle 5 while moving the substrate 1 in the X direction (right side in the figure).
In the case of the substrate 1 shown in the figure, as shown in FIG. 3C, a laser beam is irradiated from a heating laser head 7 to heat the solder resist pattern 6a formed in the third step, so that the volatile property is increased. The components are volatilized to form a solidified solder resist pattern 6b.
[0020]
(4) Fourth step (symbol mark printing step)
As shown in FIG. 4D, the substrate 1 is moved by a desired distance in the Y direction (downward in the figure). Thereafter, while the substrate 1 is moved in the X direction (left side in the figure), droplets of the symbol printing ink, which is a black or near-color paint, are ejected onto the substrate 1 by the inkjet nozzles 8 to form the symbol mark. 9a is printed. Then, the printed and applied symbol mark 9a is naturally dried.
As described above, since it is not necessary to remove the substrate 1 from the Y table 33, the solder resist pattern can be accurately arranged for a circuit pattern having a line width of several μm to several tens μm.
Instead of the ink jet nozzles 2, 5, and 7, for example, the respective inks may be made to flow through slits, similarly to the pen tip of a fountain pen.
Prior to forming a circuit pattern, the surface of the substrate 1 may be roughened to about 5 μm.
[0021]
(Second embodiment)
FIG. 4 is a view showing a second embodiment of the present invention, and shows a substrate in which each of the inkjet nozzle 2, the heating laser head 4, the inkjet nozzle 5, the heating laser head 7, and the inkjet nozzle 8 is one. It is a figure explaining a preparation procedure, (a1)-(e1) is a figure showing a manufacturing procedure, and (a2)-(e2) is a figure showing a substrate surface.
[0022]
In the case of the second embodiment, although the number of table movements is increased as compared with the first embodiment, the time required for circuit formation is longer, but the apparatus configuration is simpler and control is easier.
The operation is substantially the same as that of the first embodiment, and a detailed description is omitted.
[0023]
【The invention's effect】
As described above, according to the present invention, the solder resist pattern can be accurately positioned with respect to the circuit pattern, and the product yield can be improved. Further, since no cleaning step is required, the configuration of the apparatus is simplified.
[Brief description of the drawings]
FIG. 1 is a configuration diagram of an electronic circuit board manufacturing apparatus according to the present invention.
FIG. 2 is a schematic diagram illustrating a procedure for manufacturing an electronic circuit board according to the present invention.
FIG. 3 is a schematic diagram illustrating a procedure for manufacturing an electronic circuit board according to the present invention.
FIG. 4 is a schematic view illustrating a procedure for manufacturing another electronic circuit board according to the present invention.
FIG. 5 is an explanatory diagram of a conventional technique.
FIG. 6 is an explanatory diagram of a conventional technique.
[Explanation of symbols]
Reference Signs List 1 substrate 2 inkjet nozzle 4 heating laser head 5 inkjet nozzle 7 heating laser head 8 inkjet nozzle 33 Y table

Claims (2)

基板を載置するテーブルと、溶液による回路パターン形成手段と、乾燥手段と、溶液によるソルダーレジストパターン形成手段と、を設け、
前記テーブルに対向させて、前記回路パターン形成手段と、前記乾燥手段と、前記ソルダーレジストパターン形成手段を配置し、前記テーブルから前記基板を取り外すことなく、電子回路基板を形成することを特徴とする電子回路基板の製造装置。
A table on which the substrate is placed, a circuit pattern forming unit using a solution, a drying unit, and a solder resist pattern forming unit using a solution are provided,
The circuit pattern forming means, the drying means, and the solder resist pattern forming means are arranged to face the table, and an electronic circuit board is formed without removing the board from the table. Equipment for manufacturing electronic circuit boards.
溶液によるシンボルマーク形成手段を設け、このシンボルマーク形成手段を前記テーブルに対向させて配置することを特徴とする請求項1に記載の電子回路基板の製造装置。2. The apparatus for manufacturing an electronic circuit board according to claim 1, wherein a symbol mark forming means using a solution is provided, and the symbol mark forming means is arranged to face the table.
JP2003096786A 2003-03-31 2003-03-31 Electronic circuit board manufacturing equipment Expired - Fee Related JP4505191B2 (en)

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006100381A (en) * 2004-09-28 2006-04-13 Seiko Epson Corp Method for forming conductive film and electronic device
WO2006079913A1 (en) * 2005-01-28 2006-08-03 Smart Res S.R.L. Apparatus and method for making an antenna for a radiofrequency identifying device
JP2007008054A (en) * 2005-06-30 2007-01-18 Eito Kogyo:Kk Nozzle plugging detecting method in information printing apparatus for board
KR100852573B1 (en) 2005-06-22 2008-08-18 캐논 가부시끼가이샤 Circuit pattern forming method, circuit pattern forming device and printed circuit board
JP2013140908A (en) * 2012-01-06 2013-07-18 Sumitomo Heavy Ind Ltd Thin film formation apparatus and thin film formation method
TWI564090B (en) * 2014-03-11 2017-01-01 Sumitomo Heavy Industries Film forming method and film forming apparatus

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11163499A (en) * 1997-11-28 1999-06-18 Nitto Boseki Co Ltd Printed wiring board and manufacture thereof
JPH11274671A (en) * 1998-03-25 1999-10-08 Seiko Epson Corp Electric circuit, its manufacture and manufacture device thereof
JP2000158641A (en) * 1998-12-01 2000-06-13 Teikoku Ink Seizo Kk Production of printed wiring board

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11163499A (en) * 1997-11-28 1999-06-18 Nitto Boseki Co Ltd Printed wiring board and manufacture thereof
JPH11274671A (en) * 1998-03-25 1999-10-08 Seiko Epson Corp Electric circuit, its manufacture and manufacture device thereof
JP2000158641A (en) * 1998-12-01 2000-06-13 Teikoku Ink Seizo Kk Production of printed wiring board

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006100381A (en) * 2004-09-28 2006-04-13 Seiko Epson Corp Method for forming conductive film and electronic device
JP4715147B2 (en) * 2004-09-28 2011-07-06 セイコーエプソン株式会社 Method for forming conductive film
WO2006079913A1 (en) * 2005-01-28 2006-08-03 Smart Res S.R.L. Apparatus and method for making an antenna for a radiofrequency identifying device
US7752743B2 (en) 2005-01-28 2010-07-13 Smart Res Joint-Stock Company Apparatus for making an antenna for wire transponders
US8397377B2 (en) 2005-01-28 2013-03-19 Smart Res S.P.A. Apparatus for making an antenna for wire transponders of electrically conductive material
KR100852573B1 (en) 2005-06-22 2008-08-18 캐논 가부시끼가이샤 Circuit pattern forming method, circuit pattern forming device and printed circuit board
JP2007008054A (en) * 2005-06-30 2007-01-18 Eito Kogyo:Kk Nozzle plugging detecting method in information printing apparatus for board
JP2013140908A (en) * 2012-01-06 2013-07-18 Sumitomo Heavy Ind Ltd Thin film formation apparatus and thin film formation method
TWI593468B (en) * 2012-01-06 2017-08-01 Sumitomo Heavy Industries Thin film forming apparatus and thin film forming method
TWI564090B (en) * 2014-03-11 2017-01-01 Sumitomo Heavy Industries Film forming method and film forming apparatus

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