JP2004251904A - デバイスの相反性を利用するマルチポートネットワークアナライザの校正 - Google Patents

デバイスの相反性を利用するマルチポートネットワークアナライザの校正 Download PDF

Info

Publication number
JP2004251904A
JP2004251904A JP2004037400A JP2004037400A JP2004251904A JP 2004251904 A JP2004251904 A JP 2004251904A JP 2004037400 A JP2004037400 A JP 2004037400A JP 2004037400 A JP2004037400 A JP 2004037400A JP 2004251904 A JP2004251904 A JP 2004251904A
Authority
JP
Japan
Prior art keywords
calibration
parameters
parameter
standards
parameter values
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004037400A
Other languages
English (en)
Japanese (ja)
Other versions
JP2004251904A5 (https=
Inventor
Tiberiu Jamneala
ティベリウ・ジャムネアラ
David A Feld
デビット・エイ・フェルド
Burhan Zaini
ブーハン・ザイニ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Agilent Technologies Inc
Original Assignee
Agilent Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/368,179 external-priority patent/US7064555B2/en
Application filed by Agilent Technologies Inc filed Critical Agilent Technologies Inc
Publication of JP2004251904A publication Critical patent/JP2004251904A/ja
Publication of JP2004251904A5 publication Critical patent/JP2004251904A5/ja
Pending legal-status Critical Current

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R35/00Testing or calibrating of apparatus covered by the other groups of this subclass
    • G01R35/005Calibrating; Standards or reference devices, e.g. voltage or resistance standards, "golden" references

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
JP2004037400A 2003-02-18 2004-02-13 デバイスの相反性を利用するマルチポートネットワークアナライザの校正 Pending JP2004251904A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/368,179 US7064555B2 (en) 2003-02-18 2003-02-18 Network analyzer calibration employing reciprocity of a device
US10/758,435 US7107170B2 (en) 2003-02-18 2004-01-14 Multiport network analyzer calibration employing reciprocity of a device

Publications (2)

Publication Number Publication Date
JP2004251904A true JP2004251904A (ja) 2004-09-09
JP2004251904A5 JP2004251904A5 (https=) 2007-03-15

Family

ID=33032630

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004037400A Pending JP2004251904A (ja) 2003-02-18 2004-02-13 デバイスの相反性を利用するマルチポートネットワークアナライザの校正

Country Status (2)

Country Link
US (1) US7107170B2 (https=)
JP (1) JP2004251904A (https=)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011172227A (ja) * 2010-02-18 2011-09-01 Ls Industrial Systems Co Ltd 送信漏れ信号の相殺信号探索方法
CN103364752A (zh) * 2013-07-19 2013-10-23 中国电子科技集团公司第十三研究所 一种在片负载牵引测量系统的现场校准方法
JP2014044205A (ja) * 2012-08-24 2014-03-13 Tektronix Inc 測定方法

Families Citing this family (59)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5345170A (en) 1992-06-11 1994-09-06 Cascade Microtech, Inc. Wafer probe station having integrated guarding, Kelvin connection and shielding systems
US6380751B2 (en) 1992-06-11 2002-04-30 Cascade Microtech, Inc. Wafer probe station having environment control enclosure
US6232789B1 (en) 1997-05-28 2001-05-15 Cascade Microtech, Inc. Probe holder for low current measurements
US5561377A (en) 1995-04-14 1996-10-01 Cascade Microtech, Inc. System for evaluating probing networks
US5914613A (en) 1996-08-08 1999-06-22 Cascade Microtech, Inc. Membrane probing system with local contact scrub
US6002263A (en) 1997-06-06 1999-12-14 Cascade Microtech, Inc. Probe station having inner and outer shielding
US6256882B1 (en) 1998-07-14 2001-07-10 Cascade Microtech, Inc. Membrane probing system
US6578264B1 (en) 1999-06-04 2003-06-17 Cascade Microtech, Inc. Method for constructing a membrane probe using a depression
US6445202B1 (en) 1999-06-30 2002-09-03 Cascade Microtech, Inc. Probe station thermal chuck with shielding for capacitive current
US6838890B2 (en) 2000-02-25 2005-01-04 Cascade Microtech, Inc. Membrane probing system
US6914423B2 (en) 2000-09-05 2005-07-05 Cascade Microtech, Inc. Probe station
US6965226B2 (en) 2000-09-05 2005-11-15 Cascade Microtech, Inc. Chuck for holding a device under test
DE10143173A1 (de) 2000-12-04 2002-06-06 Cascade Microtech Inc Wafersonde
US7355420B2 (en) 2001-08-21 2008-04-08 Cascade Microtech, Inc. Membrane probing system
EP1432546A4 (en) 2001-08-31 2006-06-07 Cascade Microtech Inc OPTICAL TESTING APPARATUS
US6777964B2 (en) 2002-01-25 2004-08-17 Cascade Microtech, Inc. Probe station
EP1509776A4 (en) 2002-05-23 2010-08-18 Cascade Microtech Inc PROBE TO TEST ANY TESTING EQUIPMENT
US6847219B1 (en) 2002-11-08 2005-01-25 Cascade Microtech, Inc. Probe station with low noise characteristics
US6724205B1 (en) 2002-11-13 2004-04-20 Cascade Microtech, Inc. Probe for combined signals
US7250779B2 (en) 2002-11-25 2007-07-31 Cascade Microtech, Inc. Probe station with low inductance path
US6861856B2 (en) 2002-12-13 2005-03-01 Cascade Microtech, Inc. Guarded tub enclosure
US7221172B2 (en) 2003-05-06 2007-05-22 Cascade Microtech, Inc. Switched suspended conductor and connection
US7492172B2 (en) 2003-05-23 2009-02-17 Cascade Microtech, Inc. Chuck for holding a device under test
US7057404B2 (en) 2003-05-23 2006-06-06 Sharp Laboratories Of America, Inc. Shielded probe for testing a device under test
US7250626B2 (en) 2003-10-22 2007-07-31 Cascade Microtech, Inc. Probe testing structure
WO2005065258A2 (en) 2003-12-24 2005-07-21 Cascade Microtech, Inc. Active wafer probe
US7187188B2 (en) 2003-12-24 2007-03-06 Cascade Microtech, Inc. Chuck with integrated wafer support
DE202005021434U1 (de) 2004-06-07 2008-03-20 Cascade Microtech, Inc., Beaverton Thermooptische Einspannvorrichtung
US7330041B2 (en) 2004-06-14 2008-02-12 Cascade Microtech, Inc. Localizing a temperature of a device for testing
KR101157449B1 (ko) 2004-07-07 2012-06-22 캐스케이드 마이크로테크 인코포레이티드 멤브레인 서스펜디드 프로브를 구비한 프로브 헤드
KR20070058522A (ko) 2004-09-13 2007-06-08 캐스케이드 마이크로테크 인코포레이티드 양측 프루빙 구조
US7656172B2 (en) 2005-01-31 2010-02-02 Cascade Microtech, Inc. System for testing semiconductors
US7535247B2 (en) 2005-01-31 2009-05-19 Cascade Microtech, Inc. Interface for testing semiconductors
US7449899B2 (en) 2005-06-08 2008-11-11 Cascade Microtech, Inc. Probe for high frequency signals
EP1932003A2 (en) 2005-06-13 2008-06-18 Cascade Microtech, Inc. Wideband active-passive differential signal probe
US7427866B2 (en) * 2005-09-12 2008-09-23 Analog Devices, Inc. Calibration method and system that generates an error signal for adjusting the time constant of circuit to be calibrated
JP2007285890A (ja) * 2006-04-17 2007-11-01 Agilent Technol Inc ネットワークアナライザの再校正方法、および、ネットワークアナライザ
US7609077B2 (en) 2006-06-09 2009-10-27 Cascade Microtech, Inc. Differential signal probe with integral balun
US7403028B2 (en) 2006-06-12 2008-07-22 Cascade Microtech, Inc. Test structure and probe for differential signals
US7443186B2 (en) 2006-06-12 2008-10-28 Cascade Microtech, Inc. On-wafer test structures for differential signals
US7723999B2 (en) 2006-06-12 2010-05-25 Cascade Microtech, Inc. Calibration structures for differential signal probing
US7764072B2 (en) 2006-06-12 2010-07-27 Cascade Microtech, Inc. Differential signal probing system
US7256585B1 (en) * 2006-07-21 2007-08-14 Agilent Technologies, Inc. Match-corrected power measurements with a vector network analyzer
US7876114B2 (en) 2007-08-08 2011-01-25 Cascade Microtech, Inc. Differential waveguide probe
US7888957B2 (en) 2008-10-06 2011-02-15 Cascade Microtech, Inc. Probing apparatus with impedance optimized interface
US8410806B2 (en) 2008-11-21 2013-04-02 Cascade Microtech, Inc. Replaceable coupon for a probing apparatus
US8319503B2 (en) 2008-11-24 2012-11-27 Cascade Microtech, Inc. Test apparatus for measuring a characteristic of a device under test
DE102009018703B4 (de) 2008-12-19 2018-04-05 Rohde & Schwarz Gmbh & Co. Kg Netzwerkanalysator und ein Verfahren zum Betrieb eines Netzwerkanalysators mit 9-Term Kalibrierung
US8706433B2 (en) * 2010-02-01 2014-04-22 Teledyne Lecroy, Inc. Time domain reflectometry step to S-parameter conversion
US8917083B2 (en) 2010-11-24 2014-12-23 International Business Machines Corporation Structures and methods for RF de-embedding
EP2551650B1 (en) * 2011-07-27 2019-09-25 Endress+Hauser Consult AG Calibration method
US8928333B2 (en) 2011-11-30 2015-01-06 Raytheon Company Calibration measurements for network analyzers
US8681945B2 (en) * 2011-12-22 2014-03-25 Telefonaktiebolaget Lm Ericsson (Publ) Calibration of a line driving device
CN102680016B (zh) * 2012-05-14 2014-08-27 北京理工大学 一种光电编码器的误差补偿方法
CN103513208B (zh) * 2012-06-29 2016-06-29 中国船舶重工集团公司第七0九研究所 一种皮秒级集成电路测试系统总定时偏差校准的误差补偿方法
US9453863B2 (en) 2012-11-16 2016-09-27 International Business Machines Corporation Implementing frequency spectrum analysis using causality Hilbert Transform results of VNA-generated S-parameter model information
CN103925939B (zh) * 2014-04-10 2016-06-08 北京理工大学 一种光电编码器全量程的标定补偿方法
CN108761388B (zh) * 2018-06-06 2022-02-11 上海交通大学 基于uwb高精度测距定位系统的天线延迟校准方法
CN110149249A (zh) * 2019-06-27 2019-08-20 上海频语电子技术有限公司 一种矢量网络分析仪测试功能拓展系统及方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03181870A (ja) * 1989-11-28 1991-08-07 Cascade Microtech Inc マルチ‐ポート誤差モデル補正方法
JPH11326413A (ja) * 1998-04-24 1999-11-26 Hewlett Packard Co <Hp> ネットワ―ク・アナライザにおける測定誤差補正方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4808913A (en) * 1988-03-31 1989-02-28 Wiltron Company Asymmetrical coupling circuit
US4982164A (en) 1988-04-22 1991-01-01 Rhode & Schwarz Gmbh & Co. K.G. Method of calibrating a network analyzer
DE4401068C2 (de) 1993-08-30 1997-04-10 Rohde & Schwarz Netzwerkanalysator und Verfahren zum Kalibrieren
DE4435559A1 (de) 1994-10-05 1996-04-11 Holger Heuermann Verfahren zur Durchführung elektrischer Präzisionsmessungen mit Selbstkontrolle
US5548538A (en) 1994-12-07 1996-08-20 Wiltron Company Internal automatic calibrator for vector network analyzers
US5748506A (en) 1996-05-28 1998-05-05 Motorola, Inc. Calibration technique for a network analyzer
US5937006A (en) * 1997-05-28 1999-08-10 The Aerospace Corporation Frequency translating device transmission response method
US6606583B1 (en) * 1998-09-21 2003-08-12 Ben K. Sternberg Real-time error-suppression method and apparatus therefor
US6647357B1 (en) * 2000-02-07 2003-11-11 Avaya Technology Corp. Method for correcting reciprocity error in two port network measurements
US6643597B1 (en) 2001-08-24 2003-11-04 Agilent Technologies, Inc. Calibrating a test system using unknown standards
US6850076B2 (en) * 2002-12-23 2005-02-01 Christos Tsironis Microwave tuners for wideband high reflection applications

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03181870A (ja) * 1989-11-28 1991-08-07 Cascade Microtech Inc マルチ‐ポート誤差モデル補正方法
JPH11326413A (ja) * 1998-04-24 1999-11-26 Hewlett Packard Co <Hp> ネットワ―ク・アナライザにおける測定誤差補正方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011172227A (ja) * 2010-02-18 2011-09-01 Ls Industrial Systems Co Ltd 送信漏れ信号の相殺信号探索方法
JP2014044205A (ja) * 2012-08-24 2014-03-13 Tektronix Inc 測定方法
CN103364752A (zh) * 2013-07-19 2013-10-23 中国电子科技集团公司第十三研究所 一种在片负载牵引测量系统的现场校准方法
CN103364752B (zh) * 2013-07-19 2015-12-23 中国电子科技集团公司第十三研究所 一种在片负载牵引测量系统的现场校准方法

Also Published As

Publication number Publication date
US7107170B2 (en) 2006-09-12
US20040162689A1 (en) 2004-08-19

Similar Documents

Publication Publication Date Title
JP2004251904A (ja) デバイスの相反性を利用するマルチポートネットワークアナライザの校正
US7064555B2 (en) Network analyzer calibration employing reciprocity of a device
US6643597B1 (en) Calibrating a test system using unknown standards
US6960920B2 (en) Method for correcting measurement error and electronic component characteristic measurement apparatus
US7777497B2 (en) Method and system for tracking scattering parameter test system calibration
US7500161B2 (en) Correcting test system calibration and transforming device measurements when using multiple test fixtures
US5434511A (en) Electronic microwave calibration device
CN104237829B (zh) 高精度噪声系数测量系统整体校准方法
JP4282897B2 (ja) 改善された精度を有する自動マイクロ波試験システム
US7994801B2 (en) Calibrated S-parameter measurements of a high impedance probe
JPH11326413A (ja) ネットワ―ク・アナライザにおける測定誤差補正方法
JP2004317506A (ja) テスト・システム校正を含む平衡デバイスの特性解明
JP2005055438A (ja) 改良された直通路・反射路・線路計測較正を用いて試験対象デバイスを計測する方法及び装置
US6417674B1 (en) Two port self-calibration for an N-port network analyzer
JPH03181870A (ja) マルチ‐ポート誤差モデル補正方法
US7113891B2 (en) Multi-port scattering parameter calibration system and method
EP1455197B1 (en) Calibration method and apparatus
CN120385966A (zh) 校准方法与校准系统
WO2012105127A1 (ja) 測定誤差の補正方法及び電子部品特性測定装置
US7013229B2 (en) Obtaining calibration parameters for a three-port device under test
JP7153309B2 (ja) ベクトルネットワークアナライザを用いた反射係数の測定方法
US7054780B2 (en) Network analyzer applying loss compensation using port extensions and method of operation
Hiebel Vector network analyzer (VNA) calibration: the basics
Singh et al. Comparison of Vector Network Analyser (VNA) calibration techniques at microwave frequencies
KR102840347B1 (ko) 3개의 임피던스를 이용한 디 임베딩 방법

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20070126

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20070126

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20091217

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20100113

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20100616