JP2004251904A - デバイスの相反性を利用するマルチポートネットワークアナライザの校正 - Google Patents
デバイスの相反性を利用するマルチポートネットワークアナライザの校正 Download PDFInfo
- Publication number
- JP2004251904A JP2004251904A JP2004037400A JP2004037400A JP2004251904A JP 2004251904 A JP2004251904 A JP 2004251904A JP 2004037400 A JP2004037400 A JP 2004037400A JP 2004037400 A JP2004037400 A JP 2004037400A JP 2004251904 A JP2004251904 A JP 2004251904A
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- calibration
- parameters
- parameter
- standards
- parameter values
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R35/00—Testing or calibrating of apparatus covered by the other groups of this subclass
- G01R35/005—Calibrating; Standards or reference devices, e.g. voltage or resistance standards, "golden" references
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Resistance Or Impedance (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/368,179 US7064555B2 (en) | 2003-02-18 | 2003-02-18 | Network analyzer calibration employing reciprocity of a device |
| US10/758,435 US7107170B2 (en) | 2003-02-18 | 2004-01-14 | Multiport network analyzer calibration employing reciprocity of a device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2004251904A true JP2004251904A (ja) | 2004-09-09 |
| JP2004251904A5 JP2004251904A5 (https=) | 2007-03-15 |
Family
ID=33032630
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004037400A Pending JP2004251904A (ja) | 2003-02-18 | 2004-02-13 | デバイスの相反性を利用するマルチポートネットワークアナライザの校正 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US7107170B2 (https=) |
| JP (1) | JP2004251904A (https=) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011172227A (ja) * | 2010-02-18 | 2011-09-01 | Ls Industrial Systems Co Ltd | 送信漏れ信号の相殺信号探索方法 |
| CN103364752A (zh) * | 2013-07-19 | 2013-10-23 | 中国电子科技集团公司第十三研究所 | 一种在片负载牵引测量系统的现场校准方法 |
| JP2014044205A (ja) * | 2012-08-24 | 2014-03-13 | Tektronix Inc | 測定方法 |
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| US5345170A (en) | 1992-06-11 | 1994-09-06 | Cascade Microtech, Inc. | Wafer probe station having integrated guarding, Kelvin connection and shielding systems |
| US6380751B2 (en) | 1992-06-11 | 2002-04-30 | Cascade Microtech, Inc. | Wafer probe station having environment control enclosure |
| US6232789B1 (en) | 1997-05-28 | 2001-05-15 | Cascade Microtech, Inc. | Probe holder for low current measurements |
| US5561377A (en) | 1995-04-14 | 1996-10-01 | Cascade Microtech, Inc. | System for evaluating probing networks |
| US5914613A (en) | 1996-08-08 | 1999-06-22 | Cascade Microtech, Inc. | Membrane probing system with local contact scrub |
| US6002263A (en) | 1997-06-06 | 1999-12-14 | Cascade Microtech, Inc. | Probe station having inner and outer shielding |
| US6256882B1 (en) | 1998-07-14 | 2001-07-10 | Cascade Microtech, Inc. | Membrane probing system |
| US6578264B1 (en) | 1999-06-04 | 2003-06-17 | Cascade Microtech, Inc. | Method for constructing a membrane probe using a depression |
| US6445202B1 (en) | 1999-06-30 | 2002-09-03 | Cascade Microtech, Inc. | Probe station thermal chuck with shielding for capacitive current |
| US6838890B2 (en) | 2000-02-25 | 2005-01-04 | Cascade Microtech, Inc. | Membrane probing system |
| US6914423B2 (en) | 2000-09-05 | 2005-07-05 | Cascade Microtech, Inc. | Probe station |
| US6965226B2 (en) | 2000-09-05 | 2005-11-15 | Cascade Microtech, Inc. | Chuck for holding a device under test |
| DE10143173A1 (de) | 2000-12-04 | 2002-06-06 | Cascade Microtech Inc | Wafersonde |
| US7355420B2 (en) | 2001-08-21 | 2008-04-08 | Cascade Microtech, Inc. | Membrane probing system |
| EP1432546A4 (en) | 2001-08-31 | 2006-06-07 | Cascade Microtech Inc | OPTICAL TESTING APPARATUS |
| US6777964B2 (en) | 2002-01-25 | 2004-08-17 | Cascade Microtech, Inc. | Probe station |
| EP1509776A4 (en) | 2002-05-23 | 2010-08-18 | Cascade Microtech Inc | PROBE TO TEST ANY TESTING EQUIPMENT |
| US6847219B1 (en) | 2002-11-08 | 2005-01-25 | Cascade Microtech, Inc. | Probe station with low noise characteristics |
| US6724205B1 (en) | 2002-11-13 | 2004-04-20 | Cascade Microtech, Inc. | Probe for combined signals |
| US7250779B2 (en) | 2002-11-25 | 2007-07-31 | Cascade Microtech, Inc. | Probe station with low inductance path |
| US6861856B2 (en) | 2002-12-13 | 2005-03-01 | Cascade Microtech, Inc. | Guarded tub enclosure |
| US7221172B2 (en) | 2003-05-06 | 2007-05-22 | Cascade Microtech, Inc. | Switched suspended conductor and connection |
| US7492172B2 (en) | 2003-05-23 | 2009-02-17 | Cascade Microtech, Inc. | Chuck for holding a device under test |
| US7057404B2 (en) | 2003-05-23 | 2006-06-06 | Sharp Laboratories Of America, Inc. | Shielded probe for testing a device under test |
| US7250626B2 (en) | 2003-10-22 | 2007-07-31 | Cascade Microtech, Inc. | Probe testing structure |
| WO2005065258A2 (en) | 2003-12-24 | 2005-07-21 | Cascade Microtech, Inc. | Active wafer probe |
| US7187188B2 (en) | 2003-12-24 | 2007-03-06 | Cascade Microtech, Inc. | Chuck with integrated wafer support |
| DE202005021434U1 (de) | 2004-06-07 | 2008-03-20 | Cascade Microtech, Inc., Beaverton | Thermooptische Einspannvorrichtung |
| US7330041B2 (en) | 2004-06-14 | 2008-02-12 | Cascade Microtech, Inc. | Localizing a temperature of a device for testing |
| KR101157449B1 (ko) | 2004-07-07 | 2012-06-22 | 캐스케이드 마이크로테크 인코포레이티드 | 멤브레인 서스펜디드 프로브를 구비한 프로브 헤드 |
| KR20070058522A (ko) | 2004-09-13 | 2007-06-08 | 캐스케이드 마이크로테크 인코포레이티드 | 양측 프루빙 구조 |
| US7656172B2 (en) | 2005-01-31 | 2010-02-02 | Cascade Microtech, Inc. | System for testing semiconductors |
| US7535247B2 (en) | 2005-01-31 | 2009-05-19 | Cascade Microtech, Inc. | Interface for testing semiconductors |
| US7449899B2 (en) | 2005-06-08 | 2008-11-11 | Cascade Microtech, Inc. | Probe for high frequency signals |
| EP1932003A2 (en) | 2005-06-13 | 2008-06-18 | Cascade Microtech, Inc. | Wideband active-passive differential signal probe |
| US7427866B2 (en) * | 2005-09-12 | 2008-09-23 | Analog Devices, Inc. | Calibration method and system that generates an error signal for adjusting the time constant of circuit to be calibrated |
| JP2007285890A (ja) * | 2006-04-17 | 2007-11-01 | Agilent Technol Inc | ネットワークアナライザの再校正方法、および、ネットワークアナライザ |
| US7609077B2 (en) | 2006-06-09 | 2009-10-27 | Cascade Microtech, Inc. | Differential signal probe with integral balun |
| US7403028B2 (en) | 2006-06-12 | 2008-07-22 | Cascade Microtech, Inc. | Test structure and probe for differential signals |
| US7443186B2 (en) | 2006-06-12 | 2008-10-28 | Cascade Microtech, Inc. | On-wafer test structures for differential signals |
| US7723999B2 (en) | 2006-06-12 | 2010-05-25 | Cascade Microtech, Inc. | Calibration structures for differential signal probing |
| US7764072B2 (en) | 2006-06-12 | 2010-07-27 | Cascade Microtech, Inc. | Differential signal probing system |
| US7256585B1 (en) * | 2006-07-21 | 2007-08-14 | Agilent Technologies, Inc. | Match-corrected power measurements with a vector network analyzer |
| US7876114B2 (en) | 2007-08-08 | 2011-01-25 | Cascade Microtech, Inc. | Differential waveguide probe |
| US7888957B2 (en) | 2008-10-06 | 2011-02-15 | Cascade Microtech, Inc. | Probing apparatus with impedance optimized interface |
| US8410806B2 (en) | 2008-11-21 | 2013-04-02 | Cascade Microtech, Inc. | Replaceable coupon for a probing apparatus |
| US8319503B2 (en) | 2008-11-24 | 2012-11-27 | Cascade Microtech, Inc. | Test apparatus for measuring a characteristic of a device under test |
| DE102009018703B4 (de) | 2008-12-19 | 2018-04-05 | Rohde & Schwarz Gmbh & Co. Kg | Netzwerkanalysator und ein Verfahren zum Betrieb eines Netzwerkanalysators mit 9-Term Kalibrierung |
| US8706433B2 (en) * | 2010-02-01 | 2014-04-22 | Teledyne Lecroy, Inc. | Time domain reflectometry step to S-parameter conversion |
| US8917083B2 (en) | 2010-11-24 | 2014-12-23 | International Business Machines Corporation | Structures and methods for RF de-embedding |
| EP2551650B1 (en) * | 2011-07-27 | 2019-09-25 | Endress+Hauser Consult AG | Calibration method |
| US8928333B2 (en) | 2011-11-30 | 2015-01-06 | Raytheon Company | Calibration measurements for network analyzers |
| US8681945B2 (en) * | 2011-12-22 | 2014-03-25 | Telefonaktiebolaget Lm Ericsson (Publ) | Calibration of a line driving device |
| CN102680016B (zh) * | 2012-05-14 | 2014-08-27 | 北京理工大学 | 一种光电编码器的误差补偿方法 |
| CN103513208B (zh) * | 2012-06-29 | 2016-06-29 | 中国船舶重工集团公司第七0九研究所 | 一种皮秒级集成电路测试系统总定时偏差校准的误差补偿方法 |
| US9453863B2 (en) | 2012-11-16 | 2016-09-27 | International Business Machines Corporation | Implementing frequency spectrum analysis using causality Hilbert Transform results of VNA-generated S-parameter model information |
| CN103925939B (zh) * | 2014-04-10 | 2016-06-08 | 北京理工大学 | 一种光电编码器全量程的标定补偿方法 |
| CN108761388B (zh) * | 2018-06-06 | 2022-02-11 | 上海交通大学 | 基于uwb高精度测距定位系统的天线延迟校准方法 |
| CN110149249A (zh) * | 2019-06-27 | 2019-08-20 | 上海频语电子技术有限公司 | 一种矢量网络分析仪测试功能拓展系统及方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03181870A (ja) * | 1989-11-28 | 1991-08-07 | Cascade Microtech Inc | マルチ‐ポート誤差モデル補正方法 |
| JPH11326413A (ja) * | 1998-04-24 | 1999-11-26 | Hewlett Packard Co <Hp> | ネットワ―ク・アナライザにおける測定誤差補正方法 |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4808913A (en) * | 1988-03-31 | 1989-02-28 | Wiltron Company | Asymmetrical coupling circuit |
| US4982164A (en) | 1988-04-22 | 1991-01-01 | Rhode & Schwarz Gmbh & Co. K.G. | Method of calibrating a network analyzer |
| DE4401068C2 (de) | 1993-08-30 | 1997-04-10 | Rohde & Schwarz | Netzwerkanalysator und Verfahren zum Kalibrieren |
| DE4435559A1 (de) | 1994-10-05 | 1996-04-11 | Holger Heuermann | Verfahren zur Durchführung elektrischer Präzisionsmessungen mit Selbstkontrolle |
| US5548538A (en) | 1994-12-07 | 1996-08-20 | Wiltron Company | Internal automatic calibrator for vector network analyzers |
| US5748506A (en) | 1996-05-28 | 1998-05-05 | Motorola, Inc. | Calibration technique for a network analyzer |
| US5937006A (en) * | 1997-05-28 | 1999-08-10 | The Aerospace Corporation | Frequency translating device transmission response method |
| US6606583B1 (en) * | 1998-09-21 | 2003-08-12 | Ben K. Sternberg | Real-time error-suppression method and apparatus therefor |
| US6647357B1 (en) * | 2000-02-07 | 2003-11-11 | Avaya Technology Corp. | Method for correcting reciprocity error in two port network measurements |
| US6643597B1 (en) | 2001-08-24 | 2003-11-04 | Agilent Technologies, Inc. | Calibrating a test system using unknown standards |
| US6850076B2 (en) * | 2002-12-23 | 2005-02-01 | Christos Tsironis | Microwave tuners for wideband high reflection applications |
-
2004
- 2004-01-14 US US10/758,435 patent/US7107170B2/en not_active Expired - Fee Related
- 2004-02-13 JP JP2004037400A patent/JP2004251904A/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03181870A (ja) * | 1989-11-28 | 1991-08-07 | Cascade Microtech Inc | マルチ‐ポート誤差モデル補正方法 |
| JPH11326413A (ja) * | 1998-04-24 | 1999-11-26 | Hewlett Packard Co <Hp> | ネットワ―ク・アナライザにおける測定誤差補正方法 |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011172227A (ja) * | 2010-02-18 | 2011-09-01 | Ls Industrial Systems Co Ltd | 送信漏れ信号の相殺信号探索方法 |
| JP2014044205A (ja) * | 2012-08-24 | 2014-03-13 | Tektronix Inc | 測定方法 |
| CN103364752A (zh) * | 2013-07-19 | 2013-10-23 | 中国电子科技集团公司第十三研究所 | 一种在片负载牵引测量系统的现场校准方法 |
| CN103364752B (zh) * | 2013-07-19 | 2015-12-23 | 中国电子科技集团公司第十三研究所 | 一种在片负载牵引测量系统的现场校准方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| US7107170B2 (en) | 2006-09-12 |
| US20040162689A1 (en) | 2004-08-19 |
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