JP2004251789A5 - - Google Patents

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Publication number
JP2004251789A5
JP2004251789A5 JP2003043210A JP2003043210A JP2004251789A5 JP 2004251789 A5 JP2004251789 A5 JP 2004251789A5 JP 2003043210 A JP2003043210 A JP 2003043210A JP 2003043210 A JP2003043210 A JP 2003043210A JP 2004251789 A5 JP2004251789 A5 JP 2004251789A5
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JP
Japan
Prior art keywords
temperature
substrate
adjustment stage
dimensional
temperature sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2003043210A
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English (en)
Japanese (ja)
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JP2004251789A (ja
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Publication date
Application filed filed Critical
Priority to JP2003043210A priority Critical patent/JP2004251789A/ja
Priority claimed from JP2003043210A external-priority patent/JP2004251789A/ja
Publication of JP2004251789A publication Critical patent/JP2004251789A/ja
Publication of JP2004251789A5 publication Critical patent/JP2004251789A5/ja
Pending legal-status Critical Current

Links

JP2003043210A 2003-02-20 2003-02-20 温度測定装置及び被処理基板 Pending JP2004251789A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003043210A JP2004251789A (ja) 2003-02-20 2003-02-20 温度測定装置及び被処理基板

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003043210A JP2004251789A (ja) 2003-02-20 2003-02-20 温度測定装置及び被処理基板

Publications (2)

Publication Number Publication Date
JP2004251789A JP2004251789A (ja) 2004-09-09
JP2004251789A5 true JP2004251789A5 (enrdf_load_stackoverflow) 2005-06-02

Family

ID=33026278

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003043210A Pending JP2004251789A (ja) 2003-02-20 2003-02-20 温度測定装置及び被処理基板

Country Status (1)

Country Link
JP (1) JP2004251789A (enrdf_load_stackoverflow)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007178253A (ja) * 2005-12-28 2007-07-12 Tokyo Electron Ltd 温度測定装置および温度測定方法
JP4904822B2 (ja) * 2006-01-16 2012-03-28 東京エレクトロン株式会社 温度測定機能を有する装置
NL2002964A1 (nl) * 2008-06-16 2009-12-17 Asml Netherlands Bv Lithographic Apparatus, a Metrology Apparatus and a Method of Using the Apparatus.
JP2011109040A (ja) * 2009-11-20 2011-06-02 Nikon Corp 半導体基板ホルダ及び温度検出装置
JP5846969B2 (ja) * 2012-03-05 2016-01-20 株式会社日立ハイテクノロジーズ 温度計測方法
FR3030889B1 (fr) * 2014-12-19 2017-01-27 Commissariat Energie Atomique Capteur differentiel de temperature.

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