JP2004249611A - Manufacturing method for inkjet printer head - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a manufacturing method for an inkjet printer head which reduces manufacturing costs by greatly reducing a bonding process, prevents deformation by suppressing generation of an internal stress, and can improve the reliability. <P>SOLUTION: The manufacturing method includes the first process of forming a recess face 1A by cutting a PZT substrate 1, the second process of forming projections (a) by further cutting the substrate, the third process of setting a groove 8 over the recess face between the projections, the fourth process of burying and attaching polarizable piezoelectric bodies 5 in the grooves, the fifth process of setting ink channels 11 in the polarizable piezoelectric bodies, the sixth process of forming an electric wiring line 12 via the ink channels, the seventh process of dividing the polarizable piezoelectric bodies and the PZT substrate, the eighth process of attaching a nozzle plate 6 to the divided face, the ninth process of setting orifice holes 7 at the nozzle plate, and the 10th process of attaching a top plate lid 3 of an L-shaped cross section and with an ink supply opening body 2 to the polarizable piezoelectric body and the PZT substrate. <P>COPYRIGHT: (C)2004,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a method for manufacturing an inkjet printer head used in an inkjet printer.
[0002]
[Prior art]
As an ink ejection mechanism provided in an ink jet printer head, a technique of applying a voltage to a piezoelectric body that causes shear deformation (share mode) and changing the volume of an ink flow path formed in the piezoelectric body to apply ink is disclosed in [ Patent Literature 1] or [Patent Literature 2].
[0003]
[Patent Publication 1]
JP-A-63-252750
[Patent Publication 2]
JP, 2000-296618, A A share mode type ink jet printer head described here is obtained through the following manufacturing processes.
[0005]
Different polarities lead zirconate titanate: the _{(PZT Pb (Z rx Til -x} ) O 3) nonpolar PZT substrate was bonded together to form a trench for burying. An adhesive is applied to the groove to embed and fix the polarizable piezoelectric body.
[0006]
Then, an ink flow path composed of a narrow groove is provided by a dicing device over a part of the polarizable piezoelectric body and the non-polar PZT substrate, and an electric wiring is formed by plating along the ink flow path.
[0007]
A top plate frame, which is a non-polar PZT frame processed into a window frame shape, is bonded to the polarizable piezoelectric body and the non-polar PZT substrate. After that, the top plate frame, the polarizable piezoelectric material and the non-polar PZT substrate are cut and divided into right and left. A nozzle plate made of a polyimide (PI) sheet material is adhered to these cut surfaces, and an orifice hole for discharging ink is opened.
[0008]
A PZT plate provided with an ink supply port is adhered to the upper surface of the top plate frame to close an upper opening of the top plate frame and to form an internal space as an ink chamber. This is completed by attaching a protective component to the nozzle plate, connecting the flexible substrate on which the driving IC is mounted to the electric wiring, and connecting the ink supply port and the ink tank via the ink supply tube.
[0009]
[Problems to be solved by the invention]
As described above, in the ink jet printer head having the conventional structure, the ink chamber is formed by a method of bonding the top plate frame to the PZT substrate on which the ink flow path and the electric wiring are formed and the polarizable piezoelectric body.
[0010]
Therefore, a bonding step is required, which is troublesome and poor in workability, and adversely affects the cost. In actual use, there is a great risk of generation of internal stress due to the difference in the thermal expansion coefficient between the adhesive and the PZT substrate or the polarizable piezoelectric material, and the possibility of deformation of the head accompanying the stress. There is a problem.
[0011]
The present invention has been made in view of the above circumstances, and the purpose thereof is to achieve a reduction in manufacturing costs by greatly reducing the number of bonding steps, and to suppress the occurrence of internal stress. An object of the present invention is to provide a method of manufacturing an ink jet printer head which prevents deformation and can improve reliability.
[0012]
[Means for Solving the Problems]
In order to solve the above-mentioned problems and achieve the object, a method of manufacturing an ink jet printer head according to the present invention includes a first step of forming a concave surface by cutting the upper surface of a flat non-polar piezoelectric substrate; A second step of further cutting the upper surface of the piezoelectric substrate to form a projection at a position facing away from the upper surface of the non-polar piezoelectric substrate, and a groove extending over the opposing projection and the concave surface between the projections A third step of applying an adhesive to the grooves, embedding the polarizable piezoelectric body in the groove, and attaching the polarizable piezoelectric body to the groove, and providing a predetermined interval between the polarizable piezoelectric bodies. A fifth step of providing ink channels composed of narrow grooves in parallel with each other, and plating over the concave surfaces of the polarizable piezoelectric body and the non-polar piezoelectric substrate through these ink channels to form electric wiring. Sixth step, polarizable piezoelectric material and non-polar piezoelectric material A seventh step of dividing the substrate into left and right, an eighth step of applying an adhesive to the divided surfaces of the polarizable and nonpolar piezoelectric substrates and attaching the nozzle plate, and an ink flow to the nozzle plate. A ninth step of providing an orifice hole corresponding to the position of the road, and forming an L-shaped cross section on the application surface by applying an adhesive over the upper surface and side surfaces of the protruding portions of the polarizable and non-polar piezoelectric substrates. And a tenth step of attaching a top plate lid provided with an ink supply port and forming a space surrounded by these members as an ink chamber.
[0013]
In order to solve the above problems and achieve the object, a method of manufacturing an ink jet printer head according to the present invention is directed to a non-polar piezoelectric substrate in which a frame is formed beforehand along a recess and a periphery of the recess by firing. A first step of providing a groove over the top surface and the bottom surface of the concave portion, and a second step of applying an adhesive to the groove and embedding a polarizable piezoelectric body, and attaching the polarizable piezoelectric body to the nonpolar piezoelectric substrate groove. A third step of providing an ink flow path composed of narrow grooves in the polarizable piezoelectric body at predetermined intervals in parallel with each other, and a polarizable piezoelectric substance and a non-polar piezoelectric substrate through these ink flow paths A fourth step of forming an electric wiring by plating over the concave surface of the first step, a fifth step of dividing the polarizable piezoelectric body and the non-polar piezoelectric substrate into right and left, Apply adhesive to the divided surface of the A sixth step of adhering a sheet, a seventh step of providing an orifice hole in the nozzle plate corresponding to the position of the ink flow path, the upper surface of the polarizable piezoelectric body and the upper surface of the protrusion of the nonpolar piezoelectric substrate, and An eighth step of applying a bonding agent over the side surface, adhering a top plate lid formed in a flat plate shape and having an ink supply port, and forming a space surrounded by these members as an ink chamber. .
[0014]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
[0015]
FIG. 1 is a perspective view of a completed inkjet printer head according to the first embodiment of the present invention, and FIGS. 2A to 2C are perspective views sequentially showing the manufacturing steps of the inkjet printer head. 3 (A) to 3 (G) are perspective views sequentially showing the steps of manufacturing the ink jet printer head following FIG. 2 (C).
[0016]
In the ink jet printer head, a part of the upper surface of a non-polar piezoelectric substrate having no electrodes, for example, a substrate 1 formed of PZT is covered with a top cover 3 having a substantially L-shaped cross section. An ink supply port 2 is provided on the upper surface of the top cover 3.
[0017]
A polarizable piezoelectric body 5 is fitted on one side surface of the PZT substrate 1, and a nozzle plate 6 is mounted on this surface. Inside the PZT substrate 1, the top plate lid 3, the polarizable piezoelectric body 5 and the nozzle plate 6, there are provided an ink flow path and an ink flow path wall formed by the polarizable piezoelectric body 5 as described later. And a wall for forming an ink chamber.
[0018]
The nozzle plate 6 is made of, for example, polyimide, and orifice holes 7 for discharging ink are provided in a line at a predetermined interval. Further, the nozzle plate 6, the top plate cover 3, and the ink supply port 2 are adhered using a thermosetting epoxy adhesive.
[0019]
The thermosetting epoxy adhesive used here may be either a one-part type or a two-part type. However, the adhesive used for attaching the nozzle plate 6 needs to control the applied thickness to 3 μm or less. There is.
[0020]
Next, the manufacturing process of the ink jet printer head will be described in order.
As shown in FIG. 2A, a PZT substrate 1 which is a nonpolar piezoelectric substrate to which no polarity is given is prepared. The PZT substrate 1 is a rectangular flat plate having a thickness of about 5 mm and is carried into, for example, a dicing apparatus.
[0021]
As shown in FIG. 2B, as a first step, the upper surface of the PZT substrate 1 is cut by a dicing device while leaving both sides, so that the upper surface of the PZT substrate 1 is formed in a concave shape. The concave surface 1A is provided to form the above-described ink chamber.
[0022]
As shown in FIG. 2C, as a second step, the cutting direction by the dicing device is changed by 90 °, and one end, the other end, and the center of the remaining convex portions on both sides of the upper surface of the PZT substrate 1 are changed. The portion is cut at the same depth as the concave surface 1A, and is made flush with the concave surface 1A. On the upper surface of the PZT substrate 1, a total of four protrusions a are provided, two on each of the left and right sides.
[0023]
Further, as a third step, a groove 8 having a depth deeper than the concave surface 1A is provided between the left and right protrusions a to divide the protrusions a front and rear. Therefore, a total of eight protrusions a are formed on the upper surface of the PZT substrate 1.
[0024]
The concave surface 1A is formed in order to draw out wiring and secure a space for connecting the wiring to a flexible substrate on which a driving IC is mounted. Therefore, the concave surface 1A can be omitted depending on the setting of the wiring width, the number of wirings, or the width of the flexible substrate on which the driving IC is mounted.
[0025]
As shown in FIG. 3A, as a fourth step, an adhesive is applied to the groove 8, and then a polarizable piezoelectric body 5 having a polarity is embedded and fixed. The adhesive portion protruding from the groove 8 to the concave surface 1A and the step portion between the PZT substrate 1 and the polarizable piezoelectric body 5 are polished using a polishing device to make them even on the same plane.
[0026]
As shown in FIG. 3B, as a fifth step, an ink flow path 11 is formed for each of the polarizable piezoelectric bodies 5. The ink flow path 11 is a plurality of narrow grooves having a predetermined depth formed in the direction of the concave surface 1 </ b> A from the upper surface of the polarizable piezoelectric body 5, and has a minute interval in the length direction of the polarizable piezoelectric body 5. And arranged in parallel. In processing the ink flow path 11, for example, a dicing device is used.
[0027]
As shown in FIG. 3C, as a sixth step, an electric wiring 12 is formed on the PZT substrate 1 by, for example, a plating method. The electric wiring 12 deforms the polarizable piezoelectric body 5 in the Sure mode, and applies a voltage for ink ejection.
[0028]
The electric wiring 12 is obtained by forming an energized layer by electroless Ni plating and further performing electrolytic Au plating on the energized layer. The metal film in the ink flow path 11 has a uniform thickness. As long as a short circuit due to abnormal growth does not occur, the type of wiring metal and the forming method are not limited.
[0029]
As shown in FIG. 3D, as a seventh step, the PZT substrate 1 is divided using a dicing apparatus. The division positions are a position at which the polarizable piezoelectric body 5 is divided into two along the longitudinal direction and a central position on the concave surface 1A which is equidistant from the pair of polarizable piezoelectric bodies 5, and the PZT substrate 1 is divided into four parts. You. Each of these divided bodies S becomes an ink jet printer head.
[0030]
As shown in FIG. 3 (E), as an eighth step, an adhesive is applied to a surface generated when the polarizable piezoelectric body 5 in each divided body S is divided, and for example, a nozzle plate made of polyimide is formed. 6 (shown by hatching in the figure) is attached.
[0031]
As shown in FIG. 3 (F), as a ninth step, a plurality of orifice holes 7 serving as ink discharge ports are provided in the attached nozzle plate 6. The positions of these orifice holes 7 correspond to the positions of the ink flow paths 11 formed in the polarizable piezoelectric body 5 and communicate with each other. Since the diameter of the hole is extremely small, the hole is opened by, for example, laser beam processing.
[0032]
Next, as a tenth step, the top plate lid 3 having the ink supply port 2 is bonded over the PZT substrate 1 and the polarizable piezoelectric element 5. The top plate cover 3 is formed by integrally forming a horizontal surface portion 3a and a vertical surface portion 3b, and has an L-shaped cross section.
[0033]
The horizontal plane portion 3a of the top cover 3 has the same length as the longitudinal direction of the divided body S, and is set to be the same as the width of the divided polarizable piezoelectric body 5 and the width of the protrusion a protruding from the upper surface of the PZT substrate 1. Have been. The vertical surface 3b of the top cover 3 is set to have the same height as the height of the protrusion a.
[0034]
In bonding the top cover 3, an adhesive is applied to the upper surface and side surfaces of the protrusion a of the PZT substrate 1, the divided upper surface of the polarizable piezoelectric body 5, or the back surface of the top cover 3. The adhesive is applied using, for example, a dispenser method.
[0035]
FIG. 3G shows a state in which the top plate lid 3 is bonded to the PZT substrate 1 and the polarizable piezoelectric body 5, and the top plate lid 3 is surrounded and bent by the PZT substrate 1 and the polarizable piezoelectric body 5. The space is the ink chamber.
[0036]
Although not shown here, a flexible substrate on which a driving IC is mounted is connected to the electric wiring 12, a metal protection component is attached to the nozzle plate 6, and the ink supply port 2 is connected to the ink supply tube 2 via an ink supply tube. By connecting the ink tank, an ink jet printer head is completed.
[0037]
By employing such an ink jet printer head structure, the number of adhesive layers is reduced as compared with the conventional structure. Therefore, it is possible to suppress the generation of internal stress due to the difference in the thermal expansion coefficient between the adhesive and the PZT substrate 1 and the splittable piezoelectric body 5 and the deformation of the ink jet head due to the internal stress.
[0038]
Since the number of steps is reduced, the final yield of the ink jet printer head can be improved, which is easier than the conventional ink jet printer head manufacturing process.
[0039]
In addition, since the concave surface 1A is provided on the PZT substrate 1 to form an ink chamber, and the top plate lid 3 having an L-shaped cross section is hooked and adhered and fixed, the positioning accuracy of the top plate lid 3 can be reduced. In addition, defects caused by positioning of the top cover 3 are reliably avoided.
[0040]
With the reduction in weight due to the reduction in the number of members constituting the ink jet printer head, the movement of the printer head during printing can be reduced, contributing to the improvement of printing speed.
[0041]
In the first embodiment, since the PZT substrate 1 is formed by cutting to form the concave surface 1A, the top cover 3 has a horizontal surface portion 3a provided with the ink supply port 2 and a flat surface portion 3a. The vertical plane section 3b is formed vertically along one side edge of the horizontal plane section 3a, and is complicated.
[0042]
It is necessary to apply the adhesive to two surfaces which are perpendicular to each other, that is, two surfaces of a horizontal surface portion 3a having the ink supply port 2 and a vertical surface portion 3b having no ink supply port body 2. In the method using a dispenser, since the coating is performed on two surfaces that are perpendicular to each other, it takes time and effort.
[0043]
Therefore, a second embodiment of the present invention will be described with reference to the drawings.
FIGS. 4 to 6 show a second embodiment, FIG. 4 is a perspective view of an ink jet printer head in a completed state, and FIGS. 5A to 5C sequentially explain a manufacturing process of the ink jet printer head. 6 (A) to 6 (G) are diagrams for sequentially explaining the manufacturing steps of the ink jet printer head following FIG. 5 (C).
[0044]
As shown in FIG. 4, in the inkjet printer head, a part of the upper surface of a PZT substrate 20 which is a nonpolar piezoelectric substrate is covered with a flat top cover 22 having an ink supply port 21.
[0045]
A polarizable piezoelectric body 23 is fitted on one side surface of the PZT substrate 20, and a nozzle plate 25 having an orifice hole 24 serving as a plurality of ink discharge ports is mounted on the surface of the polarizable piezoelectric body 23.
[0046]
Inside the PZT substrate 20, the top cover 22, the polarizable piezoelectric body 23 and the nozzle plate 25, an ink flow path and an ink flow path wall formed by the polarizable piezoelectric body 23 are described later. And a wall for forming an ink chamber.
[0047]
The nozzle plate 25 is made of, for example, polyimide, and the orifice holes 24 are provided in a row at a predetermined interval. Further, the nozzle plate 25, the top plate cover 22, and the ink supply port body 21 are respectively bonded using a thermosetting epoxy adhesive.
[0048]
Next, the manufacturing process of the ink jet printer head will be described in order.
As shown in FIG. 5A, a PZT substrate 20 which is a nonpolar piezoelectric substrate to which no polarity is given is prepared. The PZT substrate 20 is a rectangular plate having a thickness of about 5 mm, and has two concave portions 26 formed on the upper surface before firing, and then firing. The periphery of these concave portions 26 becomes a frame portion 27.
[0049]
As shown in FIG. 5B, as a first step, a groove 28 is formed by cutting a substantially central portion of each concave portion 26 with a dicing device. These grooves 28 are provided over the upper surface of the frame 27 and the bottom of the recess 26 of the PZT substrate 20.
[0050]
As shown in FIG. 5C, as a second step, an adhesive is applied to the groove 28, and a polarizable piezoelectric body 23 having a polarity is embedded and fixed. The adhesive portion protruding from the groove 28 and the step portion between the PZT substrate 20 and the polarizable piezoelectric body 23 are polished by a polishing device to make them even on the same plane.
[0051]
As shown in FIG. 6A, as a third step, an ink flow path 29 is formed for the polarizable piezoelectric substance 23 protruding into each of the concave portions 26. The ink flow path 29 is in the form of a narrow groove provided in parallel on the upper surface of the polarizable piezoelectric body 23 with a small space therebetween, and a dicing device is used for processing the groove.
[0052]
As shown in FIG. 6B, as a fourth step, an electric wiring 30 is formed on the PZT substrate 20 by, for example, a plating method. The electric wirings 30 are provided corresponding to the respective polarizable piezoelectric bodies 23, and the ink flow paths provided on the polarizable piezoelectric bodies 23 from both side edges of the PZT substrate 20 via the side and bottom surfaces of the concave portion 26. 29, and is plated between the ink flow paths.
[0053]
As shown in FIG. 6C, as a fifth step, the PZT substrate 20 is divided using a dicing apparatus. The dividing positions are a position at which the polarizable piezoelectric body 23 is divided into two right and left along the polarizable piezoelectric body 23 and a central position between the concave portions 26. Become.
[0054]
As shown in FIG. 6 (D), as a sixth step, an adhesive is applied to the divided surface of the polarizable piezoelectric body 23 in each divided body N, and for example, a nozzle plate made of polyimide (shown by hatching in the figure) 25 is pasted.
[0055]
As shown in FIG. 6 (E), as a seventh step, a plurality of orifice holes 24 are provided in the nozzle plate 25 corresponding to the positions of the ink flow paths 29. Since these orifice holes 29 are very small diameter holes serving as ink ejection ports, they are opened by, for example, laser beam processing.
[0056]
Next, as an eighth step, a top plate lid 22 having an ink supply port 21 is bonded to the PZT substrate 20 and the upper surface of the polarizable piezoelectric body 23. The top cover 22 is formed in a flat plate shape and closes an upper surface opening of the concave portion 26. The space surrounded by the top cover 22, the PZT substrate 20, and the polarizable piezoelectric body 23 is the ink chamber.
[0057]
Although not shown here, a flexible substrate on which a driving IC is mounted is connected to the electric wiring 30, a metal protection component is attached to the nozzle plate 25, and an ink supply port is connected via an ink supply tube. The ink jet printer head is completed by connecting the ink tank 21 to the ink tank.
[0058]
With this ink jet printer head, the number of adhesive layers is further reduced as compared with the first embodiment. Therefore, the generation of the internal stress due to the difference in the thermal expansion coefficient between the adhesive and the piezoelectric substrate and the suppression of the deformation of the ink jet head due to the difference are the first embodiment and above.
[0059]
In the case of the second embodiment, the step of cutting the concave surface for forming the ink chamber in the PZT substrate can be omitted as compared with the first embodiment. It is necessary to provide the electric wiring 30 on the side and bottom of the recess 26.
[0060]
Here, resist patterning is performed by spray coating of a liquid resist, a current-carrying layer is formed by electroless plating in a portion where the resist pattern is opened on the PZT substrate 20, and then the electric wiring 30 is formed by performing electrolytic plating. it can.
[0061]
As described above, in the method in which the concave portion 26 is formed when the PZT substrate 20 is fired, the shape of the top cover 22 can be made a simple plate shape, and the cost of processing members can be reduced. Further, since only one bonding surface of the top plate lid 22 is required, the application of the adhesive is simplified, which is advantageous in that poor bonding hardly occurs.
[0062]
In the case where the recess 26 is formed by firing, a method in which the recess is formed by firing on the top plate lid side and the PZT substrate 20 side is formed in a flat plate shape may be considered. In this case, in addition to the advantage that the step of bonding the top plate frame to the top plate lid as in the related art is omitted, the top cover has a cross-sectional shape that is not easily deformed during heating in the adhesive curing step.
[0063]
Therefore, it is possible to suppress the nozzle position shift due to the deformation of the ink jet printer head after the top plate lid and the PZT substrate are bonded, and it is possible to suppress the deterioration of the printing quality due to the manufacturing conditions.
[0064]
【The invention's effect】
As described above, according to the present invention, by significantly reducing the number of bonding steps, the manufacturing cost can be reduced, and the occurrence of internal stress can be suppressed to prevent deformation and improve the reliability of products. And the like.
[Brief description of the drawings]
FIG. 1 is a perspective view of an ink jet printer head according to a first embodiment of the present invention.
FIG. 2 is a view for sequentially explaining a manufacturing process of the ink jet printer head according to the embodiment.
FIG. 3 is a view for explaining a manufacturing process of the ink jet printer head in succession to FIG. 2 according to the embodiment;
FIG. 4 is a perspective view of an inkjet printer head according to a second embodiment of the present invention.
FIG. 5 is a view for sequentially explaining a manufacturing process of the ink jet printer head according to the embodiment.
FIG. 6 is a view for explaining a manufacturing process of the ink jet printer head according to the embodiment, following FIG. 5;
[Explanation of symbols]
1, 20: PZT substrate (non-polar piezoelectric substrate), 1A: concave surface, 26: concave portion, a: protruding portion, 8, 28: groove, 5, 23: polarizable piezoelectric material, 11, 29: ink flow path, 12, 30: electric wiring, 6, 25: nozzle plate, 7, 24: orifice hole, 2, 21: ink supply port, 3, 22: top cover.

Claims (2)

A first step of forming a concave surface by cutting the upper surface of the flat non-polar piezoelectric substrate;
A second step of further cutting the upper surface of the non-polar piezoelectric substrate to form a projecting portion at a position facing away from the upper surface of the non-polar piezoelectric substrate;
A third step of providing a groove over the opposed protrusions and a concave surface between the protrusions;
A fourth step of embedding a polarizable piezoelectric body after applying an adhesive to the groove and attaching the polarizable piezoelectric body to the groove;
A fifth step of providing, in the polarizable piezoelectric body, ink channels formed of narrow grooves in parallel with a predetermined interval therebetween;
A sixth step of plating over the concave surface of the polarizable piezoelectric body and the non-polar piezoelectric substrate through these ink flow paths to form electrical wiring;
A seventh step of dividing the polarizable piezoelectric body and the nonpolar piezoelectric substrate into right and left,
An eighth step of applying an adhesive to the divided surfaces of the polarizable piezoelectric material and the nonpolar piezoelectric substrate, and attaching a nozzle plate;
A ninth step of providing an orifice hole in the nozzle plate corresponding to the position of the ink flow path;
An adhesive is applied over the upper surface of the polarizable piezoelectric body and the upper surface and side surfaces of the protrusion of the non-polar piezoelectric substrate, and a top plate lid having an L-shaped cross section and having an ink supply port is attached to the applied surface. And a tenth step of forming a space surrounded by these members as an ink chamber. A first step of providing a groove over the top surface of the frame portion and the bottom surface of the concave portion for the nonpolar piezoelectric substrate on which the concave portion and the frame portion are formed in advance along the periphery of the concave portion by firing;
A second step of embedding a polarizable piezoelectric body after applying an adhesive to the groove and attaching the polarizable piezoelectric body to a groove provided on a nonpolar piezoelectric substrate;
A third step of providing, in the polarizable piezoelectric body, ink channels formed of narrow grooves in parallel at predetermined intervals from each other;
A fourth step of plating over the concave surface of the polarizable piezoelectric body and the non-polar piezoelectric substrate through these ink flow paths to form electrical wiring;
A fifth step of dividing the polarizable piezoelectric body and the nonpolar piezoelectric substrate into right and left;
A sixth step of applying an adhesive to the divided surfaces of the polarizable and nonpolar piezoelectric substrates and attaching a nozzle plate;
A seventh step of providing an orifice hole in the nozzle plate corresponding to the position of the ink flow path;
An adhesive is applied over the upper surface and side surfaces of the protruding portions of the polarizable piezoelectric body and the non-polar piezoelectric substrate, and a top plate lid formed with a flat plate and provided with an ink supply port is attached thereto. Forming an ink chamber in a space surrounded by a circle.

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