JP2004247767A5 - - Google Patents
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- Publication number
- JP2004247767A5 JP2004247767A5 JP2004161353A JP2004161353A JP2004247767A5 JP 2004247767 A5 JP2004247767 A5 JP 2004247767A5 JP 2004161353 A JP2004161353 A JP 2004161353A JP 2004161353 A JP2004161353 A JP 2004161353A JP 2004247767 A5 JP2004247767 A5 JP 2004247767A5
- Authority
- JP
- Japan
- Prior art keywords
- optical system
- projection optical
- stage
- projection
- photosensitive substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 230000003287 optical effect Effects 0.000 claims 16
- 238000000034 method Methods 0.000 claims 10
- 239000000758 substrate Substances 0.000 claims 9
- 238000001514 detection method Methods 0.000 claims 3
- 238000005259 measurement Methods 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004161353A JP2004247767A (ja) | 2004-05-31 | 2004-05-31 | 投影露光装置及びそれを用いたデバイスの製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004161353A JP2004247767A (ja) | 2004-05-31 | 2004-05-31 | 投影露光装置及びそれを用いたデバイスの製造方法 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8092067A Division JPH09260269A (ja) | 1996-03-19 | 1996-03-19 | 投影露光方法及びそれを用いたデバイスの製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2004247767A JP2004247767A (ja) | 2004-09-02 |
| JP2004247767A5 true JP2004247767A5 (enExample) | 2006-04-20 |
Family
ID=33028717
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004161353A Withdrawn JP2004247767A (ja) | 2004-05-31 | 2004-05-31 | 投影露光装置及びそれを用いたデバイスの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2004247767A (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008292391A (ja) * | 2007-05-28 | 2008-12-04 | Mitsutoyo Corp | 共焦点光学装置 |
| JP6032833B2 (ja) * | 2012-03-30 | 2016-11-30 | 伯東株式会社 | 投影露光方法、および投影露光装置 |
-
2004
- 2004-05-31 JP JP2004161353A patent/JP2004247767A/ja not_active Withdrawn
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