JP2004247767A5 - - Google Patents

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Publication number
JP2004247767A5
JP2004247767A5 JP2004161353A JP2004161353A JP2004247767A5 JP 2004247767 A5 JP2004247767 A5 JP 2004247767A5 JP 2004161353 A JP2004161353 A JP 2004161353A JP 2004161353 A JP2004161353 A JP 2004161353A JP 2004247767 A5 JP2004247767 A5 JP 2004247767A5
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JP
Japan
Prior art keywords
optical system
projection optical
stage
projection
photosensitive substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2004161353A
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English (en)
Japanese (ja)
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JP2004247767A (ja
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Publication date
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Priority to JP2004161353A priority Critical patent/JP2004247767A/ja
Priority claimed from JP2004161353A external-priority patent/JP2004247767A/ja
Publication of JP2004247767A publication Critical patent/JP2004247767A/ja
Publication of JP2004247767A5 publication Critical patent/JP2004247767A5/ja
Withdrawn legal-status Critical Current

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JP2004161353A 2004-05-31 2004-05-31 投影露光装置及びそれを用いたデバイスの製造方法 Withdrawn JP2004247767A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004161353A JP2004247767A (ja) 2004-05-31 2004-05-31 投影露光装置及びそれを用いたデバイスの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004161353A JP2004247767A (ja) 2004-05-31 2004-05-31 投影露光装置及びそれを用いたデバイスの製造方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP8092067A Division JPH09260269A (ja) 1996-03-19 1996-03-19 投影露光方法及びそれを用いたデバイスの製造方法

Publications (2)

Publication Number Publication Date
JP2004247767A JP2004247767A (ja) 2004-09-02
JP2004247767A5 true JP2004247767A5 (cg-RX-API-DMAC7.html) 2006-04-20

Family

ID=33028717

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004161353A Withdrawn JP2004247767A (ja) 2004-05-31 2004-05-31 投影露光装置及びそれを用いたデバイスの製造方法

Country Status (1)

Country Link
JP (1) JP2004247767A (cg-RX-API-DMAC7.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008292391A (ja) * 2007-05-28 2008-12-04 Mitsutoyo Corp 共焦点光学装置
JP6032833B2 (ja) * 2012-03-30 2016-11-30 伯東株式会社 投影露光方法、および投影露光装置

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