JP2004239922A5 - - Google Patents
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- Publication number
- JP2004239922A5 JP2004239922A5 JP2004158631A JP2004158631A JP2004239922A5 JP 2004239922 A5 JP2004239922 A5 JP 2004239922A5 JP 2004158631 A JP2004158631 A JP 2004158631A JP 2004158631 A JP2004158631 A JP 2004158631A JP 2004239922 A5 JP2004239922 A5 JP 2004239922A5
- Authority
- JP
- Japan
- Prior art keywords
- probe
- charged particle
- particle beam
- sample
- detecting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000523 sample Substances 0.000 claims 71
- 239000002245 particle Substances 0.000 claims 38
- 230000003287 optical effect Effects 0.000 claims 8
- 230000001678 irradiating effect Effects 0.000 claims 7
- 238000001514 detection method Methods 0.000 claims 4
- 238000010894 electron beam technology Methods 0.000 claims 1
- 238000003384 imaging method Methods 0.000 claims 1
- 238000010884 ion-beam technique Methods 0.000 claims 1
- 239000011163 secondary particle Substances 0.000 claims 1
- 230000001360 synchronised effect Effects 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004158631A JP4134951B2 (ja) | 2004-05-28 | 2004-05-28 | 試料作製装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004158631A JP4134951B2 (ja) | 2004-05-28 | 2004-05-28 | 試料作製装置 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP34255098A Division JP3613039B2 (ja) | 1998-12-02 | 1998-12-02 | 試料作製装置 |
Related Child Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006104806A Division JP4111227B2 (ja) | 2006-04-06 | 2006-04-06 | 試料作製装置 |
| JP2007331324A Division JP4572934B2 (ja) | 2007-12-25 | 2007-12-25 | 試料作製装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2004239922A JP2004239922A (ja) | 2004-08-26 |
| JP2004239922A5 true JP2004239922A5 (enExample) | 2005-12-02 |
| JP4134951B2 JP4134951B2 (ja) | 2008-08-20 |
Family
ID=32960097
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004158631A Expired - Lifetime JP4134951B2 (ja) | 2004-05-28 | 2004-05-28 | 試料作製装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4134951B2 (enExample) |
-
2004
- 2004-05-28 JP JP2004158631A patent/JP4134951B2/ja not_active Expired - Lifetime
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