JP4134951B2 - 試料作製装置 - Google Patents

試料作製装置 Download PDF

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Publication number
JP4134951B2
JP4134951B2 JP2004158631A JP2004158631A JP4134951B2 JP 4134951 B2 JP4134951 B2 JP 4134951B2 JP 2004158631 A JP2004158631 A JP 2004158631A JP 2004158631 A JP2004158631 A JP 2004158631A JP 4134951 B2 JP4134951 B2 JP 4134951B2
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JP
Japan
Prior art keywords
probe
sample
charged particle
particle beam
ion beam
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Expired - Lifetime
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JP2004158631A
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English (en)
Japanese (ja)
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JP2004239922A5 (enExample
JP2004239922A (ja
Inventor
聡 富松
馨 梅村
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Hitachi Ltd
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Hitachi Ltd
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Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP2004158631A priority Critical patent/JP4134951B2/ja
Publication of JP2004239922A publication Critical patent/JP2004239922A/ja
Publication of JP2004239922A5 publication Critical patent/JP2004239922A5/ja
Application granted granted Critical
Publication of JP4134951B2 publication Critical patent/JP4134951B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Sampling And Sample Adjustment (AREA)
JP2004158631A 2004-05-28 2004-05-28 試料作製装置 Expired - Lifetime JP4134951B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004158631A JP4134951B2 (ja) 2004-05-28 2004-05-28 試料作製装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004158631A JP4134951B2 (ja) 2004-05-28 2004-05-28 試料作製装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP34255098A Division JP3613039B2 (ja) 1998-12-02 1998-12-02 試料作製装置

Related Child Applications (2)

Application Number Title Priority Date Filing Date
JP2006104806A Division JP4111227B2 (ja) 2006-04-06 2006-04-06 試料作製装置
JP2007331324A Division JP4572934B2 (ja) 2007-12-25 2007-12-25 試料作製装置

Publications (3)

Publication Number Publication Date
JP2004239922A JP2004239922A (ja) 2004-08-26
JP2004239922A5 JP2004239922A5 (enExample) 2005-12-02
JP4134951B2 true JP4134951B2 (ja) 2008-08-20

Family

ID=32960097

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004158631A Expired - Lifetime JP4134951B2 (ja) 2004-05-28 2004-05-28 試料作製装置

Country Status (1)

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JP (1) JP4134951B2 (enExample)

Also Published As

Publication number Publication date
JP2004239922A (ja) 2004-08-26

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