JP2004219262A - ウェーハ欠陥の高速オンライン電気光学的検出のための方法及びシステム - Google Patents
ウェーハ欠陥の高速オンライン電気光学的検出のための方法及びシステム Download PDFInfo
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- JP2004219262A JP2004219262A JP2003007400A JP2003007400A JP2004219262A JP 2004219262 A JP2004219262 A JP 2004219262A JP 2003007400 A JP2003007400 A JP 2003007400A JP 2003007400 A JP2003007400 A JP 2003007400A JP 2004219262 A JP2004219262 A JP 2004219262A
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Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9501—Semiconductor wafers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N21/95607—Inspecting patterns on the surface of objects using a comparative method
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003007400A JP2004219262A (ja) | 2003-01-15 | 2003-01-15 | ウェーハ欠陥の高速オンライン電気光学的検出のための方法及びシステム |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003007400A JP2004219262A (ja) | 2003-01-15 | 2003-01-15 | ウェーハ欠陥の高速オンライン電気光学的検出のための方法及びシステム |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010028061A Division JP5519313B2 (ja) | 2010-02-10 | 2010-02-10 | ウェーハ欠陥の高速オンライン電気光学的検出のための方法及びシステム |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2004219262A true JP2004219262A (ja) | 2004-08-05 |
| JP2004219262A5 JP2004219262A5 (enExample) | 2006-03-02 |
Family
ID=32897515
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003007400A Pending JP2004219262A (ja) | 2003-01-15 | 2003-01-15 | ウェーハ欠陥の高速オンライン電気光学的検出のための方法及びシステム |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2004219262A (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017219355A (ja) * | 2016-06-03 | 2017-12-14 | 株式会社ニューフレアテクノロジー | 検査方法 |
| CN112330590A (zh) * | 2020-09-25 | 2021-02-05 | 上海华力微电子有限公司 | 晶圆缺陷的验证方法 |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03221848A (ja) * | 1990-01-26 | 1991-09-30 | Canon Inc | 異物検査装置 |
| JPH0518901A (ja) * | 1991-07-15 | 1993-01-26 | Toshiba Corp | ウエーハ表面検査装置 |
| JPH05144913A (ja) * | 1991-11-19 | 1993-06-11 | Hitachi Electron Eng Co Ltd | ウエハ異物検出光学系 |
| JPH0666530A (ja) * | 1992-08-24 | 1994-03-08 | Matsushita Electric Ind Co Ltd | 半田接合部の検査装置 |
| JPH1048138A (ja) * | 1996-08-06 | 1998-02-20 | Nkk Corp | 金属板表面の疵情報入力装置 |
| JP2000338048A (ja) * | 1999-05-31 | 2000-12-08 | Hamamatsu Photonics Kk | 表面検査方法及び検査装置 |
| JP3271549B2 (ja) * | 1997-05-20 | 2002-04-02 | 日産自動車株式会社 | 表面検査装置 |
| JP3271425B2 (ja) * | 1994-03-30 | 2002-04-02 | ソニー株式会社 | 異物検査装置及び異物検査方法 |
-
2003
- 2003-01-15 JP JP2003007400A patent/JP2004219262A/ja active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03221848A (ja) * | 1990-01-26 | 1991-09-30 | Canon Inc | 異物検査装置 |
| JPH0518901A (ja) * | 1991-07-15 | 1993-01-26 | Toshiba Corp | ウエーハ表面検査装置 |
| JPH05144913A (ja) * | 1991-11-19 | 1993-06-11 | Hitachi Electron Eng Co Ltd | ウエハ異物検出光学系 |
| JPH0666530A (ja) * | 1992-08-24 | 1994-03-08 | Matsushita Electric Ind Co Ltd | 半田接合部の検査装置 |
| JP3271425B2 (ja) * | 1994-03-30 | 2002-04-02 | ソニー株式会社 | 異物検査装置及び異物検査方法 |
| JPH1048138A (ja) * | 1996-08-06 | 1998-02-20 | Nkk Corp | 金属板表面の疵情報入力装置 |
| JP3271549B2 (ja) * | 1997-05-20 | 2002-04-02 | 日産自動車株式会社 | 表面検査装置 |
| JP2000338048A (ja) * | 1999-05-31 | 2000-12-08 | Hamamatsu Photonics Kk | 表面検査方法及び検査装置 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017219355A (ja) * | 2016-06-03 | 2017-12-14 | 株式会社ニューフレアテクノロジー | 検査方法 |
| CN112330590A (zh) * | 2020-09-25 | 2021-02-05 | 上海华力微电子有限公司 | 晶圆缺陷的验证方法 |
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