JP2004212243A - 格子干渉型光学式エンコーダ - Google Patents

格子干渉型光学式エンコーダ Download PDF

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Publication number
JP2004212243A
JP2004212243A JP2003000371A JP2003000371A JP2004212243A JP 2004212243 A JP2004212243 A JP 2004212243A JP 2003000371 A JP2003000371 A JP 2003000371A JP 2003000371 A JP2003000371 A JP 2003000371A JP 2004212243 A JP2004212243 A JP 2004212243A
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JP
Japan
Prior art keywords
grating
diffraction grating
light
diffracted
diffracted light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2003000371A
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English (en)
Japanese (ja)
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JP2004212243A5 (https=
Inventor
Akira Ishizuka
公 石塚
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2003000371A priority Critical patent/JP2004212243A/ja
Priority to EP03258231A priority patent/EP1435510A1/en
Priority to US10/752,335 priority patent/US7061624B2/en
Publication of JP2004212243A publication Critical patent/JP2004212243A/ja
Priority to US11/416,889 priority patent/US7259863B2/en
Publication of JP2004212243A5 publication Critical patent/JP2004212243A5/ja
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/344—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using polarisation
    • G01D5/345—Polarising encoders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/366—Particular pulse shapes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
JP2003000371A 2003-01-06 2003-01-06 格子干渉型光学式エンコーダ Pending JP2004212243A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2003000371A JP2004212243A (ja) 2003-01-06 2003-01-06 格子干渉型光学式エンコーダ
EP03258231A EP1435510A1 (en) 2003-01-06 2003-12-30 Grating interference type optical encoder
US10/752,335 US7061624B2 (en) 2003-01-06 2004-01-05 Grating interference type optical encoder
US11/416,889 US7259863B2 (en) 2003-01-06 2006-05-02 Grating interference type optical encoder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003000371A JP2004212243A (ja) 2003-01-06 2003-01-06 格子干渉型光学式エンコーダ

Publications (2)

Publication Number Publication Date
JP2004212243A true JP2004212243A (ja) 2004-07-29
JP2004212243A5 JP2004212243A5 (https=) 2008-04-10

Family

ID=32501170

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003000371A Pending JP2004212243A (ja) 2003-01-06 2003-01-06 格子干渉型光学式エンコーダ

Country Status (3)

Country Link
US (2) US7061624B2 (https=)
EP (1) EP1435510A1 (https=)
JP (1) JP2004212243A (https=)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101099387B1 (ko) 2009-10-23 2011-12-29 김영훈 중첩 보강된 광을 위한 균일 격자체 구조
JP2012098287A (ja) * 2010-11-03 2012-05-24 Dr Johannes Heidenhain Gmbh 光学式角度測定装置
JP2017010042A (ja) * 2006-09-01 2017-01-12 株式会社ニコン 露光装置及び露光方法、並びにデバイス製造方法
JP2021193354A (ja) * 2020-06-08 2021-12-23 キヤノン株式会社 光学式エンコーダ及び制御装置

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JP2004212243A (ja) * 2003-01-06 2004-07-29 Canon Inc 格子干渉型光学式エンコーダ
DE10351560A1 (de) 2003-11-03 2005-06-02 Metronic Ag Impulsgeber
CN101061371A (zh) * 2004-11-22 2007-10-24 皇家飞利浦电子股份有限公司 探测物体的运动的光学系统
JP4670438B2 (ja) 2005-04-01 2011-04-13 ソニー株式会社 コンテンツおよびそのプレイリストの提供方法
EP1970673B1 (en) * 2005-12-28 2012-02-22 Nikon Corporation Encoder
US7636165B2 (en) * 2006-03-21 2009-12-22 Asml Netherlands B.V. Displacement measurement systems lithographic apparatus and device manufacturing method
US8582750B2 (en) * 2006-07-31 2013-11-12 Cisco Technology, Inc. Connection recovery in a call center
US8582113B2 (en) 2007-02-13 2013-11-12 Kla-Tencor Mie Gmbh Device for determining the position of at least one structure on an object, use of an illumination apparatus with the device and use of protective gas with the device
DE102007049133A1 (de) * 2007-02-13 2008-08-21 Vistec Semiconductor Systems Gmbh Vorrichtung zur Bestimmung der Position mindestens einer Struktur auf einem Objekt, Verwendung einer Beleuchtungseinrichtung für die Vorrichtung und Verwendung von Schutzgas für die Vorrichtung
DE102011082156A1 (de) * 2010-12-16 2012-06-21 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
US8772706B2 (en) 2012-04-20 2014-07-08 Mitutoyo Corporation Multiple wavelength configuration for an optical encoder readhead including dual optical path region with an optical path length difference
US10678412B2 (en) 2014-07-31 2020-06-09 Microsoft Technology Licensing, Llc Dynamic joint dividers for application windows
US10254942B2 (en) 2014-07-31 2019-04-09 Microsoft Technology Licensing, Llc Adaptive sizing and positioning of application windows
US10592080B2 (en) 2014-07-31 2020-03-17 Microsoft Technology Licensing, Llc Assisted presentation of application windows
US9562793B2 (en) * 2014-11-17 2017-02-07 Mitutoyo Corporation Illumination portion for an optical encoder
US9372347B1 (en) 2015-02-09 2016-06-21 Microsoft Technology Licensing, Llc Display system
US9535253B2 (en) 2015-02-09 2017-01-03 Microsoft Technology Licensing, Llc Display system
US10018844B2 (en) 2015-02-09 2018-07-10 Microsoft Technology Licensing, Llc Wearable image display system
US9513480B2 (en) 2015-02-09 2016-12-06 Microsoft Technology Licensing, Llc Waveguide
US9423360B1 (en) * 2015-02-09 2016-08-23 Microsoft Technology Licensing, Llc Optical components
US9827209B2 (en) 2015-02-09 2017-11-28 Microsoft Technology Licensing, Llc Display system
US10317677B2 (en) 2015-02-09 2019-06-11 Microsoft Technology Licensing, Llc Display system
US11086216B2 (en) 2015-02-09 2021-08-10 Microsoft Technology Licensing, Llc Generating electronic components
US9429692B1 (en) 2015-02-09 2016-08-30 Microsoft Technology Licensing, Llc Optical components
DE112019004545T5 (de) * 2019-04-23 2021-05-20 Han's Laser Technology Industry Group Co., Ltd. Strichscheibe und rückkopplungssystem
TWI721719B (zh) 2019-12-19 2021-03-11 財團法人工業技術研究院 量測裝置
CN111964587B (zh) * 2020-08-14 2022-06-21 清华大学深圳国际研究生院 检测系统、检测方法及光栅尺
KR20230154275A (ko) * 2021-03-17 2023-11-07 에이엠에스-오스람 아시아 퍼시픽 피티이. 리미티드 로터리 인코더들
CN115900782B (zh) * 2022-12-30 2025-05-27 四川云盾光电科技有限公司 一种绝对式测角装置及方法

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JPH08327401A (ja) * 1995-05-30 1996-12-13 Canon Inc 変位情報検出装置、駆動制御装置、及び変位情報検出用スケール
CN1151361C (zh) * 1996-05-20 2004-05-26 松下电器产业株式会社 光学编码器及位置检测方法
US6075600A (en) * 1998-03-23 2000-06-13 Kabushiki Kaisha Topcon Signal formation apparatus for use in interference measurement
JP4365927B2 (ja) * 1999-03-12 2009-11-18 キヤノン株式会社 干渉計測装置及び格子干渉式エンコーダ
JP2001012971A (ja) * 1999-06-28 2001-01-19 Canon Inc ロータリーエンコーダー
JP4846909B2 (ja) * 2000-02-15 2011-12-28 キヤノン株式会社 光学式エンコーダ及び回折格子の変位測定方法
JP2001336952A (ja) * 2000-05-26 2001-12-07 Canon Inc 測定装置
JP3977126B2 (ja) * 2002-04-12 2007-09-19 キヤノン株式会社 変位情報検出装置
JP2004212243A (ja) * 2003-01-06 2004-07-29 Canon Inc 格子干渉型光学式エンコーダ

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017010042A (ja) * 2006-09-01 2017-01-12 株式会社ニコン 露光装置及び露光方法、並びにデバイス製造方法
KR101099387B1 (ko) 2009-10-23 2011-12-29 김영훈 중첩 보강된 광을 위한 균일 격자체 구조
JP2012098287A (ja) * 2010-11-03 2012-05-24 Dr Johannes Heidenhain Gmbh 光学式角度測定装置
JP2021193354A (ja) * 2020-06-08 2021-12-23 キヤノン株式会社 光学式エンコーダ及び制御装置
US11946780B2 (en) 2020-06-08 2024-04-02 Canon Kabushiki Kaisha Optical encoder and control apparatus
JP7475973B2 (ja) 2020-06-08 2024-04-30 キヤノン株式会社 光学式エンコーダ及び制御装置

Also Published As

Publication number Publication date
US7061624B2 (en) 2006-06-13
EP1435510A1 (en) 2004-07-07
US7259863B2 (en) 2007-08-21
US20040151508A1 (en) 2004-08-05
US20060203252A1 (en) 2006-09-14

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