JP2004207407A - Spin cleaner - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a spin cleaner having higher minutely cleaning ability. <P>SOLUTION: This spin cleaner is provided with a nozzle 1 which sprays a cleaning material upon an object 2 to be cleaned and a rotating body formed as a casing 3 and having a plurality of centrifugal vanes 4 at positions surrounding the object 2. This spin cleaner is improved in workability for removing dust and a coating film removed from the object 2, by producing a function of discharging splashes or mists 15 sprayed from the nozzle 1 and shaken off from the object 2 to the outside of the vanes 4 through the rotation of the vanes 4, and a function of preventing the regression of the discharged splashes or mists 15 to the inside of the vanes 4. Consequently, this spin cleaner, which removes the dust or coating film from the object 2 by spraying the cleaning material composed of a gas, liquid, or their mixture upon the object 2 while rotating the object 2 in the casing 3, can prevent the once removed splashes or mists 15 containing dust or coating film from adhering again to cleaned surfaces. <P>COPYRIGHT: (C)2004,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a spin cleaning device, and more particularly to a spin cleaning device for removing dust and a coating film from an object to be cleaned.
[0002]
[Prior art]
2. Description of the Related Art Conventionally, a spin cleaning device is generally configured as a device in which an object to be cleaned is loaded in a casing and the object to be cleaned is cleaned using a nozzle. Precision cleaning of silicon wafers, glass substrates, and photomask surfaces using such a spin cleaning apparatus has occupied an important position in the process of manufacturing semiconductor devices. In such a situation, a spin cleaning device has been put to practical use in order to remove dust and a coating film on a circuit pattern to be miniaturized.
[0003]
2. Description of the Related Art Conventionally, a practical spin cleaning device rotates an object to be cleaned in a casing, and removes dust and a coating film by flowing a chemical solution or pure water on a cleaning surface or rubbing with a scrubbing brush. In addition, the above removal is performed by spraying a high-pressure chemical.
[0004]
FIG. 7 shows an example of a spin cleaning machine currently in practical use. The spin washer of this conventional example is an apparatus for washing an object to be washed mounted in a casing 14. The air for this cleaning is supplied from above, and the pressure is reduced by using a pump or a blower on the lower exhaust side, thereby generating a down flow from above to below. The splashes and mist 15 shaken off from the cleaning object are discharged out of the casing by a downflow inside the casing.
[0005]
Patent Document 1 listed below is a first prior invention example similar to the present invention in the technical field.
[0006]
[Publication 1]
JP-A-07-037854, "Spin dryer"
[0007]
The prior invention example 1 uses a rotator composed of a flat plate and several vertical walls fixed vertically to the flat plate, and a sirocco fan for fixing a silicon wafer at the center and a sirocco fan for the sirocco fan. Disclosed is a spin dryer in which a column having an injection port for irradiating a dry gas onto a silicon wafer orifice vertically is provided.
[0008]
Since the spin dryer in the above-mentioned invention example 1 does not rotate the silicon wafer, there is no need to find the center of the moment of inertia of the silicon wafer at all. Therefore, the apparatus is simplified, and the silicon wafer is damaged by rotation, so that the apparatus and other silicon wafers are not damaged. In addition, by using multiple stages of spin dryers, the efficiency of cleaning and drying is improved, and the quality and cost of the silicon wafer can be reduced. In addition, due to the cleaning effect of liquid nitrogen or liquid hydrogen, fine particles of silicon oxide on the surface of the silicon wafer can be obtained. Etc. can be removed. For this reason, it is said that there is little stain remaining and the yield after the next step is reduced.
[0009]
[Problems to be solved by the invention]
However, in recent years, a process for cleaning using a higher high-speed liquid flow has appeared, and splashes and mist have been more strongly scattered in the casing. As a result, if the downflow is insufficient with respect to the generated droplets and mist, the droplets and mist shaken off from the object to be washed collide with the casing inner wall 14 before being discharged out of the casing and bounce off. Then, it again moves to the cleaning surface and causes a problem of re-adhering to the cleaning surface.
[0010]
An object of the present invention is to provide a spin cleaning device having higher precision cleaning capability. More specifically, it is an object of the present invention to provide a spin cleaning apparatus that prevents splashes and mist containing dust and coating once removed from adhering to a cleaning surface.
[0011]
[Means for Solving the Problems]
In order to achieve the above object, the object to be cleaned is rotated in a predetermined casing of the present invention, and a cleaning body made of a gas, a liquid, or a mixture thereof is sprayed on the object to be cleaned, so that dust and a coating film are removed from the object to be cleaned. In a spin cleaning apparatus for removing an object, a nozzle for injecting a cleaning object to an object to be cleaned and a rotating body having a plurality of centrifugal blades in a casing and at a position around the object to be cleaned are provided. A discharge function that discharges the splashes and mist shaken off from the cleaning object to the outside of the centrifugal wing by rotating the centrifugal wing, and a return prevention function that prevents the discharged droplets and mist from returning to the inside of the centrifugal wing. , And the practicability of removing dust and a coating film removed from the object to be cleaned is enhanced.
[0012]
Further, the centrifugal wing may be fixed on the rotating body at a predetermined angle from the rotation axis to the exhaust direction, and may be formed in a curved rake shape.
[0013]
In addition, the above-mentioned casing has an exhaust port in the direction of centrifugal force generated by the rotation of the centrifugal wing to produce droplets and mist, to enhance the practicability of the exhaust function, and by the suction force connected to the exhaust port, or by rotating the rotating body. By rotating and generating a rotational force of the rotating body, the centrifugal blade has one of an exhaust function, an intake force connected to an exhaust port, and a rotational driving force of the centrifugal blade connected to the rotating body. In this case, it is preferable to improve the execution performance of the discharge function.
[0014]
BEST MODE FOR CARRYING OUT THE INVENTION
Next, an embodiment of a spin cleaning apparatus according to the present invention will be described in detail with reference to the accompanying drawings. 1 to 6, there is shown an embodiment of the spin cleaning apparatus of the present invention. 1 is a cross-sectional configuration example of the spin cleaning device of the present embodiment, FIG. 2 is a perspective view of the appearance of a casing, FIG. 3 is a top view, and FIG. 4 is a perspective view showing a configuration example of a centrifugal impeller. FIGS. 5 and 6 are diagrams for explaining an operation example.
[0015]
In the spin cleaning apparatus according to the present embodiment, dust and a coating film are removed from a cleaning object by rotating the cleaning object in a casing and injecting a gas, a liquid, or a mixture thereof onto the object to be cleaned. In this removal operation, multiple centrifugal wings installed in the casing are rotated, and gas and liquid droplets including dust and coating film removed from the object to be washed are sucked into the inner wall of the casing, thereby removing the object from the object to be washed. Dust and coatings do not reattach to the wash. The details of the configuration of the spin cleaning device having this feature will be described in detail below.
[0016]
As shown in FIG. 1, a spin cleaning device according to the present embodiment includes a nozzle 1 for fluid ejection, a cleaning object 2, a casing 3, a centrifugal wing 4 for creating a suction wall, and a suction surface for sucking droplets and mist. 5. Centrifugal impeller rotating shaft 6 for rotating the centrifugal impeller, work table 8 and work table rotating shaft 7 for rotating the washing object, work table 8 for fixing the work holder 9, and fixing the washing object. , A rotary table 10 for fixing and rotating the centrifugal wing, and an exhaust port 11 for exhausting droplets and mist.
[0017]
The casing 3 in FIG. 1 has, for example, the appearance shown in FIG. The centrifugal impeller 4 shown in FIG. 1 has a plurality of centrifugal impellers 4 provided on a turntable 10 as shown in FIG. Further, FIG. 4 is an enlarged view of a portion A in FIG. 3, and shows a detailed configuration example of the centrifugal wing 4 that creates the suction wall. The centrifugal wing 4 is formed in a curved rake shape, is fixed on the rotary table 10 at a predetermined angle from the rotation axis to the exhaust direction.
[0018]
According to the arrangement of the centrifugal wings 4 arranged on the rotary table, it becomes possible to more efficiently collect air near the inside of the table and send it out of the table. Further, the linear space between the inside and outside of the table is configured to be narrower. This configuration improves the exhaust operation capability of splashes and mist from inside to outside, and prevents return of splashes and mist from outside to inside.
[0019]
5 and 6 show an operation example of the spin cleaning apparatus configured as described above. In these two figures, the distance h in FIG. 5 indicates the distance between the outer end of the cleaning object 2 and the suction surface 5 of the centrifugal impeller 4. FIG. 6 shows an example of the form of the pressure gradient 13 in the casing 3 during operation, with the distance h as the horizontal axis and the vertical axis as the static pressure. 5 and 6 showing these operation examples, a fluid is ejected from the nozzle 1 to the rotating cleaning object 2 to remove dust and a coating film from the cleaning object 2. The removed dust and the coating film are scattered in the casing 3 as splashes and mist 12. At this time, when the centrifugal wing 4 is rotated, the gas in the wing portion of the centrifugal wing 4 receives centrifugal force and is guided to the outside of the casing 3.
[0020]
When the removed dust and coating film are scattered in the casing 3 as splashes or mist 12, the gas in the wing portion of the centrifugal wing 4 is rotated, and the scattered splash or mist 12 subjected to the centrifugal force is removed from the casing. It is exhausted out of 3. As a result, a pressure gradient 13 is generated from the center of the casing to the suction surface 5. Since the droplets and mist 12 move toward the suction surface 5 and are sucked by the pressure gradient 13, they are exhausted without rebounding from the wall and re-adhering to the cleaning object 2. FIG. 6 shows an example of a pressure gradient formation mode.
[0021]
In the intake and exhaust of the exhaust operation described above, the rotary table 10 is rotated by the suction force by the external suction to the exhaust port 11 to form intake and exhaust. However, the intake and exhaust may be generated by directly driving the rotary table 10 and rotating the centrifugal impeller 4.
[0022]
In the above configuration, there is no barrier between the object to be cleaned 2 and the suction surface 5 with respect to the operation of discharging the removed dust and the mist 12 which is the coating film. Further, the centrifugal wings 4 are formed in a rake shape, which increases the suction capability by rotation and forms a suction wall. The suction wall prevents backflow of the droplets and the mist 12 once discharged to the outside by the centrifugal wing 4. As a result, it is possible to prevent the dust and the paint film colliding against the inner wall of the casing 3 from returning to the work table 8 side.
[0023]
The above embodiment is an example of a preferred embodiment of the present invention. However, the present invention is not limited to this, and various modifications can be made without departing from the scope of the present invention.
[0024]
【The invention's effect】
As is clear from the above description, the spin cleaning apparatus of the present invention includes a rotating body having a plurality of centrifugal blades at positions around the object to be cleaned, and is sprayed from the nozzle and shaken off from the object to be cleaned. It has a discharge function of discharging the droplets and mist to the outside of the centrifugal wing by rotation of the centrifugal wing, and a return preventing function of preventing the discharged droplets and mist from returning to the inside of the centrifugal wing. Thereby, the droplets and mist are not re-adhered to the object to be cleaned, so that the effect of removing foreign substances is excellent. Further, since the exhaust flow rate is large, the speed of the jet fluid can be increased, and more precise and powerful cleaning can be performed. Further, since the centrifugal wing enables strong exhaustion, it is not necessary to separately install an exhaust device such as a pump and a blower.
[Brief description of the drawings]
FIG. 1 is a diagram showing an embodiment of a spin cleaning apparatus of the present invention.
FIG. 2 is a perspective view showing an appearance of a casing.
FIG. 3 is a plan view showing a configuration example of a turntable.
4 is an enlarged view of a portion A in FIG. 3 and is a perspective view showing a structural example of a centrifugal wing.
FIG. 5 is a conceptual diagram for explaining the operation of the spin cleaning device.
FIG. 6 is a characteristic diagram showing an example of a static pressure distribution state in the spin cleaning device.
FIG. 7 is an explanatory diagram of a conventional device.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Nozzle 2 Object to be washed 3 Casing 4 Centrifugal impeller 5 Suction surface 6 Centrifugal impeller rotating shaft 7 Work table rotating shaft 8 Work table 9 Work holder 10 Rotating table 11 Exhaust port 12 Spray and mist 13 Pressure gradient 14 Casing inner wall 15 Spray and mist

Claims (6)

In a spin cleaning apparatus that rotates a cleaning object in a predetermined casing and ejects a cleaning body made of a gas, a liquid, or a mixture thereof to the cleaning object to remove dust and a coating film from the cleaning object,
A nozzle for injecting the cleaning body onto the object to be cleaned,
A rotating body having a plurality of centrifugal wings in the casing and at a position around the object to be cleaned,
A discharge function for discharging droplets and mist ejected from the nozzle and shaken off from the object to be washed, to the outside of the centrifugal wing by rotation of the centrifugal wing,
A return prevention function of preventing the discharged droplets and mist from returning to the inside of the centrifugal wing,
A spin cleaning apparatus, wherein the operability of removing the dust and the coating film removed from the object to be cleaned is enhanced. 2. The spin cleaning apparatus according to claim 1, wherein the centrifugal impeller is configured to be fixed on the rotating body at a predetermined angle from a rotation axis to an exhaust direction. 3. The spin cleaning apparatus according to claim 1, wherein the centrifugal wing is formed in a rake shape having a curved shape. The casing according to any one of claims 1 to 3, wherein the casing has an exhaust port in a direction of centrifugal force generated by the rotation of the centrifugal wing to the droplets and the mist, thereby enhancing the practicability of the discharge function. The spin cleaning device as described in the above. 5. The spin cleaning apparatus according to claim 4, wherein a rotating force of the rotating body is generated by suction force connected to the exhaust port or by rotating the rotating body. The execution of the discharge function is enhanced by forming any one of the exhaust function by the centrifugal wing, the suction force connected to the exhaust port, and the rotational driving force of the centrifugal wing connected to the rotating body. The spin cleaning apparatus according to any one of claims 1 to 5, wherein

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