JP2005046661A - Liquid-used cleaning/drying method and apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a liquid-used cleaning/drying apparatus in which the jet of a gas is made unnecessary. <P>SOLUTION: This liquid-used cleaning/drying apparatus is provided with a sirocco fan 3 which has the suction port 3a arranged upward and is turnably driven by a rotary shaft 6 connected to a driving motor 11, fixtures 13 arranged symmetrically with respect to the rotary shaft 6 of the fan 3 for holding a work in the internal sphere of the fan 3 and nozzles 14, 15 for jetting a cleaning liquid toward the work. The surface of the work is cleaned by exerting a strong stream of the cleaning liquid generated by the centrifugal force while the cleaning liquid is jetted. At the stage where the work of cleaning by the cleaning liquid is completed, the cleaning liquid remaining on the surface of the work is removed by the centrifugal force and the surface of the work is dried quickly by a strong air stream by the fan 3. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a liquid cleaning and drying technique for cleaning an electronic component and a material constituting the electronic component with a cleaning liquid such as pure water and drying after cleaning.
[0002]
[Prior art]
An apparatus for cleaning an electronic component or a material constituting the same with a liquid, for example, as shown in Patent Document 1, performs a liquid washing while rotating the object to be cleaned, and rotates the object to be cleaned at a high speed after the liquid washing to obtain a centrifugal force. Thus, the liquid is removed from the object to be cleaned, and then the gas is sprayed onto the object to be cleaned to reliably exclude the cleaning liquid from the object to be cleaned.
[Patent Document 1] Japanese Patent Application Laid-Open No. 7-37855
[Problems to be solved by the invention]
According to this, although the cleaning liquid can be easily removed, a high-pressure gas generator that does not contain at least dust and oil is required, which not only increases the cost, but also requires an extra member for reliably irradiating the object to be cleaned with gas. There is a problem that the structure becomes complicated.
The present invention has been made in view of such problems, and an object of the present invention is to provide a liquid cleaning and drying apparatus that does not require gas injection.
[0004]
[Means for Solving the Problems]
In order to solve such a problem, in the first aspect of the present invention, the work is held so that the rotational axis of the sirocco fan, which is rotationally driven by the driving means and is arranged with the suction port facing upward, is set as the symmetry point. And a step of spraying and cleaning the workpiece while rotating the sirocco fan, and a step of drying the workpiece by rotating the sirocco fan and stopping the spray of the cleaning solution.
According to a second aspect of the present invention, the sirocco fan is disposed with the suction port facing upward and connected to the driving means and is driven to rotate by the rotation shaft, and the workpiece is set so that the rotation axis of the sirocco fan is a symmetric point. Is fixed to the inside area of the sirocco fan, and a cleaning liquid spraying means for injecting a cleaning liquid onto the work is provided.
[0005]
[Action]
During irradiation of the cleaning liquid, a strong flow caused by centrifugal force is applied to clean the surface of the workpiece. At the stage where the irradiation of cleaning is completed, the surface cleaning liquid is removed by centrifugal force and dried rapidly by a strong air current from the fan.
In addition, since the workpiece is placed inside the sirocco fan, the cleaning fluid that is being washed will splatter in the direction in which the workpiece does not exist by striking the blade, and can be reliably prevented from bouncing back to the workpiece. Therefore, the dynamic balance can be maintained and the occurrence of vibration can be suppressed.
[0006]
BEST MODE FOR CARRYING OUT THE INVENTION
Therefore, details of the present invention will be described below based on the illustrated embodiment.
1 to 3 show an embodiment of the liquid cleaning and drying apparatus of the present invention. A sirocco fan is provided in a housing 2 having an opening 1 in an upper portion so that a suction port 3a is at the upper portion. 3 is arranged.
The sirocco fan 3 is attached to a substrate 5 supported on a base 4 provided on the housing 2 via a vibration isolator 4 a via a bearing 7 so that the rotating shaft 6 protrudes below the substrate 5. ing.
As is well known, the sirocco fan 3 is configured by fixing a plurality of blades 3c at equal intervals on the peripheral edge of the rotating disk 3b and disposing a fan casing 8 on the outer periphery thereof.
[0007]
The rotating shaft 6 is constituted by a pipe having a through-hole 6a in the central axis, the lower end of which is fixed to a pulley 9 and connected to a driving motor 11 via a belt 10, and the upper part is a blade from a substrate 5 to be cleaned. The rotating disk 3b is fixed to the protruding lower region so as to protrude to the extent that it is located in the region in the height direction of 3c.
[0008]
A workpiece mounting table 12 is fixed to the upper end of the rotating shaft 6 so that the through-hole 6a is opened to the atmosphere, and a fixture 13 that supports the workpiece in a state where the workpiece is floated upward by a predetermined distance on the surface of the workpiece mounting table 12 is rotated. At least three objects are provided substantially at the center. These fixtures 13 have the same height so as to hold the plate-shaped workpiece substantially parallel to the rotating disk 3b. Above and below the center of rotation of the sirocco fan 3, cleaning liquid spraying means, in this embodiment, jet nozzles 14 and 15 are arranged.
[0009]
A shutter 17 capable of adjusting the opening degree is disposed at the discharge port 16 of the fan casing 8, and a liquid reservoir 18 connected to the fan casing 8 is disposed outside the shutter 17.
[0010]
In this embodiment, when the work W, for example, a wafer is attached to the fixture 13 and the drive motor 11 is operated and pure water or the like is sprayed as cleaning liquid continuously or intermittently from the cleaning liquid jet nozzles 14 and 15, The cleaning liquid from the cleaning liquid jet nozzle 14 hits the upper surface of the wafer W, and the cleaning liquid from the lower cleaning liquid jet nozzle 15 hits the lower surface of the workpiece W through the through hole 6a.
[0011]
The cleaning liquid hitting the rotating workpiece W receives centrifugal force to flow down the surface of the wafer W at high speed to wash away dust and the like, and rides on the air flow sucked by the blade 3c to reach the outer blade 3c. .
[0012]
On the other hand, since the individual blades 3c constituting the sirocco fan 3 are arranged obliquely with respect to the radial direction as shown in FIG. 4, the cleaning liquid C hitting the blade 3b does not rebound in the central direction. Then, the air is sucked into the air flow flowing from the suction port 3 a and flows into the fan casing 8. In addition, by adjusting the opening degree of the shutter 17, the suction force of the blade 3c can be limited, and the centrifugal force and the air flow can be adjusted to the optimum state.
[0013]
In this way, the supply of the cleaning liquid is stopped when a predetermined time elapses, and is further rotated for a predetermined time while increasing the rotational speed of the fan as necessary. As a result, the droplets of the cleaning liquid remaining on the surface of the workpiece W are blown off by receiving a strong centrifugal force, and the air sucked from the opening 3a of the sirocco fan 3 and the through hole 6a of the rotating shaft 6 is sucked. Hits the front and back surfaces of the workpiece W to dry the liquid on the front and back sides.
[0014]
Since the workpiece W is arranged symmetrically about the center of rotation and the blade 3c having a larger inertia than the workpiece W is arranged on the outer periphery, the dynamic balance is taken as much as possible and vibration is possible. It can be suppressed as much as possible. Note that the environment in which the cleaning is performed is supplied with air from which dust or the like has been removed, so that it is not necessary to facilitate the use of a special gas for drying, and dust does not adhere again in the drying process.
[0015]
When the cleaning is completed, the drive motor 11 is stopped and the workpiece W is removed from the fixture 13.
[0016]
In the above-described embodiment, the fixing tool is arranged with the rotating shaft protruding above the rotating disk for fixing the blade. However, as shown in FIG. 5, the workpiece is located in a region facing the blade. Even if the fixing tool 13 ′ having a height (length) is directly provided on the rotating disk 3 b, the same effect is obtained.
[0017]
In the above-described embodiment, the nozzle 15 is disposed below the rotary shaft 6. However, as shown in FIG. 5, the tube connected to the nozzle 15 is extended through the rotary shaft 6 to just below the workpiece. Also good. Further, not only the nozzle but also a shower can be used as the cleaning liquid spraying means.
[0018]
Furthermore, in the above-described embodiment, the case where the cleaning liquid is sprayed onto both the front and back surfaces of the workpiece has been described. However, when the printed circuit board is to be cleaned, the spray nozzle is disposed only on one side, for example, the upper part. However, it is clear that the same effect is obtained.
Even a rectangular object such as a printed circuit board can be balanced as much as possible because the wing 3c having a large inertia exists on the peripheral side as described above.
[Brief description of the drawings]
FIGS. 1A and 1B are a top view showing an embodiment of the liquid cleaning and drying apparatus of the present invention and a cross-sectional view showing an enlarged main part, respectively.
FIG. 2 is a side view showing an embodiment of the liquid cleaning and drying apparatus of the present invention.
FIG. 3 is a side view showing an embodiment of the liquid cleaning and drying apparatus of the present invention.
FIG. 4 is a diagram schematically showing a state of scattering of cleaning liquid during cleaning.
FIG. 5 is a perspective view showing an enlarged main part of another embodiment of the liquid cleaning / drying apparatus of the present invention.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Opening 2 Housing | casing 3 Sirocco fan 3a Suction port 3c Wing | blade 6 Rotating shaft 6a Through-hole 8 Fan casing 13 Fixing tool 14 and 15 Nozzle 17 for washing | cleaning liquid which comprises washing | cleaning-liquid spraying means Shutter W Workpiece

Claims (4)

Cleaning is performed by spraying a cleaning liquid onto the workpiece while rotating the sirocco fan while holding the workpiece so that the rotation axis of the sirocco fan disposed with the suction port facing upward is driven by the drive means And a liquid cleaning and drying method comprising: a step of stopping the spray of the cleaning liquid and rotating the sirocco fan to dry the workpiece. A sirocco fan which is arranged with the suction port upward and is connected to a driving means and is driven to rotate by a rotating shaft, and a work is held in the inner region of the sirocco fan so that the rotating shaft of the sirocco fan is a symmetric point A liquid cleaning / drying apparatus comprising: a work fixing means; and a cleaning liquid spraying means for injecting a cleaning liquid onto the work. The liquid cleaning and drying apparatus according to claim 2, wherein the rotating shaft is configured as a hollow body, and includes a cleaning liquid spraying unit that sprays the cleaning liquid onto a lower surface of the work through the rotating shaft. The liquid cleaning / drying apparatus according to claim 2, wherein a shutter for adjusting an air flow rate is provided in a fan casing of the sirocco fan.

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