JP2004204265A5 - - Google Patents
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- Publication number
- JP2004204265A5 JP2004204265A5 JP2002372706A JP2002372706A JP2004204265A5 JP 2004204265 A5 JP2004204265 A5 JP 2004204265A5 JP 2002372706 A JP2002372706 A JP 2002372706A JP 2002372706 A JP2002372706 A JP 2002372706A JP 2004204265 A5 JP2004204265 A5 JP 2004204265A5
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- plating
- thin film
- oxide thin
- metal oxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims 17
- 238000007747 plating Methods 0.000 claims 14
- 239000010409 thin film Substances 0.000 claims 8
- 229910044991 metal oxide Inorganic materials 0.000 claims 7
- 150000004706 metal oxides Chemical class 0.000 claims 7
- 238000000034 method Methods 0.000 claims 5
- 239000010408 film Substances 0.000 claims 4
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 claims 2
- 239000005751 Copper oxide Substances 0.000 claims 2
- 238000004140 cleaning Methods 0.000 claims 2
- 229910000431 copper oxide Inorganic materials 0.000 claims 2
- 230000009257 reactivity Effects 0.000 claims 2
- 229910001316 Ag alloy Inorganic materials 0.000 claims 1
- 229910000531 Co alloy Inorganic materials 0.000 claims 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 1
- 229910000881 Cu alloy Inorganic materials 0.000 claims 1
- 229910000990 Ni alloy Inorganic materials 0.000 claims 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims 1
- 229910052802 copper Inorganic materials 0.000 claims 1
- 239000010949 copper Substances 0.000 claims 1
- 238000007772 electroless plating Methods 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- 229910052759 nickel Inorganic materials 0.000 claims 1
- 230000001590 oxidative effect Effects 0.000 claims 1
- 229910052709 silver Inorganic materials 0.000 claims 1
- 239000004332 silver Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002372706A JP3938356B2 (ja) | 2002-12-24 | 2002-12-24 | めっき方法及び基板処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002372706A JP3938356B2 (ja) | 2002-12-24 | 2002-12-24 | めっき方法及び基板処理装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2004204265A JP2004204265A (ja) | 2004-07-22 |
| JP2004204265A5 true JP2004204265A5 (https=) | 2005-08-25 |
| JP3938356B2 JP3938356B2 (ja) | 2007-06-27 |
Family
ID=32811236
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002372706A Expired - Fee Related JP3938356B2 (ja) | 2002-12-24 | 2002-12-24 | めっき方法及び基板処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3938356B2 (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006111938A (ja) * | 2004-10-15 | 2006-04-27 | Tokyo Electron Ltd | 無電解めっき装置 |
| CN103184440B (zh) * | 2011-12-27 | 2015-12-02 | 比亚迪股份有限公司 | 一种表面选择性金属化的制品及其制备方法 |
| JP6188063B2 (ja) * | 2012-07-11 | 2017-08-30 | 国立大学法人大阪大学 | 金属パターン形成用インク組成物及び金属パターン形成方法 |
-
2002
- 2002-12-24 JP JP2002372706A patent/JP3938356B2/ja not_active Expired - Fee Related
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