JP2004203505A - Tape conveyance device and conveyance method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To stably and smoothly convey a tape without causing slack. <P>SOLUTION: The tape conveyance device arranged at each end in the width direction of the tape 1 includes a roller 10 that rotates for conveying the tape 1. At least the periphery of the roller 10 is formed of an elastic material. The periphery elastically deforms during the conveyance of the tape 1, and hence the roller 10 can apply the tension outward in the width direction of the tape 1. <P>COPYRIGHT: (C)2004,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a tape transport device and a tape transport method.
[0002]
BACKGROUND OF THE INVENTION
2. Description of the Related Art In the manufacture of semiconductor devices, a long tape may be transported by a roller, and a predetermined process may be performed in a flow operation. The rollers are disposed at both ends in the width direction of the tape, and the tape is transported by rotating the rollers.
[0003]
According to the conventional transport method, tension could be applied to the tape in the length direction, but tension could not be applied in the width direction. In some cases, and the tape could not be transported smoothly.
[0004]
An object of the present invention is to realize stable and smooth transport without causing slack of the tape.
[0005]
[Means for Solving the Problems]
(1) The tape transport device according to the present invention includes a roller that is disposed at each end in the width direction of the tape and that transports the tape by rotating.
At least the outer peripheral portion of the roller is formed of an elastic body, and the outer peripheral portion is elastically deformed when the tape is transported, so that tension is applied outward in the width direction of the tape. According to the present invention, the outer peripheral portion of the roller is elastically deformed when the tape is conveyed, so that tension is applied in the outward direction in the width direction of the tape. Since the tape is tensioned not only in the length direction but also in the width direction, the tape does not loosen at the center in the width direction during the conveyance. Therefore, stable and smooth conveyance of the tape can be realized.
(2) In this tape transport device,
The outer peripheral portion of the roller may be shaped so as to be separated from the tape in an inward direction in the width direction of the tape. According to this, the outer periphery of the roller is pulled outward in the width direction of the tape by the rotation of the roller. Thus, tension is applied to the tape outward in the width direction.
(3) In this tape transport device,
An outer peripheral portion of the roller may be inclined so as to be separated from the tape in accordance with an inward direction in the width direction of the tape. According to this, the outer periphery of the roller is pulled outward in the width direction of the tape by the rotation of the roller. Thus, tension is applied to the tape outward in the width direction.
(4) In this tape transport device,
A circumferential groove may be formed in an outer peripheral portion of the roller inside a width direction of the tape. According to this, the outer periphery of the roller is pulled outward in the width direction of the tape by the rotation of the roller. Thus, tension is applied to the tape outward in the width direction.
(5) In this tape transport device,
A second roller disposed on an opposite side to the roller via the tape,
The tape and the second roller may sandwich and convey the tape.
(6) A method for transporting a tape according to the present invention is a method for transporting a tape along with rotation of a roller disposed at each end in a width direction of the tape,
At least the outer peripheral portion of the roller is formed of an elastic body,
By elastically deforming the outer peripheral portion, the tape is conveyed while applying tension in an outward direction in the width direction. According to the present invention, the outer peripheral portion of the roller is elastically deformed when the tape is conveyed, so that tension is applied in the outward direction in the width direction of the tape. Since tension can be applied to the tape not only in the length direction but also in the width direction, the tape does not loosen at the center in the width direction during the conveyance. Therefore, stable and smooth conveyance of the tape can be realized.
(7) In the method of transporting the tape,
The outer peripheral portion of the roller may be shaped so as to be separated from the tape in an inward direction in the width direction of the tape. According to this, the outer periphery of the roller is pulled outward in the width direction of the tape by the rotation of the roller. In this way, tension can be applied to the tape outward in the width direction.
(8) In this tape transport method,
An outer peripheral portion of the roller may be inclined so as to be separated from the tape in accordance with an inward direction in the width direction of the tape. According to this, the outer periphery of the roller is pulled outward in the width direction of the tape by the rotation of the roller. In this way, tension can be applied to the tape outward in the width direction.
(9) In the method of transporting the tape,
A circumferential groove may be formed in an outer peripheral portion of the roller inside a width direction of the tape. According to this, the outer periphery of the roller is pulled outward in the width direction of the tape by the rotation of the roller. In this way, tension can be applied to the tape outward in the width direction.
(10) In this tape transport method,
A second roller is disposed on the side opposite to the roller via the tape,
The tape and the second roller may sandwich and convey the tape.
[0006]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
[0007]
(First Embodiment)
FIGS. 1 to 4 are diagrams illustrating a tape transport device and a tape transport method according to a first embodiment of the present invention. FIG. 1 is a diagram illustrating a tape transport device and a transport method according to the present embodiment, in which a tape is transported in a front-to-back direction on a paper surface. The tape transport device according to the present embodiment is used for manufacturing a semiconductor device.
[0008]
In the manufacture of a semiconductor device, a long tape (substrate or film) 1 is transported from reel to reel, and a predetermined process is performed on a plurality of work target areas of the tape 1. In the example shown in FIG. 1, the work object 3 is adhered to the work object area of the tape 1, and the process of taking out the plurality of work objects 3 from the tape 1 using the transport device according to the present embodiment is described. Do. According to the reel-to-reel conveyance, a predetermined process can be performed by a flow operation, so that production efficiency can be improved and production cost can be reduced.
[0009]
The tape 1 may be a substrate for COF (Chip On Film) or a substrate for TAB (Tape Automated Bonding). In that case, a wiring pattern forming step may be performed on a work target area (a product area) of the tape 1 or an electronic component (for example, a semiconductor chip) mounting step may be performed. According to the transport device according to the present embodiment, since the roller 10 comes into contact with the tape 1 while avoiding the central portion in the width direction, it is possible to prevent the wiring pattern or the electronic component from being damaged.
[0010]
FIG. 2 is a diagram illustrating the entire tape transport device according to the present embodiment. FIG. 3 is a partially enlarged view of FIG. 1, and FIG. 4 is a view showing a part (roller) of the tape transport device according to the present embodiment. The tape transport device according to the present embodiment includes a roller 10. In the example shown in the present embodiment, the tape transport device further includes a second roller 20, a rail 22, a delivery roller (loader) 24, and a take-up roller (unloader) 26. The tape transport device may be a part of a semiconductor device manufacturing line.
[0011]
As shown in FIG. 2, the tape 1 is wound around a plurality of rollers (the roller 10, the second roller 20, the delivery roller 24, and the take-up roller 26), and the plurality of rollers rotate in a predetermined direction. Conveyed. The tape 1 is fed frame by frame at a constant pitch. The direction indicated by the arrow in FIG. 2 indicates the transport direction of the tape 1.
[0012]
As shown in FIG. 1, the roller 10 is arranged so as to avoid the center of the tape 1 in the width direction. Specifically, the roller 10 is disposed at an end of the tape 1 in the width direction. It is preferable that a pair of rollers 10 be disposed at both ends in the width direction of the tape 1. By doing so, tension can be simultaneously applied from both sides in the outward direction in the width direction of the tape 1 (from the center to the end).
[0013]
As shown in FIG. 4, the roller 10 has a rotating shaft 12 and a rotating plate 14 connected to the shaft 12. The roller 10 can be driven by transmitting power to the shaft 12. In the example shown in FIG. 1, the shaft portion 12 of the roller 10 extends in the outward direction, but may also extend inward separately from this, and the pair of rollers 10 are connected by one shaft portion 12. No problem.
[0014]
At least the outer peripheral portion of the roller 10 is formed of an elastic body. Specifically, at least the outer peripheral portion of the rotating plate 14 is formed of an elastic body. The entire rotating plate 14 may be formed of an elastic material, or only the outer peripheral portion of the rotating plate 14 except for a central portion (a connection portion with the shaft portion 12) may be formed of an elastic material. As the material of the elastic body, for example, a well-known rubber can be used, but the material is not limited thereto. The material of the elastic body may be determined according to the magnitude of the tension applied to the tape 1 in consideration of the radius, the rotation speed, the weight, and the like of the roller 10.
[0015]
As shown in FIG. 4, an outer peripheral portion of the roller 10 (specifically, of the rotating plate 14) is shaped so as to be separated from the tape 1 according to an inward direction in the width direction of the tape 1. By doing so, as shown in FIG. 3, the outer peripheral portion of the roller 10 is pulled outward in the width direction of the tape 1 by the rotation of the roller 10. Therefore, as shown in FIG. 1, tension is applied to the tape 1 in the outward direction in the width direction. For example, the rotating plate 14 of the roller 10 may have the inclined portion 16. In other words, the rotating plate 14 of the roller 10 has a truncated cone shape. The slope 16 may be a smooth surface. As a modification, the outer peripheral portion of the rotating plate 14 of the roller 10 may be stepped.
[0016]
As shown in FIG. 2, the second roller 20 is disposed on the side opposite to the roller 10 via the tape 1. The second roller 20 forms a pair with the roller 10 in the up-down direction, and transports the tape 1 together with the roller 10. That is, the second roller 20 is also disposed at the end of the tape 1 in the width direction. The second roller 20 has a rotating shaft and a rotating plate connected to the shaft, and a contact portion with the tape 1 is flat. The second roller 20 may be a driving roller, or may rotate as the roller 10 rotates. The rotating plate of the second roller 20 may be formed of, for example, an elastic body (such as rubber).
[0017]
As shown in FIG. 1, the rail 22 controls the position of the tape 1 in the width direction. The rail 22 is arranged on the widthwise side of the tape 1 and extends in the length direction of the tape 1. In the example shown in FIG. 1, the cross section of the rail 22 is L-shaped. The rail 22 can prevent the tape 1 from meandering in the width direction.
[0018]
The tape transport device according to the present embodiment is configured as described above, and a tape transport method will be described below. The semiconductor device may be manufactured by applying the tape conveying method.
[0019]
First, the tape 1 is set in the transport device. More specifically, one of the tapes 1 is set on the feeding roller 24 and the other is set on the winding roller 26. The tape 1 is sandwiched between the roller 10 and the second roller 20 between the sending and winding rollers 24 and 26. If the rails 22 are provided on both sides in the width direction of the tape 1, meandering in the width direction of the tape 1 can be prevented.
[0020]
As described above, the plurality of work objects 3 are bonded to the tape 1. The plurality of work objects 3 are arranged in a plurality of rows and a plurality of columns in the length direction and the width direction of the tape 1. The work object 3 may be, for example, a reinforcing member of a semiconductor device. The reinforcing member may be attached to the back surface side of the semiconductor device to protect a bonding portion between the semiconductor chip and the wiring. Alternatively, the reinforcing member may be attached to a terminal group of a plurality of wirings of the semiconductor device (or the wiring board) so as to increase the thickness as a connector. By applying the tape conveying method according to the present embodiment, a plurality of reinforcing members can be smoothly removed from the tape 1.
[0021]
As shown in FIG. 1, each of the rollers (for example, the feed roller 24, the take-up roller 26, the roller 10, and the second roller 20) is driven to convey the tape 1. The outer peripheral portion of the roller 10 is formed of an elastic body, and has a shape that is separated from the tape 1 according to an inward direction in the width direction of the tape 1. Thereby, as shown in FIG. 3, when the roller 10 is pressed in the direction of the tape 1, the outer peripheral portion of the roller 10 is pressed and bent outward in the width direction of the tape 1. Therefore, tension is applied in the direction indicated by the arrow in FIG. 1 (outward in the width direction of the tape), and the tape 1 can be conveyed without being slackened.
[0022]
Thus, while the tape 1 is being conveyed, each work object 3 is taken out by the tool 30 (for example, taken out by suction). Since the tape 1 is tensioned and flattened, the work object 3 can be reliably taken out.
[0023]
According to the present embodiment, when the tape 1 is conveyed, the outer peripheral portion of the roller 10 is elastically deformed, so that tension is applied in the outward direction in the width direction of the tape 1. Since tension is applied to the tape 1 not only in the length direction but also in the width direction, the tape 1 does not loosen at the center in the width direction during the conveyance. Therefore, stable and smooth conveyance of the tape 1 can be realized.
[0024]
(Second embodiment)
5 and 6 are views for explaining a tape transport device and a tape transport method according to a second embodiment of the present invention. In FIG. 5, the tape is transported in the front and back directions on the paper. FIG. 6 is a diagram showing a part (roller) of the tape transport device according to the present embodiment. In the present embodiment, the form of the roller is different from that described above. The roller 40 has a rotating shaft 42 and a rotating plate 44 connected to the shaft 42.
[0025]
A circumferential groove 46 is formed in an outer peripheral portion of the roller 40 (specifically, of the rotating plate 44). The circumferential groove 46 is formed inside the rotating plate 44 in the width direction of the tape 1. One or more circumferential grooves 46 may be provided. The depth of the circumferential groove 46 may be so small that it does not reach the center line (not shown) of the width of the rotating plate 44, or may be so deep as to exceed it. The deeper the circumferential groove 46, the more tension can be applied to the tape 1. The shape of the circumferential groove 46 may be a concave portion as shown in FIG. 6, or may be a V-shaped groove. In the example shown in FIG. 5, the contact portion of the roller 40 with the tape 1 is flat, but as a modified example, the roller 40 may be inclined, for example, as described in the first embodiment. Note that the contents described in the above embodiment can be applied to other structures.
[0026]
As shown in FIG. 5, when the roller 40 is driven, the roller 40 is pressed in the direction of the tape 1 and the circumferential groove 46 is crushed. Then, the outer peripheral portion of the roller 40 is pushed and bent outward in the width direction of the tape 1. Therefore, tension is applied to the tape 1 outward in the width direction, and the tape 1 can be conveyed without being slackened.
[0027]
This embodiment can also achieve the effects described in the first embodiment.
[0028]
The present invention is not limited to the embodiments described above, and various modifications are possible. For example, the invention includes configurations substantially the same as the configurations described in the embodiments (for example, a configuration having the same function, method, and result, or a configuration having the same object and result). Further, the invention includes a configuration in which a non-essential part of the configuration described in the embodiment is replaced. Further, the invention includes a configuration having the same operation and effect as the configuration described in the embodiment, or a configuration capable of achieving the same object. Further, the invention includes a configuration in which a known technique is added to the configuration described in the embodiment.
[Brief description of the drawings]
FIG. 1 is a diagram illustrating a tape transport device and a tape transport method according to a first embodiment of the present invention.
FIG. 2 is a diagram illustrating the entire tape transport device according to the first embodiment of the present invention.
FIG. 3 is a partially enlarged view of FIG. 1;
FIG. 4 is a diagram showing a part of the tape transport device according to the first embodiment of the present invention.
FIG. 5 is a diagram illustrating a tape transport device and a tape transport method according to a second embodiment of the present invention.
FIG. 6 is a diagram illustrating a part of a tape transport device according to a second embodiment of the present invention.
[Explanation of symbols]
1 tape, 10 rollers, 16 inclined section, 20 second roller 40 rollers, 46 circumferential groove

Claims (10)

A roller is disposed at each end in the width direction of the tape and includes a roller that conveys the tape by rotating.
At least an outer peripheral portion of the roller is formed of an elastic body, and the outer peripheral portion is elastically deformed when the tape is transported, so that a tension is applied outward in a width direction of the tape. The tape transport device according to claim 1,
An apparatus for transporting a tape, wherein an outer peripheral portion of the roller is shaped so as to be separated from the tape in an inward direction in a width direction of the tape. The tape conveying device according to claim 2,
An apparatus for transporting a tape, wherein an outer peripheral portion of the roller is inclined away from the tape in accordance with an inward direction in a width direction of the tape. The tape transport device according to any one of claims 1 to 3,
A tape transport device, wherein a circumferential groove is formed on the outer periphery of the roller in the width direction of the tape. The tape transport device according to any one of claims 1 to 4,
A second roller disposed on an opposite side to the roller via the tape,
A tape transport device that transports the tape by sandwiching the tape between the roller and the second roller. A method of transporting the tape along with the rotation of rollers arranged at each end in the width direction of the tape,
At least the outer peripheral portion of the roller is formed of an elastic body,
A method for transporting a tape, wherein the outer peripheral portion is elastically deformed to transport the tape while applying tension in an outward direction in a width direction. The method for conveying a tape according to claim 6,
A method of transporting a tape, wherein an outer peripheral portion of the roller is shaped so as to be separated from the tape according to an inward direction in a width direction of the tape. The method for transporting a tape according to claim 7,
A method of transporting a tape, wherein an outer peripheral portion of the roller is inclined so as to be separated from the tape according to an inward direction in a width direction of the tape. In the method for transporting a tape according to claim 7 or claim 8,
A method of transporting a tape, wherein a circumferential groove is formed inside a width direction of the tape on an outer peripheral portion of the roller. The method of transporting a tape according to any one of claims 7 to 9,
A second roller is disposed on the side opposite to the roller via the tape,
A method of transporting a tape in which the tape and the second roller sandwich and transport the tape.

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