JP2004193536A5 - - Google Patents

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Publication number
JP2004193536A5
JP2004193536A5 JP2003013058A JP2003013058A JP2004193536A5 JP 2004193536 A5 JP2004193536 A5 JP 2004193536A5 JP 2003013058 A JP2003013058 A JP 2003013058A JP 2003013058 A JP2003013058 A JP 2003013058A JP 2004193536 A5 JP2004193536 A5 JP 2004193536A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2003013058A
Other languages
Japanese (ja)
Other versions
JP4078989B2 (ja
JP2004193536A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2003013058A priority Critical patent/JP4078989B2/ja
Priority claimed from JP2003013058A external-priority patent/JP4078989B2/ja
Publication of JP2004193536A publication Critical patent/JP2004193536A/ja
Publication of JP2004193536A5 publication Critical patent/JP2004193536A5/ja
Application granted granted Critical
Publication of JP4078989B2 publication Critical patent/JP4078989B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2003013058A 2002-10-18 2003-01-22 プラズマアッシング方法 Expired - Fee Related JP4078989B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003013058A JP4078989B2 (ja) 2002-10-18 2003-01-22 プラズマアッシング方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002304782 2002-10-18
JP2003013058A JP4078989B2 (ja) 2002-10-18 2003-01-22 プラズマアッシング方法

Publications (3)

Publication Number Publication Date
JP2004193536A JP2004193536A (ja) 2004-07-08
JP2004193536A5 true JP2004193536A5 (enExample) 2006-02-09
JP4078989B2 JP4078989B2 (ja) 2008-04-23

Family

ID=32774442

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003013058A Expired - Fee Related JP4078989B2 (ja) 2002-10-18 2003-01-22 プラズマアッシング方法

Country Status (1)

Country Link
JP (1) JP4078989B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4815771B2 (ja) * 2004-09-01 2011-11-16 住友電気工業株式会社 電気部品の製造方法
WO2025197721A1 (ja) * 2024-03-22 2025-09-25 東京エレクトロン株式会社 基板処理方法及びプラズマ処理装置

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