JP2004193131A - チャネルプレート - Google Patents

チャネルプレート Download PDF

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Publication number
JP2004193131A
JP2004193131A JP2003412242A JP2003412242A JP2004193131A JP 2004193131 A JP2004193131 A JP 2004193131A JP 2003412242 A JP2003412242 A JP 2003412242A JP 2003412242 A JP2003412242 A JP 2003412242A JP 2004193131 A JP2004193131 A JP 2004193131A
Authority
JP
Japan
Prior art keywords
channel plate
channel
layers
fluid
switch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2003412242A
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English (en)
Japanese (ja)
Other versions
JP2004193131A5 (enExample
Inventor
Marvin Glenn Wong
グレン ウォング マービン
Paul Thomas Carson
トーマス カーソン ポール
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Agilent Technologies Inc
Original Assignee
Agilent Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agilent Technologies Inc filed Critical Agilent Technologies Inc
Publication of JP2004193131A publication Critical patent/JP2004193131A/ja
Publication of JP2004193131A5 publication Critical patent/JP2004193131A5/ja
Pending legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H29/00—Switches having at least one liquid contact
    • H01H29/28—Switches having at least one liquid contact with level of surface of contact liquid displaced by fluid pressure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0073—Solutions for avoiding the use of expensive silicon technologies in micromechanical switches
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H29/00—Switches having at least one liquid contact
    • H01H2029/008—Switches having at least one liquid contact using micromechanics, e.g. micromechanical liquid contact switches or [LIMMS]

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  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
JP2003412242A 2002-12-12 2003-12-10 チャネルプレート Pending JP2004193131A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/317,960 US6855898B2 (en) 2002-12-12 2002-12-12 Ceramic channel plate for a switch

Publications (2)

Publication Number Publication Date
JP2004193131A true JP2004193131A (ja) 2004-07-08
JP2004193131A5 JP2004193131A5 (enExample) 2007-01-25

Family

ID=32506255

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003412242A Pending JP2004193131A (ja) 2002-12-12 2003-12-10 チャネルプレート

Country Status (2)

Country Link
US (2) US6855898B2 (enExample)
JP (1) JP2004193131A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007026848A (ja) * 2005-07-15 2007-02-01 Shin Etsu Polymer Co Ltd キーパッドおよびその製造方法

Families Citing this family (4)

* Cited by examiner, † Cited by third party
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US7071432B2 (en) * 2003-04-14 2006-07-04 Agilent Technologies, Inc. Reduction of oxides in a fluid-based switch
US20060260919A1 (en) * 2005-05-17 2006-11-23 Marco Aimi Methods and apparatus for filling a microswitch with liquid metal

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007026848A (ja) * 2005-07-15 2007-02-01 Shin Etsu Polymer Co Ltd キーパッドおよびその製造方法

Also Published As

Publication number Publication date
US6924444B2 (en) 2005-08-02
US20050051412A1 (en) 2005-03-10
US6855898B2 (en) 2005-02-15
US20040112728A1 (en) 2004-06-17

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