JP2004176812A

JP2004176812A - Constant flow rate valve

Info

Publication number: JP2004176812A
Application number: JP2002343689A
Authority: JP
Inventors: Kenro Yoshino; 研郎吉野; Akihiro Tsuzuki; 昭博続
Original assignee: Asahi Organic Chemicals Industry Co Ltd
Current assignee: Asahi Yukizai Corp
Priority date: 2002-11-27
Filing date: 2002-11-27
Publication date: 2004-06-24
Anticipated expiration: 2022-11-27
Also published as: TW200521364A; JP4222821B2; TWI302970B

Abstract

<P>PROBLEM TO BE SOLVED: To provide a constant flow rate valve, capable of setting a flow rate after valve piping, eliminating metal elution or corrosion by chemicals, and closing the valve. <P>SOLUTION: Inside a chamber 6 in the body 1, a first diaphragm 8 having a valve member 7, a second diaphragm 9 and a third diaphragm 10 are provided, dividing the chamber 6 into a first pressurization chamber 11, a second valve chest 12, a first valve chest 13, and a second pressurization chamber 18. The first pressurization chamber 11 has a means to apply a certain inward force to the second diaphragm 9, the second pressurization chamber 18 has a means to apply a certain inward force to the third diaphragm 10, the first valve chest 13 communicates with an inflow passage 23, and the second valve chest 12 has a valve seat 27 corresponding to the valve member 7, allowing the control of the hydraulic pressure in a lower valve chest 14 of the second valve chest 12 through the vertical motion of the valve member 7. <P>COPYRIGHT: (C)2004,JPO

Description

【０００１】
【発明の属する技術分野】
本発明は、弁上流側および下流側の流体圧力が変動しても流量を一定にする定流量弁に関するものであり、さらに詳しくは発塵防止のために摺動部が無く、即応性に優れた定流量弁に関するものである。
【０００２】
【従来の技術】
従来の定流量弁は種々提案されているが、その一つとして特開平５−９９３５４に開示されているタイプのものがある。その構造は図８に示すように、流路１０１中に設けられた弁座１０２と、それに対向する弁体１０３を有するダイヤフラム１０４とでダイヤフラム室１０５を設け、またダイヤフラム１０４にバネ１０６を介して開弁方向の力を作用させ、さらに入口側流体をダイヤフラム室１０５に流入させるようダイヤフラム１０４に連絡路１０７を有している。
【０００３】
これらによって、入口側より流入した流体はダイヤフラム１０４を弁閉方向に加圧し、連絡路１０７で減圧されダイヤフラム室１０５に入る。ダイヤフラム室１０５に流入した流体は、ダイヤフラム１０４を弁開方向に加圧し、弁座１０２とダイヤフラム１０４の弁体１０３との間の流体制御部１０８を通るときさらに減圧されて出口側へと流出していく。
【０００４】
また、ダイヤフラム１０４に作用する弁閉方向の力と弁開方向の力の差は、ダイヤフラム１０４を弁開方向に付勢しているバネ１０６と釣りあった状態となっている。
【０００５】
そのため、入口側の流体圧力が増加するか、もしくは、出口側の流体圧力が減少すると、ダイヤフラム１０４に作用する弁閉方向の力が増加し流体制御部１０８の開口面積が減少しダイヤフラム室１０５の流体圧力を増加させる。これによって、ダイヤフラム１０４に作用する弁開方向の力も増加し、ダイヤフラム１０４に作用する弁閉方向と弁開方向の力の差は再度バネの１０６の力と釣り合うこととなる。
【０００６】
一方、入口側の流体圧力が減少するか、出口側の流体圧力が増加すると、流体制御部１０８の開口面積は増加するため、やはり、ダイヤフラム１０４に作用する弁閉方向と弁開方向の力の差はバネ１０６の力と釣り合うこととなる。
【０００７】
したがって、ダイヤフラム１０４に作用する入口側流体圧力とダイヤフラム室１０５の流体圧力の差は一定に保たれるため、連絡路１０７の前後の差圧が一定となり、流量を一定に保つことができる。
【０００８】
【特許文献１】
特開平５−９９３５４号公報（第５図）
【０００９】
【発明が解決しようとする課題】
しかしながら、バネ１０６の加重を分解することなく変更することができないため、連絡路１０７前後の差圧を変えることが出来ず、流量の設定をバルブ配管後に変更することが出来ない。
【００１０】
また、バネ１０６が接液しているため流体への金属の溶出や薬液による腐食が懸念される。
【００１１】
さらに、完全に弁閉することができないため流体を遮断するためには別途バルブを接続する必要がある。
【００１２】
本発明は以上のような従来技術の問題点に鑑みてなされたもので、バルブ配管後でも簡単に流量の設定変更が可能で、金属の溶出や薬液による腐食の心配が無い、弁閉可能な定流量弁を提供することを目的とする。
【００１３】
【課題を解決するための手段】
本発明の構成を図１にもとづいて説明すると、流体の入口流路２３、出口流路３０及び、入口流路２３及び出口流路３０が連通するチャンバ６とから形成された本体部１、弁体４３と第一ダイヤフラム部８を有する弁部材７、弁部材７の下部および上部に位置し第一ダイヤフラム部８より有効受圧面積が小さい第二ダイヤフラム部９および第三ダイヤフラム部１０を有し、弁部材７及び各ダイヤフラム部８，９，１０が各ダイヤフラム部の外周部を本体部１に固定されることによりチャンバ６内に取りつけられ、かつ前記各ダイヤフラム部によってチャンバ６を第一加圧室１１、第二弁室１２、第一弁室１３及び第二加圧室１８に区分し、第一加圧室１１は第二ダイヤフラム部９に対して常時内向きの一定の力を加える手段を有し、第一弁室１３は入口流路２３と連通し、第二弁室１２は、弁部材７の弁体４３に対応する弁座２７を有し、弁座２７に対して第一ダイヤフラム部８側に位置し、第一ダイヤフラム部８に設けられた連通孔４０にて第一弁室１３と連通している下部第二弁室１４と、第二ダイヤフラム部９側に位置し、前記出口流路３０と連通している上部第二弁室１５とに分かれて形成され、弁部材７の上下動により弁体４３と弁座２７との間の開口面積が変化して下部第二弁室１４の流体圧力が制御される流体制御部４６を有し、第二加圧室１８は、第三ダイヤフラム部１０に対して常時内向きの一定の力を加える手段を有することを第一の特徴としている。
【００１４】
また、一定の力を加える手段がバネ装置または加圧流体であることを第二の特徴としている。
【００１５】
さらにまた、第二ダイヤフラム部９に、第一加圧室１１に設けられた第四ダイヤフラム部５９を介して一定の力が加えられていることを第三の特徴としている（図７参照）。
【００１６】
【発明の実施の形態】
以下、本発明の実施態様について図面を参照して説明するが、本発明が本実施態様に限定されないことは言うまでもない。
【００１７】
図１は本発明の定流量弁の一実施態様を示す縦断面図である。図２は、図１に他の表示を追加した図である。図３は本体の一部の半割斜視図である。図４は本体の他の一部の半割斜視図である。図５は各ダイヤフラム部の半割斜視図である。図６は図１において上流側圧力が減少もしくは下流側圧力が増加した場合の状態を示す縦断面図である。図７は本発明の定流量弁の他の実施態様を示す縦断面図である。
【００１８】
図において１は本体部であり、内部に第一加圧室１１、第二弁室１２、第一弁室１３及び第二加圧室１８に区切られるチャンバ６と、流体が外部からチャンバ６へ流入するための入口流路２３及びチャンバ６から外部へと流出するための出口流路３０とを有し、上から本体Ｃ４、本体Ｂ３、本体Ａ２、本体Ｄ５に分かれており、これらを一体に組みつけて構成されている。
【００１９】
本体Ａ２は本体部１の内側に位置しＰＴＦＥ製であり、図３に示すように上部に平面円形状の段差部１９が設けられ、段差部１９の中央には段差部１９より小径の、下部第一弁室１６となる開孔部２０が、また、開孔部２０の下には開孔部２０の径より大径の平面円形状の下部段差部２１が連続して設けられている。本体Ａ２の上面部、すなわち段差部１９の周縁部には環状凹溝２２が設けられ、また、側面から本体Ａ２の開孔部２０に連通する入口流路２３が設けられている。
【００２０】
本体Ｂ３は本体Ａ２の上面に係合固定されＰＴＦＥ製であり、図４に示すように上部に平面円形状の段差部２４が設けられ、段差部２４の中央には段差部２４より小径の上部第二弁室１５となる開孔部２５が設けられている。また、開孔部２５の下には開孔部２５の径より小径の開口部２６と、本体Ａ２の段差部１９と同じ径の平面円形状の下部段差部２８が連続して設けられている。開口部２６の下端周囲は弁座２７となっている。本体Ｂ３の下面部すなわち下部段差部２８の周縁部には本体Ａ２の環状凹溝２２と相対する位置に環状凹溝２９が設けられ、また、本体Ａ２の入口流路２３と反対側に位置する本体Ｂ３の側面から開孔部２５に連通する出口流路３０が設けられている。
【００２１】
本体Ｃ４は本体Ｂ３の上部に嵌合固定されＰＶＤＦ製であり、上部中央にはボルト３１が螺合される雌ネジ部３２が設けられ、その下には第一加圧室１１となる開孔部３３（図２）が連続に設けられている。本体Ｃ４の側面にはそこから開孔部３３に連通する小径の呼吸孔３５（図２）が設けられ、また、下端面には本体Ｂ３の段差部２４に嵌合される環状突部３４が開孔部３３を中心にして設けられている。
【００２２】
本体Ｄ５は本体Ａ２の底部に嵌合固定されＰＶＤＦ製であり、中央部には上面に開口した、第二加圧室１８となる開孔部３６（図２）が設けられ、開孔部３６上面の周囲には、本体Ａ２の下部段差部２１に嵌合固定される環状突部３７が設けられている。また、本体Ｄ５の側面には、そこから開孔部３６に連通する小径の呼吸孔３８が設けられている。
【００２３】
以上説明した本体部１を構成する４つの本体Ａ，Ｂ，Ｃ，Ｄはボルト・ナット（図示せず）で挟持固定されている。
【００２４】
７はＰＴＦＥ性の弁部材であり、中央に鍔状に設けられた肉厚部３９と肉厚部３９を貫通して設けられた連通孔４０、肉厚部３９の外周面から径方向に延出して設けられた円形状の薄膜部４１及び薄膜部４１の外周縁部に上下に突出して設けられた環状リブ部４２を有する第一ダイヤフラム部８と、第一ダイヤフラム部８の上部中央に設けられ逆すり鉢状の弁体４３と、弁体４３の上部より上方に突出して設けられ、上端部が半球状に形成された上部ロッド４４及び肉厚部３９の下端面中央部より下方に突出して設けられ、下端部が半球状に形成された下部ロッド４５を有し、かつ、一体的に形成されている。第一ダイヤフラム部８の外周縁部に設けられた環状リブ部４２は本体Ａ２と本体Ｂ３に設けられた両環状凹溝２２，２９に嵌合され、本体Ａ２と本体Ｂ３に挟持固定されている。また、弁体４３の傾斜面と本体Ｂ３の開口部２６（図４）の下端面周縁部との間に形成される空間は流体制御部４６になっている。
【００２５】
９はＰＴＦＥ製の第二ダイヤフラム部であり、中央に円柱状の肉厚部４７と肉厚部４７の下端面から径方向に延出して設けられた円形状の薄膜部４８、及び薄膜部４８の外周縁部に設けられた環状シール部４９を有し、かつ一体的に形成されている。また、薄膜部４８の周縁部の環状シール部４９は本体Ｂ３の上部の段差部２４と、本体Ｃ４の環状突部３４とに挟持固定されている。
【００２６】
尚、第二ダイヤフラム部９の受圧面積は、第一ダイヤフラム部８のそれよりも小さく設ける必要がある。
【００２７】
１０はＰＴＦＥ製の第三ダイヤフラム部で、形状は第二ダイヤフラム部９と同一になっており、上下逆にして配置されている。肉厚部５０の上端面は弁部材７の下部ロッド４５と接触しており、また、薄膜部５１の周縁部の環状シール部５２は本体Ａ２の下部段差部２１と本体Ｄ５の環状突部３７とに挟持固定されている。
【００２８】
尚、第三ダイヤフラム部１０の受圧面積も上記と同様に第一ダイヤフラム部８のそれよりも小さく設ける必要がある。
【００２９】
５３は本体Ｃ４の開孔部３３内に配置され、第二ダイヤフラム部９の肉厚部４７に嵌合されているＰＶＤＦ製のバネ受けである。バネ受け５３は、本体Ｃ４の雌ネジ部３２に螺合されたボルト３１との間に配置されたバネ５４により、常に第二ダイヤフラム部９を内向き（図１では下方向）に加圧している。本実施態様では、バネ５４とバネ受け５３とで加圧手段が形成されているが、本体Ｃ４の開孔部３３に加圧空気などの流体を導入することによる手段でもかまわない。
【００３０】
５５および５６は本体Ｄ５の開孔部３６に配置されたＰＶＤＦ製のバネ受けとＳＵＳ製のバネである。両者は上記と同じ作用で第三ダイヤフラム部１０を内向き（図１では上向き）に加圧している。その他については上記と同様であるため説明は省略する。
【００３１】
以上説明した各構成により本体部１の内部に形成されたチャンバ６は上から、第二ダイヤフラム部９と本体Ｃ４の開孔部３３とから形成された第一加圧室１１、第一ダイヤフラム部８と本体Ｂ３の下部段差部２８との間に形成された下部第二弁室１４と第二ダイヤフラム部９と本体Ｂ３の開孔部２５とから形成された上部第二弁室１５との両者からなる第二弁室１２、第三ダイヤフラム部１０と本体Ａ２の開孔部２０とで形成された下部第一弁室１６と第一ダイヤフラム部８と本体Ａ２の段差部１９とで形成された上部第一弁室１７とからなる第一弁室１３、及び第三ダイヤフラム部１０と本体Ｄ５の開孔部３６とで形成された第二加圧室１８に区分されていることがわかる。
【００３２】
上記の構成からなる第一の実施態様の定流量弁の作動は次のとおりである。
【００３３】
本体Ａ２の入口流路２３より第一弁室１３に流入した流体は、弁部材７の連通孔４０を通ることで減圧され下部第二弁室１４に流入する。さらに、流体は、下部第二弁室１４から流体制御部４６を通り上記第二弁室１５に流入する際に流体制御部４６での圧力損失により再度減圧され出口流路３０から流出する。ここで、連通孔４０の直径は充分小さく設けてあるため、弁を流れる流量は連通孔４０前後の圧力差によって決まっている。
【００３４】
このとき、各ダイヤフラム部８，９，１０が流体から受ける力を見ると、第一ダイヤフラム部８は第一弁室１３と下部第二弁室１４内の流体圧力差により上方向の、第二ダイヤフラム部９は上部第二弁室１５の流体圧力により上方向の、第三ダイヤフラム部１０は第一弁室１３内の流体圧力により下方向の力を受けている。ここで、第一ダイヤフラム部８の受圧面積は、第二ダイヤフラム部９及び第三ダイヤフラム部１０の受圧面積よりも充分大きく設けてあるため、第二、第三ダイヤフラム部９，１０に働く力は、第一ダイヤフラム部８に働く力に比べてほとんど無視することができる。したがって、弁部材７が、流体から受ける力は、第一弁室１３と下部第二弁室１４内の流体圧力差による上方向の力となる。
【００３５】
また、弁部材７は、第一加圧室１１の加圧手段により下方へ付勢されており、同時に第二加圧室１８の加圧手段により上方へ付勢されている。第一加圧室１１の加圧手段の力を第二加圧室１８の加圧手段の力より大きく調整しておけば、弁部材７が各加圧手段から受ける合力は下方向の力となる。
【００３６】
したがって、弁部材７は、各加圧手段による下方向の合力と、第一弁室１３と下部第二弁室１４内の流体圧力差による上方向の力とが釣り合う位置に安定する。つまり、各加圧手段による合力と流体圧力差による力が釣り合うように、下部第二弁室１４の圧力が流体制御部４６の開口面積により自立的に調整される。
【００３７】
したがって、各加圧手段による下向きの合力に変化が無ければ、第一弁室１３と下部第二弁室１４内の流体圧力差は一定となり、連通孔４０の前後の差圧は一定に保たれる。よって、弁を流れる流量は常に一定に保たれる。
【００３８】
以上の作動により、本定流量弁前後の流体圧に変化があっても流量を一定に保つことができる。
【００３９】
また、本定流量弁は、弁部材７に働く各加圧手段の合力と、第一弁室１３と下部第二弁室１４との圧力差による力とが釣り合って作動するため、弁部材７に働く各加圧手段の合力を調整変更すれば、第一弁室１３と下部第二弁室１４との流体圧力差はそれに対応した値となる。したがって、連通孔４０前後の差圧を変更調整することができるため、バルブを分解することなく流量を変更調整することができる。
【００４０】
さらにまた、第一加圧室１１の加圧手段による力を第二加圧室１８の加圧手段による力より小さく調整すれば、弁部材７に働く合力は上方向のみとなり、弁部材７の弁体４３を本体Ｂ３の開口部２６の弁座２７に押圧するかたちとなり、流体を遮断することができる。すなわち、定流量弁は閉塞状態となる。
【００４１】
図７は本定流量弁の第二の実施態様を示す縦断面図である。本実施態様は加圧手段がバネに替わって圧縮空気による手段になっている。
【００４２】
本体Ａ２、本体Ｂ３、本体Ｄ５、弁部材７、第二ダイヤフラム部９、第三ダイヤフラム部１０、及び、第三ダイヤフラム部１０に対して加圧する手段構造は図１の定流量弁と同じであり、作動も同様であるため説明は省略する。
【００４３】
図において、５７は本体Ｂ３の上部に嵌合固定されている本体Ｅであり、中央に本体Ｅ５７の上下端面を貫通し上部で拡径した平面円形状のダイヤフラム室６０と、ダイヤフラム室６０と外部とを連通する呼吸孔６１、及び下端面に本体Ｂ３の段差部２４に嵌合される環状突部６２がダイヤフラム室６０を中心として設けられている。
【００４４】
５８は本体Ｅ５７の上部に位置する本体Ｆであり、下部に気室６３と、気室６３と上端面とを貫通して設けられ外部から気室６３へと圧縮空気などを導入するための給気孔６４とが設けられている。
【００４５】
５９は第四ダイヤフラム部であり、周縁部に外径が本体Ｅ５７のダイヤフラム室６０と略同径の円筒形リブ６５と、中央に円柱部６６、及び円筒形リブ６５の下端面内周と円柱部６６の上端面外周とをつないで設けられた膜部６７を有する。円筒形リブ６５は本体Ｅ５７のダイヤフラム室６０に嵌合固定されるとともに、本体Ｂ３と本体Ｅ５７の間で挟持固定され、円柱部６６はダイヤフラム室６０の中で上下動自在となっている。また、円柱部６６の下部は、第二ダイヤフラム９の肉厚部４７（図２）が嵌合されている。
【００４６】
上記構成より、第二ダイヤフラム部９と本体Ｅ５７のダイヤフラム室６０及び本体Ｆ５８の気室６３とから第一加圧室１１（図１）が形成されており、第四ダイヤフラム部５９上面が圧縮空気などの圧力を受けることにより第二ダイヤフラム部９は常に内向き（図６では下方向）に加圧されている。
【００４７】
作動については、第一実施態様と同じであるので説明は省略する。加圧手段に圧縮空気を使用する構成にすることにより、圧縮空気の圧力を調整変更することで第二ダイヤフラム部９を内向き（図６では下方向）に加圧する力を調整変更することができる。そのため、圧縮空気の圧力を電動空気圧式レギュレータ等で調整すれば遠隔操作にて流量の変更、遮断を行なうことができる。
【００４８】
【発明の効果】
以上の構成より設けられた本定流量弁は以下の優れた特徴を有する。
【００４９】
（１）第一加圧室の加圧手段による内向きの力を変更することで流量を変更することができるため、バルブを分解することなく流量を変更できる。
【００５０】
（２）バネ等の金属の接液がないため金属の溶出による流体の汚染を防ぐことができる。
【００５１】
（３）第一加圧室の加圧手段による内向きの力を、第二加圧室の加圧手段による内向きの力より小さく調整すると流体を遮断することができるため、別途流体遮断用のバルブを接続する必要がない。
【００５２】
（４）第一加圧室の加圧手段を圧縮空気によるものにすれば、電動空気圧式レギュレータ等を使って遠隔操作にて流量の変更、遮断を行うことができる。
【図面の簡単な説明】
【図１】本発明の定流量弁の一実施態様を示す縦断面図である。
【図２】図１に他の表示を追加した図である。
【図３】図１の本体の一部の半割斜視図である。
【図４】図１の本体の他の一部の半割斜視図である。
【図５】各ダイヤフラム部の半割斜視図である。
【図６】図１において上流側圧力が減少もしくは下流側圧力が増加した場合の状態を示す縦断面図である。
【図７】本発明の定流量弁の他の実施態様を示す縦断面図である。
【図８】従来の定流量弁の縦断面図である。
【符号の説明】
１…本体部
２…本体Ａ
３…本体Ｂ
４…本体Ｃ
５…本体Ｄ
６…チャンバ
７…弁部材
８…第一ダイヤフラム部
９…第二ダイヤフラム部
１０…第三ダイヤフラム部
１１…第一加圧室
１２…第二弁室
１３…第一弁室
１４…下部第二弁室
１５…上部第二弁室
１６…下部第一弁室
１７…上部第一弁室
１８…第二加圧室
１９…段差部
２０…開孔部
２１…下部段差部
２２…環状凹溝
２３…入口流路
２４…段差部
２５…開孔部
２６…開口部
２７…弁座
２８…下部段差部
２９…環状凹溝
３０…出口流路
３１…ボルト
３２…雌ネジ部
３３…開孔部
３４…環状突部
３５…呼吸孔
３６…開孔部
３７…環状突部
３８…呼吸孔
３９…肉厚部
４０…連通孔
４１…薄膜部
４２…環状リブ部
４３…弁体
４４…上部ロッド
４５…下部ロッド
４６…流体制御部
４７…肉厚部
４８…薄膜部
４９…環状シール部
５０…肉厚部
５１…薄膜部
５２…環状シール部
５３…バネ受け
５４…バネ
５５…バネ受け
５６…バネ
５７…本体Ｅ
５８…本体Ｆ
５９…第四ダイヤフラム部
６０…ダイヤフラム室
６１…呼吸孔
６２…環状突部
６３…気室
６４…給気孔
６５…円筒形リブ
６６…円柱部
６７…膜部[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a constant flow valve that keeps the flow rate constant even when the fluid pressure on the upstream and downstream sides of the valve fluctuates. More specifically, the present invention has no sliding part to prevent dust generation and has excellent responsiveness. It relates to a constant flow valve.
[0002]
[Prior art]
Various conventional constant flow valves have been proposed, and one of them is the type disclosed in Japanese Patent Laid-Open No. 5-99354. As shown in FIG. 8, a diaphragm chamber 105 is provided by a valve seat 102 provided in a flow path 101 and a diaphragm 104 having a valve body 103 opposed thereto, and the diaphragm 104 is connected via a spring 106. A communication path 107 is provided in the diaphragm 104 so as to apply a force in the valve opening direction and to allow the inlet side fluid to flow into the diaphragm chamber 105.
[0003]
As a result, the fluid flowing in from the inlet side pressurizes the diaphragm 104 in the valve closing direction, is depressurized by the communication path 107 and enters the diaphragm chamber 105. The fluid flowing into the diaphragm chamber 105 pressurizes the diaphragm 104 in the valve opening direction, and is further reduced in pressure when passing through the fluid control unit 108 between the valve seat 102 and the valve body 103 of the diaphragm 104 and flows out to the outlet side. To go.
[0004]
Further, the difference between the force in the valve closing direction and the force in the valve opening direction acting on the diaphragm 104 is balanced with the spring 106 that urges the diaphragm 104 in the valve opening direction.
[0005]
Therefore, when the fluid pressure on the inlet side increases or the fluid pressure on the outlet side decreases, the force in the valve closing direction acting on the diaphragm 104 increases, the opening area of the fluid control unit 108 decreases, and the diaphragm chamber 105 Increase fluid pressure. As a result, the force in the valve opening direction acting on the diaphragm 104 also increases, and the difference between the force in the valve closing direction and the valve opening direction acting on the diaphragm 104 is balanced with the force of the spring 106 again.
[0006]
On the other hand, when the fluid pressure on the inlet side decreases or the fluid pressure on the outlet side increases, the opening area of the fluid control unit 108 increases. Therefore, the force in the valve closing direction and the valve opening direction acting on the diaphragm 104 is also increased. The difference is balanced with the force of the spring 106.
[0007]
Therefore, since the difference between the inlet side fluid pressure acting on the diaphragm 104 and the fluid pressure in the diaphragm chamber 105 is kept constant, the differential pressure before and after the communication path 107 becomes constant, and the flow rate can be kept constant.
[0008]
[Patent Document 1]
JP-A-5-99354 (FIG. 5)
[0009]
[Problems to be solved by the invention]
However, since the weight of the spring 106 cannot be changed without disassembling, the differential pressure before and after the communication path 107 cannot be changed, and the flow rate setting cannot be changed after the valve piping.
[0010]
In addition, since the spring 106 is in contact with the liquid, there is a concern about metal elution into the fluid and corrosion due to the chemical solution.
[0011]
Furthermore, since the valve cannot be completely closed, it is necessary to connect a separate valve in order to shut off the fluid.
[0012]
The present invention has been made in view of the above-described problems of the prior art. The flow rate can be easily changed even after valve piping, and there is no fear of metal elution or corrosion due to chemicals, and the valve can be closed. The object is to provide a constant flow valve.
[0013]
[Means for Solving the Problems]
The configuration of the present invention will be described with reference to FIG. 1. A main body 1, a valve formed from a fluid inlet channel 23, an outlet channel 30, and a chamber 6 in which the inlet channel 23 and the outlet channel 30 communicate with each other. A valve member 7 having a body 43 and a first diaphragm portion 8, a second diaphragm portion 9 and a third diaphragm portion 10 which are located below and above the valve member 7 and have an effective pressure receiving area smaller than that of the first diaphragm portion 8, The valve member 7 and the diaphragm portions 8, 9, and 10 are mounted in the chamber 6 by fixing the outer peripheral portion of each diaphragm portion to the main body portion 1, and the chamber 6 is connected to the first pressurizing chamber by the respective diaphragm portions. 11, a second valve chamber 12, a first valve chamber 13, and a second pressurizing chamber 18, and the first pressurizing chamber 11 has means for constantly applying a constant inward force to the second diaphragm portion 9. Has first valve chamber 3 communicates with the inlet flow path 23, the second valve chamber 12 has a valve seat 27 corresponding to the valve body 43 of the valve member 7, and is located on the first diaphragm portion 8 side with respect to the valve seat 27, A lower second valve chamber 14 communicating with the first valve chamber 13 through a communication hole 40 provided in the first diaphragm portion 8, and located on the second diaphragm portion 9 side, communicated with the outlet flow path 30. The upper second valve chamber 15 is formed separately, and the opening area between the valve body 43 and the valve seat 27 is changed by the vertical movement of the valve member 7 to control the fluid pressure in the lower second valve chamber 14. The first feature is that the second pressurizing chamber 18 has means for applying a constant inward force to the third diaphragm portion 10 at all times.
[0014]
The second feature is that the means for applying a constant force is a spring device or a pressurized fluid.
[0015]
Furthermore, a third feature is that a constant force is applied to the second diaphragm portion 9 via a fourth diaphragm portion 59 provided in the first pressurizing chamber 11 (see FIG. 7).
[0016]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the drawings. However, it goes without saying that the present invention is not limited to the embodiments.
[0017]
FIG. 1 is a longitudinal sectional view showing an embodiment of the constant flow valve of the present invention. FIG. 2 is a diagram in which another display is added to FIG. FIG. 3 is a half perspective view of a part of the main body. FIG. 4 is a half perspective view of another part of the main body. FIG. 5 is a half perspective view of each diaphragm portion. FIG. 6 is a longitudinal sectional view showing a state where the upstream pressure is decreased or the downstream pressure is increased in FIG. FIG. 7 is a longitudinal sectional view showing another embodiment of the constant flow valve of the present invention.
[0018]
In the figure, reference numeral 1 denotes a main body, and a chamber 6 is divided into a first pressurizing chamber 11, a second valve chamber 12, a first valve chamber 13, and a second pressurizing chamber 18 inside, and fluid flows from the outside to the chamber 6. It has an inlet channel 23 for flowing in and an outlet channel 30 for flowing out from the chamber 6 to the outside, and is divided into a main body C4, a main body B3, a main body A2, and a main body D5 from above. It is assembled and configured.
[0019]
The main body A2 is located on the inner side of the main body 1 and is made of PTFE. As shown in FIG. 3, a flat circular step 19 is provided on the upper portion, and a lower portion having a smaller diameter than the step 19 at the center of the step 19 An opening 20 serving as the first valve chamber 16 is provided continuously below the opening 20 and a planar circular lower step 21 having a diameter larger than the diameter of the opening 20 is provided continuously. An annular groove 22 is provided on the upper surface of the main body A2, that is, the peripheral edge of the step portion 19, and an inlet channel 23 communicating with the opening 20 of the main body A2 from the side surface is provided.
[0020]
The main body B3 is engaged and fixed to the upper surface of the main body A2 and is made of PTFE. As shown in FIG. 4, a flat circular step portion 24 is provided on the upper portion, and an upper portion having a smaller diameter than the step portion 24 is provided at the center of the step portion 24. An opening 25 serving as the second valve chamber 15 is provided. Further, an opening 26 having a diameter smaller than the diameter of the opening 25 and a planar circular lower step 28 having the same diameter as the step 19 of the main body A2 are continuously provided below the opening 25. . A valve seat 27 is formed around the lower end of the opening 26. An annular groove 29 is provided at a position opposite to the annular groove 22 of the main body A2 on the lower surface portion of the main body B3, that is, the peripheral edge portion of the lower step portion 28, and is positioned on the opposite side of the main body A2 from the inlet channel 23. An outlet channel 30 communicating with the opening 25 from the side surface of the main body B3 is provided.
[0021]
The main body C4 is fitted and fixed to the upper part of the main body B3 and is made of PVDF. A female screw part 32 into which the bolt 31 is screwed is provided in the center of the upper part, and an opening serving as the first pressurizing chamber 11 is provided therebelow. The part 33 (FIG. 2) is provided continuously. A small-diameter breathing hole 35 (FIG. 2) communicating with the opening 33 is provided on the side surface of the main body C4, and an annular protrusion 34 fitted to the stepped portion 24 of the main body B3 is provided on the lower end surface. The opening portion 33 is provided as a center.
[0022]
The main body D5 is fitted and fixed to the bottom portion of the main body A2 and is made of PVDF. The central portion is provided with an opening portion 36 (FIG. 2) that opens to the upper surface and becomes the second pressurizing chamber 18. Around the upper surface, an annular protrusion 37 that is fitted and fixed to the lower step portion 21 of the main body A2 is provided. A small-diameter breathing hole 38 communicating with the opening 36 is provided on the side surface of the main body D5.
[0023]
The four main bodies A, B, C and D constituting the main body 1 described above are clamped and fixed by bolts and nuts (not shown).
[0024]
Reference numeral 7 denotes a PTFE valve member, which extends in the radial direction from the thick portion 39 provided in the center in a bowl shape, the communication hole 40 provided through the thick portion 39, and the outer peripheral surface of the thick portion 39. A first thin film portion 8 having a circular thin film portion 41 provided and an annular rib portion 42 provided so as to protrude vertically on the outer peripheral edge portion of the thin film portion 41 and an upper center of the first diaphragm portion 8 are provided. An inverted mortar-shaped valve body 43 and an upper rod 44 that is provided above the upper part of the valve body 43 and projecting upward from the upper part of the hemisphere, and projecting downward from the center part of the lower end surface of the thick part 39. The lower rod 45 is provided and the lower end portion is formed in a hemispherical shape, and is integrally formed. An annular rib portion 42 provided at the outer peripheral edge of the first diaphragm portion 8 is fitted into both annular concave grooves 22 and 29 provided in the main body A2 and the main body B3, and is sandwiched and fixed between the main body A2 and the main body B3. . In addition, a space formed between the inclined surface of the valve body 43 and the peripheral edge portion of the lower end surface of the opening 26 (FIG. 4) of the main body B3 is a fluid control unit 46.
[0025]
Reference numeral 9 denotes a PTFE second diaphragm portion, which includes a cylindrical thick portion 47 at the center, a circular thin film portion 48 provided radially extending from the lower end surface of the thick portion 47, and the thin film portion 48. It has the annular seal part 49 provided in the outer peripheral edge part, and is formed integrally. The annular seal portion 49 at the peripheral edge of the thin film portion 48 is sandwiched and fixed between the stepped portion 24 at the top of the main body B3 and the annular protrusion 34 of the main body C4.
[0026]
The pressure receiving area of the second diaphragm portion 9 needs to be smaller than that of the first diaphragm portion 8.
[0027]
Reference numeral 10 denotes a third diaphragm portion made of PTFE, which has the same shape as the second diaphragm portion 9 and is arranged upside down. The upper end surface of the thick portion 50 is in contact with the lower rod 45 of the valve member 7, and the annular seal portion 52 at the peripheral edge of the thin film portion 51 is the lower step portion 21 of the main body A2 and the annular protrusion 37 of the main body D5. It is clamped and fixed.
[0028]
In addition, it is necessary to provide the pressure receiving area of the 3rd diaphragm part 10 smaller than that of the 1st diaphragm part 8 similarly to the above.
[0029]
Reference numeral 53 denotes a PVDF spring receiver that is disposed in the opening 33 of the main body C4 and is fitted to the thick portion 47 of the second diaphragm 9. The spring receiver 53 always pressurizes the second diaphragm portion 9 inward (downward in FIG. 1) by a spring 54 disposed between the bolt 31 screwed into the female screw portion 32 of the main body C4. Yes. In this embodiment, the pressurizing means is formed by the spring 54 and the spring receiver 53, but means by introducing a fluid such as pressurized air into the opening 33 of the main body C4 may be used.
[0030]
Reference numerals 55 and 56 denote a PVDF spring receiver and a SUS spring arranged in the opening 36 of the main body D5. Both press the third diaphragm portion 10 inwardly (upward in FIG. 1) by the same action as described above. Others are the same as described above, and the description is omitted.
[0031]
From the top, the chamber 6 formed in the main body portion 1 by the above-described configuration is formed from the first pressure chamber 11 and the first diaphragm portion formed by the second diaphragm portion 9 and the opening portion 33 of the main body C4. 8 and the lower second valve chamber 14 formed between the lower step portion 28 of the main body B3, the second diaphragm portion 9, and the upper second valve chamber 15 formed from the opening portion 25 of the main body B3. Formed of the second valve chamber 12, the third diaphragm portion 10 and the lower first valve chamber 16 formed by the opening portion 20 of the main body A2, the first diaphragm portion 8 and the step portion 19 of the main body A2. It turns out that it is divided into the 1st valve chamber 13 which consists of the upper 1st valve chamber 17, and the 2nd pressurization chamber 18 formed of the 3rd diaphragm part 10 and the opening part 36 of the main body D5.
[0032]
The operation of the constant flow valve of the first embodiment configured as described above is as follows.
[0033]
The fluid that has flowed into the first valve chamber 13 from the inlet channel 23 of the main body A2 is reduced in pressure by passing through the communication hole 40 of the valve member 7 and flows into the lower second valve chamber 14. Furthermore, when the fluid flows from the lower second valve chamber 14 through the fluid control unit 46 into the second valve chamber 15, the fluid is decompressed again by the pressure loss in the fluid control unit 46 and flows out from the outlet channel 30. Here, since the diameter of the communication hole 40 is sufficiently small, the flow rate flowing through the valve is determined by the pressure difference before and after the communication hole 40.
[0034]
At this time, when the force that each diaphragm portion 8, 9, 10 receives from the fluid is seen, the first diaphragm portion 8 is moved upward in the second direction due to the fluid pressure difference between the first valve chamber 13 and the lower second valve chamber 14. The diaphragm portion 9 receives an upward force due to the fluid pressure in the upper second valve chamber 15, and the third diaphragm portion 10 receives a downward force due to the fluid pressure in the first valve chamber 13. Here, since the pressure receiving area of the first diaphragm portion 8 is sufficiently larger than the pressure receiving areas of the second diaphragm portion 9 and the third diaphragm portion 10, the force acting on the second and third diaphragm portions 9, 10 is The force acting on the first diaphragm portion 8 can be almost ignored. Therefore, the force that the valve member 7 receives from the fluid is an upward force due to the fluid pressure difference in the first valve chamber 13 and the lower second valve chamber 14.
[0035]
Further, the valve member 7 is biased downward by the pressurizing means of the first pressurizing chamber 11 and simultaneously biased upward by the pressurizing means of the second pressurizing chamber 18. If the force of the pressurizing means in the first pressurizing chamber 11 is adjusted to be larger than the force of the pressurizing means in the second pressurizing chamber 18, the resultant force that the valve member 7 receives from each pressurizing means is a downward force. Become.
[0036]
Therefore, the valve member 7 is stabilized at a position where the downward resultant force by each pressurizing means and the upward force due to the fluid pressure difference in the first valve chamber 13 and the lower second valve chamber 14 are balanced. That is, the pressure of the lower second valve chamber 14 is independently adjusted by the opening area of the fluid control unit 46 so that the resultant force of each pressurizing means and the force of the fluid pressure difference are balanced.
[0037]
Therefore, if there is no change in the downward resultant force by each pressurizing means, the fluid pressure difference in the first valve chamber 13 and the lower second valve chamber 14 becomes constant, and the differential pressure before and after the communication hole 40 is kept constant. It is. Thus, the flow rate through the valve is always kept constant.
[0038]
With the above operation, the flow rate can be kept constant even if the fluid pressure before and after the constant flow valve changes.
[0039]
Further, the constant flow valve operates by balancing the resultant force of each pressurizing means acting on the valve member 7 and the force due to the pressure difference between the first valve chamber 13 and the lower second valve chamber 14. If the resultant force of each pressurizing means acting on is adjusted and changed, the fluid pressure difference between the first valve chamber 13 and the lower second valve chamber 14 becomes a value corresponding thereto. Therefore, since the differential pressure across the communication hole 40 can be changed and adjusted, the flow rate can be changed and adjusted without disassembling the valve.
[0040]
Furthermore, if the force by the pressurizing means in the first pressurizing chamber 11 is adjusted to be smaller than the force by the pressurizing means in the second pressurizing chamber 18, the resultant force acting on the valve member 7 becomes only upward, The valve body 43 is pressed against the valve seat 27 of the opening 26 of the main body B3, and the fluid can be shut off. That is, the constant flow valve is closed.
[0041]
FIG. 7 is a longitudinal sectional view showing a second embodiment of the constant flow valve. In this embodiment, the pressurizing means is a means using compressed air instead of the spring.
[0042]
The means structure for pressurizing the main body A2, the main body B3, the main body D5, the valve member 7, the second diaphragm portion 9, the third diaphragm portion 10 and the third diaphragm portion 10 is the same as the constant flow valve of FIG. Since the operation is the same, the description is omitted.
[0043]
In the figure, reference numeral 57 denotes a main body E which is fitted and fixed to the upper part of the main body B3. A flat circular diaphragm chamber 60 which penetrates the upper and lower end surfaces of the main body E57 in the center and expands in diameter at the upper part, and the diaphragm chamber 60 and the outside And an annular protrusion 62 fitted to the stepped portion 24 of the main body B3 on the lower end surface of the diaphragm chamber 60.
[0044]
58 is a main body F located at the upper part of the main body E57. The main body F is provided in the lower part through the air chamber 63, the air chamber 63 and the upper end surface, and is used for introducing compressed air or the like from the outside into the air chamber 63. A pore 64 is provided.
[0045]
Reference numeral 59 denotes a fourth diaphragm portion, which has a cylindrical rib 65 having an outer diameter substantially the same as that of the diaphragm chamber 60 of the main body E57 at the peripheral portion, a column portion 66 at the center, and an inner periphery of the lower end surface of the cylindrical rib 65 and a column. The film portion 67 is provided so as to connect to the outer periphery of the upper end surface of the portion 66. The cylindrical rib 65 is fitted and fixed to the diaphragm chamber 60 of the main body E57, and is sandwiched and fixed between the main body B3 and the main body E57, and the columnar portion 66 is movable up and down in the diaphragm chamber 60. Further, the thick part 47 (FIG. 2) of the second diaphragm 9 is fitted to the lower part of the cylindrical part 66.
[0046]
With the above configuration, the first pressurizing chamber 11 (FIG. 1) is formed from the second diaphragm portion 9, the diaphragm chamber 60 of the main body E57, and the air chamber 63 of the main body F58, and the upper surface of the fourth diaphragm portion 59 is compressed air. The second diaphragm portion 9 is always pressurized inward (downward in FIG. 6) by receiving a pressure such as.
[0047]
Since the operation is the same as in the first embodiment, a description thereof will be omitted. By adopting a configuration in which compressed air is used for the pressurizing means, the force for pressing the second diaphragm portion 9 inward (downward in FIG. 6) can be adjusted and changed by adjusting and changing the pressure of the compressed air. it can. Therefore, if the pressure of compressed air is adjusted with an electropneumatic regulator or the like, the flow rate can be changed or shut off by remote control.
[0048]
【The invention's effect】
The constant flow valve provided from the above configuration has the following excellent features.
[0049]
(1) Since the flow rate can be changed by changing the inward force by the pressurizing means of the first pressurizing chamber, the flow rate can be changed without disassembling the valve.
[0050]
(2) Since there is no wetted metal such as a spring, it is possible to prevent fluid contamination due to metal elution.
[0051]
(3) Since the fluid can be shut off by adjusting the inward force by the pressurizing means in the first pressurizing chamber to be smaller than the inward force by the pressurizing means in the second pressurizing chamber, the fluid can be shut off separately. There is no need to connect the valve.
[0052]
(4) If the pressurizing means of the first pressurizing chamber is made of compressed air, the flow rate can be changed or shut off by remote control using an electropneumatic regulator or the like.
[Brief description of the drawings]
FIG. 1 is a longitudinal sectional view showing an embodiment of a constant flow valve of the present invention.
FIG. 2 is a diagram in which another display is added to FIG.
FIG. 3 is a half perspective view of a part of the main body of FIG. 1;
FIG. 4 is a half perspective view of another part of the main body of FIG. 1;
FIG. 5 is a half perspective view of each diaphragm portion.
6 is a longitudinal sectional view showing a state where the upstream pressure is decreased or the downstream pressure is increased in FIG.
FIG. 7 is a longitudinal sectional view showing another embodiment of the constant flow valve of the present invention.
FIG. 8 is a longitudinal sectional view of a conventional constant flow valve.
[Explanation of symbols]
1 ... Body 2 ... Body A
3 ... B
4 ... Body C
5 ... Body D
6 ... Chamber 7 ... Valve member 8 ... 1st diaphragm part 9 ... 2nd diaphragm part 10 ... 3rd diaphragm part 11 ... 1st pressurization chamber 12 ... 2nd valve chamber 13 ... 1st valve chamber 14 ... Lower 2nd valve Chamber 15 ... Upper second valve chamber 16 ... Lower first valve chamber 17 ... Upper first valve chamber 18 ... Second pressurizing chamber 19 ... Step part 20 ... Opening part 21 ... Lower step part 22 ... Annular groove 23 ... Inlet flow path 24 ... Stepped portion 25 ... Opening portion 26 ... Opening portion 27 ... Valve seat 28 ... Lower stepped portion 29 ... Annular groove 30 ... Outlet flow channel 31 ... Bolt 32 ... Female threaded portion 33 ... Opening portion 34 ... Annular projection 35 ... Breathing hole 36 ... Opening portion 37 ... Annular projection 38 ... Breathing hole 39 ... Thick part 40 ... Communication hole 41 ... Thin film part 42 ... Annular rib part 43 ... Valve element 44 ... Upper rod 45 ... Lower part Rod 46 ... Fluid control part 47 ... Thick part 48 ... Thin film part 49 ... Annular seal part 50 ... Thick part 51 ... Thin film part 52 ... Ring Sealing portion 53 ... spring receiver 54 ... spring 55 ... spring receiver 56 ... spring 57 ... main body E
58 ... Body F
59 ... 4th diaphragm part 60 ... Diaphragm chamber 61 ... Breathing hole 62 ... Annular protrusion 63 ... Air chamber 64 ... Air supply hole 65 ... Cylindrical rib 66 ... Cylindrical part 67 ... Membrane part

Claims

A main body formed from a fluid inlet channel, an outlet channel, and a chamber communicating with the inlet channel and the outlet channel, a valve member having a valve body and a first diaphragm, and positioned at a lower part and an upper part of the valve member The second diaphragm portion and the third diaphragm portion having an effective pressure receiving area smaller than that of the first diaphragm portion, and the valve member and each diaphragm portion fix the outer peripheral portion of each diaphragm portion to the main body portion. The chamber is divided into a first pressurizing chamber, a second valve chamber, a first valve chamber, and a second pressurizing chamber, and the first pressurizing chamber is the second pressurizing chamber. The first valve chamber communicates with the inlet channel, and the second valve chamber corresponds to the valve body of the valve member. And has a valve seat And a lower second valve chamber communicating with the first valve chamber through a communication hole provided on the first diaphragm portion side and provided in the first diaphragm portion, and positioned on the second diaphragm portion side The lower second valve is formed separately from an upper second valve chamber provided in communication with the outlet flow path, and an opening area between the valve body and the valve seat is changed by the vertical movement of the valve member. A constant flow rate characterized by having a fluid control part for controlling the fluid pressure of the chamber, wherein the second pressurizing chamber has means for constantly applying a constant inward force to the third diaphragm part valve.

2. The constant flow valve according to claim 1, wherein the means for applying a constant force is a spring device or a pressurized fluid.

The constant flow valve according to claim 1 or 2, wherein a constant force is applied to the second diaphragm portion via a fourth diaphragm portion provided in the first pressurizing chamber. .