1302970 玖、發明說明： C 明戶斤屬々員】 發明領域 本發明，係關於一種閥上游側及下游側之流體壓力儘 管變動也使流量成為一定之定流量閥，更詳言之，關於一 種為防止塵埃之產生而無滑動部，具有優異適應性之定流 量閥。 發明背景 10 以往，提案有各種定流閥，作為其中之一者有揭露於 特開平5-99354號公報之型式者。此型式之定流量閥，係如 第8圖所示，用一設在流路ιοί中之閥座1〇2，及一具有與之 對向之閥體103來劃定隔膜室105。在隔膜104,透過彈簧1〇6 作用有一開閥方向之力，同時在隔膜室1〇4形成有聯絡路 15 ，俾使進口側流體流入於隔膜室1〇5。 在這種構成下，從定流量閥之進口側流入定流量閥内 之流體，便把隔膜104加壓於閉閥方向，在聯絡路被減 壓而進入隔膜105。流入於隔膜室1〇5之流體，即把隔膜加 壓於開閥方向，在通過一形成在閥座1〇2與隔膜1〇4之閥體 20 1〇3間之流體控制部1〇8時更加被減壓，而向定流閥之出口 侧流出去。 又，作用於隔膜104之閉閥方向之力與開閥方向之力之 差距，與把隔膜104附勢於開閥方向之彈簣1〇6成平衡狀態。 為此，若定流量閥之進口側之流體壓力增加，或者， 1302970 定流量閥之出口側之流體壓力減少時，作用於隔膜104之閉 閥方向之力即增加且流體控制部108之開口面積減少，使隔 膜室105之流體壓力增加。藉此，作用於隔膜104之開閥方 向之力也增加，使得作用於隔膜104之閉閥方向與開閥方向 5 之差距，成為再次與彈簣106之力平衡。 一方面，若定流量閥之進口侧之流體壓力減少，或者， 定流量閥之出口側之流體壓力增加時，由於流體控制部108 之開口面積會增加，所以作用於隔膜104之閉閥方向與開閥 方向之力之差距，仍然成為與彈簧106之力平衡。 10 因此，作用於隔膜104之進口侧流體壓力與隔膜室105 内之流體壓力之差距被保持成一定，所以聯絡路107之前後 之壓力差成為一定，從而可將流量保持成一定。 然而，若不卸開定流量閥就無法變更彈簧106之強度， 所以閥配管後無法變更流量之設定。 15 又，由於彈簧106接觸於液體，而不免擔心金屬之對於 流體之溶解析出和來自藥液之腐#。 再者，由於無法完全閉閥，所以為了遮斷流體而需要 連接另一途徑之閥。 【發明内容】 20 發明概要 因此，本發明之目的係在提供一種儘管在閥之配管後 也可簡單地變更流量之設定，不需擔心金屬之溶解析出和 來自藥液之府蝕的，可閉閥之定流量閥。 本發明提供一種定流量閥，其備有：本體部，其係由 1302970 W體之進〇流路及出口流路，及供進口流路及出口流路連 通之小室所形成；及閥構件，其係設在該小室内且具有閥 體及第一隔膜部；其中： 10 15 於前述小室更備有第二隔膜部及第三隔膜部，其係夾 著#述閑構件而位於兩側，其有效受壓面積即小於第一隔 膜’ 4述閥構件及各隔膜部係將各隔膜部之外周部固定在 幻述本體部藉以安裝在前述小室内；前述小室被區分為， 形成在前述小室之一端部與前述第二隔膜部間之第一加 壓至，一形成在前述小室之他端部與前述第三隔膜部間之 第一加壓至，_形在前述第一隔膜部與前述第三隔膜部間 之第閥至，及一形成在前述第一隔膜部與前述第二隔膜 ^間之第二閥室；前述第—加壓室具有—對於前述第二隔 膜部施加平時油之-定力的手段；前述第-閥室係與前 述流路連通；前述第二閥室分開形成下部第二閥室及 P第間至，其中，下部第二閥室具有對應於前述間構 件之閥體的閥座，並對著該閥座而位於第—隔膜側，透過 一設在前述第-隔膜之連通孔，跟前述第—閥室連通，而 上部第二間室即位於前述第二隔膜部側同時與前述出口流 路連通；前述閥體與前述閥座間之空間，係在前述間構件 之上下動下使前述_與閥座間之開口面積變化，以 第二閥室之流體壓力的流體控制部;前述 一定二二射“弟三隔膜部而施加”朝内之 施加一定力之手段， 可利用彈簧裝置或加壓流體 20 1302970 宜在前述第一加壓室設置第四隔膜部，透過該第四隔 膜部，在前述第二隔膜部施加有一定之力。 圖式簡單說明 以下，參考附圖，根據本發明之實施形態，更詳細地 5 說明本發明之上述及其他目的，特徵及優點。於附圖中： 第1圖係顯示本發明定流量閥之一實施形態的縱斷面 圖。 第2圖係在第1圖追加顯示之圖。 第3圖係第1圖之本體之一部份之半斜視圖。 10 第4圖係第1圖之本體之其他一部份之半斜視圖。 第5圖係各隔膜部之半斜視圖。 第6圖為一縱斷面圖，係顯示於第1圖中上游侧壓力減 少或下游側壓力增加時之狀態。 第7圖為一縱斷面圖，係顯示本發明定流量閥之其他實 15 施態樣。 第8圖係習知定流量閥之縱斷面圖。 t 較佳實施例之詳細說明 以下，就本發明之實施態樣，參考圖式加以說明，但 20 不用說，本發明並不受此實施態樣之限定。 於第1圖中，定流量閥之本體部1，從上向下區分為本 體C4、本體B3、本體A2、本體D5，並將此等組合起來構成。 比本體部1，具有：小室6，其係於其内部，劃分成第一加 壓室11、第二閥室12、第一閥室13及第二加壓室18 ;進口 1302970 流路23 ’其係用以從外部向小室6流入流體；及出口流路 30 ’其係用以從小室6向外部流出流體。 本體A2，係由聚四氟乙烯(PTFE)所形成，而位於本體 部1之中央部。如第3圖所示，在本體A2之上部，設有圓形 5凹狀之上部階段部19 ;在上部階段部19之中央設有一直徑 小於上部階段部19之開孔部20(成為第一閥室16)。又，在開 孔部20之下面，連續地設有直徑大於開孔部2〇之圓形凹狀 之下部階段部21。在本體A2之上面部，即，在上部階段19 之周緣部，設有環狀凹溝22 ;又，設有一從側面向本體A2 10之開口部延伸使兩者之間連通之進口流路23。 本體B3係由PTFE所形成，並卡合固定於本體A2之上 面。如第4圖所示，在本體B3之上部設有圓形凹狀之上部階 段部24，而在上部階段部24之中央即設有一直徑小於上部 階段部24之開口部25(成為上部第二閥室15)。又，在開口部 15 25之下面’連續著設有一直徑小於開口部25之開口部26， 及一與本體A2之上部階段部19同徑之圓形凹狀之下部階段 部28。開口部26之下端面周緣部係成為閥座27。在本體B3 之下面部亦即下部階段部28之周緣部，與本體A2之環狀凹 溝22相對之位置，設有環狀凹溝29 ;又，設有出口流路， 2〇其係從位於與本體A2之進口流路23相反側；本體B3之側 面，向開孔部25延伸使兩者之間連通。 本體C4係聚氟亞乙烯基材(pvDF)所形成，而嵌合固定 在本體B3之上部。在本體33之上部中央設有陰螺紋部32以 供螺栓31螺合，而在其下面連續著設有開孔部（孔徑)33以成 1302970 為第一加壓室11(第2圖）。在本體C4之侧面，設有一從那裡 向開孔部33延伸使兩者之間連通之小徑通氣孔第2圖）， 又，在本體C4之下端面，以開孔部33為中心地設有一嵌合 於本體B3之上部階段部24之環狀突部34。 5 本體D5係由pVDF所形成，而嵌合固定在本體A2之底 邛。在本體D5之中央部，設有一向上面開口之開孔部（孔 徑)36(第2圖），以成為第二加壓室18，而在開孔部％上面之 周圍，則設有一嵌合固定在本體A2之下部階段部21之環狀 突部37。又，在本體D5之侧面，設有一從那裡向開孔部％ 10延伸使兩者之間連通之小徑通氣孔38。 構成本體部1之上述四個本體A，B, C，D，係由螺栓、 螺母(未圖示)所夾持固定著。 PTFE製之閥構件係用符號來表示。閥構件7包含第一 隔膜8，而該第一隔膜8則備有：在中央設成護手狀較原部 15 39 ;將較厚部39貫穿設置之連通孔4〇 ;從較厚部39之外周 面向直徑方向延伸設置之圓形狀薄膜部41 ;及向上下突出 设置於薄膜41外周緣部之環狀肋部42。閥構件7，更包含 有·反研鉢狀閥體43，其係設在第一隔膜部8之上部中央且 具有傾斜面；上部杆44，其突設於比閥體43之上部更上方 2〇之地方且上端部形成半狀球；及下部杆45，其係突設在比 車又厚部39之下端面中央部更下方之地方且下端部形成半球 狀。每些所含之構件與第一隔膜部係共同地形成一體。設 在第一隔膜部8之外周緣部的環狀肋部42,係嵌合於設在本 體A2及本體B3之兩環狀凹溝22, 29,並被失持固定在本體 1302970 A2與本體B3之間。又，形成在閥體43之傾斜面與本體B3開 口部26(第4圖）之下端周緣部之間的空間，係作為流體控制 部46作用。 在閥構件7之下方，設有PTFE製之第二隔膜部9，第二 5隔膜9，包含有：一設在中央之圓柱狀較厚部47 ; —從較厚 部47下端面延伸設置之圓形狀薄膜部48 ;及一設在薄膜部 48外周緣部之環狀密封部49。它們係形成一體。又，薄膜 部48之外周緣部之環狀密封部49，係央持固定在本體B3之 上部階段部24，與本體C4之環狀突部34間。 1〇 又’第二隔膜部9之受壓面積，有必要設成比第一隔膜 部8之受壓面積更小。 在閥構件7之上方，設有PTFE製之第三隔膜部1〇。第 一隔膜部10，包含有：一設在中央之圓柱狀較厚部50 ; — k車乂厚部50之上端面向徑向延伸設置之圓形狀薄膜部η ; 15及设在薄膜部51之外周緣部的環狀密封部52。它們係形成 一體、。像這樣，第三隔膜部1〇之形狀係與第二隔膜部9之形 狀成為同一，而上下反過來配置著。較厚部50之上端面係 ，_件7之下部杆45接觸著，又，薄膜糾之相緣部之 %狀松、封部52，係夾持固定在本體A2之下部階段部21盘本 20體D5之環狀突部37間。 二又，第三隔膜部10之受壓面積，也與上述同樣，有必 要設成比第一隔膜部8之受壓面積更小。 如第卜項所示，pVDF製之㈣支承⑽配置在本體 之開孔°卩33内，域合在第二隔膜部9之較厚部47。彈菩 11 1302970 支承53，係藉由彈簧54(配置在與螺合於本體C4之陰螺部32 之螺梭31間）’經常將第二隔膜部9向内（第1為向下方向）加 壓。本實施形態，雖用彈簧54及彈簣支承53來形成加壓手 段，俱利用一種導入加壓空氣等之流體於本體C4之開口部 5 44(第2圖）之手段也無妨。 同樣，PVDF製之彈簧支承55及sus製之彈簧％係配置 本體5之開孔部36(第2圖），而彈簧支承55即嵌合於第三隔膜 部10之較厚部5〇。兩者係以同於彈簧支承53及彈簧Μ之作 用把第>隔膜部10向内（第1圖為向上)加壓。關於其他者係 10 因同於上述而省略說明。 在以上所說明之各構成下，形成在本體部丨内部之小室 6,係從上區分為第一加壓室11、第二閥室12、第一閥室13， 及第二加壓至18，其中·第一加壓室11，係由第二隔膜部9 及本體C4之開孔部33所形成；第二閥室12，係由下部第二 15閥室I4及上部第二閥室15所形成，其中，下部第二閥室14 係形成在第一隔膜部8與本體B3之下部階段部28間，而上部 第二閥室15係由第二隔膜部9及本體B3之開孔部25所形 成，弟一閥至13，係由下部第一閥室16及上部第一閥室17 所成，其中，下部第一閥室16係由第三隔膜部1〇及本體A2 20之開孔部20所形成，而上部第一閥室17即由第一隔膜8及本 體A2之階段部所形成；第二加壓室18係由第二隔膜部1〇及 本體D5之開孔部36所形成。 由上述之構成所成之第一實施態樣之定流量閥係動作 如下。 12 1302970 從本體A2之進口流路23流入於第一閥室13之流體，首 先，藉著通過閥構件7之連通孔40而被減壓後流入於下部第 二閥室14。更且，當流體從下部第二閥室14通過流體控制 部46並流入於上述第二閥室15時，因在流體控制部46之壓 5力損失而再度被減壓後，從出口流路30流出。在此，由於 連通孔40之直徑設定得充份短小，所以流過閥之流量由連 通孔40前後之壓力差所決定。 此時，如果檢討各隔膜部8，9，1 〇受自流體之力的話， 第一隔膜部8承受因第一閥室13與下部第二閥室14内之流 1〇體壓力差而向上之力，第二隔膜部9承受因上部第二閥室15 之流體壓力而向上之力，第三隔膜部1〇即承受因第一閥室 13内之流體壓力而向下之力。在此，由於第一隔膜部8之受 壓面積設定得充份大於第二隔膜部9及第三隔膜部1〇之受 壓面積，所以加於第二、第三隔膜部9、1〇之力，較之作用 15於第一隔膜部8之力，幾可忽視之。因此，閥構件7受自淹 體之力，成為因第-閥室13内與下部第二間室14内之流體 壓力差而向上之力。 又闕構件7，係藉第一加壓室11之加壓手段而向下方 附勢，同時藉第二加壓室18之加壓手段而向上方附勢者。 /、要將第加壓至叹加壓手段之力預先調整得大於第二 加[至1S之加壓手段之力，閥構件受自各加壓手段之合力 即成為向下之力。 因此，閱構件7，便安定於藉助於各加壓手段之向下方 之合力，與藉助於下部第二閱室14内之流體虔力之向上方 13 1302970 之力平衡的位置上 體控制部46之開口 壓手段之合力與藉 就疋’下部第二閥室14之壓力藉由流 面積而自立地被難，以便藉助於各加 助於流體壓力差之力平衡。 π13ίΓ 手段之朝下之合力沒有變 1弟一間至13内與下部第二間室_之流體壓力差即成 ===連通孔4G之前後之壓力差成為 閥之流1經常保持一定。 在乂上之動作下，本定流量閥前後之流體壓力 變化，也可保持流量於一定。 即使有 10 15 20 人又’本定流量閥，由於作用於閥構件7之各加壓手段之 合力’與藉助於第-閥室13内與下部閥室14内之流體壓力 以、=平衡地作動，所以只要調整變更該作用於閥構件7之 各加壓手段之合力，第一閥室U與下部第二閥室14之流體 壓2差即成為與其對應之值。因此，可以變更調整連通孔 幻後之壓力差，從而不需卸閥也可變更調整流量。 再者，只要將藉助於第一加壓室11之加壓手段之力調 整得小於藉助於第二加壓室18之加壓手段之力，作用於閥 構件7之合力即成為只朝上，變成將閥構件7之閥體43向本 體B3之開口部26之閥座按壓之樣子，從而可遮斷流體。即， 定流量閥成為閉塞狀態。 第7圖為一縱斷面圖，係顯示本發明之定流量閥之第二 貫施態樣。本實施態樣，其加壓手段變為壓縮空氣以替代 彈黃。本體A2、本體B3、本體D5、閥構件7、第二隔膜部9、 第二隔膜部丨〇,及，對於第三隔膜部10加壓之手段之構造， 14 1302970 係與第一實施態樣之定流量閥同一，動作也同樣，所以省 略其說明。 如第7圖所示，設有一嵌合固定在本體B3之上部的本體 E57。本體E57，備有··斷面圓形狀之隔膜室6〇，其係於中 5央貫穿延伸本體仍了之上下端面，並在上部擴大直徑；及通 氣孔61，其係用來連通隔膜室6〇與外部，並在下端面，以 隔膜室60為中心地設有一嵌合於本體B3之階段部以的環狀 突部62。 位於本體E57上部之本體F58，備有··一設在下部之氣 10室63 ’·及供氣孔64，其係貫穿氣室幻及上端面，從外部向 氣室63導入壓縮空氣等。 第四隔膜部59,備有··圓筒形肋65，其係設在周緣部， 外徑即本體E57之隔膜室60大致同徑；一設在中央之圓柱部 及膜邛67，其係设成連接圓筒形肋65之下端面内周及 15圓柱部之上端面外周。圓筒形肋65，係嵌合固定於本體心 隔膜至60㈤日守被夾持固定在本體B3與本體仍7間，使得 圓㈣咐隔膜室60之中自由上下移動。又，在圓柱部^ 之下邛，肷合有第二隔膜部9之較厚部47(第2圖）。 *上迷構成，由第二隔膜部9、本體E57之隔膜室⑼及 ^體F58之氣至63來形成第一加壓室“（第旧），且，第四隔 膜部59上面承受壓縮空氣等之壓力，藉此第二隔膜部9經常 被朝内加壓（第6圖為朝下）。 關於動作，由於與第一實施態樣同一，所以省略其說 月使用壓^空氣作為加壓手段之構成，藉此調整變更壓 15 1302970 縮空氣之壓力，從而可調整變更將第二隔膜部9朝内（第6圖 為朝下）加壓之力。為此，只要用電動空氣壓式調節器等來 調整壓縮空氣之壓力，即可藉遙控操作來進行流量之變 更、遮斷。 5 由以上之構成所設置之本發明之定流量閥具有以下優 異之特徵。 (1) 由於可以藉著變更借助於第一加壓室之加壓手段的 朝内之力，而變更流量，所以不需卸閥就可變更流量。 (2) 由於沒有彈簧等金屬接觸液體，所以可防止來自金 10 屬析出之流體之污染。 (3) 若將借助於第一加壓室之加壓手段的朝内之力，調 整得小於借助於第二加壓室之加壓手段的朝内之力，則可 遮斷流體，所以不需要另外連接流體遮斷用閥。 (4) 若將第一加壓手段作成依靠壓縮空氣，則可使用電 15 動空氣壓式調節器等，藉遙控操作來進行流量之變更、遮 斷。 t圖式簡單說明3 第1圖係顯示本發明定流量閥之一實施形態的縱斷面 圖。 20 第2圖係在第1圖追加顯示之圖。 第3圖係第1圖之本體之一部份之半斜視圖。 第4圖係第1圖之本體之其他一部份之半斜視圖。 第5圖係各隔膜部之半斜視圖。 第6圖為一縱斷面圖，係顯示於第1圖中上游側壓力減 16 1302970 少或下游侧壓力增加時之狀態。 第7圖為一縱斷面圖，係顯示本發明定流量閥之其他實 施態樣。 第8圖係習知定流量閥之縱斷面圖。 5 【圖式之主要元件代表符號表】 1…本體部 25，26…開口部 6…小室 27，102…閥座 7…閥構件 28···下部階段部 8···第一隔膜部 30…出口流路 9···第二隔膜部 31…螺栓 10…第三隔膜部 32…陰螺紋部 11…加壓室 35…小徑開孔部 12…第二閥室 37···環狀突部 13…第一閥室 39，47，50…較厚部 14…下部第二閥室 40…連通孔 15…上部第二閥室 42…環狀肋部 16…下部第一閥室 43，103…閥體 17…上部第一閥室 44···上部杆 18…加壓室 45···下部杆 19，24···上部階段部 46…流體控制部 20，33，36···開孔部 49，52…環狀密封部 21…下部階段部 51…薄膜部 22，29…環狀凹溝 53…彈簧支承 23···進口流路 54…彈簧 17 1302970 55…彈簧支承 59…第四隔膜部 60…隔膜室 61…通氣孔 63…氣室 64…供氣孔 65…圓筒形肋 66…圓柱部 67…膜部 101···流路 104···隔膜 105···隔膜室 106…彈簧 107…聯絡路 108…流體控制部 A2，B3，C4，D5，E57，F58···本體1302970 玖 发明 发明 发明 发明 发明 发明 】 】 】 】 】 】 】 】 】 】 】 】 】 】 】 】 】 】 】 】 】 】 】 】 】 】 】 】 】 】 】 】 】 】 】 】 】 】 】 】 】 】 】 】 】 A fixed flow valve with excellent adaptability to prevent the generation of dust without a sliding portion. Background of the Invention In the past, various types of constant flow valves have been proposed, and one of them is disclosed in Japanese Laid-Open Patent Publication No. Hei 5-99354. The constant flow valve of this type is as shown in Fig. 8, and the diaphragm chamber 105 is defined by a valve seat 1〇2 provided in the flow path ιοί, and a valve body 103 having a direction opposite thereto. In the diaphragm 104, a force in the valve opening direction is applied through the spring 1〇6, and a communication path 15 is formed in the diaphragm chamber 1〇4 so that the inlet side fluid flows into the diaphragm chamber 1〇5. With this configuration, the fluid flowing into the constant flow valve from the inlet side of the constant flow valve pressurizes the diaphragm 104 in the valve closing direction, and is depressurized in the communication path to enter the diaphragm 105. The fluid flowing into the diaphragm chamber 1〇5 pressurizes the diaphragm in the valve opening direction, and passes through a fluid control unit 1〇8 formed between the valve seat 1〇2 and the valve body 20 1〇3 of the diaphragm 1〇4. It is further decompressed and flows out to the outlet side of the constant flow valve. Further, the difference between the force acting in the valve closing direction of the diaphragm 104 and the force in the valve opening direction is balanced with the magazine 1〇6 which is attached to the diaphragm 104 in the valve opening direction. For this reason, if the fluid pressure on the inlet side of the constant flow valve increases, or if the fluid pressure on the outlet side of the 1302970 constant flow valve decreases, the force acting on the valve closing direction of the diaphragm 104 increases and the opening area of the fluid control portion 108 increases. The decrease causes the fluid pressure of the diaphragm chamber 105 to increase. Thereby, the force acting on the valve opening direction of the diaphragm 104 is also increased, so that the difference between the valve closing direction acting on the diaphragm 104 and the valve opening direction 5 is again balanced with the force of the magazine 106. On the one hand, if the fluid pressure on the inlet side of the constant flow valve is decreased, or the fluid pressure on the outlet side of the constant flow valve is increased, since the opening area of the fluid control portion 108 is increased, the valve closing direction acting on the diaphragm 104 is The difference in force in the valve opening direction is still balanced with the force of the spring 106. Therefore, the difference between the fluid pressure acting on the inlet side of the diaphragm 104 and the fluid pressure in the diaphragm chamber 105 is kept constant, so that the pressure difference between the front and the rear of the communication path 107 is constant, so that the flow rate can be kept constant. However, the strength of the spring 106 cannot be changed unless the constant flow valve is removed, so the flow rate setting cannot be changed after the valve is piped. 15 Also, since the spring 106 is in contact with the liquid, there is a fear of the metal's dissolution of the fluid and the rot from the liquid. Furthermore, since the valve cannot be completely closed, it is necessary to connect the valve of another route in order to interrupt the fluid. SUMMARY OF THE INVENTION [Invention] Therefore, an object of the present invention is to provide a setting that can easily change the flow rate even after piping of a valve, and can be closed without concern for dissolution of metal and deposition of liquid medicine. Valve flow valve. The invention provides a constant flow valve, which is provided with: a main body portion formed by an inlet flow path and an outlet flow path of the 1302970 W body, and a small chamber for connecting the inlet flow path and the outlet flow path; and a valve member, The utility model is disposed in the small chamber and has a valve body and a first diaphragm portion; wherein: 10 15 is further provided with a second diaphragm portion and a third diaphragm portion in the small chamber, which are located on both sides of the idle member. The effective pressure receiving area is smaller than the first diaphragm. The valve member and each diaphragm portion fix the outer peripheral portion of each diaphragm portion to the magic body portion to be installed in the small chamber. The chamber is divided into the aforementioned chamber. a first pressurization between one of the end portions and the second diaphragm portion, a first pressurization between the other end portion of the small chamber and the third diaphragm portion, and a shape of the first diaphragm portion and the aforementioned a first valve between the third diaphragm portion and a second valve chamber formed between the first diaphragm portion and the second diaphragm; the first pressurizing chamber has a normal oil applied to the second diaphragm portion - means of constant force; the aforementioned first - valve chamber The flow path is connected; the second valve chamber is separately formed to form a lower second valve chamber and a P to the valve seat, wherein the lower second valve chamber has a valve seat corresponding to the valve body of the intermediate member, and the valve seat is Located on the first diaphragm side, communicating with the first valve chamber through a communication hole provided in the first diaphragm, and the upper second chamber is located on the second diaphragm portion side while communicating with the outlet flow path; The space between the body and the valve seat is a fluid control unit that changes the opening area between the _ and the valve seat by the downward movement of the intermediate member, and the fluid pressure of the second valve chamber; the predetermined two-two diaphragm Applying a force to the inside, a spring device or a pressurized fluid 20 1302970 may be provided in the first pressurizing chamber to provide a fourth diaphragm portion, and through the fourth diaphragm portion in the second diaphragm portion. Apply a certain amount of force. BRIEF DESCRIPTION OF THE DRAWINGS The above and other objects, features and advantages of the present invention will be described in more detail. In the drawings: Fig. 1 is a longitudinal sectional view showing an embodiment of a constant flow valve of the present invention. Fig. 2 is a diagram additionally shown in Fig. 1. Figure 3 is a half oblique view of a portion of the body of Figure 1. 10 Fig. 4 is a half oblique view of the other part of the body of Fig. 1. Fig. 5 is a half oblique view of each diaphragm portion. Fig. 6 is a longitudinal sectional view showing the state in which the pressure on the upstream side decreases or the pressure on the downstream side increases in Fig. 1. Fig. 7 is a longitudinal sectional view showing another embodiment of the constant flow valve of the present invention. Figure 8 is a longitudinal sectional view of a conventional flow valve. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the present invention will be described with reference to the drawings, but it is needless to say that the present invention is not limited by the embodiment. In Fig. 1, the main body portion 1 of the constant flow valve is divided into the main body C4, the main body B3, the main body A2, and the main body D5 from the top to the bottom, and these are combined. The main body portion 1 has a small chamber 6 which is divided into a first pressurizing chamber 11, a second valve chamber 12, a first valve chamber 13 and a second pressurizing chamber 18; and an inlet 1302970 flow path 23' It is used to flow fluid from the outside into the chamber 6; and the outlet flow path 30' is used to discharge fluid from the chamber 6 to the outside. The body A2 is formed of polytetrafluoroethylene (PTFE) and is located at the central portion of the body portion 1. As shown in Fig. 3, a circular recessed upper step portion 19 is provided in the upper portion of the main body A2, and an opening portion 20 having a smaller diameter than the upper step portion 19 is provided in the center of the upper stage portion 19 (becomes the first Valve chamber 16). Further, on the lower surface of the opening portion 20, a circular concave lower portion portion 21 having a diameter larger than that of the opening portion 2 is continuously provided. An annular groove 22 is provided on the upper surface of the body A2, that is, at the peripheral portion of the upper stage 19; and an inlet flow path 23 extending from the side to the opening of the body A2 10 to communicate therebetween is provided. . The body B3 is formed of PTFE and is snap-fitted to the upper surface of the body A2. As shown in Fig. 4, a circular concave upper stage portion 24 is provided on the upper portion of the main body B3, and an opening portion 25 having a smaller diameter than the upper stage portion 24 is provided in the center of the upper stage portion 24 (becomes the upper second portion). Valve chamber 15). Further, an opening portion 26 having a diameter smaller than the opening portion 25 and a circular concave lower portion portion 28 having the same diameter as the upper portion of the upper portion of the main body A2 are continuously provided below the opening portion 15 25 . The peripheral edge portion of the lower end surface of the opening portion 26 is a valve seat 27. An annular groove 29 is provided at a position opposite to the annular groove 22 of the body A2 at a portion below the body B3, that is, at a peripheral portion of the lower stage portion 28. Further, an outlet flow path is provided, and Located on the opposite side of the inlet flow path 23 of the body A2; the side surface of the body B3 extends toward the opening portion 25 to communicate therebetween. The body C4 is formed of a polyfluorovinylidene material (pvDF) and is fitted and fixed to the upper portion of the body B3. A female screw portion 32 is provided at the center of the upper portion of the body 33 for screwing the bolt 31, and an opening portion (aperture) 33 is continuously formed at the lower portion thereof to form 1302970 as the first pressurizing chamber 11 (Fig. 2). On the side of the main body C4, a small-diameter vent hole extending from the opening portion 33 to connect the two is provided, and the lower end surface of the main body C4 is centered on the opening portion 33. There is an annular projection 34 fitted to the upper stage portion 24 of the body B3. 5 The body D5 is formed by pVDF, and the fitting is fixed at the bottom of the body A2. In the central portion of the body D5, an opening portion (aperture) 36 (Fig. 2) opening upward is provided to become the second pressurizing chamber 18, and a fitting is provided around the upper portion of the opening portion %. The annular projection 37 is fixed to the lower stage portion 21 of the body A2. Further, on the side surface of the main body D5, a small-diameter vent hole 38 is provided which extends from the opening portion 10 to connect the two. The four bodies A, B, C, and D constituting the main body portion 1 are sandwiched and fixed by bolts and nuts (not shown). Valve members made of PTFE are indicated by symbols. The valve member 7 includes a first diaphragm 8, and the first diaphragm 8 is provided with a handle-like portion 1539 at the center, and a communication hole 4〇 through which the thick portion 39 is disposed; The outer peripheral surface is formed in a circular film portion 41 extending in the radial direction, and an annular rib portion 42 projecting upward and downward from the outer peripheral edge portion of the film 41. The valve member 7 further includes a reverse-throttle valve body 43 which is provided at the center of the upper portion of the first diaphragm portion 8 and has an inclined surface, and an upper rod 44 which protrudes above the upper portion of the valve body 43. The lower end portion is formed with a hemispherical ball; and the lower rod 45 is provided at a position lower than the central portion of the lower end surface of the thick portion 39 of the vehicle and the lower end portion is formed in a hemispherical shape. Each of the contained members is integrally formed with the first diaphragm portion. The annular rib 42 provided on the outer peripheral edge portion of the first diaphragm portion 8 is fitted to the annular groove 22, 29 provided in the main body A2 and the main body B3, and is held by the main body 1302970 A2 and the body. Between B3. Further, a space formed between the inclined surface of the valve body 43 and the lower peripheral edge portion of the opening portion 26 (Fig. 4) of the main body B3 functions as the fluid control portion 46. Below the valve member 7, a second diaphragm portion 9 made of PTFE is provided, and the second diaphragm 9 includes: a cylindrical thick portion 47 provided at the center; - extending from the lower end surface of the thick portion 47. The circular-shaped thin film portion 48; and an annular seal portion 49 provided on the outer peripheral edge portion of the thin film portion 48. They are integrated into one. Further, the annular seal portion 49 of the outer peripheral portion of the film portion 48 is held by the upper stage portion 24 of the main body B3 and between the annular projections 34 of the main body C4. Further, the pressure receiving area of the second diaphragm portion 9 is required to be smaller than the pressure receiving area of the first diaphragm portion 8. Above the valve member 7, a third diaphragm portion 1 made of PTFE is provided. The first diaphragm portion 10 includes: a cylindrical thick portion 50 disposed at the center; a circular film portion η extending from the upper end surface of the k-vehicle thick portion 50; and a film portion 51 disposed at the film portion 51 The annular seal portion 52 of the outer peripheral portion. They are integrated into one. In this manner, the shape of the third diaphragm portion 1 is the same as that of the second diaphragm portion 9, and is placed upside down. The upper end surface of the thick portion 50 is in contact with the lower portion 45 of the member 7, and the % of the edge portion of the film is loosened, and the sealing portion 52 is clamped and fixed to the lower portion of the body A2. 20 between the annular projections of the body D5. Further, similarly to the above, the pressure receiving area of the third diaphragm portion 10 is required to be smaller than the pressure receiving area of the first diaphragm portion 8. As shown in the item (b), the (4) support (10) of the pVDF is disposed in the opening 卩 33 of the body, and is joined to the thick portion 47 of the second diaphragm portion 9. The volcano 11 1302970 support 53 is often inwardly (the first downward direction) by the spring 54 (disposed between the snails 31 screwed to the female screw portion 32 of the body C4) Pressurize. In the present embodiment, the spring 54 and the magazine support 53 are used to form the pressing means, and it is also possible to use a means for introducing a fluid such as pressurized air to the opening 544 (Fig. 2) of the main body C4. Similarly, the spring support 55 made of PVDF and the spring % made of SUS are provided with the opening portion 36 (Fig. 2) of the main body 5, and the spring support 55 is fitted to the thick portion 5 of the third diaphragm portion 10. Both of them are pressed in the same manner as the spring support 53 and the spring Μ, and the diaphragm portion 10 is pressed inward (the first figure is upward). The other system 10 is omitted from the above description. In each of the configurations described above, the small chamber 6 formed inside the main body portion is divided into a first pressurizing chamber 11, a second valve chamber 12, a first valve chamber 13, and a second pressurization to 18 The first pressurizing chamber 11 is formed by the second diaphragm portion 9 and the opening portion 33 of the body C4; the second valve chamber 12 is composed of the lower second valve chamber I4 and the upper second valve chamber 15 Formed, wherein the lower second valve chamber 14 is formed between the first diaphragm portion 8 and the lower portion portion 28 of the body B3, and the upper second valve chamber 15 is formed by the second diaphragm portion 9 and the opening portion of the body B3 Formed by 25, the first valve to 13 is formed by the lower first valve chamber 16 and the upper first valve chamber 17, wherein the lower first valve chamber 16 is opened by the third diaphragm portion 1 and the body A2 20 The hole portion 20 is formed, and the upper first valve chamber 17 is formed by the phase portion of the first diaphragm 8 and the body A2; the second pressurized chamber 18 is formed by the second diaphragm portion 1 and the opening portion 36 of the body D5. Formed. The constant flow valve of the first embodiment formed by the above configuration operates as follows. 12 1302970 The fluid that has flowed into the first valve chamber 13 from the inlet flow path 23 of the main body A2 is first decompressed by the communication hole 40 of the valve member 7, and then flows into the lower second valve chamber 14. Further, when the fluid passes through the fluid control unit 46 from the lower second valve chamber 14 and flows into the second valve chamber 15, the fluid is again decompressed by the pressure loss of the fluid control unit 46, and then the flow path is exited from the outlet. 30 outflow. Here, since the diameter of the communication hole 40 is set to be sufficiently short, the flow rate of the flow through the valve is determined by the pressure difference between the front and rear of the communication hole 40. At this time, if it is judged that the respective diaphragm portions 8, 9, 1 are subjected to the force from the fluid, the first diaphragm portion 8 is subjected to the pressure difference of the flow in the first valve chamber 13 and the lower second valve chamber 14 upward. The second diaphragm portion 9 receives the upward force due to the fluid pressure of the upper second valve chamber 15, and the third diaphragm portion 1 receives the downward force due to the fluid pressure in the first valve chamber 13. Here, since the pressure receiving area of the first diaphragm portion 8 is set to be sufficiently larger than the pressure receiving area of the second diaphragm portion 9 and the third diaphragm portion 1〇, it is applied to the second and third diaphragm portions 9, 1 The force, compared to the force acting on the first diaphragm portion 8, can be neglected. Therefore, the valve member 7 receives the force from the flooding body and becomes an upward force due to the difference in fluid pressure between the inside of the first valve chamber 13 and the lower second chamber 14. Further, the member 7 is attached downward by the pressurizing means of the first pressurizing chamber 11, and is biased upward by the pressurizing means of the second pressurizing chamber 18. /, the force of the first pressurization to the sighing means is adjusted to be larger than the force of the second plus [to 1S pressing means, and the valve member is subjected to the resultant force of the respective pressing means to become a downward force. Therefore, the reading member 7 is stabilized by the resultant force of the downward direction by the respective pressing means, and the upper body control portion 46 is at a position balanced by the force of the upward force of 13 1302970 by the fluid force in the lower second reading chamber 14. The resultant force of the opening pressure means and the pressure of the lower second valve chamber 14 are self-supporting by the flow area so as to be balanced by the force applied to each of the fluid pressure differences. π13ίΓ The resultant force of the downward movement of the means does not change. The difference between the pressure of the fluid from one to the inside of the second chamber and the second chamber in the lower part is === The pressure difference before and after the communication hole 4G becomes the flow of the valve 1 is always kept constant. Under the action of the squat, the fluid pressure before and after the flow valve can be changed to keep the flow constant. Even if there are 10 15 20 people, the 'supplemental flow valve', due to the resultant force of the respective pressurizing means acting on the valve member 7, and the fluid pressure in the inner and lower valve chambers 14 by means of the first valve chamber 13 are balanced. Since the engagement force of the respective pressing means acting on the valve member 7 is adjusted and changed, the difference between the fluid pressures of the first valve chamber U and the lower second valve chamber 14 becomes a value corresponding thereto. Therefore, it is possible to change the pressure difference after the adjustment of the communication hole, so that the adjustment flow rate can be changed without removing the valve. Further, as long as the force of the pressing means by means of the first pressurizing chamber 11 is adjusted to be smaller than the force of the pressing means by the second pressurizing chamber 18, the resultant force acting on the valve member 7 becomes only upward, The valve body 43 of the valve member 7 is pressed against the valve seat of the opening portion 26 of the body B3, so that the fluid can be blocked. That is, the constant flow valve is in an occluded state. Fig. 7 is a longitudinal sectional view showing the second embodiment of the constant flow valve of the present invention. In this embodiment, the pressurizing means becomes compressed air instead of the yellowing. The main body A2, the main body B3, the main body D5, the valve member 7, the second diaphragm portion 9, the second diaphragm portion 丨〇, and the structure of the means for pressurizing the third diaphragm portion 10, 14 1302970 and the first embodiment Since the constant flow valve is the same and the operation is the same, the description thereof will be omitted. As shown in Fig. 7, a body E57 fitted to the upper portion of the body B3 is provided. The main body E57 is provided with a diaphragm chamber 6〇 having a circular cross section, which is formed by extending the upper end surface of the main body at the center of the central portion and expanding the diameter at the upper portion, and a vent hole 61 for connecting the diaphragm chamber 6〇 and the outside, and on the lower end surface, an annular projection 62 fitted to the step portion of the body B3 is provided centering on the diaphragm chamber 60. The main body F58 located at the upper portion of the main body E57 is provided with a gas chamber 10'' and a gas supply hole 64 which are provided in the lower portion, and which penetrates the upper end surface of the gas chamber and introduces compressed air or the like from the outside to the gas chamber 63. The fourth diaphragm portion 59 is provided with a cylindrical rib 65 which is provided on the peripheral portion, and the outer diameter, that is, the diaphragm chamber 60 of the main body E57 is substantially the same diameter; and the cylindrical portion and the diaphragm 67 are provided at the center. The inner circumference of the lower end surface of the cylindrical rib 65 and the outer circumference of the upper end surface of the cylindrical portion 15 are connected. The cylindrical rib 65 is fitted and fixed to the body core diaphragm to 60 (5). The keeper is clamped and fixed between the body B3 and the body still 7 so that the circular (four) diaphragm chamber 60 is free to move up and down. Further, under the cylindrical portion ^, the thick portion 47 of the second diaphragm portion 9 is twisted (Fig. 2). * The above composition is formed by the second diaphragm portion 9, the diaphragm chamber (9) of the body E57, and the gas of the body F58 to 63 to form the first pressurizing chamber "(old), and the fourth diaphragm portion 59 is subjected to compressed air. The second diaphragm portion 9 is often pressed inward (Fig. 6 is downward). The operation is the same as that of the first embodiment, so that the use of the air is suppressed as the pressure. By the configuration of the means, by adjusting the pressure of the air pressure 15 1302970, the force of pressing the second diaphragm portion 9 inward (downward in Fig. 6) can be adjusted and changed. For this, the electric air pressure type is used. The regulator or the like adjusts the pressure of the compressed air, and the flow rate can be changed and blocked by the remote control operation. 5 The constant flow valve of the present invention provided by the above configuration has the following excellent features. (1) By changing the inward force of the pressurizing means of the first pressurizing chamber and changing the flow rate, the flow rate can be changed without removing the valve. (2) Since there is no metal such as a spring to contact the liquid, it is possible to prevent the gold from being 10 It is a pollution of the fluid that is deposited. (3) The inward force of the pressing means by means of the first pressurizing chamber is adjusted to be smaller than the inward force of the pressing means by means of the second pressurizing chamber, so that the fluid can be interrupted, so that no additional fluid connection is required (4) If the first pressurizing means is made to rely on compressed air, the flow rate can be changed or blocked by remote control using an electric 15 air pressure regulator or the like. 3 is a longitudinal sectional view showing an embodiment of a constant flow valve according to the present invention. 20 Fig. 2 is a view additionally shown in Fig. 1. Fig. 3 is a half of a part of the body of Fig. 1. Fig. 4 is a half oblique view of the other part of the body of Fig. 1. Fig. 5 is a half oblique view of each diaphragm portion. Fig. 6 is a longitudinal sectional view, which is shown in Fig. 1. The middle-upstream side pressure is reduced by 16 1302970 or the state of the downstream side pressure is increased. Fig. 7 is a longitudinal sectional view showing another embodiment of the constant flow valve of the present invention. Fig. 8 is a conventional flow regulating valve Longitudinal view. 5 [Main symbol representative symbol table of the drawing] 1... Main body part 25, 26... Opening part 6 The chambers 27, 102, the valve seat 7, the valve member 28, the lower stage portion 8, the first diaphragm portion 30, the outlet flow path 9, the second diaphragm portion 31, the bolts 10, the third diaphragm portion 32, ... Female threaded portion 11 ... pressurized chamber 35 ... small diameter opening portion 12 ... second valve chamber 37 · annular projection 13 ... first valve chamber 39, 47, 50 ... thick portion 14 ... lower second valve Room 40...communication hole 15...upper second valve chamber 42...annular rib 16...lower first valve chamber 43,103...valve body 17...upper first valve chamber 44·...upper rod 18...pressurizing chamber 45 ···lower rod 19,24···upper stage part 46...fluid control unit 20,33,36···opening part 49,52...annular sealing part 21...lower stage part 51...thin part 22,29 ... annular groove 53... spring support 23 · · · inlet flow path 54 ... spring 17 1302970 55 ... spring support 59 ... fourth diaphragm portion 60 ... diaphragm chamber 61 ... vent hole 63 ... air chamber 64 ... air supply hole 65 ... round Cylindrical rib 66...cylindrical portion 67...membrane portion 101···flow path 104···diaphragm 105···diaphragm chamber 106...spring 107...contact path 108...fluid control unit A2, B3, C4, D5 E57, F58 ··· body
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