200521364 玫、發明說明： I：發明所屬之技術領域2 發明領域 本發明，係關於一種閥上游側及下游側之流體壓力儘 5 管變動也使流量成為一定之定流量閥，更詳言之，關於一 種為防止塵埃之產生而無滑動部，具有優異適應性之定流 量閥。 發明背景 10 15 以往，提案有各種定流閥，作為其中之一者有揭露於 特開平5-99354號公報之型式者。此型式之定流量閥，係如 第8圖所示，用一設在流路1〇1中之閥座1〇2，及一具有與之 對向之閥體103來劃定隔膜室105。在隔膜1〇4，透過彈簧1〇6 作用有-開閥方向之力，同時在隔膜室刚形成有聯絡路 107，俾使進口側流體流入於隔膜室1〇5。 在這種構成下，從定流量閥之進口側流入定流量閥内 之流體，便把隔膜HM加壓於閉閥方向，在聯絡路1〇7被減 ^進入隔卿。流入於隔膜㈣之流體，即把隔膜加 i U方向纟通過*成在⑽與隔膜刚之閥體 =間之^體控制部⑽時更加被減壓，而 側流出去。 #距W川 閱方向之力與開閥方向之力》 呈距，與把隔膜104附勢於 為…… 開閥方向之彈簧成平衡狀態 側之流體壓力增加，或者， 20 200521364 定流量閥之出口側之流體壓力減少時，作用於隔膜104之閉 閥方向之力即增加且流體控制部108之開口面積減少，使隔 膜室105之流體壓力增加。藉此，作用於隔膜104之開閥方 向之力也增加，使得作用於隔膜104之閉閥方向與開閥方向 5 之差距，成為再次與彈簧106之力平衡。 一方面，若定流量閥之進口側之流體壓力減少，或者， 定流量閥之出口側之流體壓力增加時，由於流體控制部108 之開口面積會增加，所以作用於隔膜104之閉閥方向與開閥 方向之力之差距，仍然成為與彈簧106之力平衡。 10 因此，作用於隔膜104之進口側流體壓力與隔膜室105 内之流體壓力之差距被保持成一定，所以聯絡路107之前後 之壓力差成為一定，從而可將流量保持成一定。 然而，若不卸開定流量閥就無法變更彈簧106之強度， 所以閥配管後無法變更流量之設定。 15 又，由於彈簧106接觸於液體，而不免擔心金屬之對於 流體之溶解析出和來自藥液之腐I虫。 再者，由於無法完全閉閥，所以為了遮斷流體而需要 連接另一途徑之閥。 I：發明内容3 20 發明概要 因此，本發明之目的係在提供一種儘管在閥之配管後 也可簡單地變更流量之設定，不需擔心金屬之溶解析出和 來自藥液之府蝕的，可閉閥之定流量閥。 本發明提供一種定流量閥，其備有：本體部，其係由 200521364 流體之進口流路及出口流路，及供進口流路及出口流路連 通之小室所形成；及閥構件，其係設在該小室内且具有間 體及第一隔膜部；其中： +於月；)述小至更傷有第二隔膜部及第三隔膜部，其係夹 丨著前= 閥構件而位於兩侧，其有效受麼面積即小於第一隔 膜，則述閥構件及各隔膜部係將各隔膜部之外周部固定在 前述本體部藉以安襄在前述小室内；前述小室被區分為， 二成在則述小室之-端部與前述第二隔膜部間之第一加 10 15 20 笛 乂成在月迷小室之他端部與前述第三隔膜部間之 弟^一加壓室，一报A_ 篦 刖弟一隔膜部與前述第三隔膜部間 弟閥至，及一形成在前述第_ 1 部間之第二閱室m 4厂膜轉w述第二隔膜 膜部施加平時朝内之-定力的手段一…别述弟二隔 述進口流路連义 又，則述第一閥室係與前 上部第二二:述開形成下部第二閥室* 件之間體的間座，並對著該閥座對應於前述闊構 -設在前述第一隔膜之連通孔，跟前述:::膜側’透過 上部第二閥室即位於前述第二隔”弟一間室連通，而 路連通；前述閥體與前述閥座間之问時與前述出口流 之上下動下使前述閥體與間座間之，係在前述閥構件 —用來控制前述第二閱室之流體墨二面積變化’以形成 第二加壓室具有-對著前述第三=體控制部；前述 一定力的手段。 外而施加平時朝内之 轭加一定力之手段，可利用彈 …#置或加壓流體。 200521364 且在别述弟一加壓宮'^罢# 至°又置弟四隔膜部，透過該第四隔 膜部，在前述第二隔膜部施加有一定之力。 圖式簡單說明 以下，茶考附圖，根據本發明之實施形態，更詳細地 說明本發明之上述及其他目的，特徵及優點。於附圖中： 第1圖係顯示本發明定流量閥之—實施形態的縱斷面 第2圖係在第1圖追加顯示之圖。 第3圖係第1圖之本體之一部份之半斜視圖。 第4圖係第1圖之本體之其他一部份之半斜視圖。 第5圖係各隔膜部之半斜視圖。 第6圖為縱斷面圖，係顯示於第1圖中上游側麼力減 少或下游側壓力增加時之狀態。 第7圖為縱斷面圖，係顯示本發明定流量閥之其他實 15施態樣。 、 第8圖係習知定流量閥之縱斷面圖。 C實施方式】 較佳實施例之詳細說明 以下ί尤本發明之實施態樣，參考圖式加以說明，但 不用况’本發明並*受此實施態樣之限定。 於第1圖中’定流量閥之本體部1，從上向下區分為本 奴C4、本體Β3、本體Α2、本體D5，並將此等組合起來構成。 β匕本紅^1 ’具有··小室6，其係於其内部，劃分成第一加 1至U、第二間室12、第一閥室13及第二加壓室18 ;進口 20 200521364 流路23，其係用以從外部向小室6流入流體；及出口流路 30，其係用以從小室6向外部流出流體。 本體A2，係由聚四氟乙烯(PTFE)所形成，而位於本體 部1之中央部。如第3圖所不’在本體A2之上部’設有圓形 5 凹狀之上部階段部19 ;在上部階段部19之中央設有一直徑 小於上部階段部19之開孔部20(成為第一閥室16)。又，在開 孔部20之下面，連續地設有直徑大於開孔部20之圓形凹狀 之下部階段部21。在本體A2之上面部，即，在上部階段19 之周緣部，設有環狀凹溝22 ;又，設有一從側面向本體A2 10 之開口部延伸使兩者之間連通之進口流路23。 本體B3係由PTFE所形成，並卡合固定於本體A2之上 面。如第4圖所示，在本體B3之上部設有圓形凹狀之上部階 段部24，而在上部階段部24之中央即設有一直徑小於上部 階段部24之開口部25(成為上部第二閥室15)。又，在開口部 15 25之下面，連續著設有一直徑小於開口部25之開口部26， 及一與本體A2之上部階段部19同徑之圓形凹狀之下部階段 部28。開口部26之下端面周緣部係成為閥座27。在本體B3 之下面部亦即下部階段部28之周緣部，與本體八2之環狀凹 溝22相對之位置，設有環狀凹溝29 ;又，設有出口流路3〇， 20其係從位於與本體A2之進口流路23相反側；本體B3之側 面，向開孔部25延伸使兩者之間連通。 本體C4係聚氟亞乙烯基材(pvDF)所形成，而嵌合固定 在本體B3之上部。在本體B3之上部中央設有陰螺紋部d以 供螺栓31螺合，而在其下面連續著設有開孔部（孔經阳以成 200521364 為第一加壓室11(第2圖）。在本體C4之側面，設有一從那裡 向開孔部33延伸使兩者之間連通之小徑通氣孔％(第2圖）， 又，在本體C4之下端面，以開孔部33為中心地設有一嵌合 於本體B3之上部階段部24之環狀突部34。 5 本體D5係由PVDF所形成，而嵌合固定在本體A2之底 邛在本體D5之中央部，設有一向上面開口之開孔部（孔 徑）36(第2圖），以成為第二加壓室18，而在開孔部％上面之 周圍，則設有-嵌合固定在本體A2之下部階段部21之環狀 突部37。又，在本體D5之側面，設有一從那裡向開孔部％ 10延伸使兩者之間連通之小徑通氣孔38。 構成本體部1之上述四個本體a，b，C，D，係由螺拴、 螺母（未圖示）所夾持固定著。 PTFE製之閥構件係用符號來表示。閥構件7包含第一 隔膜而該第-隔膜8則備有：在中央設成護手狀較原部 15 39 ;將較厚部39貫穿設置之連通孔4():從較厚㈣之外周 面向直徑方向延伸設置之圓形狀薄膜部41 ;及向上下突出 設置於薄膜41外周緣部之環狀肋部42。閱構件？，更包含 有：反研鉢狀閥體43，其係設在第一隔膜部8之上部中央且 具有傾斜面；上部杆44，其突設於比閥體43之上部更上方 2〇之地方且上端部形成半狀球；及下部杆45，其係突設在比 較厚部39之下端面中央部更下方之地方且下端部形成半球 狀。這些所含之構件與第一隔膜部係共同地形成一體。設 在第一隔膜部8之外周緣部的環狀肋部42，係嵌合於設在本 體A2及本體B3之兩環狀凹溝22, 29,並被夹持固定在本體 10 200521364 本feB3之間。又，形成在閥體43之傾斜面與本體33開 卩6(第4圖）之下端周緣部之_空間，係作為流體控制 部46作用。 5 10 15 ^在閥構件7之下方，設有i>TFEt之第二隔膜部9，第二 隔膜9 ’包含有··一設在中央之圓柱狀較厚部47 ; -從較厚 ^47下端面延伸設置之圓形狀薄膜部⑽；及—設在薄膜部 ^外周緣部之環狀㈣部49。它們係形成_體。又，薄膜 部二之外周緣部之環狀密封部49，係夾持固定在本體幻之 上部階段部24，與本體C4之環狀突部34間。 又，第二隔膜部9之受壓面積，有必要設成比第一隔膜 部8之受壓面積更小。 、 一 一在閥構件7之上方，言史有PTFE製之第三隔膜部⑺。第 :隔，：10,包含有：-設在中央之圓柱狀較厚部50; _ 攸較厚部50之上端面向徑向延伸設置之圓形狀薄膜部51 · 及设在薄膜部51之外周緣部的環狀密封部52。它們係形成 一體、。像這樣，第三隔膜部H)之形狀係與第二_部9^ 狀成為同_，而上下反過來配置著。較厚部別之上俨: 熟m件7之下部杆45接觸著，又，薄膜部51之外周^部^ 環狀密封部52，係夾持固定在本體A2之下部階段部加 體D5之環狀突部37間。 V、 弟二隔膜部10之受壓面積，也與上述同樣，有、 要6又成比第—隔膜部8之受壓面積更小。 、 如第1，2圖所# ’PVDF製之彈簧支承53係配置在本體 C4之開孔部33内，並嵌合在第二隔膜部9之較厚部47。彈菩 20 200521364 支承53 ’係藉由彈簧54(配置在與螺合於本體C4之陰螺部32 之螺栓31間），經常將第二隔膜部9向内（第丨為向下方向）加 壓。本實施形態，雖用彈簧54及彈簧支承53來形成加壓手 段，但利用一種導入加壓空氣等之流體於本體匸4之開口部 5 44(第2圖）之手段也無妨。 同樣，PVDF製之彈簧支承55及sus製之彈簧56係配置 本體5之開孔部36(第2圖），而彈簧支承55即嵌合於第三隔膜 部10之較厚部5〇。兩者係以同於彈簧支承S3及彈簧Μ之作 用把第三隔膜部10向内（第丨圖為向上)加壓。關於其他者係 1 〇 因同於上述而省略說明。 在以上所說明之各構成下，形成在本體部1内部之小室 6,係從上區分為第一加壓室n、第二閥室12、第一閥室U， 及第二加壓室18,其中：第一加壓室u，係由第二隔膜部9 及本體C4之開孔部33所形成；第二閥室12，係由下部第二 15閥至14及上部第二閥室15所形成，其中，下部第二閱室μ 係形成在第一隔膜部8與本體Β3之下部階段部以間，而上部 第二閥室15係由第二隔膜部9及本體Β3之開孔部乃所形 成；第-閥室13，係由下部第一閥室16及上部第一閱如 所成其中，下部第一閥室16係由第三隔膜部10及本體八2 2開孔部20所形成，而上部第一閥室17即由第一隔膜8及本 體Α2之階段部所形成；第二加壓室18係由第二隔膜部⑺及 本體D5之開孔部36所形成。 由上述之構成所成之第一實施態樣之定流量閱係 如下。 12 200521364 從本體A2之進口流路23流入於第一閥室13之流體，首 先，藉著通過閥構件7之連通孔40而被減壓後流入於下部第 二閥室14。更且，當流體從下部第二閥室14通過流體控制 部46並流入於上述第二閥室15時，因在流體控制部46之壓 5力損失而再度被減壓後，從出口流路30流出。在此，由於 連通孔40之直徑設定得充份短小，所以流過閥之流量由連 通孔40前後之壓力差所決定。 此時，如果檢討各隔膜部8，9，1〇受自流體之力的話， 第一隔膜部8承受因第一閥室13與下部第二閥室14内之流 10體壓力差而向上之力，第二隔膜部9承受因上部第二閥室15 之流體壓力而向上之力，第三隔膜部1〇即承受因第一閥室 13内之流體壓力而向下之力。在此，由於第一隔膜部8之受 壓面積設定得充份大於第二隔膜部9及第三隔膜部1〇之受 壓面積，所以加於第二、第三隔膜部9、1〇之力，較之作用 15於第一隔膜部8之力，幾可忽視之。因此，閥構件7受自流 體之力，成為因第一閥室13内與下部第二閥室14内之流體 壓力差而向上之力。 又，閥構件7，係藉第一加壓室丨丨之加壓手段而向下方 附勢，同時藉第二加壓室18之加壓手段而向上方附勢者。 2〇只要將第-加壓室11之加壓手段之力預先調整得大於第二 加壓室18之加壓手段之力，閥構件受自各加壓手段之合力 即成為向下之力。 因此，閥構件7’便安定於藉助於各加壓手段之向下方 之合力，與藉助於下部第二閥室14内之流體壓力之向上方 13 200521364 之力平衡的位置上。就是，下部第二閱室14之麼力藉由流 體控制部46之開σ面積而自立地被調整，以便藉助於各加 麼手段之合力與藉助於流體壓力差之力平衡。 5 因此’只要藉助於各加壓手段之朝下之合力沒有變 $㈤至13内與下部第二閥室14内之流體壓力差即成 為一定，保持連通孔4G之前後之屢力差成為—定，因此流 閥之流量經常保持一定。 在以上之動作下，本定流量閥前後之流體壓力即使有 變化，也可保持流量於一定。 1〇 又’本定流量閥，由於作用於閥構件7之各加壓手段之 合力，與藉助於第-閥室Β内與下部閥室Μ内之流體壓力 差的力平衡地作動，所以只要調整變更該作用於閥構件7之 各加壓手段之合力，第一閥室13與下部第二闕室14之流體 壓力差即成為與其對應之值。因此，可以變更調整連通孔 15 40前後之壓力差，從而不需卸閥也可變更調整流量。 再者，只要將藉助於第一加壓室η之加壓手段之力調 整得小於藉助於第二加壓室18之加壓手段之力，作用於閥 構件7之合力即成為只朝上，變成將閥構件7之閥體43向本 體Β3之開口部26之閥座按壓之樣子，從而可遮斷流體。即， 20 定流量閥成為閉塞狀態。 第7圖為一縱斷面圖，係顯示本發明之定流量閥之第二 實施態樣。本實施態樣，其加壓手段變為壓縮空氣以替代 彈簧。本體Α2、本體Β3、本體D5、閥構件7、第二隔膜部9、 第三隔膜部10,及，對於第三隔膜部1〇加壓之手段之構造， 14 200521364 係與第一實施態樣之定流量閥同一，動作也同樣，所以省 略其說明。 如第7圖所示，設有一嵌合固定在本體B3之上部的本體 E57。本體E57，備有：斷面圓形狀之隔膜室6〇，其係於中 5央貫穿延伸本體E57之上下端面，並在上部擴大直徑；及通 氣孔61，其係用來連通隔膜室60與外部，並在下端面，以 隔膜室60為中心地設有一嵌合於本體B3之階段部24的環狀 突部62。 位於本體E57上部之本體F58，備有：一設在下部之氣 1〇室63 ;及供氣孔64，其係貫穿氣室63及上端面，從外部向 氣室63導入壓縮空氣等。 第四隔膜部59，備有：圓筒形肋65，其係設在周緣部， 外徑即本體E57之隔膜室60大致同徑；一設在中央之圓柱部 66 ;及膜部67，其係設成連接圓筒形肋65之下端面内周及 15 圓柱部之上端面外周。圓筒形肋65，係嵌合固定於本體E57 之隔膜室60，同時被夾持固定在本體B3與本體E57間，使得 圓柱部66在隔膜室60之中自由上下移動。又，在圓柱部66 之下部，嵌合有第二隔膜部9之較厚部47(第2圖）。 從上述構成，由第二隔膜部9、本體E57之隔膜室60及 20本體F58之氣室63來形成第一加壓室11(第1圖），且，第四隔 膜部59上面承受壓縮空氣等之壓力，藉此第二隔膜部9經常 被朝内加壓（第6圖為朝下）。 關於動作，由於與第一實施態樣同一，所以省略其說 明。使用壓縮空氣作為加壓手段之構成，藉此調整變更壓 15 200521364 縮空氣之壓力，從而可調整變更將第二隔膜部9朝内（第6圖 為朝下）加壓之力。為此，只要用電動空氣壓式調節器等來 調整壓縮空氣之壓力，即可藉遙控操作來進行流量之變 更、遮斷。 5 由以上之構成所設置之本發明之定流量閥具有以下優 異之特徵。 (1) 由於可以藉著變更借助於第一加壓室之加壓手段的 朝内之力，而變更流量，所以不需卸閥就可變更流量。 (2) 由於沒有彈簧等金屬接觸液體，所以可防止來自金 10 屬析出之流體之污染。 (3) 若將借助於第一加壓室之加壓手段的朝内之力，調 整得小於借助於第二加壓室之加壓手段的朝内之力，則可 遮斷流體，所以不需要另外連接流體遮斷用閥。 (4) 若將第一加壓手段作成依靠壓縮空氣，則可使用電 15 動空氣壓式調節器等，藉遙控操作來進行流量之變更、遮 斷。 I：圖式簡單說明】 第1圖係顯示本發明定流量閥之一實施形態的縱斷面 圖。 20 弟2圖係在弟1圖追加颁不之圖。 第3圖係第1圖之本體之一部份之半斜視圖。 第4圖係第1圖之本體之其他一部份之半斜視圖。 第5圖係各隔膜部之半斜視圖。 第6圖為一縱斷面圖，係顯示於第1圖中上游側壓力減 16 200521364 少或下游側壓力增加時之狀態。 第7圖為一縱斷面圖，係顯示本發明定流量閥之其他實 施態樣。 第8圖係習知定流量閥之縱斷面圖。 5 【圖式之主要元件代表符號表】 1…本體部 25，26…開口部 6···小室 27，102…閥座 7…閥構件 28···下部階段部 8···第一隔膜部 30···出口流路 9···第二隔膜部 31…螺栓 10…第三隔膜部 32…陰螺紋部 11…加壓室 35…小徑開孔部 12…第二閥室 37···環狀突部 13…第一閥室 39，47，50…較厚部 14…下部第二閥室 40···連通孔 15…上部第二閥室 42…環狀肋部 16…下部第一閥室 43，103…閥體 17…上部第一閥室 44···上部杆 18…加壓室 45···下部杆 19，24···上部階段部 46…流體控制部 20，33，36···開孔部 49，52···環狀密封部 21…下部階段部 51…薄膜部 22，29…環狀凹溝 53…彈簧支承 23···進口流路 54…彈簧 17 200521364 55…彈簧支承 67…膜部 59…第四隔膜部 101···流路 60···隔膜室 104···隔膜 61···通氣孔 105···隔膜室 63…氣室 106…彈簧 64···供氣孔 107…聯絡路 65…圓筒形肋 108…流體控制部 66…圓柱部 A2，B3，C4，D5，E57，F58 18200521364 Description of the invention: I: The technical field to which the invention belongs 2 Field of the invention The present invention relates to a valve whose fluid pressure on the upstream and downstream sides of the valve also changes the flow rate to a constant flow valve. More specifically, This invention relates to a constant flow valve with excellent adaptability to prevent the generation of dust without sliding parts. Background of the Invention 10 15 In the past, various types of constant flow valves have been proposed. One of them has been disclosed in Japanese Patent Application Laid-Open No. 5-99354. As shown in Fig. 8, this type of constant flow valve uses a valve seat 102 provided in the flow path 101 and a valve body 103 having an opposite side to define the diaphragm chamber 105. In the diaphragm 104, a force in the valve opening direction acts through the spring 106, and at the same time, a communication path 107 is just formed in the diaphragm chamber, so that the inlet-side fluid flows into the diaphragm chamber 105. Under this configuration, the fluid flowing from the inlet side of the constant flow valve into the constant flow valve pressurizes the diaphragm HM in the direction of the closed valve, and is reduced in the communication path 107 to enter the partition. The fluid flowing into the diaphragm ，, that is, the diaphragm is added in the U direction U through * so that when ⑽ and the diaphragm body of the diaphragm = the body control section 间 is further depressurized, and flows out sideways. # The distance from the force in the direction of W. Chuan and the force in the valve opening direction is at a distance from the fluid pressure on the side of the valve in the state of equilibrium when the diaphragm 104 is attached to the valve opening direction, or, 20 200521364 When the fluid pressure at the outlet side decreases, the force acting in the valve closing direction of the diaphragm 104 increases and the opening area of the fluid control portion 108 decreases, so that the fluid pressure in the diaphragm chamber 105 increases. Thereby, the force acting in the valve opening direction of the diaphragm 104 also increases, so that the difference between the valve closing direction and the valve opening direction 5 acting on the diaphragm 104 becomes equal to the force of the spring 106 again. On the one hand, if the fluid pressure on the inlet side of the constant flow valve decreases or the fluid pressure on the outlet side of the constant flow valve increases, the opening area of the fluid control section 108 will increase, so the direction of valve closing acting on the diaphragm 104 and The gap in the force in the valve opening direction is still in balance with the force of the spring 106. 10 Therefore, the difference between the fluid pressure acting on the inlet side of the diaphragm 104 and the fluid pressure in the diaphragm chamber 105 is maintained constant, so the pressure difference between the front and rear of the communication path 107 becomes constant, so that the flow rate can be maintained constant. However, the strength of the spring 106 cannot be changed without removing the constant flow valve, so the flow setting cannot be changed after the valve is piping. 15 In addition, since the spring 106 is in contact with the liquid, there is no doubt that the dissolution of the metal into the fluid and the rot from the medicinal solution will cause concern. Furthermore, since the valve cannot be completely closed, it is necessary to connect a valve of another route in order to shut off the fluid. I: Summary of the invention 3 20 Summary of the invention Therefore, the object of the present invention is to provide a method that can easily change the flow rate setting even after the piping of the valve, without worrying about the dissolution of metals and the erosion from the chemical solution. Constant flow valve with closed valve. The invention provides a constant flow valve, which is provided with a body part formed by an inlet flow path and an outlet flow path of a 200521364 fluid, and a chamber for connecting the inlet flow path and the outlet flow path; and a valve member, which is It is located in the small room and has an intermediary body and a first diaphragm portion; of which: + 于 月;) The second diaphragm portion and the third diaphragm portion are as small as possible, which are located between the front and the valve members. Side, its effective receiving area is smaller than the first diaphragm, then the valve member and each diaphragm portion fix the outer peripheral portion of each diaphragm portion to the main body portion so as to be located in the small chamber; the small chamber is divided into 20% The first between the end of the chamber and the second diaphragm section is added 10 15 20 and the flute becomes the brother between the other end of the moon and the third diaphragm section ^ a pressurized chamber, one report A_ The first diaphragm part and the third diaphragm part are connected to each other, and a second reading room formed between the first part _ 1 and the second membrane part. The second diaphragm part is usually applied inward. -Means of fixing one ... Do n’t mention my brother, I ’ll tell you about the flow path of the inlet. And the upper part of the second upper part: the middle seat of the lower second valve chamber * is opened, and the valve seat corresponds to the aforementioned wide structure-the communication hole provided in the first diaphragm, and the aforementioned: : Membrane side 'communicates through the upper second valve chamber, which is located in the aforementioned second compartment, and the road communicates; the time between the valve body and the valve seat and the outlet flow moves up and down to make the valve body and The space between the seat and the valve is used to control the area change of the fluid ink 2 of the second reading room to form a second pressurizing chamber having-facing the third = body control unit; the aforementioned means of certain force. The external means of applying a certain amount of force to the inward yoke can be used to set or pressurize the fluid. 200521364 In addition, pressurize the palace in the place of Besshudi ^^ # and set the diaphragm part of the brother, through the The fourth diaphragm portion applies a certain force to the aforementioned second diaphragm portion. The drawings are briefly explained below. The tea will be described with reference to the drawings, and the above and other objects, features, and advantages of the present invention will be described in more detail based on the embodiments of the present invention. In the drawings: Figure 1 shows the constant flow rate of the present invention -The longitudinal section of the embodiment. Fig. 2 is a diagram additionally shown in Fig. 1. Fig. 3 is a semi-oblique view of a part of the body of Fig. 1. Fig. 4 is the other body of Fig. 1 A partially oblique view of the part. Fig. 5 is a semi-inclined view of each diaphragm part. Fig. 6 is a longitudinal sectional view showing the state when the upstream side pressure decreases or the downstream side pressure increases in the first image. Fig. 7 is a longitudinal sectional view showing other embodiments of the constant flow valve according to the present invention. Fig. 8 is a longitudinal sectional view of a conventional constant flow valve. C Embodiment] Details of the preferred embodiment The following describes the embodiment of the present invention, which will be described with reference to the drawings, but needless to say, the present invention is not limited by this embodiment. In the first figure, the body portion 1 of the constant flow valve is from top to bottom. The subordinates are divided into the slave C4, the ontology B3, the ontology A2, and the ontology D5, and these are combined to form. β Dagger Red ^ 1 'has a small chamber 6, which is tied to the inside, and is divided into first plus 1 to U, second chamber 12, first valve chamber 13 and second pressurizing chamber 18; inlet 20 200521364 The flow path 23 is used to flow fluid from the outside to the small chamber 6; and the outlet flow path 30 is used to flow fluid from the small chamber 6 to the outside. The main body A2 is formed of polytetrafluoroethylene (PTFE), and is located at the center of the main body portion 1. As shown in FIG. 3, a circular 5 concave upper stage portion 19 is provided 'on the upper portion of the main body A2'; an opening portion 20 (becoming the first stage) having a diameter smaller than that of the upper stage portion 19 is provided in the center of the upper stage portion 19 Valve chamber 16). Further, a circular concave lower step portion 21 having a diameter larger than that of the opening portion 20 is continuously provided below the opening portion 20. An annular groove 22 is provided on the upper surface of the main body A2, that is, a peripheral portion of the upper stage 19; and an inlet flow path 23 extending from the side toward the opening of the main body A2 10 to communicate between the two is provided. . The main body B3 is formed of PTFE and is fixed to the upper surface of the main body A2. As shown in FIG. 4, a circular concave upper stage portion 24 is provided on the upper portion of the body B3, and an opening portion 25 (becoming the upper second portion) having a diameter smaller than that of the upper stage portion 24 is provided in the center of the upper stage portion 24. Valve chamber 15). Below the openings 15 to 25, an opening 26 having a diameter smaller than that of the openings 25 and a circular concave lower step portion 28 having the same diameter as the upper step portion 19 of the main body A2 are continuously provided. The peripheral edge portion of the lower end surface of the opening portion 26 is a valve seat 27. On the lower surface of the body B3, that is, on the periphery of the lower stage portion 28, an annular groove 29 is provided at a position opposite to the annular groove 22 of the body 8; and an outlet flow path 30, 20 and It is located on the side opposite to the inlet flow path 23 of the main body A2; the side of the main body B3 extends to the opening portion 25 so that the two communicate with each other. The body C4 is made of polyvinylidene fluoride (pvDF), and is fitted and fixed to the upper part of the body B3. A female screw portion d is provided at the center of the upper portion of the main body B3 for the bolt 31 to be screwed, and an opening portion is continuously provided below it (Kong Jingyang Yicheng 200521364 is the first compression chamber 11 (Figure 2). On the side of C4, there is a small-diameter vent hole (Fig. 2) extending from there to the opening portion 33 so as to communicate between them. Also, the lower end of the body C4 is provided with the opening portion 33 as the center. A ring-shaped protrusion 34 is fitted into the upper stage portion 24 of the body B3. 5 The body D5 is formed of PVDF, and is fitted and fixed to the bottom of the body A2. At the center of the body D5, there is an opening which is opened upward. The opening portion (aperture) 36 (FIG. 2) becomes the second pressurizing chamber 18, and around the upper portion of the opening portion, a ring-fittingly fixed stage portion 21 at the lower portion of the body A2 is provided. A protrusion 37. On the side of the body D5, a small-diameter vent hole 38 extending from there to the opening portion 10 is provided to communicate between the two. The above-mentioned four bodies a, b, and C constituting the body 1 , D, are clamped and fixed by bolts and nuts (not shown). Valve components made of PTFE are represented by symbols. Valve components 7 packs The first diaphragm and the first diaphragm 8 are provided with a hand guard-like 15 39 in the center; a communication hole 4 () that extends through the thicker portion 39: extending from the outer periphery of the thicker ridge in the diameter direction A circular film portion 41 is provided; and a ring-shaped rib portion 42 protruding upward and downward from the outer peripheral edge portion of the film 41. The reading member? Further includes an anti-mortar valve body 43 provided on the first diaphragm portion. 8 the center of the upper part has an inclined surface; the upper rod 44 is protruded at a position 20 higher than the upper part of the valve body 43 and the upper end portion forms a hemisphere; and the lower rod 45 is protruded at a relatively thick part 39 The lower end face is further below the central portion and the lower end portion is formed in a hemispherical shape. These contained members are integrally formed with the first diaphragm portion system. An annular rib portion 42 provided at the outer peripheral portion of the first diaphragm portion 8 Is fitted into two annular grooves 22, 29 provided in the body A2 and the body B3, and is clamped and fixed between the body 10 200521364 and feB3. In addition, the inclined surface formed on the valve body 43 and the body 33 are opened.卩 6 (figure 4) The _space of the lower end peripheral portion functions as the fluid control portion 46. 5 10 15 ^ 在 阀Below the piece 7, there is a second diaphragm portion 9 of i > TFEt, and the second diaphragm 9 'includes a cylindrical thick portion 47 provided in the center;-a circle extending from the lower end surface of the thicker ^ 47 The shape of the film portion —; and the ring-shaped ㈣ portion 49 provided on the outer peripheral edge portion of the thin film portion 系. They are formed into a body. In addition, the ring-shaped sealing portion 49 on the outer peripheral edge portion of the thin film portion 2 is clamped and fixed to the body The upper upper stage portion 24 and the annular protrusion 34 of the body C4. The pressure area of the second diaphragm portion 9 needs to be set smaller than the pressure area of the first diaphragm portion 8. Above the valve member 7, there is a third diaphragm portion ⑺ made of PTFE. No .: Separate, 10, including:-a cylindrical thick portion 50 provided in the center; _ a thick thin film portion 51 provided at the upper end of the thick portion 50 and extending in the radial direction; and provided on the outer periphery of the thin film portion 51 Edge portion of the annular seal portion 52. They form one body. In this way, the shape of the third diaphragm portion H) is the same as the shape of the second diaphragm 9 and is arranged upside down. The upper part of the thicker part: The lower part 45 of the cooked part 7 is in contact, and the outer part ^ of the film part 51 ^ The annular sealing part 52 is clamped and fixed to the lower part of the body A2 and the body D5. 37 annular protrusions. V. The pressure-receiving area of the second diaphragm portion 10 is the same as above, and the pressure-receiving area of the second diaphragm portion 8 is smaller than that of the first-diaphragm portion 8. As shown in FIGS. 1 and 2, a spring support 53 made of “PVDF” is arranged in the opening portion 33 of the main body C4 and is fitted into the thick portion 47 of the second diaphragm portion 9. Tuanpu 20 200521364 support 53 'is by a spring 54 (located between the bolt 31 and the female screw portion 32 screwed to the body C4), the second diaphragm portion 9 is often inward (the first direction is downward) Pressure. Although the pressurizing means is formed by the spring 54 and the spring support 53 in this embodiment, a means for introducing a fluid such as pressurized air into the opening 5 44 (Fig. 2) of the main body 匸 4 may be used. Similarly, a spring support 55 made of PVDF and a spring 56 made of sus are provided with the opening portion 36 (Fig. 2) of the main body 5, and the spring support 55 is fitted into the thicker portion 50 of the third diaphragm portion 10. Both of them press the third diaphragm portion 10 inward (upward in the figure) with the same functions as the spring support S3 and the spring M. The other parts are the same as those described above, and explanations are omitted. With each of the configurations described above, the small chamber 6 formed inside the main body portion 1 is divided into the first pressure chamber n, the second valve chamber 12, the first valve chamber U, and the second pressure chamber 18 from above. , Where: the first pressure chamber u is formed by the second diaphragm portion 9 and the opening portion 33 of the body C4; the second valve chamber 12 is formed by the second valve 15 to the lower 14 and the second valve chamber 15 at the upper The lower second reading chamber μ is formed between the first diaphragm portion 8 and the lower stage portion of the main body B3, and the upper second valve chamber 15 is formed by the second diaphragm portion 9 and the opening portion of the main body B3. The first valve chamber 13 is formed by the lower first valve chamber 16 and the upper first. The lower first valve chamber 16 is formed by the third diaphragm portion 10 and the body 8 2 2 opening portion 20 The upper first valve chamber 17 is formed by the first diaphragm 8 and the stage portion of the body A2; the second pressurizing chamber 18 is formed by the second diaphragm portion ⑺ and the opening portion 36 of the body D5. The constant flow rate reading of the first embodiment made up of the above structure is as follows. 12 200521364 The fluid flowing from the inlet flow path 23 of the main body A2 into the first valve chamber 13 is first reduced in pressure through the communication hole 40 of the valve member 7 and then flows into the lower second valve chamber 14. Furthermore, when the fluid passes from the lower second valve chamber 14 to the fluid control unit 46 and flows into the second valve chamber 15, the fluid is decompressed again due to the pressure loss in the fluid control unit 46, and then is decompressed from the outlet flow path. 30 out. Here, since the diameter of the communication hole 40 is set sufficiently short, the flow rate through the valve is determined by the pressure difference before and after the communication hole 40. At this time, if each diaphragm portion 8, 9, 10 is subjected to the force from the fluid, the first diaphragm portion 8 will be subjected to upward pressure due to the pressure difference between the flow in the first valve chamber 13 and the lower second valve chamber 14. The second diaphragm portion 9 receives the upward force due to the fluid pressure in the upper second valve chamber 15, and the third diaphragm portion 10 receives the downward force due to the fluid pressure in the first valve chamber 13. Here, since the pressure-receiving area of the first diaphragm portion 8 is set to be sufficiently larger than the pressure-receiving areas of the second and third diaphragm portions 9 and 10, they are added to the second and third diaphragm portions 9 and 10. The force is almost negligible compared to the force acting on the first diaphragm portion 8. Therefore, the valve member 7 is subjected to the force of the free-flowing fluid and becomes an upward force due to the pressure difference between the fluid in the first valve chamber 13 and the lower second valve chamber 14. In addition, the valve member 7 is downwardly biased by the pressure means of the first pressure chamber 丨 丨, and is upwardly biased by the pressure means of the second pressure chamber 18 at the same time. 20 As long as the force of the pressure means of the first pressure chamber 11 is adjusted in advance to be greater than the force of the pressure means of the second pressure chamber 18, the valve member is subjected to a downward force by the combined force of the pressure means. Therefore, the valve member 7 'is settled in a position balanced by the downward force of the respective pressure means and the upward force of 13 200521364 by the fluid pressure in the lower second valve chamber 14. That is, the force of the lower second reading room 14 is independently adjusted by the opening σ area of the fluid control section 46 so that the combined force of the various means and the force of the fluid pressure difference are balanced. 5 Therefore, as long as the downward force by the pressure means does not change, the pressure difference between the fluid in the 13 and the lower second valve chamber 14 becomes constant, and the repeated force difference before and after maintaining the communication hole 4G becomes- The flow rate of the flow valve is always kept constant. Under the above actions, even if the fluid pressure before and after the constant flow valve is changed, the flow can be kept constant. 10. The fixed flow valve operates in balance with the force of the pressure difference between the first valve chamber B and the lower valve chamber M due to the combined force of the pressure means acting on the valve member 7. By adjusting and changing the combined force of the pressure means acting on the valve member 7, the fluid pressure difference between the first valve chamber 13 and the second lower chamber 14 becomes a corresponding value. Therefore, the pressure difference between the front and rear of the adjustment communication hole 15 and 40 can be changed, so that the adjustment flow rate can be changed without removing the valve. Furthermore, as long as the force by the pressure means by the first pressure chamber η is adjusted to be smaller than the force by the pressure means by the second pressure chamber 18, the total force acting on the valve member 7 will only be upward, The valve body 43 of the valve member 7 is pressed against the valve seat of the opening portion 26 of the main body B3, thereby blocking the fluid. That is, the 20 constant flow valve is closed. Fig. 7 is a longitudinal sectional view showing a second embodiment of the constant flow valve of the present invention. In this embodiment, the pressurizing means is compressed air instead of a spring. Main body A2, main body B3, main body D5, valve member 7, second diaphragm portion 9, third diaphragm portion 10, and structure of means for pressurizing third diaphragm portion 10, 14 200521364 is the same as the first embodiment Since the fixed flow valves are the same and operate in the same manner, the descriptions thereof are omitted. As shown in Fig. 7, a main body E57 is fitted and fixed to the upper portion of the main body B3. The main body E57 is provided with a diaphragm chamber 60 of a circular cross section, which is connected to the middle and central sides of the main body E57 and extends the upper and lower end faces of the main body E57, and expands the diameter at the upper part; and a vent hole 61, which is used to connect the diaphragm chamber 60 and On the lower end surface, a ring-shaped projection 62 fitted on the stage portion 24 of the main body B3 is provided around the diaphragm chamber 60 as a center. The main body F58 located at the upper part of the main body E57 is provided with: a gas chamber 10 provided at the lower part; and an air supply hole 64, which penetrates the air chamber 63 and the upper end surface, and introduces compressed air into the air chamber 63 from the outside. The fourth diaphragm portion 59 is provided with a cylindrical rib 65 provided at the peripheral portion, and the outer diameter of the diaphragm chamber 60, which is the body E57, is approximately the same diameter; a cylindrical portion 66 provided at the center; and a membrane portion 67, which It is provided to connect the inner periphery of the lower end surface of the cylindrical rib 65 and the outer periphery of the upper end surface of the 15 cylindrical portion. The cylindrical rib 65 is fitted and fixed to the diaphragm chamber 60 of the main body E57 and is clamped and fixed between the main body B3 and the main body E57, so that the cylindrical portion 66 can move up and down in the diaphragm chamber 60 freely. A thicker portion 47 of the second diaphragm portion 9 is fitted to the lower portion of the cylindrical portion 66 (see FIG. 2). From the above configuration, the first diaphragm 11 (FIG. 1) is formed by the second diaphragm portion 9, the diaphragm chamber 60 of the main body E57, and the air chamber 63 of the main body F58, and the upper surface of the fourth diaphragm portion 59 receives compressed air. The second diaphragm portion 9 is often pressurized inwardly by equal pressure (downward in FIG. 6). Since the operation is the same as that of the first embodiment, the description is omitted. The structure using compressed air as the pressurizing means is used to adjust and change the pressure 15 200521364 The pressure of the compressed air can be adjusted to change the force for pressing the second diaphragm portion 9 inward (downward in Fig. 6). Therefore, as long as the pressure of compressed air is adjusted by an electric air pressure regulator, etc., the flow rate can be changed and blocked by remote control. 5 The constant flow valve of the present invention provided with the above structure has the following excellent characteristics. (1) Since the flow rate can be changed by changing the inward force of the pressure means by the first pressurizing chamber, the flow rate can be changed without removing the valve. (2) Since no metal, such as a spring, comes in contact with the liquid, contamination from fluids that precipitate out of the metal can be prevented. (3) If the inward force by the pressure means of the first pressure chamber is adjusted to be smaller than the inward force by the pressure means of the second pressure chamber, the fluid can be blocked, so A separate valve for fluid shutoff is required. (4) If the first pressurizing means is made to rely on compressed air, an electric air pressure regulator can be used to change and block the flow rate by remote control. I: Brief Description of Drawings] Fig. 1 is a longitudinal sectional view showing an embodiment of the constant flow valve of the present invention. 20 Brother 2 pictures are added to Brother 1 pictures. Fig. 3 is a half perspective view of a part of the body of Fig. 1. Figure 4 is a semi-angled view of the other part of the body of Figure 1. Fig. 5 is a half perspective view of each diaphragm portion. Fig. 6 is a longitudinal sectional view showing the state when the pressure on the upstream side decreases or the pressure on the downstream side increases as shown in Fig. 1. Fig. 7 is a longitudinal sectional view showing another embodiment of the constant flow valve of the present invention. Fig. 8 is a longitudinal sectional view of a conventional constant flow valve. 5 [Representative symbols for the main components of the drawing] 1 ... body 25, 26 ... opening 6 ... chamber 27, 102 ... valve seat 7 ... valve member 28 ... lower stage portion 8 ... first diaphragm Part 30 ... Outlet flow path 9 ... Second diaphragm portion 31 ... Bolt 10 ... Third diaphragm portion 32 ... Female threaded portion 11 ... Pressurizing chamber 35 ... Small-diameter opening portion 12 ... Second valve chamber 37 ... ·· Ring protrusion 13 ... First valve chamber 39,47,50 ... Thick portion 14 ... Lower second valve chamber 40 ... · Communication hole 15 ... Upper second valve chamber 42 ... Ring rib 16 ... Lower First valve chambers 43, 103 ... Valve body 17 ... Upper first valve chamber 44 ... Upper rod 18 ... Pressure chamber 45 ... Lower rod 19, 24 ... Upper stage portion 46 ... Fluid control portion 20, 33, 36 ... Openings 49, 52 ... Ring seal 21 ... Lower stage portion 51 ... Film portion 22, 29 ... Ring groove 53 ... Spring support 23 ... Inlet flow path 54 ... Spring 17 200521364 55 ... Spring support 67 ... Membrane part 59 ... Fourth diaphragm part 101 ... Flow path 60 ... Diaphragm chamber 104 ... Diaphragm 61 ... Vent hole 105 ... Diaphragm chamber 63 ... Air chamber 106 …spring 64 ··· Air supply hole 107 ... Communication path 65 ... Cylinder rib 108 ... Fluid control part 66 ... Cylinder part A2, B3, C4, D5, E57, F58 18