JP2021055783A - Valve device and fluid supply unit - Google Patents

Abstract

To provide a valve device which can inhibit complication and enlargement of its structure and secure a safety function.SOLUTION: A valve device 1 includes: a single passage block 2 formed with a fluid inflow passage 231, a fluid outflow passage 232, and a communication passage 233 which allows the fluid inflow passage 231 and the fluid outflow passage 232 to communicate with each other; a diaphragm 3 which opens or closes the communication passage 233; a diaphragm presser 4 which presses the diaphragm 3; an actuator 5 which presses down the diaphragm 3 through the diaphragm presser 4; and a check valve 7 which is incorporated into the communication passage 233 and allows only a fluid flowing from the fluid inflow passage 231 to the fluid outflow passage 232.SELECTED DRAWING: Figure 2

Description

The present invention relates to a valve device and a fluid supply unit.

Patent Document 1 describes a flow path block in which a flow path is formed, a valve body that opens and closes the flow path, an actuator that presses the valve body via a valve body retainer, and a bonnet that connects the flow path block and the actuator. A valve device comprising the above is disclosed.

Japanese Unexamined Patent Publication No. 2016-161022

However, in the fluid supply unit provided with the valve device described in Patent Document 1, the closing pressure of the valve device is exceeded due to the mixing of other fluid (gas) on the downstream side due to a malfunction of the fluid supply unit or the like, and the fluid flows through the flow path. There is a risk of backflow.

Therefore, it is generally considered to provide a separate check valve as a safety measure, but in order to provide a single check valve, it is necessary to secure a space for adding a base block and increase the size of the fluid supply unit. Will lead to. Further, in order to provide a check valve in the valve device, it is necessary to add a flow path block, and it is necessary to separately secure a space for adding the flow path block, which complicates the structure of the valve device and makes the valve device large. There was a problem that it would become.

The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a valve device and a fluid supply unit capable of suppressing complicated structure and increasing size and ensuring a safety function. To do.

According to an aspect of the present invention, a single flow path block in which a fluid inflow flow path, a fluid outflow flow path, and a communication path communicating the fluid inflow flow path and the fluid outflow flow path are formed. A valve body that opens and closes the communication passage, a valve body retainer that presses the valve body, an actuator that presses the valve body via the valve body retainer, and a fluid inflow flow path that is built in the communication passage. Provided is a valve device comprising a check valve that allows only fluid flowing from the fluid to the fluid outflow flow path.

According to the aspect of the present invention, it is possible to suppress the complexity and size of the structure and secure the safety function.

It is a perspective view which shows the fluid supply unit which concerns on embodiment of this invention. It is sectional drawing which shows the valve device which concerns on 1st Embodiment (the diaphragm and the valve body for a check valve are both closed). It is an enlarged view which shows the main part A in FIG. It is sectional drawing which shows the valve device which a diaphragm and a check valve valve body are in a closed state and an open state, respectively. It is sectional drawing which shows the valve device which both the diaphragm and the valve body for a check valve are in an open state. It is sectional drawing which shows the valve device which concerns on 2nd Embodiment. It is an enlarged view which shows the main part B in FIG. It is a bottom view which shows the large diameter part of a filter. It is sectional drawing which shows the 1st modification of a filter. It is sectional drawing which shows the 2nd modification of a filter.

Hereinafter, embodiments of the present invention (hereinafter, referred to as the present embodiment) will be described with reference to the accompanying drawings. Throughout the specification, the same elements are designated by the same reference numerals.

First, the fluid supply unit 100 according to the present embodiment will be described with reference to FIG.

FIG. 1 is a perspective view showing a fluid supply unit 100. In FIG. 1, the longitudinal direction and the width direction of the fluid supply unit 100 are defined as a direction along the X axis and a direction along the Y axis, respectively. Hereinafter, for convenience of description, the longitudinal direction and the width direction of the fluid supply unit 100 are simply referred to as the longitudinal direction and the width direction.

As shown in FIG. 1, the fluid supply unit 100 is used as a means for supplying process gas and purge gas in a semiconductor manufacturing apparatus (CVD apparatus, sputtering apparatus, etching apparatus, etc.).

The fluid supply unit 100 is provided with a metal base plate BS arranged along the width direction and extending in the longitudinal direction. G1 indicates the upstream side, and G2 indicates the downstream side. Various fluid devices 991A to 991E are installed on the base plate BS via a plurality of base blocks 992. The plurality of flow path blocks 992 form a flow path (not shown) through which the fluid flows from the upstream side G1 to the downstream side G2.

Here, the "fluid device" is a device used for the fluid supply unit 100, and includes a flow path block that defines a fluid flow path, and at least two flow path ports that open on the surface of the flow path block. It is a device to have. Specifically, the fluid equipment includes, but is limited to, an on-off valve (two-way valve) 991A, a regulator 991B, a pressure gauge 991C, an on-off valve (three-way valve) 991D, a mass flow controller 991E, and the like. is not it. The introduction pipe is connected to the flow path port on the upstream side of the above-mentioned flow path (not shown).

The valve device 1 according to the first embodiment (see FIGS. 2 to 5) and the valve device 1A according to the second embodiment (see FIGS. 6 to 8) are applicable to the on-off valve 991A. It is most preferable that the valve device 1 and the valve device 1A are applied to the on-off valve 991A provided on the most upstream side.

(First Embodiment)
First, the valve device 1 according to the first embodiment will be described in detail with reference to FIG. For convenience of explanation, the vertical direction of the drawing will be described as the vertical direction of the valve device 1.

FIG. 2 is a cross-sectional view showing a valve device 1 (both the diaphragm 3 and the check valve valve body 72 are in the closed state).

As shown in FIG. 2, the valve device 1 includes a single flow path block 2, a diaphragm 3 as a valve body, a diaphragm retainer 4 as a valve body retainer, an actuator 5 as a drive unit, a spacer 6, and a check valve 7. To be equipped. The valve device 1 is a normally closed air-operated valve that opens the diaphragm 3 by introducing drive air as a drive fluid into the actuator 5.

The single flow path block 2 has a flow path block main body 21 on which the flow path 23 is formed and a cylindrical shape (specifically, a cylindrical shape) protruding upward (upper end side in FIG. 2) from one end surface of the flow path block main body 21. , Cylindrical) peripheral wall 22 and. The flow path 23 has a fluid inflow flow path 231 and a fluid outflow flow path 232 and a communication passage 233. On the inner wall surface of the peripheral wall 22, a female screw 221 screwed into an extension portion 514 described later of the actuator 5 is formed.

One end (upper end) of the fluid inflow flow path 231 communicates with the outer periphery of the intermediate portion of the communication passage 233, and the other end (lower end) as the flow path port opens at the other end surface (lower end surface) of the flow path block main body 21. .. In the fluid outflow flow path 232, one end (upper end) of the flow path port is opened at one end surface (upper end surface) of the flow path block main body 21, and the other end (lower end) of the other flow path port is the flow path block. It opens at the other end surface (lower end surface) of the main body 21.

In the present embodiment, the other end of the fluid inflow flow path 231 and the other end of the fluid outflow flow path 232 are both open on the other end surface of the flow path block main body 21, but the present invention is not limited to this. However, for example, both may be opened on the side surface of the flow path block main body 21, one of them may be opened on the other end surface of the flow path block main body 21, and one of them may be opened on the side surface of the flow path block main body 21. It may be opened.

The communication passage 233 is a flow path that communicates the fluid inflow flow path 231 and the fluid outflow flow path 232. In the communication passage 233, one end (upper end of FIG. 2) as one of the flow path ports opens at one end surface (upper end surface of FIG. 2) of the flow path block main body 21, and the other end of the other flow path port (FIG. 2). The lower end of the flow path block main body 21 is opened at the other end surface (lower end surface of FIG. 2). That is, the communication passage 233 is composed of a through hole extending on a straight line (vertical direction in FIG. 2) and penetrating the flow path block main body 21.

One end of the communication passage 233 (upper end of FIG. 2) and one end of the outflow passage 232 (upper end of FIG. 2) communicate with each other via a housing portion 24 surrounded by a peripheral wall 22. An annular (specifically, annular) valve seat 25 is provided on the peripheral edge of one end of the communication passage 233. Further, one end of the communication passage 233 faces the diaphragm 3. The details of the communication passage 233 as a characteristic portion of the valve device 1 will be described later.

The diaphragm 3 is a valve body for opening and closing the communication passage 233 separated from the valve seat 25 or pressed by the valve seat 25. The diaphragm 3 is a diaphragm member that separates the flow path 23 side and the actuator 5 side. Further, the diaphragm 3 is formed in an arc shape that rises toward the actuator 5 side (upper side in FIG. 2) in a natural state, and is made of, for example, a nickel alloy thin plate or the like. Normally, the diaphragm 3 is pressed against the valve seat 25 by the diaphragm retainer 4.

The diaphragm retainer 4 is a retainer member for pressing the diaphragm 3 against the valve seat 25. The diaphragm retainer 4 is housed in the peripheral wall 22 of the flow path block 2 and the extension portion 514 of the actuator 5. Further, the diaphragm retainer 4 has a large diameter portion 41 that can come into contact with the diaphragm 3 and a small diameter portion 42 that protrudes from the large diameter portion 41 toward the actuator 5 side (upper side in FIG. 2) and is inserted into the extension portion 514. Has. The large diameter portion 41 and the small diameter portion 42 are formed coaxially.

The actuator 5 presses the diaphragm 3 against the valve seat 25 or separates the diaphragm 3 from the valve seat 25 via the diaphragm retainer 4 housed in the peripheral wall 22 of the flow path block 2 and the extension portion 514, whereby the communication passage 233 and the fluid outflow flow. The road 232 is blocked or communicated with the road 232. The actuator 5 includes a case 51 provided above the flow path block 2, a piston 52 slidably housed in the case 51 in the vertical direction, and a coil spring 53 that presses the piston 52 toward the flow path block 2. The stem 54 moves in the axial direction (vertical direction in FIG. 2) in conjunction with the piston 52.

The case 51 is a frame member for accommodating the piston 52 and the coil spring 53. The case 51 has a bottomed cylindrical (specifically, bottomed cylindrical) first case 511 as an upper case and a second case 512 as a lower case connected to the first case 511 by screwing. And have. The piston 52 is slidably accommodated in the accommodating space 511f formed by connecting the first case 511 and the second case 512. A coil spring 53 is housed above the piston 52.

The first case 511 has a cylindrical peripheral wall 511a and a top wall 511b provided at one end (upper end) of the peripheral wall 511a. A female screw 511c screwed into the second case 512 is formed on the inner peripheral surface of the other end (lower end) of the peripheral wall 511a. A stem guide hole 511d penetrating the stem 54 in the axial direction (vertical direction) is formed in the center of the top wall 511b. Further, in the center of the top wall 511b, a cylindrical portion 511e protruding from the lower end surface of the top wall 511b to the flow path block 2 side (lower side) is provided. The drive air is introduced into the actuator 5 from the drive air supply control unit (not shown) via the stem guide hole 511d.

An accommodation space 511f for accommodating the coil spring 53 is formed inside the peripheral wall 511a. The coil spring 53 is accommodated in the accommodation space 511f in a compressed state so that one end (upper end) thereof abuts on the top wall 511b and the other end (lower end) abuts on the piston 52.

The top wall 511b is formed with a through hole 511g for bleeding air that penetrates in the vertical direction so as not to interfere with the stem guide hole 511d. The through hole 511g communicates the accommodation space 511f with the outside of the valve device 1.

The second case 512 has a cylindrical peripheral wall 512a, a disc-shaped bottom wall 512b provided at one end (lower end) of the peripheral wall 512a, and a cylindrical shape extending from the bottom wall 512b to the flow path block 2 side (lower side). It has a stretched portion 514 and. On the outer peripheral surface of the peripheral wall 512a, a male screw 512c screwed into the female screw 511c is formed. A through hole 512d through which the stem 54 is inserted is formed in the bottom wall 512b.

The stretched portion 514 includes a hollow hexagonal large-diameter stretched portion 514a extending from the bottom wall 512b to the flow path block 2 side (lower side) and a flow path block 2 side (lower side in FIG. 2) from the large-diameter stretched portion 514a. It has a cylindrical small-diameter stretched portion 514b that stretches to. The large-diameter stretched portion 514a and the small-diameter stretched portion 514b are formed coaxially. Both the stem 54 and the diaphragm retainer 4 are inserted inside the inscribed circle of the large-diameter extending portion 514a. On the other hand, the diaphragm retainer 4 is inserted inside the small diameter extending portion 514b.

On the outer peripheral surface of the small-diameter extending portion 514b, a male screw 515 screwed into the peripheral wall 22 of the flow path block 2 is provided. Then, the actuator 5 is attached to the flow path block 2 by screwing the female screw 221 of the peripheral wall 22 and the male screw 515 of the small diameter extending portion 514b. The small-diameter stretched portion 514b is formed with an air bleeding through hole 516 that penetrates in the radial direction so as not to interfere with the male screw 515. The through hole 516 communicates the inside of the extension portion 514 with the outside of the valve device.

An air introduction chamber 55 is formed between the piston 52 and the bottom wall 512b of the second case 512. A spring receiving portion 521 that holds the other end (lower end) of the coil spring 53 is formed on the surface of the piston 52 facing the top wall 511b.

The stem 54 includes a stem large diameter portion 541 provided with a piston 52 on the outer peripheral side, a stem first small diameter portion 542 protruding from one end (upper end) of the stem large diameter portion 541, and the other end (lower end) of the stem large diameter portion 541. ), And a stem second small diameter portion 543. In the present embodiment, the stem 54 is integrally formed with the piston 52, but the present invention is not limited to this, and the stem 54 may be formed in connection with the piston 52, for example.

The stem first small diameter portion 542 is inserted inside the cylindrical portion 511e of the first case 511. The second small diameter portion 543 of the stem is inserted inside the through hole 512d of the bottom wall 512b and the large diameter extending portion 514a of the extending portion 514.

The stem 54 is formed with an axial flow path 544 and a radial flow path 545 for introducing drive air into the air introduction chamber 55. The axial flow path 544 communicates with the stem guide hole 511d. The radial flow path 545 is formed from the tip (lower end) of the axial flow path 544, and communicates the axial flow path 544 with the air introduction chamber 55.

A sealing material 11 is interposed between the cylindrical portion 511e and the stem first small diameter portion 542. A sealing material 12 is interposed between the piston 52 and the second case 512. A sealing material 13 is interposed between the small diameter portion 543 of the stem 2 and the inside of the large diameter extending portion 514a.

An annular spacer 6 is provided between the tip (lower end) of the small-diameter stretched portion 514b of the stretched portion 514 and the outer peripheral edge of the diaphragm 3. The outer peripheral edge of the diaphragm 3 is held between the spacer 6 and the bottom surface of the accommodating portion 24 of the flow path block 2, and is fixed by screwing the small diameter extending portion 514b into the female screw 221 of the peripheral wall 22. Inside the spacer 6, a large diameter portion 41 of the diaphragm retainer 4 that comes into contact with the diaphragm 3 is inserted.

The check valve 7 is a check valve that allows only the fluid flowing from the fluid inflow flow path 231 to the fluid outflow flow path 232. Further, in the present embodiment, the fluid is composed of a gas such as a process gas or a purge gas, but the fluid is not limited to this, and may be composed of, for example, a liquid. The details of the check valve 7 as a characteristic portion of the valve device 1 will be described later.

Next, the communication passage 233 and the check valve 7 as the characteristic parts of the valve device 1 will be described in detail with reference to FIG.

FIG. 3 is an enlarged cross-sectional view showing a main part A in FIG.

As shown in FIG. 3, the communication passage 233 in the single flow path block 2 includes a check valve 7 that allows only the fluid flowing from the fluid inflow flow path 231 to the fluid outflow flow path 232. As a result, the backflow of the fluid from the fluid outflow flow path 232 to the fluid inflow flow path 231 can be prevented, so that the safety function of the valve device 1 can be ensured. Further, it is not necessary to separately add a flow path block for providing the check valve 7, and it is possible to suppress an increase in size and a complicated structure of the valve device 1.

The outer periphery of the intermediate portion of the communication passage 233 communicates with one end (upper end of FIG. 3) of the fluid inflow flow path 231. That is, when FIG. 3 is viewed from the front, the communication passage 233 is formed so that a part thereof overlaps with the fluid inflow flow path 231 in the vertical direction. As a result, the size of the flow path block 2 can be reduced in the vertical direction as compared with the flow path block in which the fluid inflow flow path and the communication path do not overlap with each other in the vertical direction. As a result, it is possible to further suppress the increase in size of the valve device 1. Further, since one end of the fluid inflow flow path 231 communicates with the outer periphery of the intermediate portion of the communication passage 233 without communicating with the other end (lower end of FIG. 3) of the communication passage 233, it is reversed from the other end of the communication passage 233. A check valve 7 can be attached.

The check valve 7 is attached from the other end (lower end of FIG. 3) of the communication passage 233 which is not provided with the valve seat 25 (that is, does not face the diaphragm 3). As a result, even after the actuator 5 is attached to the flow path block 2, the check valve 7 can be easily attached to and detached from the flow path block main body 21 of the flow path block 2, so that a valve seat is provided (that is,). The valve device 1 can be easily manufactured as compared with a valve device in which a check valve is attached from one end of a communication passage (facing the diaphragm 3).

As shown in FIG. 3, the communication passage 233 has a small-diameter road 233a, a medium-diameter road 233b, and a large-diameter road 233c. The small-diameter road 233a, the medium-diameter road 233b, and the large-diameter road 233c are formed in order from one end of the communication passage 233 (upper side in FIG. 3) toward the other end (lower side in FIG. The small-diameter road 233a, the medium-diameter road 233b, and the large-diameter road 233c are formed coaxially.

The small-diameter path 233a is a flow path for communicating the medium-diameter path 233b and the fluid outflow flow path 232 via the valve chamber. A valve seat 25 is provided on the peripheral edge of one end (upper end of FIG. 3) of the small path 233a. The other end of the small path 233a (lower end of FIG. 3) communicates with one end of the medium path 233b (upper end of FIG. 3).

The medium-diameter road 233b is a flow path for communicating the small-diameter road 233a and the large-diameter road 233c. At one end (upper end) of the medium-diameter path 233b, a reduced-diameter portion 234 is formed as a spring receiving portion for holding one end of the coil spring 73 described later of the check valve 7. At the boundary between the small diameter path 233a and the reduced diameter portion 234, a step 235 is formed as an abutting portion connecting the two. The other end (lower end) of the medium-diameter road 233b communicates with one end (upper end) of the large-diameter road 233c.

The large-diameter path 233c is a flow path for communicating the fluid inflow flow path 231 and the medium-diameter path 233b. Further, when FIG. 3 is viewed from the front, the large-diameter path 233c is formed so as to overlap the fluid inflow flow path 231 along the vertical direction. At one end (upper end) of the large-diameter path 233c, a step 236 is formed as a positioning portion for positioning the check valve seat 71, which will be described later, of the check valve 7. That is, a step 236 is formed at the boundary between the medium-diameter road 233b and the large-diameter road 233c.

A female screw 237 screwed into a plug 74 described later of the check valve 7 is formed on the peripheral wall at the other end (lower end) of the large-diameter path 233c. A communication portion 238 communicating with one end (upper end) of the fluid inflow flow path 231 is formed in the intermediate portion of the large diameter road 233c located between one end of the large diameter road 233c and the other end of the large diameter road 233c. That is, the communication portion 238 is formed between the step 236 and the female screw 237. The communication portion 238 is formed so that its diameter is larger than the diameter of the large-diameter road 233c.

As described above, the check valve 7 is a valve for allowing only the flow of fluid from the fluid inflow flow path 231 to the fluid outflow flow path 232. As shown in FIG. 3, the check valve 7 includes a check valve seat 71, a check valve valve body 72, a coil spring 73 as an urging member, a plug 74 as a positioning member, a plate 75, and a sealing material. Has 76.

The check valve valve seat 71 is a valve seat positioned in the communication passage 233. The check valve valve seat 71 is housed in the large-diameter path 233c of the communication passage 233. The check valve valve seat 71 has a resin valve body contact portion 711 and a metal valve body non-contact portion 712.

The valve body contact portion 711 is made of a fluororesin such as polytetrafluoroethylene (PTFE). The valve body contact portion 711 is provided so as to be in contact with the check valve valve body 72. That is, the portion of the check valve valve seat 71 that can come into contact with the check valve valve body 72 (valve body contact portion 711) is made of resin. As a result, it is possible to improve the sealing property and reduce wear due to contact between the check valve valve body 72 and the valve body contact portion 711 when the check valve 7 is switched from the open state to the closed state. As a result, the service life of the check valve 7 can be extended.

The valve body contact portion 711 has an annular (specifically, annular) valve body contact portion main body 711a provided so that the axial direction is in the vertical direction and an annular shape (specifically, an annular shape) provided on the outer edge of the valve body contact portion main body 711a. Specifically, it has an annular rib 711b. The rib 711b is provided so that its tip (upper end) is in contact with the step 236. Then, the valve body contact portion 711 is positioned on the large-diameter path 233c of the communication passage 233 by the contact between the rib 711b and the step 236.

The valve body non-contact portion 712 is a holding portion for holding the valve body contact portion 711. Further, the valve body non-contact portion 712 is provided on the upstream side of the communication passage 233 with respect to the valve body contact portion 711 so as not to come into contact with the check valve valve body 72. In this way, by making the portion of the check valve valve seat 71 that does not come into contact with the check valve valve body 72 (valve body non-contact portion 712) made of metal, the strength of the entire check valve valve seat 71 is as strong as possible. Therefore, it is possible to suppress a decrease in the performance of the check valve 7 due to a decrease in the strength of the check valve valve seat 71.

The valve body non-contact portion 712 has a bottomed tubular (specifically, bottomed cylindrical) main body 712a provided so that the axial direction is in the vertical direction, and an outer circumference of one end (upper end) of the main body 712a. An annular (specifically, annular) flange 712b provided on the side, an annular (specifically, annular) flange 712c provided on the outer peripheral side of the other end (lower end) of the main body 712a, and a main body 712a. It has a columnar (specifically, columnar) sealing material mounting portion 712d that projects downward from the other end of the. The main body portion 712a, the flange 712b, the flange 712c, and the sealing material mounting portion 712d are formed coaxially.

One end (upper end) of the main body 712a is opened, and the other end (lower end) is sealed with a lid material. A plurality of (here, four) communication holes 712e penetrating in the radial direction are formed on the peripheral wall of the main body portion 712a. The communication hole 712e is located between the flange 712b and the flange 712c, and corresponds to the communication portion 238 of the large-diameter road 233c. That is, the communication portion 238 is located between the flange 712b and the flange 712c. As a result, the fluid from the fluid inflow flow path 231 enters the main body portion 712a through the communication portion 238 and the communication hole 712e.

An annular (specifically, annular) sealing material 76 for sealing is interposed between the sealing material mounting portion 712d and the large-diameter path 233c of the communication passage 233. That is, the sealing material 76 is interposed between the check valve valve seat 71 and the communication passage 233. In this way, the inclusion of the sealing material 76 prevents the fluid from leaking from the communication passage 233 to the outside of the valve device 1. The sealing material 76 is formed of, for example, a metal sealing material. The flange 712c is a movement restricting unit for restricting the upward movement of the sealing material 76.

Further, in the present embodiment, the valve body contact portion 711 and the valve body non-contact portion 712 are composed of a resin material and a metal material, respectively, but the present invention is not limited to this, and for example, both are resin materials or. It may be composed of a metallic material. In this case, the valve body contact portion 711 and the valve body non-contact portion 712 are integrally formed.

The check valve valve body 72 is a metal valve body for opening and closing the large-diameter path 233c of the communication passage 233 by separating or pressing the check valve valve seat 71. The check valve valve body 72 is provided so as to extend along the vertical direction. Further, the check valve valve body 72 is housed in the medium-diameter path 233b of the communication passage 233 so as to be located on the downstream side of the communication passage 233 with respect to the check valve valve seat 71. The check valve valve body 72 is preferably made of a metal material.

The check valve valve body 72 has a large diameter of a tubular (specifically, cylindrical) valve body that is provided in order from the upper side to the lower side (that is, from the downstream side of the communication passage 233 to the upstream side of the communication passage 233). It has a portion 721, a tubular (specifically, cylindrical) valve body small diameter portion 722, and a columnar (specifically, cylindrical) protruding portion 723. The valve body large diameter portion 721, the valve body small diameter portion 722, and the protruding portion 723 are integrally formed coaxially.

The valve body large diameter portion 721 is a member that holds the end portion (the other end / lower end) of the coil spring 73. The valve body large diameter portion 721 is formed so that its outer diameter is substantially the same as the diameter of the medium diameter path 233b of the communication passage 233. A coil spring 73 is inserted into the opening at one end (upper end) of the valve body large diameter portion 721. An annular (specifically, annular) rib 721a that comes into contact with the other end (lower end) of the coil spring 73 is provided on the inner peripheral side of the other end (lower end) of the valve body large diameter portion 721.

The valve body small diameter portion 722 is formed in a bottomed tubular shape (specifically, a bottomed cylindrical shape). Specifically, one end (upper end) of the valve body small diameter portion 722 is opened and the other end (lower end) is sealed with a lid material. One end of the valve body small diameter portion 722 is connected to the rib 721a of the valve body large diameter portion 721. The other end of the valve body small diameter portion 722 presses the inner edge of the annular (specifically, annular) valve body contact portion main body 711a of the check valve valve seat 71 by the urging force of the coil spring 73.

The valve body small diameter portion 722 is formed so that its outer diameter is smaller than the diameter of the medium diameter path 233b of the communication passage 233. Then, an annular flow path 239 through which the fluid flows is formed between the valve body small diameter portion 722 and the peripheral wall forming the medium diameter path 233b. A plurality of (here, four) communication holes 722a penetrating in the radial direction are formed on the peripheral wall of the valve body small diameter portion 722. The communication hole 722a communicates the annular flow path 239 with the inside of the valve body small diameter portion 722.

The protruding portion 723 is formed so that its outer diameter is smaller than the inner diameter of the valve body contact portion main body 711a of the check valve valve seat 71. As a result, when the inner edge of the valve body contact portion main body 711a is pressed by the other end of the valve body small diameter portion 722, the protruding portion 723 enters the inside of the valve body contact portion main body 711a.

The coil spring 73 is a spring that urges the check valve valve body 72 to press the check valve valve seat 71. The coil spring 73 is provided in the medium-diameter path 233b of the communication passage 233 so as to extend along the vertical direction. Specifically, one end (upper end) of the coil spring 73 is held by the reduced diameter portion 234 of the medium-diameter path 233b, and the other end (lower end) is the valve body large-diameter portion 721 of the check valve valve body 72. It is provided in the medium diameter path 233b in a compressed state so as to be held by.

One end (upper end) of the coil spring 73 comes into contact with a step 235 connecting the small diameter path 233a and the reduced diameter portion 234. On the other hand, the other end (lower end) of the coil spring 73 comes into contact with the rib 721a of the valve body large diameter portion 721. That is, the coil spring 73 is provided between the step 235 and the rib 721a in a compressed state.

The plug 74 is a positioning member for positioning the check valve valve seat 71 in the communication passage 233. By positioning the check valve seat 71 in the communication passage 233 by the plug 74 in this way, the check valve 7 can be connected to the communication passage of the single flow passage block 2 without separately providing another flow path block. It can be built into the 233. Therefore, it is possible to suppress the increase in size and the complexity of the structure of the valve device 1. The plug 74 is housed in the large path 233c of the communication passage 233.

Further, the plug 74 has a substantially columnar (specifically, substantially columnar) screw body 741 provided so as to extend in the vertical direction, and a female screw 237 of a large-diameter path 233c provided on the outer periphery of the screw body 741. It has a male plug 742 screwed into the screw body 741 and an engaging groove 743 formed on the end surface (lower surface) of the screw body 741 and engaged with a rotary tool (not shown).

Then, in a state where the rotary tool is engaged with the engagement groove 743, the male plug 742 of the plug 74 is tightened to the female screw 237 of the large-diameter path 233c, so that the tip of the rib 711b of the check valve valve seat 71 becomes the large-diameter path 233c. The check valve valve seat 71 is moved from the other end side of the communication passage 233 (lower end side in FIG. 3) to one end side of the communication passage 233 (upper end side in FIG. 3) until it hits the step 236.

Further, in the present embodiment, the positioning member is composed of the plug 74, but is not limited to this, and may be composed of, for example, a press-fitting member press-fitted into the large-diameter path 233c of the communication passage 233. ..

The plate 75 is a plate-shaped (specifically, disk-shaped) movement restricting member for restricting the downward movement of the sealing material 76. Further, the plate 75 is housed in the large-diameter road 233c of the communication passage 233. The plate 75 is interposed between the check valve valve seat 71 (specifically, the valve body non-contact portion 712) and the plug 74. As a result, as compared with the check valve 7 in which the plate 75 is not interposed between the check valve valve seat 71 and the plug 74, the check valve valve seat 71 (specifically, the valve body) is tightened by tightening the plug 74. It is possible to suppress the co-rotation of the non-contact portion 712). The sealing material 76 is sandwiched between the valve body non-contact portion 712 and the plate 75.

Further, in the present embodiment, a plate 75 is interposed between the check valve valve seat 71 and the plug 74, but the present invention is not limited to this, and for example, a plate 75 is interposed. It does not have to be. In this case, the tip (upper end) of the plug 74 is formed so as to restrict the downward movement of the sealing material 76. That is, the sealing material 76 is sandwiched between the valve body non-contact portion 712 and the plug 74.

Next, the operation of the valve device 1 will be described with reference to FIGS. 2 to 5.

FIG. 4 is a cross-sectional view showing a valve device 1 in which the diaphragm 3 and the check valve valve body 72 are in the closed state and the open state, respectively. FIG. 5 is a cross-sectional view showing a valve device in which both the diaphragm 3 and the check valve valve body 72 are in the open state.

As shown in FIGS. 2 and 3, when the drive air supply control unit does not supply drive air to the actuator 5 of the valve device 1 via the stem guide hole 511d, the piston 52 is driven by the urging force of the coil spring 53. It is located below with the stem 54. As a result, the diaphragm 3 is pressed against the valve seat 25 via the diaphragm retainer 4. That is, the diaphragm 3 closes the small path 233a of the communication passage 233 by the urging force of the coil spring 53. In other words, the valve device 1 is closed.

At this time, the vaporized process gas or other fluid has not yet been supplied to the fluid inflow flow path 231. Therefore, the check valve valve body 72 is pressed against the check valve valve seat 71 only by the urging force of the coil spring 73. That is, the check valve valve body 72 closes the large-diameter path 233c (specifically, the opening of the check valve valve seat 71) of the communication passage 233 only by the urging force of the coil spring 73. In other words, the check valve 7 is closed.

Next, when a fluid such as a process gas is supplied to the fluid inflow flow path 231, the check valve valve body 72 becomes an urging force of the coil spring 73 due to the pressure of the fluid supplied to the fluid inflow flow path 231. It is separated from the check valve seat 71 against it (see FIGS. 3 and 4). That is, the check valve valve body 72 opens the large-diameter path 233c (specifically, the opening of the check valve valve seat 71) of the communication passage 233 by the pressure of the fluid supplied to the fluid inflow flow path 231. .. In other words, the check valve 7 is in the open state. Then, the fluid supplied to the fluid inflow flow path 231 flows to the small path 233a of the communication passage 233 via the check valve 7.

However, at this time, the drive air supply control unit has not yet supplied the drive air to the actuator 5 of the valve device 1. Therefore, the valve device 1 remains in the closed state (see FIGS. 3 and 4). Therefore, the fluid such as the process gas is supplied from the fluid inflow passage 231 to the communication passage 233, but is not supplied to the fluid outflow passage 232.

Next, when the drive air supply control unit supplies the drive air to the actuator 5 via the stem guide hole 511d while the check valve 7 is in the open state, the drive air flows in the axial flow path 544 and the radial flow path. It is introduced into the air introduction chamber 55 via 545.

As a result, the piston 52 moves upward integrally with the stem 54 against the urging force of the coil spring 53 so that the volume of the air introduction chamber 55 increases. Then, as shown in FIGS. 3 and 5, the diaphragm 3 is separated from the valve seat 25 by rising together with the diaphragm retainer 4 by its own restoring force. That is, the diaphragm 3 opens the small path 233a of the communication passage 233 by raising the piston 52 and the stem 54. In other words, the valve device 1 is in the open state. Therefore, the fluid such as the process gas supplied to the communication passage 233 is supplied to the fluid outflow flow path 232 via the valve chamber formed between the valve seat 25 and the diaphragm 3.

On the other hand, when the drive air supply control unit stops supplying the drive air to the actuator 5, the piston 52 moves downward integrally with the stem 54 by the urging force of the coil spring 53. Then, the diaphragm 3 is pressed against the valve seat 25 via the diaphragm retainer 4 by the downward movement of the stem 54. That is, the diaphragm 3 again closes the small path 233a of the communication passage 233 by the movement of the piston 52, the stem 54, and the diaphragm retainer 4. In other words, the valve device 1 returns to the closed state. Therefore, the fluid such as the process gas is not supplied from the fluid inflow flow path 231 to the fluid outflow flow path 232.

The volume of the air introduction chamber 55 is reduced by the movement of the piston 52 and the stem 54. At this time, the air in the air introduction chamber 55 is led out to the drive air supply control unit via the radial flow path 545, the axial flow path 544, and the stem guide hole 511d.

In this way, the drive air supply control unit can switch the opening and closing of the diaphragm 3 with respect to the valve seat 25 by controlling the supply of the drive air to the actuator 5. Therefore, according to such a valve device 1, it is possible to control the fluid supply from the fluid inflow flow path 231 to the fluid outflow flow path 232. In the present embodiment, the valve device 1 is composed of a valve device that is always closed (normally closed), but is not limited to this, for example, from a valve device that is always open (normally open). You may become.

Next, the action and effect of this embodiment will be described.

The valve device 1 according to the present embodiment is a single valve device 1 in which a fluid inflow flow path 231, a fluid outflow flow path 232, and a communication passage 233 communicating the fluid inflow flow path 231 and the fluid outflow flow path 232 are formed. Flow path block 2, a diaphragm 3 that opens and closes the communication passage 233, a diaphragm holder 4 that holds the diaphragm 3, an actuator 5 that pushes the diaphragm 3 via the diaphragm holder 4, and a fluid inflow incorporated in the communication passage 233. A check valve 7 that allows only the fluid flowing from the flow path 231 to the fluid outflow flow path 232 is provided.

According to this configuration, a check valve 7 that allows only the fluid flowing from the fluid inflow flow path 231 to the fluid outflow flow path 232 is built in the communication passage 233 in the single flow path block 2 to allow the fluid outflow flow. Since the backflow of the fluid from the path 232 to the fluid inflow flow path 231 can be prevented, the safety function of the valve device 1 can be ensured. Further, it is not necessary to separately add a flow path block for providing the check valve 7, and it is possible to suppress an increase in size and a complicated structure of the valve device 1.

Further, in the present embodiment, the communication passage 233 is a through hole penetrating the flow path block 2, one end of which faces the diaphragm 3, and the fluid inflow flow path 231 communicates with the outer periphery of the through hole, and is reversed. The check valve 7 is attached from the other end of the communication passage 233.

According to this configuration, by communicating the fluid inflow flow path 231 to the outer circumference of the communication passage 233, the flow is compared with the flow path block in which the fluid inflow flow path and the communication passage are communicated so as not to overlap in the vertical direction. The road block 2 can be miniaturized in the vertical direction. As a result, it is possible to further suppress the increase in size of the valve device 1. Further, since one end of the fluid inflow flow path 231 communicates with the outer periphery of the intermediate portion of the communication passage 233 without communicating with the other end of the communication passage 233, the check valve 7 is attached from the other end of the communication passage 233. Can be done.

Further, since the check valve 7 is attached from the other end of the communication passage 233 that does not face the diaphragm 3, the check valve 7 can be attached to and detached from the flow path block 2 even after the actuator 5 is attached to the flow path block 2. Since this can be easily performed, the valve device 1 can be easily manufactured as compared with a valve device in which a check valve is attached from one end of a communication passage facing the diaphragm 3.

Further, in the present embodiment, the check valve 7 is separated from the check valve valve seat 71 positioned in the communication passage 233 and the check valve valve seat 71 or pressed against the check valve valve seat 71. As a result, the check valve valve body 72 that opens and closes the communication passage 233, the coil spring 73 that urges the check valve valve body 72 to press the check valve valve seat 71, and the check valve. It has a plug 74 for positioning the valve seat 71 in the communication passage 233.

According to this configuration, the check valve seat 71 is positioned in the communication passage 233 by the plug 74, so that the check valve 7 can be installed in the single flow path block 2 without separately providing another flow path block. It can be built in the communication passage 233. Therefore, it is possible to suppress the increase in size and the complexity of the structure of the valve device 1.

Further, in the present embodiment, the check valve 7 further has a plate 75 interposed between the check valve valve seat 71 and the plug 74.

According to this configuration, as compared with the check valve 7 in which the plate 75 is not interposed between the check valve valve seat 71 and the plug 74, the check valve seat 71 is suppressed from rotating together due to the tightening of the plug 74. can do.

Further, in the present embodiment, the check valve valve seat 71 is in contact with the check valve valve body 72 and the resin valve body contact portion 711 provided so as to be in contact with the check valve valve body 72. It has a metal valve body non-contact portion 712 that holds the valve body contact portion 711.

According to this configuration, by making the valve body contact portion 711 made of resin, the contact between the check valve valve body 72 and the valve body contact portion 711 when the check valve 7 is switched from the open state to the closed state. It is possible to reduce the wear caused by both. As a result, the service life of the check valve 7 can be extended. Further, since the strength of the entire check valve valve seat 71 can be increased by making the valve body non-contact portion 712 made of metal, the performance of the check valve 7 due to the decrease in the strength of the check valve valve seat 71. The decrease can be suppressed.

Further, in the present embodiment, the check valve 7 further has a sealing material 76 interposed between the check valve valve seat 71 and the communication passage 233.

According to this configuration, it is possible to prevent the fluid from leaking from the communication passage 233 to the outside of the valve device 1.

Although the present embodiment has been described above, the above-described embodiment shows only a part of the application examples of the present invention, and the purpose is to limit the technical scope of the present invention to the specific configuration of the above-described embodiment. is not it.

(Second Embodiment)
Next, the valve device 1A according to the second embodiment will be described with reference to FIGS. 6 to 8. In this embodiment, the same points as those in the first embodiment will be omitted, and the points different from those in the first embodiment will be mainly described.

FIG. 6 is a cross-sectional view showing the valve device 1A according to the second embodiment. FIG. 7 is an enlarged cross-sectional view showing a main part B in FIG. FIG. 8 is a bottom view showing the filter large diameter portion 771.

As shown in FIG. 6, the valve device 1A includes a single flow path block 2A, a diaphragm 3, a diaphragm retainer 4, an actuator 5, a spacer 6, and a check valve 7A.

Since the diaphragm 3, diaphragm retainer 4, actuator 5 and spacer 6 of the valve device 1A according to the present embodiment are the same as the diaphragm 3, diaphragm retainer 4, actuator 5 and spacer 6 of the valve device 1 according to the first embodiment. , These explanations will be omitted.

Since the flow path block 2A according to the present embodiment is the same as the flow path block 2 according to the first embodiment except for the communication passage 233A (see FIG. 7), the flow path block 2A excluding the communication passage 233A will be described. Omit.

Since the communication passage 233A according to the present embodiment is the same as the communication passage 233 according to the first embodiment except for the medium-diameter road 233B, the description of the communication passage 233A excluding the medium-diameter road 233B will be omitted.

The medium-diameter path 233b according to the first embodiment has a reduced-diameter portion 234 as a spring receiving portion, whereas the medium-diameter path 233B according to the present embodiment does not have a reduced-diameter portion 234. That is, the medium-diameter path 233B is formed to have the same diameter from one end (upper end) to the other end (lower end). Further, a female screw 240 screwed into a male screw 773, which will be described later, is formed on the peripheral wall at one end (upper end) of the medium-diameter path 233B.

On the other hand, the check valve 7 according to the first embodiment has a check valve seat 71, a check valve valve body 72, a coil spring 73, a plug 74, a plate 75, and a sealing material 76. As shown in FIG. 7, the check valve 7A according to the embodiment is different in that it has a filter 77 in addition to the check valve valve body 72, the coil spring 73, the plug 74, the plate 75, and the sealing material 76.

As shown in FIG. 7, the filter 77 is a filter for filtering foreign substances (specifically, particles) mixed in a fluid such as a process gas. The filter 77 is provided so as to be located on the downstream side of the communication passage 233A with respect to the coil spring 73. That is, the filter 77 is provided so as to be located on the most downstream side of the communication passage 233A. Further, from the viewpoint of ease of manufacture, the filter 77 is preferably made of a sintered metal.

The filter 77 is composed of a tubular (specifically, cylindrical) filter large diameter portion 771 as a screw portion accommodated at one end (upper end) of the medium diameter path 233B in the communication passage 233A, and a filter large diameter portion 771. Also has a bottomed tubular (specifically, bottomed cylindrical) filter small diameter portion 772 as a head portion accommodated in the small diameter path 233a so as to be located on the downstream side. The large diameter portion 771 of the filter and the small diameter portion 772 of the filter are integrally formed coaxially. Further, the inner diameter of the filter large diameter portion 771 and the inner diameter of the filter small diameter portion 772 are the same.

A male screw 773 screwed into the female screw 240 of the medium diameter path 233B is formed on the outer periphery of the filter large diameter portion 771. As a result, the filter 77 can be easily attached to the communication passage 233A without enlarging the entire filter 77. Then, by tightening the male screw 773 to the female screw 240, one end surface (upper end surface) of the large diameter portion 771 of the filter is abutted against the step 235 as the abutting portion formed at the boundary between the small diameter path 233a and the medium diameter path 233B. .. As a result, the positioning of the filter 77 with respect to the communication passage 233A can be ensured.

A protrusion 774 as a spring receiving portion is provided on the other end surface (lower end surface) of the filter large diameter portion 771. One end of the coil spring 73 is held on the outside of the protrusion 774. That is, the coil spring 73 has a large diameter portion of the valve body in a compressed state so that one end thereof is held by the protrusion 774 and the other end is held by the large diameter portion 721 of the valve body 72 for the check valve. It is accommodated between 721 and the large diameter portion 771 of the filter.

As shown in FIG. 8, the protrusion 774 is formed with a substantially cross-shaped groove 775 that engages with a rotary tool (not shown). Then, the protrusion 774 is divided into four substantially fan-shaped protrusions 774a formed on the same circumference at predetermined intervals by the groove 775. As a result, the filter 77 can be easily tightened to the communication passage 233A in a state where the rotary tool is engaged with the groove 775.

Further, in the present embodiment, the spring receiving portion is composed of the protrusion 774, but the present invention is not limited to this, and for example, a circle formed on the other end surface (lower end surface) of the filter large diameter portion 771. It may be composed of grooves of a shape. In this case, one end of the coil spring 73 is held so as to fit into this groove.

The small diameter portion 772 of the filter functions as a filter material. One end (upper end) of the filter small diameter portion 772 is sealed with a lid material, and the other end (lower end) is opened. Further, the peripheral wall of the filter small diameter portion 772 is formed so that the diameter is reduced from the other end toward one end thereof. Then, only a small gap is formed between the peripheral wall of the filter small diameter portion 772 and the peripheral wall forming the small diameter path 233a of the communication passage 233A. Therefore, due to the large resistance in this gap, the fluid can hardly pass through the peripheral wall of the filter small diameter portion 772. Therefore, the lid material of the filter small diameter portion 772 mainly functions as a filter material. The other end of the filter small diameter portion 772 is connected to the filter large diameter portion 771. The filter small diameter portion 772 is provided so as not to come into contact with the diaphragm 3.

Further, in the present embodiment, the filter 77 has a filter large diameter portion 771 and a filter small diameter portion 772, but is not limited thereto. For example, the filter 77 does not have the filter small diameter portion 772 and has a large filter. It may have only the diameter 771. In this case, the large-diameter portion 771 of the filter has a bottomed cylindrical shape (specifically, a bottomed cylindrical shape), and the lid material functions as a filtering material.

Further, in the present embodiment, the filter large diameter portion 771 and the filter small diameter portion 772 are integrally formed, but the present invention is not limited to this, and for example, they may be formed separately. In this case, it is sufficient that only the small diameter portion 772 of the filter is made of sintered metal.

Next, the action and effect of this embodiment will be described.

In the present embodiment, the check valve 7A further has a filter 77 provided with a protrusion 774 and arranged in the communication passage 233A, and the coil spring 73 has one end held by the protrusion 774 and the other end. Is held by the check valve valve body 72 and is housed between the check valve valve body 72 and the filter 77.

According to this configuration, foreign substances (specifically, particles) mixed in the fluid can be filtered by the filter 77. Further, since the coil spring 73 is accommodated between the check valve valve body 72 and the filter 77 in a compressed state, the diameter-reduced portion 234 described in the first embodiment can be eliminated. As a result, the communication passage 233A can be easily processed. Further, even when foreign matter is generated from the movable check valve valve body 72 or the coil spring 73, the foreign matter is caught in the outside or between the flam 3 and the valve seat 25, and the fluid slightly flows into the fluid outflow flow path 232. Can be prevented.

Further, in the present embodiment, the filter 77 has a filter large diameter portion 771 screwed into the communication passage 233A, and the communication passage 233A has a step 235 for positioning the filter 77 by abutting the filter large diameter portion 771. Provided.

According to this configuration, the filter 77 is attached to the communication passage 233A by screwing the filter large diameter portion 771 and the communication passage 233A, so that the filter can be easily attached to the communication passage 233A without enlarging the entire filter 77. be able to. Further, the filter 77 can be positioned with respect to the communication passage 233A by abutting the large diameter portion 771 of the filter against the step 235.

(First modification of the filter)
Next, a first modification (filter 77A) of the filter 77 will be described with reference to FIG. In this modification, the same points as those in the second embodiment will be omitted, and the points different from those in the second embodiment will be mainly described.

FIG. 9 is a cross-sectional view showing the filter 77A.

In the second embodiment described above, the head portion is composed of the filter small diameter portion 772, but is not limited to this, and may be composed of, for example, the conical portion 772A shown in FIG. In this case, the conical portion 772A has a tapered portion in a cross-sectional view. According to this, since the gap formed between the tapered portion of the conical portion 772A and the peripheral wall forming the small path 233a of the communication passage 233A is large, the portion that functions as a filter medium is compared with the second embodiment described above. Since the area of the can be increased, the filtration efficiency can be improved.

Further, in the present embodiment, the tip of the conical portion 772A has an acute angle, but the present invention is not limited to this, and may be rounded, for example.

(Second modification of the filter)
Next, a second modification of the filter 77 (filter 77B) will be described with reference to FIG. In this modification, the same points as those in the second embodiment will be omitted, and the points different from those in the second embodiment will be mainly described.

FIG. 10 is a cross-sectional view showing the filter 77B.

In the second embodiment described above, the head portion is composed of the filter small diameter portion 772, but is not limited to this, and may be composed of, for example, the hemispherical portion 772B shown in FIG. In this case, the hemispherical portion 772B has a parabolic portion in a cross-sectional view. According to this, since the gap formed between the parabolic portion of the hemispherical portion 772B and the peripheral wall forming the small path 233a of the communication passage 233A is large, the first modification described above is the same as the first modification described above. Since the area of the portion that functions as the filter material can be increased as compared with the second embodiment, the filtration efficiency can be improved.

1 Valve device 1A Valve device 2 Flow path block 2A Flow path block 3 Diaphragm (valve body)
4 Diaphragm retainer (valve retainer)
5 Actuator 7 Check valve 7A Check valve 71 Check valve valve seat 72 Check valve valve body 73 Coil spring (urging member)
74 plug (positioning member)
75 Plate 76 Sealing material 77 Filter 231 Fluid inflow flow path 232 Fluid outflow flow path 233 Linked passage 233A Linked passage 711 Valve body contact part 712 Valve body non-contact part 774 Projection part (spring receiving part)

Claims (10)

A single flow path block in which a fluid inflow flow path, a fluid outflow flow path, and a communication path communicating the fluid inflow flow path and the fluid outflow flow path are formed.
A valve body that opens and closes the passageway
The valve body retainer that presses the valve body and
An actuator that pushes the valve body via the valve body retainer, and an actuator that pushes the valve body.
A valve device including a check valve built in the communication passage and allowing only fluid flowing from the fluid inflow flow path to the fluid outflow flow path. The communication passage is a through hole penetrating the flow path block, and one end thereof faces the valve body.
The fluid inflow flow path communicates with the outer periphery of the through hole and communicates with the outer circumference of the through hole.
The valve device according to claim 1, wherein the check valve is attached from the other end of the communication passage. The check valve is
A check valve valve seat positioned in the communication passage and
A check valve valve body that opens and closes the communication passage by being separated from the check valve valve seat or pressed by the check valve valve seat.
An urging member that urges the check valve valve body to press against the check valve seat, and
The valve device according to claim 1 or 2, further comprising a positioning member for positioning the check valve valve seat in the communication passage. The check valve further includes a plate interposed between the check valve seat and the positioning member.
The valve device according to claim 3, wherein the positioning member is composed of a plug screwed into the communication passage. The check valve seat is
A resin valve body contact portion provided so as to be in contact with the check valve valve body,
The valve device according to claim 3 or 4, further comprising a metal valve body non-contact portion that holds the valve body contact portion without contacting the check valve valve body. The valve device according to any one of claims 3 to 5, wherein the check valve further includes a sealing material interposed between the check valve valve seat and the communication passage. The urging member is composed of a coil spring.
The check valve is provided with a spring receiving portion and further has a filter arranged in the communication passage.
A claim that one end of the coil spring is held by the spring receiving portion and the other end is held by the check valve valve body and is accommodated between the check valve valve body and the filter. Item 6. The valve device according to any one of Items 3 to 6. The filter has a threaded portion that is screwed into the communication path.
The valve device according to claim 7, wherein the communication passage is provided with an abutting portion for positioning the filter by abutting the screwed portion. The filter further has a head portion located on the downstream side of the screwed portion.
The valve device according to claim 8, wherein the head portion has a tapered portion or a parabolic portion in a cross-sectional view. A fluid supply unit including the valve device according to any one of claims 1 to 9.

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