KR101982592B1 - Regulator - Google Patents

Abstract

The regulator includes a body having a cavity formed therein, an inlet through which the fluid flows, an outlet through which the fluid is discharged, and a pilot fluid inlet; A first diaphragm located in the space and partitioning the space into first and second chambers isolated from each other, wherein the first chamber communicates with the inlet and the outlet, and the second chamber communicates with the pilot fluid inlet Communication); First biasing means disposed in the first chamber for biasing the first diaphragm; And second biasing means disposed in the second chamber and biasing the first diaphragm while displacing based on the pressure of the pilot fluid entering through the pilot fluid inlet.

Description

Regulator {REGULATOR}

The present invention relates to a regulator, and more particularly, to a regulator used for supplying a fluid at a constant pressure.

In general, a process of depositing or etching a specific material on a substrate for manufacturing a semiconductor device is performed. The apparatus for carrying out the above process has a chamber for accommodating a wafer, and a supply pipe for supplying a process gas into the chamber is installed in the chamber. The pressure and flow rate of the process gas supplied into the chamber should be precisely controlled to maintain consistency during the process.

Generally, a supply pipe is provided with a pump that provides a flow pressure to the gas and a regulator that supplies gas to the chamber at a constant pressure.

A typical regulator has an inlet line through which gas flows, an outlet line through which gas flows, and a body provided with a buffer space for connecting them. In the body, there is provided an opening / closing device for opening / closing a passage for gas flowing into the buffer space. The opening / closing device has a sheet member having an inlet and an outlet, and a rod for opening and closing the inlet of the opening / closing device. The switch is connected to a pressure setting member (e.g., a handle, a stem, etc.) for setting a reference pressure of the regulator, and the regulator can supply gas to the chamber at a constant pressure based on the reference pressure.

However, when a plurality of regulators are used, it is troublesome to set the reference pressures of the regulators using a handle or the like, that is, the control may be inconvenient.

Korean Registered Patent No. 0,598,111 (Announced on July 7, 2006)

An object of the present invention is to provide a regulator which is easy to control.

It is an object of the present invention to provide a regulator that can be controlled using a low-pressure pilot fluid.

In order to accomplish one object of the present invention, a regulator according to embodiments of the present invention includes a cavity formed therein, an inlet through which the fluid flows, an outlet through which the fluid is discharged, A branch body; A first diaphragm located in the space and partitioning the space into a first chamber and a second chamber isolated from each other, the first chamber communicating with the inlet and outlet, and the second chamber communicating with the pilot fluid inlet ; First biasing means disposed in the first chamber for biasing the first diaphragm; And second biasing means disposed in the second chamber and biasing the first diaphragm while displacing based on the pressure of the pilot fluid entering through the pilot fluid inlet.

According to an embodiment, the second biasing means includes: an actuator body that divides the second chamber into a first region and a second region along a first direction perpendicular to the first diaphragm; A first piston disposed in the first region and sliding in the first direction based on the pilot fluid introduced into the first region; And a second piston disposed in the second region and sliding in the first direction based on the pilot fluid introduced into the second region.

According to an embodiment, the first piston and the second piston are moved in proportion to each other, and a force applied to the first diaphragm by the second biasing means is larger than a first area of the first piston, 2 < / RTI > piston, and the hydraulic pressure of the pilot fluid.

According to one embodiment, the actuator body includes: an intermediate partition wall arranged parallel to the first diaphragm; And a support portion extending from the edge of the intermediate partition wall in the first direction and fixed to the second chamber, wherein the area of the intermediate partition wall may be the same as the cross-sectional area of the second chamber.

According to one embodiment, the first piston includes a first O-ring disposed between an edge and a support portion of the actuator body to seal at least a portion of the first region, the second piston includes an edge and a support portion of the actuator body, Wherein the actuator body is disposed between an edge of the support and an inner surface of the second chamber to seal the first and second areas, Further comprising a third O-ring for sealing the first piston and the second piston, wherein the first piston and the second piston are slidable within the support of the actuator body.

According to one embodiment, the intermediate partition of the actuator body includes a first through-hole communicating the first region and the second region, one of the first piston and the second piston in a first direction And protrusions formed through the first through-holes and connected to the other one of the first piston and the second piston.

According to one embodiment, the second piston includes a first communication hole formed in the second surface, and the protrusion includes a second communication hole in fluid communication with the first region and the first communication hole, The pilot fluid may enter the first region from the second region through the first and second communication ports.

According to an embodiment, the support portion of the actuator body may include a third communication hole disposed adjacent to the intermediate partition wall in the first region, and the second chamber may be formed on the side corresponding to the third communication hole And a space between the second piston and the intermediate partition may be in fluid communication with the atmosphere through the third and fourth communication holes.

According to one embodiment, the actuator body may include a first partition wall arranged in parallel with the first diaphragm.

According to one embodiment, the second biasing means is made of an elastic material and has a plate shape parallel to the first diaphragm, and is disposed in the first region between the second chamber and the first piston A first elastic member elastically supporting the first piston; And a second elastic member which is made of an elastic material and has a plate shape parallel to the first diaphragm and which is disposed between the second chamber and the second piston in the second region to elastically support the second piston, . ≪ / RTI >

According to an embodiment, the first partition may include a first through hole communicating the first region and the second region, one of the first and second pistons protruding in a first direction, And a protrusion that passes through the first through-hole and is connected to the other of the first piston and the second piston, and a sixth O-ring may be disposed between the first through-hole and the protrusion of the first partition .

According to one embodiment, the second piston includes a first communication hole formed in the second surface, and the protrusion includes a second communication hole in fluid communication with the first region and the first communication hole, The pilot fluid may enter the first region from the second region through the first and second communication ports.

According to an embodiment, the actuator body may include a first partition wall having a plate shape parallel to the first diaphragm and fixed to an inner surface of the second chamber.

According to one embodiment, the first piston includes an eleventh O-ring disposed between an edge and an inner surface of the first region to seal at least a portion of the first region, the second piston having an edge and a second And a twelfth O-ring disposed between the inner surface of the region and sealing at least a portion of the second region.

According to one embodiment, the first biasing means includes: a sheet disposed on a flow path connecting the inlet and the outlet in the first chamber; A sheet holder for fixing the sheet; A poppet that is in close contact with or spaced from the seat to open and close the flow path and is connected to the first diaphragm; And a poppet spring for elastically supporting the poppet toward the seat.

According to one embodiment, the regulator includes: a second diaphragm disposed in the space and partitioning the space into the third chamber and the fourth chamber; A pilot poppet assembly disposed in the third chamber and biasing the second diaphragm; And a third biasing means disposed in the fourth chamber and biasing the second diaphragm according to an external input.

According to one embodiment, the pilot poppet assembly includes: a pilot sheet disposed on a pilot flow path connecting the pilot fluid inlet and the second chamber; A pilot sheet holder for fixing the pilot sheet; A pilot poppet that is in close contact with or spaced from the pilot sheet to open / close the pilot flow path and is connected to the second diaphragm; And a pilot poppet spring for elastically supporting the pilot poppet toward the pilot seat.

According to one embodiment, the second diaphragm includes a second through-hole corresponding to the pilot poppet, and the fourth chamber includes a fifth communication hole in fluid communication with the atmosphere, Wherein the pilot poppet is spaced apart from the second through hole of the second diaphragm when the hydraulic pressure of the pilot fluid increases to be equal to or higher than a reference pressure and the pilot fluid passes through the second through hole and the fifth communication hole .

In order to accomplish one object of the present invention, a regulator according to embodiments of the present invention includes a cavity formed therein, an inlet through which the fluid flows, an outlet through which the fluid is discharged, A branch body; A first diaphragm located in the space and partitioning the space into a first chamber and a second chamber isolated from each other, the first chamber communicating with the inlet and outlet, and the second chamber communicating with the pilot fluid inlet ; First biasing means disposed in the first chamber for biasing the first diaphragm; And first and second pistons disposed in the second chamber along a first direction perpendicular to the first diaphragm, the first and second pistons being displaced based on the pilot fluid and pressing the first diaphragm, .

In order to accomplish one object of the present invention, a regulator according to embodiments of the present invention includes: a body assembly including an inlet through which the fluid flows and an outlet through which the fluid is discharged; A first pilot body including an upper body, a central body, and a lower body, the pilot body including a pilot fluid inlet through which a pilot fluid flows, and a lower end opened to be disposed on the upper portion of the body assembly; A first diaphragm disposed between the body assembly and the first pilot body; First biasing means disposed in the body assembly for biasing the first diaphragm; A first elastic member having a plate shape parallel to the first diaphragm and disposed between the center body and the lower body and pressing the first diaphragm while being displaced based on the pilot fluid; And a second elastic member having a plate shape parallel to the first diaphragm and disposed between the upper main body and the central main body and pressing the first elastic member while being displaced based on the pilot fluid .

The regulator according to embodiments of the present invention includes a second biasing means comprised of a plurality of pistons and operating on a pilot fluid so that the pressure of the fluid can be regulated constantly based on the low pressure pilot fluid .

Further, the regulator is supplied with pilot hydraulic pressure from an independently configured pilot regulator, thereby making it easy to control the plurality of regulators only by controlling the pilot hydraulic pressure.

However, the effects of the present invention are not limited to the above effects, and may be variously extended without departing from the spirit and scope of the present invention.

1 is a diagram illustrating a regulator according to embodiments of the present invention.
Fig. 2 is a cross-sectional view showing an example of the regulator of Fig. 1;
3 is a cross-sectional view showing an example of the regulator of FIG.
4 is a cross-sectional view showing an example of the regulator of FIG.

BRIEF DESCRIPTION OF THE DRAWINGS The present invention is capable of various modifications and various embodiments, and specific embodiments are illustrated in the drawings and described in detail in the detailed description. It is to be understood, however, that the invention is not to be limited to the specific embodiments, but includes all modifications, equivalents, and alternatives falling within the spirit and scope of the invention. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

The terms first, second, etc. may be used to describe various components, but the components should not be limited by the terms. The terms are used only for the purpose of distinguishing one component from another.

The terminology used in this application is used only to describe a specific embodiment and is not intended to limit the invention. The singular expressions include plural expressions unless the context clearly dictates otherwise. In the present application, the terms "comprises" or "having" and the like are used to specify that there is a feature, a number, a step, an operation, an element, a component or a combination thereof described in the specification, But do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, or combinations thereof. Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

Hereinafter, it is assumed that the first direction is the vertical direction (or the longitudinal direction) and the second direction is the horizontal direction (or the lateral direction) perpendicular to the first direction. Further, the first surface will be described assuming that the object is the lower surface and the second surface is the upper surface of the object. The longitudinal section is a section cut in the first direction (or vertical direction) and the cross section is assumed to be the section cut in the second direction (or horizontal direction).

FIG. 1 is a view showing a regulator according to an embodiment of the present invention, and FIG. 2 is a sectional view showing an example of a regulator of FIG.

Referring to Figs. 1 and 2, Fig. 2 is a cross-sectional view of the regulator 10 taken along the A'-A axis shown in Fig.

Referring to FIGS. 1 and 2, the regulator 10 can regulate the pressure of the fluid flowing through the inlet INLET and discharge it through the outlet OUTLET.

The regulator 10 may include a main regulator 100 (or a main regulator part), a pressure control part 200, and a pilot regulator 300 (or a pilot regulator part). The pilot regulator 300 regulates the pressure of the pilot fluid (or pilot hydraulic pressure) and supplies the pressure to the pressure control unit 200. The pressure control unit 200 presses the first diaphragm 120 to be described later on the basis of the pilot hydraulic pressure , The main regulator 100 can adjust the pressure of the fluid to be constant based on the operation of the first diaphragm 120. Here, the pilot fluid may be a fluid supplied to control the operation of the regulator 10. [

The main regulator 100, the pressure control unit 200, and the pilot regulator 300 may be formed in the main body 101.

The main body 101 includes a cavity (or internal space) formed therein and includes an inlet INLET through which the fluid flows, an outlet OUTLET through which the fluid is discharged, and a pilot fluid inlet INLET2 through which the pilot fluid flows ). The main body 101 may be integrally formed or may have a body assembly 110, a connecting body 140 (or a bonnet nut body), a first pilot body 210 (or a pilot upper body) and a second pilot body 310 ) (Or a pilot bottom body).

The main regulator 100 may include a body assembly 110, a first diaphragm 120, a first biasing means 130, and a connection body 140.

The body assembly 110 constitutes a part of the main body 101 and may include an inlet INLET, an outlet OUTLET and a fluid transfer passage formed between the inlet INLET and the outlet OUTLET. The fluid transfer passage may include an inlet line, an outlet line and a first chamber. The inflow line may include a first horizontal portion extending horizontally from the inlet INLET toward the interior of the body assembly 110 and a first vertical portion extending vertically upward from one end of the first horizontal portion. The first chamber may be formed to be recessed inwardly from the upper surface of the body assembly 110 and may be connected to the first vertical portion of the inflow line. The outlet line may include a second vertical portion extending vertically from the first chamber and a second horizontal portion extending horizontally from one end of the vertical portion to the outlet OUTLET. The first chamber may be in fluid communication with the inlet INLET and the outlet OUTLET.

The first diaphragm 120 may be disposed on the upper surface of the body assembly 110. The lower surface of the first diaphragm 120 may form part of the first chamber. The first diaphragm 120 may be a diaphragm, a diaphragm, or a partition plate of a resilient thin membrane. When the main body 101 is integrally formed, the first diaphragm 120 is located in the space of the main body 101, and the space can be partitioned into the first chamber and the second chamber.

The first biasing means 130 can control the flow rate of the fluid moving from the inlet INLET to the outlet OUTLET through the first chamber. The first biasing means 130 may be disposed within the body assembly 110 (or within the first chamber) to biasing the first diaphragm 120. Here, the biasing biases the object to one side, and the first diaphragm 120 can be deflected or displaced in a specific direction (for example, upward direction) in accordance with the operation of the first biasing means 130.

The first biasing means 130 includes a seat 131 (or orifice), a seat holder 132 (or a seat retainer), a poppet 133, a poppet damper 134, And may include a poppet spring 135.

The sheet 131 includes holes for ejecting fluid, and may be disposed on the lower surface of the first chamber (or between the first chamber and the inflow line).

The sheet holder 132 can be disposed on the top of the sheet 131 to fix the sheet 131. [ The seat holder 132 may be coupled to the lower space of the first chamber by an interference fit, a rotation coupling, or the like.

The poppet 133 has a bar shape (or a cylindrical shape) and can extend from the one end of the first vertical portion of the inflow line to the first diaphragm 120 through a hole formed in the seat 131. The poppet 133 may include a lower rod, a head (or a rod), and a top rod. The lower bar is disposed in the inlet line and may have a diameter smaller than the diameter of the inlet line. The head has a mushroom shape and is located adjacent to the sheet 131 and may have a diameter larger than the diameter of the hole formed in the sheet 131. [ The head can open and close the hole of the seat 131. [ The upper rod may be disposed in the first chamber and may have a diameter smaller than the diameter of the hole formed in the seat 131. [

The poppet damper 134 is disposed at one end of the first vertical portion of the inflow line and can support one end (or lower end) of the poppet 133 or one end of the poppet spring 135. The poppet damper 134 can absorb vibration or vibration energy transmitted through the poppet 133 or the poppet spring 135.

The poppet spring 135 can elastically support the poppet 133 toward the seat 131. The poppet spring 135 can be brought into close contact with the first diaphragm 120 to be linked with the poppet 133. [ The poppet spring 135 surrounds the outer surface of the lower rod of the poppet 133 and can be disposed between the poppet 133 and the poppet damper 134.

The poppet 133 is displaced based on the force applied in the vertical direction through the first diaphragm 120. In this case, the head of the poppet 133 opens or closes the hole of the seat 131, The distance between the hole and the head of the poppet 133 can be adjusted. Thus, the flow rate and / or the hydraulic pressure of the fluid can be controlled.

The connection body 140 is disposed on the upper side of the body assembly 110 or on the upper side of the body assembly 110 and includes a main regulator 100 (or a body assembly 110) and a pressure control unit 200 The first pilot body 210 of the control unit 200). For example, the connection body 140 includes a threaded portion formed on the inner circumferential surface, and a portion of the connection body 140 is coupled through a threaded line formed on the upper outer surface of the body assembly 110, The first pilot body 210 and the first pilot body 210 are connected to each other through a thread formed on the inner surface of the lower portion of the first pilot body 210.

Meanwhile, the pressure control unit 200 can displace the first diaphragm 120 based on the pilot fluid (or pilot hydraulic pressure). The pressure control unit 200 may include a first pilot body 210 and a second biasing unit 220.

The first pilot body 210 may include a pilot fluid inlet INLET2, a pilot fluid path, and a second chamber. The pilot fluid inlet INLET2 may be formed on one side of the first pilot body 210 (e.g., on the upper side of the side). The second chamber may be formed to be embedded inwardly from the lower surface of the first pilot body 210. The pilot fluid transfer passage is in fluid communication with the pilot fluid inlet INLET2 and the second chamber.

The pilot fluid pathway may include an inlet line and an outlet line. Similar to the inflow line of the main regulator 100, the inflow line of the pilot fluid transfer path includes a third horizontal portion extending horizontally from the pilot fluid inlet INLET2 toward the interior of the first pilot body 210, And a third vertical portion extending vertically from one end of the horizontal portion toward the upper portion. The other end of the third vertical part may be connected to the third chamber, which will be described later. The outflow line extends in a vertical direction from the third chamber to the second chamber and is in fluid communication with the second chamber and the third chamber.

The second biasing means 220 is located in the second chamber (or the third vertical portion of the pilot fluid pathway) and is biased to the pressure (i.e., pilot hydraulic pressure) of the pilot fluid entering through the pilot fluid inlet INLET2 The first diaphragm 120 can be pressed downward while being displaced on the basis of the first diaphragm.

The second biasing means 220 includes a first piston 221 (or a piston upper, an upper piston), a second piston 222 (or a piston bottom, a bottom piston), and an actuator body 223 ).

The actuator body 223 may partition the second chamber into a first region and a second region along a vertical direction (i.e., a vertical direction perpendicular to the upper surface of the first diaphragm 120). The actuator body 223 may have a tubular shape (e.g., a cylindrical shape) having an " H " The actuator body 223 has substantially the same size as the second chamber and may be disposed within the second chamber.

In one embodiment, the actuator body 223 may include a middle partition and a support. The intermediate partition is arranged parallel to the first diaphragm 120, and can isolate the first area from the second area. The intermediate bulkhead is made of a rigid material having a plate shape and little elasticity, and may not be deformed by the pilot hydraulic pressure. The area of the intermediate partition may be substantially equal to the cross-sectional area of the second chamber (or the cross-sectional area in the horizontal direction).

The support may extend in a vertical direction (e.g., upward and downward) from the edge of the intermediate partition and be secured to the second chamber. For example, one end (or the lower end) of the support may be fixed to the lower surface of the second chamber, and the other end (or the upper end) of the support may be fixed to the upper end of the second chamber. In this case, the first piston 221 and the second piston 222 can slide in the support portion of the actuator body 223.

The first piston 221 is disposed in the first region and can slide in the first direction based on the pilot fluid introduced into the first region. Similarly, the second piston 222 is disposed in the second region and can slide in the first direction based on the pilot fluid introduced into the second region. That is, the first piston 221 and the second piston 222 are sequentially stacked in the upward direction with respect to the first diaphragm 120, and can slide on the basis of the pilot fluid.

The first piston 221 and the second piston 222 have a plate shape and one of the first piston 221 and the second piston 222 includes a vertically protruding protrusion, (That is, a first through hole communicating with the first region and the second region) formed in the intermediate partition wall of the first piston 221 and the second piston 222 through the first through hole H_T1 It can be connected to the other one.

For example, the second piston 222 may include a protrusion that protrudes downward from the center of the lower surface. That is, the second piston 222 may have a longitudinal profile of a " T " shape. The protrusion may extend through the first through hole H_T1 and may be inserted and coupled into a groove formed at the center of the upper surface of the first piston 221. [ As another example, the first piston 221 may include protrusions protruding upward from the center of the upper surface. In this case, the protrusion of the first piston 221 extends through the first through-hole H_T1 and can be connected to the second piston 222. [

While the first piston 221 and the second piston 222 have been described separately, the present invention is not limited thereto. For example, the first and second pistons 221 and 222 may be integrally formed. However, the first piston 221 and the second piston 222 may be configured independently in terms of manufacturing (or assembling) the regulator 10. The first piston 221, the actuator body 223 and the second piston 223 may be disposed in the second chamber sequentially or in reverse order in the process of assembling the regulator 10. Therefore, ease of assembly of the regulator 10 (or the pressure control unit 200) can be improved.

In embodiments, the first and second pistons 221 and 222 may include first through fourth O-rings 224 through 227.

The first O-ring 224 is disposed between the edge (or outer surface) of the first piston 221 and the support portion of the actuator body 223, and can seal at least a part of the first region. For example, the first O-ring 224 may be disposed in a first sub-region (e.g., a space located below the first piston 221) and a second sub-region (e.g., A space that is located in the space between the electrodes. Here, the first and second sub-areas may be included in the first area.

Similarly, the second O-ring 225 is disposed between the edge (or outer surface) of the second piston 222 and the support portion of the actuator body 223, and can seal at least a part of the second region. For example, the second O-ring 225 may be disposed in a third sub-region (e.g., a space located below the second piston 222) and a fourth sub-region (e.g., A space that is located in the space between the electrodes. Here, the third and fourth sub-areas may be included in the second area.

The third O-ring 226 is disposed between the edge of the support portion of the actuator body 223 and the inner surface of the second chamber to seal the first region and the second region. For example, the third O-ring 226 may be disposed between one end of the support and the lower surface of the second chamber. Also, the third O-ring 226 may be disposed between the other end of the support and the upper surface of the second chamber.

The fourth O-ring 227 is disposed between the inner surface of the first through hole H_T1 and the protrusion (for example, the protrusion of the first piston 221), and functions as a sealing function between the first area and the second area Can be performed.

The protrusion (for example, the protrusion of the first piston 221) is connected to the second communication hole H_C2 through the first communication hole H_C1 formed on the upper surface of the second piston 222. In this embodiment, . ≪ / RTI > Here, the second communication hole H_C2 may be formed between the intermediate partition wall of the actuator body 223 and the upper surface of the first piston 222. [ The first communication hole H_C1 and the second communication hole H_C2 can be in fluid communication through the inside of the protrusion. Thus, the fourth sub-region of the second region (i.e., the upper space of the second piston 222) and the second sub-region of the first region (i.e., the upper space of the first piston 221) The pilot fluid may flow into the first region from the second region through the first and second communication holes H_C1, H_C2.

As described above, according to the structure of the second biasing means 220, the pilot fluid flows into only some of the spaces in the second chamber (i.e., the second sub-region and the fourth sub-region) 1 and the second pistons 221, 222 can press the first diaphragm 120.

The first piston 221 and the second piston 222 can move relative to each other according to the coupling structure of the first piston 221 and the second piston 222. [ In this case, the force applied to the first diaphragm 120 by the first piston 221 and the second piston 222 (or the force applied to the first diaphragm 120 by the second biasing means 220) (Or upper surface area) of the first piston 221 and the sum of the second area (or upper surface area) of the second piston 222 and the sum of the pressure of the pilot fluid (i.e., pilot hydraulic pressure) . ≪ / RTI > Accordingly, the pressure control unit 200 can operate with a relatively low pilot hydraulic pressure (or low pressure pilot fluid).

In one embodiment, the support of the actuator body 223 may include a third communication port H_C3 and the second chamber (or first pilot body 210) may include a fourth communication port H_C4 have. Here, the third communication hole H_C3 may be formed in the support portion of the actuator body 223 adjacent to the third sub region. The fourth communication hole H_C4 may be formed on the side of the first pilot body 210 in correspondence with the third communication hole H_C3. In this case, the third sub-region (i.e., the space between the second piston 222 and the intermediate partition) can be in fluid communication with the atmosphere through the third and fourth communication ports H_C3, H_C4.

When the third sub-region (i.e., the space between the second piston 222 and the intermediate partition) is sealed, the pressure of the third sub-region increases with the descent of the second piston 222, The pressure in the sub-region may affect the operation of the second piston 222 relative to the pilot hydraulic pressure. Accordingly, the pressure control unit 200 controls the second biasing unit 220 to operate in a substantially proportional manner to the pilot hydraulic pressure by communicating the third sub-region with the atmosphere through the third and fourth communication lines H_C3 and H_C4 can do.

In one embodiment, the second biasing means 120 may further comprise a pusher 228. The pusher 228 has a shape similar to that of the first piston 221 and is disposed between the first piston 221 and the first diaphragm 120 and is disposed between the first diaphragm 120 ) Can be directly pressed across the entire area. As shown in FIG. 2, the pusher 228 may be disposed within the coupling body 140.

In one embodiment, the pressure control unit 200 may further include a stop ring 230 and a pilot poppet assembly 240.

The stop ring 230 may be disposed on the upper portion of the first diaphragm 120 along the edge of the pusher 228. The stop ring 230 may limit the movement range (or travel distance) of the pusher 228.

The pilot poppet assembly 240 can control the flow rate of the pilot fluid entering the third chamber from the pilot fluid inlet INLET2. The pilot poppet assembly 240 is disposed inside the first pilot body 210 and can bias the second diaphragm 320 described below. The pilot poppet assembly 240 may include a pilot sheet, a pilot sheet holder, a pilot poppet, a pilot poppet damper, and a pilot poppet spring. The pilot seat, the pilot seat holder, the pilot poppet, the pilot poppet damper and the pilot poppet spring may be substantially the same as the seat, the sheet holder, the poppet, the poppet damper and the poppet spring of the first biasing means 130 . Therefore, redundant description is not repeated.

On the other hand, the pilot regulator 300 can adjust the oil pressure (i.e., the pilot oil pressure) of the pilot fluid provided to the pressure control unit 200 to be constant.

The pilot regulator 300 may include a second pilot body 310, a second diaphragm 320 (or a rubber diaphragm), and a pilot rod spring 330 (or a third biasing means).

The second pilot body 310 may include a space forming a part of the main body 101 and the lower end of which is recessed inwardly to form a part of the third chamber. The second pilot body 310 includes a fastener formed in a vertical direction at a lower edge thereof and can engage with the first pilot body 310 through a fastening member (e.g., a bolt). For example, the fastening member may be inserted and coupled into a fastener formed along the upper edge of the first pilot body 210 through the fastener of the second pilot body 310.

The second diaphragm 320 may be disposed between the first pilot body 210 and the second pilot body 320. When the main body 101 is integrally formed, the second diaphragm 320 is located in the space of the main body 101, and the space can be partitioned into the third chamber and the fourth chamber. The second diaphragm 320 is substantially the same as the first diaphragm 310. For example, the second diaphragm 320 may be formed of rubber.

The pilot rod spring 330 is disposed between the upper surface of the second pilot body 310 and the second diaphragm 320 and is capable of pressing the second diaphragm 320 in the vertical direction based on an externally applied force have. An intermediate member similar to the pusher 228 described above is disposed between one end of the pilot rod spring 330 and the second diaphragm 320 and an intermediate member is disposed between the end of the pilot rod spring 330 and the second diaphragm 320, .

The other end of the pilot rod spring 320 is connected to one end of the stem 341 through the stem plate 342 and the stem 341 extends in the vertical direction through the upper surface of the second pilot body 310, The other end of the stem 341 may be connected to an external handle 343 through a fastening member such as a nut 344. The stem 341 moves along the vertical direction to apply a pressure (for example, a reference pressure) to the pilot rod spring 330 and the second diaphragm 320 moves the pilot rod spring 330 330). ≪ / RTI >

In one embodiment, the second diaphragm 320 includes a second through-hole H_T2 corresponding to the pilot poppet, and the fourth chamber includes a fifth communication hole H_C5 in fluid communication with the atmosphere . When the pilot hydraulic pressure in the third chamber (or the second chamber) increases beyond the reference pressure, the pilot poppet is separated from the second through-hole H_T2 of the second diaphragm 320, and the pilot fluid passes through the second through- The second communication hole H_T2 and the fifth communication hole H_C5.

As described with reference to Figs. 1 and 2, since the regulator 10 includes the second biasing means 220 composed of the two-stage pistons 221 and 222 and operating based on the pilot fluid, The pressure of the fluid can be regulated constantly on the basis of the pilot fluid.

1 and 2, the regulator 10 includes the first and second pistons 221 and 222 of two stages. However, the regulator 10 is not limited thereto. For example, the regulator 10 may include three or more stages of pistons.

Further, the regulator 10 is described as including the pilot regulator 300, but the regulator 10 is not limited thereto. For example, the regulator 10 includes only the configurations other than the configuration for adjusting the pilot hydraulic pressure (i.e., the main regulator 100 and the hydraulic control unit 200), and the independently configured pilot regulator 300 includes a plurality of regulators A predetermined pilot hydraulic pressure can be supplied to the hydraulic cylinders 10. In this case, it is possible to control the plurality of regulators 10 only by controlling the pilot hydraulic pressure.

3 is a cross-sectional view showing an example of the regulator of FIG.

Referring to Figs. 1 to 3, the regulator 20 is configured to regulate the pressure of the fluid flowing in through the inlet INLET in a similar manner to the regulator 10 described with reference to Fig. 2, The fluid can be discharged through the outlet OUTLET.

The regulator 20 may include a main regulator 100, a pressure control unit 400, and a pilot regulator 300. The main regulator 100 and the pilot regulator 300 may be substantially identical to the main regulator 100 and the pilot regulator 300 described above with reference to Fig. Therefore, redundant description is not repeated.

The pressure control unit 400 may include a first pilot body 410 (or a third pilot body) and a second biasing unit 420. The second biasing means 420 includes first and second resilient means 422 and 423 and first and second pistons 421 and 424 (or third and fourth pistons) .

The first pilot body 410 constitutes a part of the main body 101 and may include a lower main body 410a, a center main body 410b and an upper main body 410c.

The lower body 410a may be disposed on the upper portion of the body assembly 110 and may be coupled to the body assembly 110 through a screw connection or the like, similar to the connection body 140 described with reference to FIG. The lower body 410a may include a first subspace. The first sub-space may be formed by being embedded inwardly from the upper surface of the lower main body 410a, and may be included in the first area described above.

The central body 410b (or the actuator body) has substantially the same size (or a cross-sectional area in the same lateral direction) as the lower body 410a and includes a first partition 411, The first area and the second area. The first partition 411 may be substantially the same as the intermediate partition of the actuator body 223 described with reference to FIG. Therefore, redundant description is not repeated.

The central body 410b may include a second subspace and a third subspace. The second sub-space may be formed by being embedded inwardly from the lower surface of the central body 410b, and may be included in the first area. Similarly, the third sub-space may be formed to be recessed inwardly from the upper surface of the central body 410b, and may be included in the second area. The central body 410b may have an " H "

The upper body 410c includes a pilot fluid inlet INLET2 and a pilot fluid pathway similar to the first pilot body 210 (or the upper portion of the first file body 210) .

The first elastic means 422 is made of an elastic material and has a plate shape parallel to the first diaphragm 120 and may be disposed between the lower body 410a and the central body 410b. In this case, the first piston 421 may be mounted on the first resilient means 422 and elastically supported. Alternatively, when the main body 101 is integrally formed, the first resilient means 422 may be disposed between the second chamber (or the inner surface of the second chamber) and the first piston 421 And the side surface of the first piston 421) to elastically support the first piston 421.

Similarly to the first elastic means 422, the second elastic means 423 is made of an elastic material and has a plate shape parallel to the first diaphragm 120 and has a central body 410b and an upper body 410a As shown in FIG. In this case, the second piston 424 may be mounted on the second elastic means 423 and elastically supported. Alternatively, when the main body 101 is integrally formed, the second resilient means 423 is disposed between the second chamber (or the inner surface of the second chamber) and the second piston 424 in the second region So that the second piston 424 can be elastically supported.

Similar to the first piston 221 described with reference to Fig. 2, the first piston 421 is disposed in the first region and can slide in the first direction based on the pilot fluid introduced into the first region . The first piston 421 includes a groove formed along the side surface thereof and the first piston 421 can be mounted to the piston mount (or groove) of the first resilient means 422 through the groove.

Similar to the second piston 222 described with reference to Fig. 2, the second piston 424 is disposed in the second region and can slide in the first direction based on the pilot fluid introduced into the second region . The second piston 424 includes a groove formed along the side surface and the second piston 424 can be mounted to the piston mount (or groove) of the second elastic means 423 through the groove.

In one embodiment, one of the first piston 421 and the second piston 424 includes a protrusion formed to protrude in a first direction (i.e., vertical direction) The first piston 421 and the second piston 424 can be connected to each other through the first through hole H_T1 formed in the first piston 421 and the second piston 421. [

For example, the first piston 421 may include a plate body having a plate shape, an upper projection formed upwardly from the piston body, and a lower projection formed downward from the piston body. That is, the first piston 421 may have a " + "

The second piston 424 may include a piston body having a plate shape and an upper projection formed upwardly from the piston body. In addition, the second piston 424 may further include a groove formed at the center of the lower surface. In this case, the upper protrusion of the first piston 421 extends through the hole formed at the center of the first partition wall 411, and can be inserted into and coupled with the groove of the second piston 424.

The first elastic means 422 (or the first elastic means 422 on which the first piston 421 is mounted), the central body 410b, the first elastic means 422 The second elastic means 423 (or the second elastic means 423 with the second piston 424 mounted thereon) and the upper main body 410c may be stacked sequentially or in reverse order. Therefore, the ease of assembling the regulator 20 (or the pressure control unit 400) can be improved.

In embodiments, the first and second pistons 421 and 424 may include fifth to seventh O-rings 425 to 427.

The fifth O-ring 425 is disposed between the outer surface of the lower protrusion of the first piston 421 and the lower body 410a and is capable of sealing at least a portion of the first area (e.g., the first sub- have. The first sub-space may be in fluid communication with the space in which the pusher 228 is disposed, and for this purpose, the fifth O-ring 425 may include a bearing (not shown) to reduce friction between the first piston 421 and the lower body 410a bearing.

Similarly, the sixth O-ring 426 is disposed between the outer surface of the upper protrusion of the first piston 421 and the central body 410b (or the first partition 411 of the central body 410b) (E.g., the second subspace) of the first region and at least a portion (e.g., the third subspace) of the second region. For example, the sixth O-ring 426 may seal the space located above the first piston 421.

The seventh O-ring 427 is disposed between the outer surface of the upper protrusion of the second piston 424 and the upper body 410c (or the second partition wall 412 of the upper body 410c) At least some (e. G., The fourth sub-space) may be sealed. The space located at the top of the second piston 424 may be in fluid communication with the third chamber for which the seventh O-ring 427 is similar to the fifth O-ring 425, Lt; RTI ID = 0.0 > 410c. ≪ / RTI >

In one embodiment, the second piston 424 includes a first communication hole H_C1 formed on the upper surface, and the protrusion (for example, the upper protrusion of the first piston 421) includes a second communication hole H_C2 ). Here, the second communication hole H_C2 may be formed in the second sub space. The first communication hole H_C1 and the second communication hole H_C2 can be in fluid communication through the inside of the protrusion. Thus, the upper space (e.g., the fourth subspace of the second region) of the second piston 424 and the upper space of the first piston 421 (i.e., the second subspace of the first region) And the pilot fluid can be introduced into the first region from the second region through the first and second communication holes H_C1, H_C2.

Only the upper space of the second piston 424 and the upper space of the first piston 421) in accordance with the structure of the second biasing means 420, Fluid can be introduced and the first and second pistons 421 and 424 can press the first diaphragm 120 based on the pilot fluid. Thus, the regulator 20 can operate with a relatively low pilot hydraulic pressure (or low pressure pilot fluid).

Although not shown in FIG. 3, the third and fourth communication ports described with reference to FIG. 2 are formed in at least one of the center body 410b and the lower body 410c, and the first piston 421 and the first The space between the partition walls 411 and the lower space of the second piston 424 can be in fluid communication with the atmosphere through the third and fourth communication holes.

4 is a cross-sectional view showing an example of the regulator of FIG.

Referring to Figs. 1 to 4, the regulator 30 is configured to regulate the pressure of the fluid flowing in through the inlet INLET in a similar manner to the regulator 10 described with reference to Fig. 2, The fluid can be discharged through the outlet OUTLET.

The regulator 30 may include a main regulator 100, a pressure control unit 500, and a pilot regulator 300. The main regulator 100 and the pilot regulator 300 may be substantially identical to the main regulator 100 and the pilot regulator 300 described above with reference to Fig. Therefore, redundant description is not repeated.

The pressure control unit 500 may include a first pilot body 510 and a second biasing unit 520. Here, the first pilot body 510 may be integrally formed substantially the same as the first pilot body 210 described with reference to FIG. 2, or may be formed integrally with the first sub-pilot body 511 and the second sub- And a pilot body 512.

The second biasing means 520 is similar to the second biasing means 220 described with reference to Figure 2 and is arranged in the second chamber and has a pressure of pilot fluid flowing through the pilot fluid inlet INLET2 The first diaphragm 120 can be pressed in the first direction (or the lower direction) while being displaced based on the pilot pressure (i.e., the pilot hydraulic pressure).

The second biasing means 220 may include a piston support 521 (or an actuator body, a first bulkhead), a first piston 523, and a second piston 525.

Similar to the actuator body 223 described with reference to FIG. 2, the piston support 521 can divide the second chamber into a first region and a second region. The piston support portion 521 has a plate shape parallel to the first diaphragm 120 and can be fixed to the inner surface of the second chamber. A first through hole H_T1 may be formed at the center of the piston support portion 521. [

The first piston 523 and the second piston 525 may be substantially identical to the first piston 221 and the second piston 222 described with reference to FIG. Therefore, redundant description is not repeated.

The first piston 525 includes a first communication hole H_C1 formed on a second surface (for example, the upper surface), and the protrusion (for example, the upper protrusion of the first piston 525) And a second communication hole H_C2 may be formed between the piston supporting portion 521 and the upper surface of the first piston 421. [ Since the first communication hole H_C1 and the second communication hole H_C2 are in fluid communication through the inside of the protrusion, the upper space of the second piston 525 (that is, some space of the second region) and the first piston 523 (That is, a part of the space of the first region) is in fluid communication, and the pilot fluid can flow from the second region to the first region through the first and second communication holes H_C1 and H_C2.

On the other hand, the second biasing means 520 (or the first and second pistons 523 and 525) includes the eleventh to fourteenth O-rings 527-1, 527-2, 527-3 and 527-4 ). The eleventh to thirteenth O-rings 527-1, 527-2 and 527-3 respectively correspond to the first O-ring 224, the second O-ring 225 and the fourth O-ring 227 described with reference to FIG. . ≪ / RTI > Also, the fourteenth O-ring 527-4 may be substantially the same as the seventh O-ring 427 described with reference to FIG. Therefore, redundant description is not repeated.

Since the first piston 523, the piston supporting portion 521 and the second piston 525 can be stacked sequentially or in reverse order in the assembling process of the regulator 30, the regulator 30 (or the pressure control portion) (500)) can be improved.

As described above, according to the structure of the second biasing means 520, only a part of the spaces in the second chamber (i.e., the upper space of the second piston 525 and the upper space of the first piston 523) Fluid can be introduced and the first and second pistons 523 and 525 can press the first diaphragm 120 based on the pilot fluid. Thus, the regulator 30 can operate with a relatively low pilot hydraulic pressure (or low pressure pilot fluid).

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments. It can be changed.

10, 20, 30: Regulator
101: Body
100: main regulator
110: Body assembly
120: first diaphragm
130: first biasing means
140: connection body
200:
210: first pilot body
220: second biasing means
221: first piston
222: second piston
223: Actuator body
224 to 227: First to fourth O-rings
228: Pusher
230: Stop ring
240: Pilot poppet assembly
300: Pilot regulator
310: second pilot body
320: second diaphragm
330: Pilot rod spring
341: Stem
342: Stem plate
343: Handle
344: Nuts
400: pressure control section
410: first pilot body
410a, 410b, 410c: a lower body, a central body,
411: first partition
412:
421: first piston
422: first elastic means
423: second elastic means
424: Second piston
425 to 427: fifth to seventh O-rings
500:
511, 512: First and second sub pilot bodies
520: second biasing means
521:
523: first piston
524: Second piston
527-1 to 527-4: the 11th to 14th O rings

Claims (20)

A regulator for regulating the pressure of a fluid,
A body having a cavity formed therein, an inlet through which the fluid flows, an outlet through which the fluid is discharged, and a pilot fluid inlet;
A first diaphragm located in the space and partitioning the space into a first chamber and a second chamber isolated from each other, the first chamber communicating with the inlet and outlet, and the second chamber communicating with the pilot fluid inlet ;
First biasing means disposed in the first chamber for biasing the first diaphragm; And
And second biasing means disposed in the second chamber and biasing the first diaphragm while being displaced based on the pressure of the pilot fluid entering through the pilot fluid inlet,
Wherein the second biasing means comprises:
An actuator body dividing the second chamber into a first region and a second region along a first direction perpendicular to the first diaphragm; A first piston disposed in the first region and sliding in the first direction based on the pilot fluid introduced into the first region; And a second piston disposed in the second region and sliding in the first direction based on the pilot fluid introduced into the second region;
/ RTI >
delete 2. The apparatus of claim 1, wherein the first piston and the second piston move in proportion to each other,
Wherein the force applied to the first diaphragm by the second biasing means is proportional to the sum of the first area of the first piston and the second area of the second piston and the hydraulic pressure of the pilot fluid regulator.
The actuator according to claim 1,
An intermediate partition wall arranged parallel to the first diaphragm; And
And a support portion extending from the edge of the intermediate partition wall in the first direction and fixed to the second chamber,
And an area of the intermediate partition wall is equal to a cross-sectional area of the second chamber.
5. The apparatus of claim 4, wherein the first piston includes a first O-ring disposed between an edge and a support of the actuator body for sealing at least a portion of the first region,
The second piston includes a second O-ring disposed between an edge and a support of the actuator body for sealing at least a portion of the second region,
Wherein the actuator body further comprises a third O-ring disposed between an edge of the support and an inner surface of the second chamber for sealing the first and second regions,
Wherein the first piston and the second piston slide in a support portion of the actuator body.
6. The actuator according to claim 5, wherein the intermediate partition wall of the actuator body includes a first through hole communicating the first region and the second region,
Wherein one of the first piston and the second piston includes a projection protruding in the first direction and passing through the first through hole and connected to the other of the first piston and the second piston regulator.
7. The compressor according to claim 6, wherein the second piston includes a first communication hole formed in the second surface,
And the protruding portion includes a second communication hole for fluidly communicating the first region with the first communication hole,
And the pilot fluid flows into the first region from the second region through the first and second communication ports.
[8] The apparatus of claim 7, wherein the support portion of the actuator body includes a third communication hole disposed adjacent to the intermediate partition wall in the first region,
And the second chamber includes a fourth communication port formed on a side surface corresponding to the third communication port,
And a space between the second piston and the intermediate partition wall is in fluid communication with the atmosphere through the third and fourth communication holes.
The regulator according to claim 1, wherein the actuator body includes a first partition wall arranged in parallel with the first diaphragm.
10. The apparatus of claim 9, wherein the second biasing means comprises:
A first elastic member which is made of an elastic material and has a plate shape parallel to the first diaphragm and which is disposed between the second chamber and the first piston in the first region and elastically supports the first piston; And
A second elastic member which is made of an elastic material and has a plate shape parallel to the first diaphragm and which is disposed between the second chamber and the second piston in the second region to elastically support the second piston, Wherein the regulator includes:
11. The semiconductor device according to claim 10, wherein the first bank includes a first through hole communicating the first region and the second region,
Wherein one of the first piston and the second piston includes a projection protruding in the first direction and penetrating the first through hole and connected to the other of the first piston and the second piston,
And a sixth O-ring is disposed between the first through-hole and the protrusion of the first partition.
12. The compressor according to claim 11, wherein the second piston includes a first communication hole formed in the second surface,
And the protruding portion includes a second communication hole for fluidly communicating the first region with the first communication hole,
And the pilot fluid flows into the first region from the second region through the first and second communication ports.
The actuator according to claim 1,
And a first partition wall having a plate shape parallel to the first diaphragm and fixed to an inner surface of the second chamber.
14. The apparatus of claim 13 wherein the first piston comprises an eleventh O-ring disposed between an edge and an inner surface of the first region to seal at least a portion of the first region,
And the second piston includes a twelfth O-ring disposed between an edge and an inner surface of the second region to seal at least a portion of the second region.
The apparatus of claim 1, wherein the first biasing means comprises:
A sheet disposed on the flow path connecting the inlet and the outlet in the first chamber;
A sheet holder for fixing the sheet;
A poppet that is in close contact with or spaced from the seat to open and close the flow path and is connected to the first diaphragm; And
And a poppet spring for elastically supporting the poppet toward the seat.
A regulator for regulating the pressure of a fluid,
A body having a cavity formed therein, an inlet through which the fluid flows, an outlet through which the fluid is discharged, and a pilot fluid inlet;
A first diaphragm located in the space and partitioning the space into a first chamber and a second chamber isolated from each other, the first chamber communicating with the inlet and outlet, and the second chamber communicating with the pilot fluid inlet ;
First biasing means disposed in the first chamber for biasing the first diaphragm;
Second biasing means disposed in the second chamber and biasing the first diaphragm while being displaced based on the pressure of the pilot fluid entering through the pilot fluid inlet;
A second diaphragm disposed in the space and partitioning the space into a third chamber and a fourth chamber;
A pilot poppet assembly disposed in the third chamber and biasing the second diaphragm; And
And third biasing means disposed in the fourth chamber for biasing the second diaphragm in accordance with an external input.
17. The pilot poppet assembly of claim 16,
A pilot sheet disposed on a pilot flow path connecting the pilot fluid inlet and the second chamber;
A pilot sheet holder for fixing the pilot sheet;
A pilot poppet that is in close contact with or spaced from the pilot sheet to open / close the pilot flow path and is connected to the second diaphragm; And
And a pilot poppet spring elastically supporting the pilot poppet toward the pilot seat.
18. The method of claim 17, wherein the second diaphragm includes a second through hole corresponding to the pilot poppet,
The fourth chamber includes a fifth communication port in fluid communication with the atmosphere,
Wherein when the hydraulic pressure of the pilot fluid in the third chamber increases to be equal to or higher than a reference pressure, the pilot poppet is separated from the second through-hole of the second diaphragm, and the pilot fluid passes through the second through- And the air is discharged to the outside through the opening.
delete A regulator for regulating the pressure of a fluid,
A body assembly including an inlet through which the fluid flows and an outlet through which the fluid is discharged, the upper body of the body assembly being opened;
A first pilot body including an upper body, a central body, and a lower body, the pilot body including a pilot fluid inlet through which a pilot fluid flows, and a lower end opened to be disposed on the upper portion of the body assembly;
A first diaphragm disposed between the body assembly and the first pilot body;
First biasing means disposed in the body assembly for biasing the first diaphragm;
A first elastic member having a plate shape parallel to the first diaphragm and disposed between the center body and the lower body and pressing the first diaphragm while being displaced based on the pilot fluid; And
And a second elastic member having a plate shape parallel to the first diaphragm and disposed between the upper main body and the central main body and pressing the first elastic member while being displaced based on the pilot fluid.

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