JP2004160296A5 - - Google Patents

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Publication number
JP2004160296A5
JP2004160296A5 JP2002326717A JP2002326717A JP2004160296A5 JP 2004160296 A5 JP2004160296 A5 JP 2004160296A5 JP 2002326717 A JP2002326717 A JP 2002326717A JP 2002326717 A JP2002326717 A JP 2002326717A JP 2004160296 A5 JP2004160296 A5 JP 2004160296A5
Authority
JP
Japan
Prior art keywords
film forming
substrate
forming apparatus
control member
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2002326717A
Other languages
English (en)
Japanese (ja)
Other versions
JP2004160296A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2002326717A priority Critical patent/JP2004160296A/ja
Priority claimed from JP2002326717A external-priority patent/JP2004160296A/ja
Publication of JP2004160296A publication Critical patent/JP2004160296A/ja
Publication of JP2004160296A5 publication Critical patent/JP2004160296A5/ja
Pending legal-status Critical Current

Links

JP2002326717A 2002-11-11 2002-11-11 膜形成装置及び膜形成方法、電気光学装置、並びに電子機器 Pending JP2004160296A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002326717A JP2004160296A (ja) 2002-11-11 2002-11-11 膜形成装置及び膜形成方法、電気光学装置、並びに電子機器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002326717A JP2004160296A (ja) 2002-11-11 2002-11-11 膜形成装置及び膜形成方法、電気光学装置、並びに電子機器

Publications (2)

Publication Number Publication Date
JP2004160296A JP2004160296A (ja) 2004-06-10
JP2004160296A5 true JP2004160296A5 (enExample) 2005-10-27

Family

ID=32805568

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002326717A Pending JP2004160296A (ja) 2002-11-11 2002-11-11 膜形成装置及び膜形成方法、電気光学装置、並びに電子機器

Country Status (1)

Country Link
JP (1) JP2004160296A (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4728629B2 (ja) * 2004-11-29 2011-07-20 株式会社東芝 インクジェット塗布装置及びインクジェット塗布方法
JP4530224B2 (ja) * 2005-11-30 2010-08-25 大日本スクリーン製造株式会社 塗布装置および塗布方法
JP4637250B2 (ja) * 2009-06-05 2011-02-23 シャープ株式会社 局所加熱装置
JP6328434B2 (ja) * 2013-03-14 2018-05-23 東京エレクトロン株式会社 乾燥装置及び乾燥処理方法
KR101994874B1 (ko) * 2013-03-14 2019-07-01 도쿄엘렉트론가부시키가이샤 건조 장치 및 건조 처리 방법
CN108344254B (zh) * 2017-09-28 2020-10-23 广东聚华印刷显示技术有限公司 真空干燥装置

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