JP2004160296A5 - - Google Patents
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- Publication number
- JP2004160296A5 JP2004160296A5 JP2002326717A JP2002326717A JP2004160296A5 JP 2004160296 A5 JP2004160296 A5 JP 2004160296A5 JP 2002326717 A JP2002326717 A JP 2002326717A JP 2002326717 A JP2002326717 A JP 2002326717A JP 2004160296 A5 JP2004160296 A5 JP 2004160296A5
- Authority
- JP
- Japan
- Prior art keywords
- film forming
- substrate
- forming apparatus
- control member
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Claims (16)
載置された前記基板を加熱する加熱機構と、
前記基板に対向する平面部を有し、前記平面部と前記基板の表面との間に間隔を維持しつつ、前記基板を覆う制御部材を備えることを特徴とする膜形成装置。In a film forming apparatus for forming a film by drying a liquid material containing a film forming component applied on a substrate,
A heating mechanism for heating the mounted substrate;
An apparatus for forming a film, comprising: a planar portion facing the substrate; and a control member that covers the substrate while maintaining a gap between the planar portion and the surface of the substrate.
載置された前記基板に対向する平面部を有し、前記平面部と前記基板の表面との間に間隔を維持しつつ、前記基板を覆う制御部材と、
排気機構を有することを特徴とする膜形成装置。In a film forming apparatus for forming a film by drying a liquid material containing a film forming component applied on a substrate,
A control member that covers the substrate while having a flat portion facing the mounted substrate and maintaining a gap between the flat portion and the surface of the substrate;
A film forming apparatus having an exhaust mechanism.
前記液体材料を吐出した後、前記基板の上の一部若しくは全体を、該表面から一定間隔で離間され、且つ、複数の貫通孔が穿設された制御部材部材で覆い乾燥を行う、
ことを特徴とする膜形成方法。In a film forming method of discharging a liquid material containing a film forming component onto a substrate and drying it,
After discharging the liquid material, a part or the whole of the substrate is covered with a control member member that is spaced apart from the surface at a constant interval and has a plurality of through holes, and is dried.
A film forming method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002326717A JP2004160296A (en) | 2002-11-11 | 2002-11-11 | Film forming apparatus, film forming method, electrooptical device and electronic machinery |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002326717A JP2004160296A (en) | 2002-11-11 | 2002-11-11 | Film forming apparatus, film forming method, electrooptical device and electronic machinery |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2004160296A JP2004160296A (en) | 2004-06-10 |
| JP2004160296A5 true JP2004160296A5 (en) | 2005-10-27 |
Family
ID=32805568
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002326717A Pending JP2004160296A (en) | 2002-11-11 | 2002-11-11 | Film forming apparatus, film forming method, electrooptical device and electronic machinery |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2004160296A (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4728629B2 (en) * | 2004-11-29 | 2011-07-20 | 株式会社東芝 | Inkjet coating apparatus and inkjet coating method |
| JP4530224B2 (en) * | 2005-11-30 | 2010-08-25 | 大日本スクリーン製造株式会社 | Coating apparatus and coating method |
| JP4637250B2 (en) * | 2009-06-05 | 2011-02-23 | シャープ株式会社 | Local heating device |
| JP6328434B2 (en) * | 2013-03-14 | 2018-05-23 | 東京エレクトロン株式会社 | Drying apparatus and drying processing method |
| KR101994874B1 (en) * | 2013-03-14 | 2019-07-01 | 도쿄엘렉트론가부시키가이샤 | Drying apparatus and drying method |
| CN108344254B (en) * | 2017-09-28 | 2020-10-23 | 广东聚华印刷显示技术有限公司 | Vacuum drying device |
-
2002
- 2002-11-11 JP JP2002326717A patent/JP2004160296A/en active Pending
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