JP2004158845A5 - - Google Patents
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- Publication number
- JP2004158845A5 JP2004158845A5 JP2003355837A JP2003355837A JP2004158845A5 JP 2004158845 A5 JP2004158845 A5 JP 2004158845A5 JP 2003355837 A JP2003355837 A JP 2003355837A JP 2003355837 A JP2003355837 A JP 2003355837A JP 2004158845 A5 JP2004158845 A5 JP 2004158845A5
- Authority
- JP
- Japan
- Prior art keywords
- laser
- semiconductor film
- crystalline semiconductor
- laser beam
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000004065 semiconductor Substances 0.000 claims 59
- 238000000034 method Methods 0.000 claims 15
- 239000000758 substrate Substances 0.000 claims 15
- 238000004519 manufacturing process Methods 0.000 claims 14
- 239000002184 metal Substances 0.000 claims 10
- 229910052751 metal Inorganic materials 0.000 claims 10
- 230000001678 irradiating effect Effects 0.000 claims 9
- 239000007789 gas Substances 0.000 claims 6
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims 3
- 239000010931 gold Substances 0.000 claims 3
- 229910052737 gold Inorganic materials 0.000 claims 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical group [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 2
- 229910021417 amorphous silicon Inorganic materials 0.000 claims 2
- 229910052802 copper Inorganic materials 0.000 claims 2
- 239000010949 copper Substances 0.000 claims 2
- 230000007547 defect Effects 0.000 claims 2
- 239000011521 glass Substances 0.000 claims 2
- 230000010355 oscillation Effects 0.000 claims 2
- 239000010979 ruby Substances 0.000 claims 2
- 229910001750 ruby Inorganic materials 0.000 claims 2
- 239000007787 solid Substances 0.000 claims 2
- 230000004888 barrier function Effects 0.000 claims 1
- UIZLQMLDSWKZGC-UHFFFAOYSA-N cadmium helium Chemical compound [He].[Cd] UIZLQMLDSWKZGC-UHFFFAOYSA-N 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000001953 recrystallisation Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003355837A JP2004158845A (ja) | 2002-10-17 | 2003-10-16 | 半導体装置の作製方法 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002303659 | 2002-10-17 | ||
| JP2003355837A JP2004158845A (ja) | 2002-10-17 | 2003-10-16 | 半導体装置の作製方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2004158845A JP2004158845A (ja) | 2004-06-03 |
| JP2004158845A5 true JP2004158845A5 (enrdf_load_stackoverflow) | 2006-11-09 |
Family
ID=32827975
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003355837A Withdrawn JP2004158845A (ja) | 2002-10-17 | 2003-10-16 | 半導体装置の作製方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2004158845A (enrdf_load_stackoverflow) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006093212A (ja) * | 2004-09-21 | 2006-04-06 | Sumitomo Heavy Ind Ltd | 多結晶層の形成方法、半導体装置の製造方法、及び半導体装置 |
| JP5037926B2 (ja) * | 2006-12-14 | 2012-10-03 | 三菱電機株式会社 | レーザアニール装置 |
| WO2020208774A1 (ja) * | 2019-04-11 | 2020-10-15 | シャープ株式会社 | 発光素子および表示装置 |
-
2003
- 2003-10-16 JP JP2003355837A patent/JP2004158845A/ja not_active Withdrawn
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